Flow cell and dissolved oxygen testing device

Abstract

The utility model provides a flow cell, which is used for a dissolved oxygen test and comprises a flow cell body and an ultrasonic unit, the flow cell body is used for containing a liquid with a tested dissolved oxygen concentration, and the ultrasonic unit is conducted with the liquid in the flow cell body through a through hole arranged at the bottom of the flow cell body. The utility model further provides a dissolved oxygen testing device which comprises a dissolved oxygen instrument and the flow cell. Under the test state of the dissolved oxygen meter, the ultrasonic unit inhibits the formation of scale on the surface of the probe electrode of the dissolved oxygen meter, prolongs the service life of the electrode, and reduces the maintenance frequency; under the maintenance state of the dissolved oxygen instrument, the ultrasonic unit is used for driving and removing bubbles in the electrolyte storage chamber of the probe of the dissolved oxygen instrument, the operation is simple, rapid, efficient and thorough, the maintenance quality is improved, and the maintenance cost is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of electronic detection equipment, and in particular to a circulation cell and a dissolved oxygen testing device using the circulation cell. Background Art

[0002] Ultrapure water is the process water for the microelectronics industry. Semiconductor factories use a large amount of ultrapure water, mainly for wet cleaning before and after each process. Dissolved oxygen in ultrapure water can cause problems such as silicon dioxide film growth and interconnection line corrosion. Therefore, the control of dissolved oxygen in ultrapure water is crucial.

[0003] The membrane-coated dissolved oxygen meter is a commonly used online monitoring instrument in semiconductor ultrapure water systems. The membrane-coated dissolved oxygen meter adopts the permeation measurement principle. The probe part is composed of a cathode (gold) and an anode (silver) and potassium chloride or potassium hydroxide electrolyte. Oxygen diffuses into the electrolyte through the membrane and forms a measurement circuit with the cathode and anode.

[0004] However, there are two problems in the use and maintenance of membrane-covered dissolved oxygen meters:

[0005] 1. Under the test state, the gold-silver electrode surface on the top of the instrument probe is prone to scaling, which interferes with the test value. After a period of use, the test needs to be stopped and polished, which affects the test progress and increases the consumption of maintenance agents and diaphragms;

[0006] 2. In the maintenance state, the bubbles in the electrolyte storage chamber of the instrument probe will affect the test accuracy. The bubbles need to be removed manually, which is time-consuming and labor-intensive. In addition, the electrolyte storage chamber may not be completely removed and there may be residual bubbles.

[0007] Therefore, a device is needed to solve the problem that the electrode surface of the membrane-coated dissolved oxygen meter is easy to scale in the test state, and the bubble removal in the electrolyte storage chamber of the meter probe in the maintenance state is time-consuming and laborious. Utility Model Content

[0008] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide a device for solving the problem that the electrode surface of the dissolved oxygen meter in the prior art is prone to scaling when in the test state, and it is time-consuming and laborious to remove bubbles in the electrolyte storage chamber of the meter probe in the maintenance state.

[0009] The present application provides a circulation pool for dissolved oxygen testing, comprising a circulation pool body and an ultrasonic unit, wherein the circulation pool body is used to contain liquid whose dissolved oxygen concentration is to be tested, and the ultrasonic unit is connected to the liquid in the circulation pool body via a through hole arranged at the bottom of the circulation pool body.

[0010] In some embodiments, the ultrasonic unit includes an ultrasonic generator and an ultrasonic transducer. The ultrasonic generator is disposed outside the circulation pool body and is electrically connected to the ultrasonic transducer. The ultrasonic transducer is disposed at the bottom of the circulation pool body and is connected to the interior of the circulation pool body through a through hole disposed at the bottom of the circulation pool body.

[0011] In some embodiments, the circulation pool body includes a liquid inlet pipeline and a liquid outlet pipeline, the liquid inlet of the liquid inlet pipeline is configured at the bottom of the circulation pool body, and the liquid outlet of the liquid outlet pipeline is set on the side wall of the circulation pool body.

[0012] The present application also provides a dissolved oxygen testing device, comprising a dissolved oxygen meter and the circulation pool described in the above embodiment; the dissolved oxygen meter comprises a probe with electrodes, the dissolved oxygen meter is electrically connected to the ultrasonic generator, and controls the start and stop and parameter setting of the ultrasonic generator.

[0013] In some embodiments, the height of the liquid outlet of the circulation cell is set so that the liquid in the circulation cell body reaching the height can immerse the electrode of the probe.

[0014] In some embodiments, the probe is a membrane-covered dissolved oxygen meter probe.

[0015] In some embodiments, in the testing state, the membrane-covered end of the probe is placed downward.

[0016] In some embodiments, in the test state, the ultrasonic generator is turned on once a day, and each time the time ranges from 20 to 60 seconds.

[0017] In some embodiments, during the time when the ultrasonic wave acts, the additional potential difference between the probe electrodes caused by the ultrasonic wave is smaller than the measurement error range of the dissolved oxygen meter.

[0018] In some embodiments, in the maintenance state, the membrane-coated end of the probe is placed upward.

[0019] As described above, a circulation cell and a dissolved oxygen testing device using the circulation cell of the present application have the following beneficial effects: when the dissolved oxygen meter is in the testing state, the dissolved oxygen meter automatically and regularly starts the ultrasonic unit online, and suppresses the formation of scale on the surface of the electrode of the dissolved oxygen meter probe through the ultrasonic action, which can reduce the number of times the offline manual removal of electrode scale is required and reduce the maintenance frequency; the non-direct contact ultrasonic action will not wear the electrode and extend the service life of the electrode. When the dissolved oxygen meter is in the maintenance state, ultrasonic waves are used to drive out and remove bubbles in the electrolyte storage chamber of the dissolved oxygen meter probe, replacing the existing manual vibration driving or changing the diaphragm structure. The operation is simple, fast, efficient and thorough, which improves the maintenance quality and reduces the maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0021] in:

[0022] Figure 1 is a schematic diagram of the structure of a circulation pool according to some embodiments of the present application;

[0023] Figure 2 is a schematic diagram of an existing flow cell body according to some embodiments;

[0024] Figure 3 It is a cross-sectional schematic diagram of a membrane-coated dissolved oxygen meter probe according to some embodiments of the present application.

[0025] Figure 4 It is a schematic diagram of the dissolved oxygen testing device and the test state connection according to some embodiments of the present application;

[0026] Figure 5 It is a schematic diagram of the maintenance status connection of the dissolved oxygen testing device shown in some embodiments of the present application. DETAILED DESCRIPTION

[0027] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0028] The dissolved oxygen meter in the embodiment of the present application includes a probe with an electrode. In view of the problem that the surface of the electrode of the dissolved oxygen meter probe is easy to scale in the test state, and the problem that it is time-consuming and laborious to remove bubbles in the electrolyte storage chamber of the dissolved oxygen meter probe in the manual maintenance state, the present application provides a flow cell for dissolved oxygen testing, including a flow cell body and an ultrasonic unit, the flow cell body is used to contain a liquid of a tested dissolved oxygen concentration, and the ultrasonic unit is connected to the liquid in the flow cell body through a through hole arranged at the bottom of the flow cell body.

[0029] In some embodiments, the ultrasonic unit includes an ultrasonic generator and an ultrasonic transducer. The ultrasonic generator is disposed outside the circulation pool body and is electrically connected to the ultrasonic transducer. The ultrasonic transducer is disposed at the bottom of the circulation pool body and is connected to the interior of the circulation pool body through a through hole disposed at the bottom of the circulation pool body.

[0030] The present application also provides a dissolved oxygen testing device, comprising a dissolved oxygen meter and the above-mentioned circulation pool.

[0031] The flow cell of the present application is equipped with an ultrasonic unit at the bottom of the flow cell body, aiming to utilize the cavitation effect and straight-through flow effect of ultrasound to reduce the maintenance frequency, extend the service life of the dissolved oxygen meter electrode, make necessary maintenance faster and more efficient, and comprehensively reduce maintenance costs.

[0032] When ultrasound propagates in a medium, the interaction between ultrasound and the medium causes physical and chemical changes in the medium, resulting in a series of ultrasonic effects, one of which is the cavitation effect. The cavitation effect refers to the dynamic process of growth and collapse of micro-gas core cavitation bubbles in a liquid when they vibrate under the action of sound waves and when the sound pressure reaches a certain value. When ultrasound acts on a liquid, a large number of small bubbles can be generated. One reason is that tensile stress occurs locally in the liquid, forming negative pressure. The reduction in pressure makes the gas originally dissolved in the liquid supersaturated and escapes from the liquid to form small bubbles. Another reason is that the strong tensile stress "teares" the liquid into a cavity, which is called cavitation. The cavity contains liquid vapor or another gas dissolved in the liquid, or even a vacuum. The small bubbles formed by cavitation will continue to move, grow or burst with the vibration of the surrounding medium.

[0033] The phenomenon that ultrasonic waves flow in the liquid along the direction of sound propagation is called ultrasonic straight-through flow. This flow can stir the micro-oil dirt on the surface of the object being cleaned, and at the same time, the cleaning liquid on the dirt surface produces convection, thereby accelerating the dissolution rate of the dissolved dirt. The straight-through flow phenomenon accelerates the dissolution rate and plays an important role in the transportation of dirt.

[0034] The straight-forward flow effect and the cavitation effect are two very important effects in ultrasonic cleaning. They act together on liquid and dirt to disperse, emulsify and peel off the dirt layer, thereby achieving the purpose of cleaning.

[0035] The circulation cell and the dissolved oxygen testing device using the circulation cell provided in the present application can realize two purposes of one device. In the test state, the circulation cell body contains the liquid of the dissolved oxygen concentration to be tested, and the probe is immersed in the liquid to be tested for measurement, while the ultrasonic unit is started to suppress the formation of scale on the electrode surface through the ultrasonic action. In the maintenance state, the probe is placed in the circulation cell body, and the bubbles in the electrolyte chamber of the probe are driven out and cleared by ultrasonic waves.

[0036] The technical solution of the present application is described in detail below with reference to the embodiments and drawings.

[0037] refer to Figure 1 As shown in the schematic diagram of the circulation pool structure, the present application provides a circulation pool 100, including a circulation pool body 1 and an ultrasonic unit. Among them, the ultrasonic unit includes an ultrasonic generator 2 and an ultrasonic transducer 3. The circulation pool body 1 is used to contain the liquid whose dissolved oxygen concentration is to be tested. The ultrasonic unit is connected to the liquid in the circulation pool body 1 through a through hole arranged at the bottom of the circulation pool body 1. Specifically, the ultrasonic generator 2 is arranged outside the circulation pool body 1 and is electrically connected to the ultrasonic transducer 3. The ultrasonic transducer 3 is arranged at the bottom of the circulation pool body 1, and is connected to the inside of the circulation pool body 1 through a through hole arranged at the bottom of the circulation pool body 1.

[0038] In some embodiments, the ultrasonic transducer 3 is provided with an external thread, and the through hole at the bottom of the circulation cell body 1 is provided with an internal thread matching the external thread of the ultrasonic transducer 3. Through the combination of the internal and external threads, the ultrasonic transducer 3 is installed at the bottom of the circulation cell body 1 and is connected to the inside of the circulation cell body 1. When the circulation cell body 1 contains liquid, the ultrasonic transducer 3 is in direct contact with the liquid. Furthermore, in some embodiments, a rubber gasket is provided at the junction of the ultrasonic transducer 3 and the bottom of the circulation cell body 1 to increase the sealing and prevent leakage.

[0039] In some embodiments, the flow cell body 1 includes a liquid inlet pipeline 4 and a liquid outlet pipeline 5. The liquid to be tested for dissolved oxygen concentration is transported into the flow cell body 1 through the liquid inlet pipeline 4. When the liquid is filled to a certain height, the excess liquid will be discharged from the liquid outlet pipeline 5, so that the measured solution in the flow cell body 1 maintains a set height. At the same time, the process of inputting and flowing out the measured liquid has a disturbing effect on the measured liquid, which is more conducive to the test of dissolved oxygen concentration.

[0040] Also refer to Figure 1 and Figure 3 In some embodiments, the liquid inlet 41 of the liquid inlet pipeline 4 is configured at the bottom of the circulation pool body 1, the liquid outlet 51 of the liquid outlet pipeline 5 is set on the side wall of the circulation pool body 1, and the height of the liquid outlet 51 is set so that the liquid reaching this height in the circulation pool body 1 can fully immerse the electrode 112 of the probe 11, so that the probe 11 can work normally.

[0041] Figure 2The figure shows an existing circulation cell body 1', wherein the liquid inlet 41' and the liquid outlet 51' are both located at the bottom of the circulation cell body 1'. In some embodiments, the liquid outlet 51' is set as an internal thread through hole matching the external thread of the ultrasonic transducer 3, and the liquid outlet 51 is set on the side wall of the circulation cell body 1'. The modified circulation cell body 1' can be used as the circulation cell body 1 in some embodiments of the present application.

[0042] refer to Figure 4 As shown in the connection diagram, the present application also provides a dissolved oxygen testing device, including a dissolved oxygen meter 10 and a circulation pool 100. The dissolved oxygen meter 10 includes a probe 11, which is electrically connected to the ultrasonic generator 2 and controls the start and stop and parameter setting of the ultrasonic generator 2.

[0043] In some embodiments, the probe 11 of the dissolved oxygen meter 10 is a membrane-covered probe. Figure 3 As shown, the membrane-coated probe 11 includes a diaphragm 111, an electrode 112 and an electrolyte storage chamber 113. The electrode 112 includes an anode and a cathode. Generally, the material of the anode is silver (Ag) and the material of the cathode is gold (Au); the electrolyte in the electrolyte storage chamber 113 is potassium chloride or potassium hydroxide, and oxygen diffuses into the electrolyte through the diaphragm 111 to form a measurement circuit with the cathode and the anode. When a certain voltage is applied to the probe 11 by the dissolved oxygen meter 10, oxygen diffuses through the diaphragm 111, the cathode releases electrons, and the anode receives electrons to generate current. When the membrane-coated probe 11 is immersed in an oxygen-containing liquid, oxygen diffuses into the electrolyte through the diaphragm 111 to form a measurement circuit with the cathode and the anode and generate current. In the embodiment of the present application, the end of the membrane-coated probe 11 where the diaphragm 111 is located is called the membrane end.

[0044] In some embodiments, a timer for starting and stopping the ultrasonic generator 2 is set in the dissolved oxygen meter 10, and ultrasonic waves are emitted according to a predetermined working procedure to act on the probe electrode 112 or the electrolyte (not shown) to achieve different functions.

[0045] In some embodiments, when the dissolved oxygen meter 10 is in a test state, the dissolved oxygen meter 10 automatically starts the ultrasonic unit online at a fixed time, and suppresses the formation of scale on the surface of the electrode 112 through ultrasonic action, replacing the existing offline manual mechanical physical polishing and grinding method to remove electrode scale.

[0046] Specifically, in the test state, the film-coated end of the probe 11 is placed downward (refer to Figure 4As shown in the figure, the ultrasonic transducer 3 at the bottom of the flow cell body 1 transmits the ultrasonic wave to the electrode 112 of the probe 11, and through the "cavitation effect" and "straight flow effect", it triggers the vibration and friction of the material molecules, generates shear force, inhibits the formation of crystal nuclei and the growth of crystals, so that the scaling materials are dispersed and loosened, and are not easy to adhere to the electrode 112 to form scaling and form large-volume crystals.

[0047] In some embodiments, the ultrasonic generator 2 is turned on once a day, and each time lasts for 20 to 60 seconds. For example, Table 1 is a set of preferred ultrasonic unit operating parameters.

[0048] Table 1 A set of preferred ultrasonic unit operating parameters

[0049] Operating frequency Ultrasonic power Single duration Frequency Maximum sound pressure 28kHZ 50W 20s 1 time / day 0.29Mpa

[0050] During the ultrasonic action, the electrochemical reaction will not be disturbed within the selected process parameters, and the test value will not be disturbed; the additional potential difference between the probe electrodes caused by the ultrasonic wave is less than the measurement error range of the dissolved oxygen meter. For example, when the working parameters in Table 1 are used, within 20 seconds of the ultrasonic action, the potential difference generated is about ±0.001V, which is within the measurement error range of ±1% of the dissolved oxygen meter.

[0051] As can be seen from Table 2, manual mechanical physical descaling not only takes more than 60 minutes, but also requires the test to be suspended. The dissolved oxygen test device provided in this application can start the ultrasonic unit at a fixed time during the test to inhibit the formation of scale on the electrode surface, without suspending the test process, thereby improving work efficiency.

[0052] Table 2 Steps and time consumption of mechanical physical descaling

[0053] step Operation content Duration (min) 1 Stop the test and remove the probe 3 2 Remove the membrane and clean the electrolyte 3 3 Configure grinding liquid for polishing 5 4 Flush electrode and restore installation 5 5 Polarization correction is back online 60～120

[0054] From the cost analysis in Table 3, it can be seen that the circulation pool 100 provided in some embodiments of the present application requires an improvement cost of 1,000 yuan based on the original circulation pool, but in return it saves 22,650 yuan in costs each year, and the economic benefits are very considerable.

[0055] Table 3 Cost analysis

[0056]

[0057]

[0058] When the dissolved oxygen meter 10 is in maintenance mode, the probe 11 is placed with the membrane end facing upward (refer to Figure 5As shown), the ultrasonic transducer 3 at the bottom of the flow cell body 1 transmits the ultrasonic wave to the electrolyte storage chamber 113 of the probe 11. Under the "cavitation effect" and "straight flow effect", the electrolyte in the electrolyte storage chamber 113 causes the internal bubbles, especially the bubbles hidden in the dead corners, to vibrate, break, and float, thereby achieving the effect of defoaming and degassing. After the electrolyte is injected during the maintenance process of the dissolved oxygen meter, the ultrasonic wave is manually turned on and the frequency and other parameters are set. For example, start for 1 minute each time, pause for 2 minutes, repeat 2 to 3 times, and if there are no more bubbles floating, the diaphragm is pressed and packaged to complete the maintenance of the dissolved oxygen meter.

[0059] In some embodiments, liquid is contained in the circulation cell body 1 to help ultrasonic waves be more effectively transmitted to the electrolyte storage chamber 113 of the probe 11 .

[0060] Table 4 Probe component tolerance strength table

[0061]

[0062] Further, referring to Table 4, the probe component tolerance strength table, the ultrasonic action intensity regulated in the dissolved oxygen testing device provided in the present application is less than the tolerance strength of each component in the probe, and the single ultrasonic action time is controlled at 20 to 60 seconds, so the ultrasonic wave will not cause damage to the precision components in the probe.

[0063] The beneficial effects that may be brought about by the embodiments of the present application include but are not limited to: a circulation cell and a dissolved oxygen testing device using the circulation cell provided by the present application combine an ultrasonic unit with a dissolved oxygen meter device. When the dissolved oxygen meter is in the testing state, the dissolved oxygen meter automatically and regularly starts the ultrasonic unit online, and suppresses the formation of scale on the probe electrode surface through ultrasonic action, which can reduce the number of times the offline manual removal of electrode scale is required; the non-direct contact ultrasonic action will not wear the electrode, extend the service life of the electrode, and reduce the maintenance frequency. When the dissolved oxygen meter is in the maintenance state, ultrasonic waves are used to drive out and remove bubbles in the electrolyte storage chamber of the probe, replacing the existing manual vibration driving or changing the diaphragm structure. The operation is simple, fast, efficient, and thorough, which improves the maintenance quality and reduces the maintenance cost.

[0064] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects.

[0065] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0066] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0067] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0068] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0069] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0070] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0071] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in this application.

Claims

1. A circulation pool, characterized in that Used for dissolved oxygen testing, it comprises a circulation pool body and an ultrasonic unit. The circulation pool body is used to contain liquid whose dissolved oxygen concentration is tested. The ultrasonic unit is connected to the liquid in the circulation pool body through a through hole arranged at the bottom of the circulation pool body.

2. The flow cell according to claim 1, characterized in that The ultrasonic unit includes an ultrasonic generator and an ultrasonic transducer. The ultrasonic generator is arranged outside the circulation pool body and is electrically connected to the ultrasonic transducer. The ultrasonic transducer is arranged at the bottom of the circulation pool body and is connected to the interior of the circulation pool body through a through hole arranged at the bottom of the circulation pool body.

3. The flow cell according to claim 1, characterized in that The circulation pool body comprises a liquid inlet pipeline and a liquid outlet pipeline. The liquid inlet of the liquid inlet pipeline is arranged at the bottom of the circulation pool body, and the liquid outlet of the liquid outlet pipeline is arranged on the side wall of the circulation pool body.

4. A dissolved oxygen testing device, characterized in that: The dissolved oxygen testing device comprises a dissolved oxygen meter and a circulation cell according to any one of claims 1 to 3; the dissolved oxygen meter comprises a probe having electrodes, the dissolved oxygen meter is electrically connected to an ultrasonic generator of the circulation cell, and controls the start and stop and parameter setting of the ultrasonic generator.

5. The dissolved oxygen testing device according to claim 4, characterized in that: The height of the liquid outlet of the circulation pool is set so that the liquid in the circulation pool body reaching the height can immerse the electrode of the probe.

6. The dissolved oxygen testing device according to claim 4, characterized in that: The probe is a membrane-covered dissolved oxygen meter probe.

7. The dissolved oxygen testing device according to claim 6, characterized in that: In the testing state, the film-coated end of the probe is placed downward.

8. The dissolved oxygen testing device according to claim 7, characterized in that: In the test state, the ultrasonic generator is turned on once a day, and each time ranges from 20 to 60 seconds.

9. The dissolved oxygen testing device according to claim 8, characterized in that: During the ultrasonic action time, the additional potential difference between the probe electrodes caused by the ultrasonic wave is smaller than the measurement error range of the dissolved oxygen meter.

10. The dissolved oxygen testing device according to claim 6, characterized in that: In the maintenance state, the film-coated end of the probe is placed upward.

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