Cooling water flow early warning device for silicon epitaxial furnace

Abstract

The utility model relates to a silicon epitaxial furnace cooling water flow early warning device, which comprises a mounting sleeve, an adjusting early warning device is arranged in the mounting sleeve, the adjusting early warning device comprises a movable sleeve, a strong magnetic ring and a rotating shaft, the movable sleeve is slidably connected in the mounting sleeve, and the strong magnetic ring is fixedly mounted on the outer surface of the movable sleeve. According to the cooling water flow early warning device for the silicon epitaxial furnace, after cooling water enters a mounting sleeve, water flow can push a movable sleeve to move in the mounting sleeve, when the water flow is too large, the movable sleeve can be moved to the side close to a water outlet pipe by the water flow, and when one strong magnetic ring is close to two magnetic reed switches, two first early warning lamps are powered on and turned on; when the cooling water flow is small, the movable sleeve can move in the direction close to the water inlet pipe under the action of the tension spring, and the second early warning lamp can be powered on and turned on, so that the purpose of conveniently adjusting the water flow while carrying out flow early warning on the cooling water is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of early warning devices, in particular to an early warning device for cooling water flow of a silicon epitaxial furnace. Background Art

[0002] A silicon epitaxial furnace is a device used to prepare silicon epitaxial layers. It grows one or more layers of silicon single crystal thin films on a silicon substrate under specific process conditions. This equipment is widely used in semiconductor manufacturing, solar cells, integrated circuits and other fields. The silicon epitaxial furnace needs to be cooled by cooling water during use to ensure that the silicon epitaxial furnace operates in a stable working environment to avoid damage to the equipment or affect the quality of the epitaxial layer due to overheating.

[0003] The size of the cooling water flow has a direct impact on the performance and stability of the silicon epitaxial furnace. Appropriate cooling water flow can ensure uniform temperature distribution in the silicon epitaxial furnace and prevent local overheating, thereby improving the growth quality and uniformity of the epitaxial layer. At the same time, sufficient cooling water flow can also help extend the service life of the silicon epitaxial furnace and reduce equipment failures and maintenance costs caused by overheating. Therefore, a cooling water flow warning device for a silicon epitaxial furnace is proposed. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a cooling water flow warning device for a silicon epitaxial furnace, which has the advantages of providing a cooling water flow warning while facilitating adjustment of the water flow size, thereby solving the problem that the cooling water flow warning of the current silicon epitaxial furnace needs to be improved.

[0005] To achieve the above object, the utility model provides the following technical solution: a silicon epitaxial furnace cooling water flow warning device, comprising a mounting sleeve, a water inlet pipe is arranged on the right side of the mounting sleeve, a water outlet pipe is arranged on the left side of the mounting sleeve, and an adjustment warning device is arranged inside the mounting sleeve;

[0006] The adjustment and warning device includes a movable sleeve, a strong magnetic ring, a rotating shaft, blades, a permanent magnet, a generating coil, a reed switch, a first warning light, a second warning light, a support sleeve and a rotating rod. The movable sleeve is slidably connected inside the mounting sleeve, a strong magnetic ring is fixedly installed on the outer surface of the movable sleeve, the movable sleeve is rotatably connected inside the mounting sleeve, the blades are fixedly installed on the outer surface of the rotating shaft, a permanent magnet is fixedly installed on the outer surface of the rotating shaft, a generating coil is fixedly installed on the outer surface of the mounting sleeve, a reed switch is fixedly installed on the outer surface of the mounting sleeve, the first warning light is fixedly installed on the outer surface of the mounting sleeve, the second warning light is fixedly installed on the outer surface of the mounting sleeve, the support sleeve is fixedly installed inside the mounting sleeve, and the rotating rod is rotatably connected inside the mounting sleeve.

[0007] Furthermore, there are two strong magnetic rings, which are fixedly connected to the left and right sides of the movable sleeve respectively; there are two blades, and the opposite sides of the two blades are fixedly connected to the top and bottom of the rotating shaft respectively.

[0008] Furthermore, the number of the reed switches is four, and opposite sides of the four reed switches are fixedly connected to the top and the bottom of the mounting sleeve respectively.

[0009] Furthermore, the number of the first warning lights and the number of the second warning lights are both two, and the opposite sides of the two first warning lights and the opposite sides of the two second warning lights are fixedly connected to the top and the bottom of the mounting sleeve respectively.

[0010] Furthermore, a tension spring is fixedly installed on the left side of the support sleeve, and the left side of the tension spring is fixedly connected to the right side of one of the strong magnetic rings. A semicircular block is fixedly installed on the outer surface of the rotating rod, and the front side of the rotating rod passes through the inner front wall of the mounting sleeve and extends to the outside of the mounting sleeve.

[0011] Furthermore, a bridge rectifier is arranged outside the generating coil, the generating coil and the bridge rectifier are electrically connected, the bridge rectifier and four reed switches are electrically connected, and the four reed switches are electrically connected to the two first warning lights and the two second warning lights respectively.

[0012] Beneficial Effects

[0013] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0014] The cooling water flow warning device for a silicon epitaxial furnace is characterized in that when cooling water enters the installation sleeve through the water inlet pipe, the water flow will push the movable sleeve to move in the installation sleeve. When the water flow is too large, the movable sleeve will be moved by the water flow to the side close to the water outlet pipe, and the tension spring will be stretched at the same time. When one of the strong magnetic rings approaches two of the reed switches, the reed switch will be closed due to the change in the magnetic field, so that the two first warning lights will be powered on and light up, reminding the staff that the cooling water flow is too large. The staff can adjust the water flow size by turning the rotating rod to adjust the opening of the semicircular block. When the cooling water flow is small, the movable sleeve will move toward the direction close to the water inlet pipe under the action of the tension spring. When the other strong magnetic ring approaches the other two reed switches, the second warning light will be powered on and light up, reminding the staff that it is necessary to increase the cooling water flow, thereby achieving the purpose of providing a flow warning for the cooling water while facilitating the adjustment of the water flow size. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the front structure of the utility model;

[0016] Figure 2This is a front sectional structural schematic diagram of the utility model;

[0017] Figure 3 It is a schematic diagram of the structure of the utility model from top view.

[0018] In the figure: 1. installation sleeve; 2. water inlet pipe; 3. water outlet pipe; 4. adjustment warning device; 401. movable sleeve; 402. strong magnetic ring; 403. rotating shaft; 404. blade; 405. permanent magnet; 406. generating coil; 407. reed switch; 408. first warning light; 409. second warning light; 410. support sleeve; 411. rotating rod. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-3 , a silicon epitaxial furnace cooling water flow warning device, comprising a mounting sleeve 1, a water inlet pipe 2 is arranged on the right side of the mounting sleeve 1, a water outlet pipe 3 is arranged on the left side of the mounting sleeve 1, and an adjustment warning device 4 is arranged inside the mounting sleeve 1;

[0021] The adjustment warning device 4 includes a movable sleeve 401, a strong magnetic ring 402, a rotating shaft 403, a blade 404, a permanent magnet 405, a power generation coil 406, a reed switch 407, a first warning light 408, a second warning light 409, a support sleeve 410 and a rotating rod 411. The movable sleeve 401 is slidably connected inside the mounting sleeve 1, and the strong magnetic ring 402 is fixedly installed on the outer surface of the movable sleeve 401. The movable sleeve 401 is rotatably connected inside the rotating shaft 403, and the blade 404 is fixedly installed on the outer surface of the rotating shaft 403. The permanent magnet 405 is fixedly installed on the outer surface of the rotating shaft 403, the power generation coil 406 is fixedly installed on the outer surface of the mounting sleeve 1, the reed switch 407 is fixedly installed on the outer surface of the mounting sleeve 1, the first warning light 408 is fixedly installed on the outer surface of the mounting sleeve 1, the second warning light 409 is fixedly installed on the outer surface of the mounting sleeve 1, the support sleeve 410 is fixedly installed inside the mounting sleeve 1, and the rotating rod 411 is rotatably connected inside the mounting sleeve 1.

[0022] Specifically, Figure 2As shown, the strong magnetic ring 402 is an annular magnet made of permanent magnetic material, which can generate a persistent and stable magnetic field. The permanent magnet 405 is a type of magnet that can maintain its magnetism for a long time. They can maintain their magnetism without external energy input, so they are widely used in various fields. The generating coil 406 is based on the electromagnetic induction phenomenon, that is, when the coil rotates in the magnetic field, the magnetic flux changes, thereby generating an electromotive force in the coil, and then generating current. The reed switch 407 is also called a reed switch, which is an electric switch operated by an applied magnetic field. Its basic structure is to seal two magnetic reed sheets in a glass tube. Although the two magnetic reed sheets overlap, there is a small gap in the middle. When the external magnetic field approaches, the magnetic reed sheets are magnetized and generate magnetic fields of different polarities. When the magnetic field strength is sufficient, the two magnetic reed sheets will attract and contact each other, thereby turning on the circuit. Once the external magnetic field is far away, the magnetic reed sheets gradually demagnetize and separate, and the circuit is disconnected.

[0023] Specifically, Figure 2 As shown, when the cooling water enters the installation sleeve 1, the blades 404 will drive the rotating shaft 403 to rotate through the water flow, and the rotation of the rotating shaft 403 will drive the permanent magnet 405 on the outer surface to rotate, thereby generating current inside the generating coil 406 outside the installation sleeve 1, and then the generated current will be converted into direct current through the bridge rectifier. When the strong magnetic ring 402 is close to the reed switch 407, the magnetic field of the reed switch 407 will change, thereby changing the state of the circuit, and energizing the first warning light 408 or the second warning light 409. After energization, the first warning light 408 or the second warning light 409 will light up to remind the staff.

[0024] Specifically, Figure 2 As shown, the material of the tension spring is beryllium copper alloy. The tension spring made of this material has the characteristics of high strength, high elasticity, corrosion resistance and non-magneticity. It can resist the influence of magnetic field to a certain extent and can provide moderate tension.

[0025] When implementing, follow these steps:

[0026] 1) First, connect the installation sleeve 1 with the water inlet pipe 2 and the water outlet pipe 3, and start to transport cooling water into the installation sleeve 1;

[0027] 2) The blades 404 are then driven by the water flow to rotate, and drive the rotating shaft 403 and the permanent magnet 405 to rotate, and cooperate with the generating coil 406 on the outer surface of the mounting sleeve 1 to generate electricity;

[0028] 3) The cooling water flow rate is controlled by the lighting of the first warning light 408 and the second warning light 409;

[0029] 4) Finally, when the first warning light 408 is on, the rotating rod 411 is rotated to appropriately close the opening of the semicircular block to reduce the water flow, and when the second warning light 409 is on, the opening of the semicircular block is increased.

[0030] To summarize, after the cooling water enters the installation sleeve 1 through the water inlet pipe 2, the water flow will push the movable sleeve 401 to move in the installation sleeve 1. When the water flow is too large, the movable sleeve 401 will be moved by the water flow to the side close to the water outlet pipe 3, and at the same time, the tension spring will be stretched. When one of the strong magnetic rings 402 is close to two of the reed switches 407, the reed switch 407 will be closed due to the change in the magnetic field, so that the two first warning lights 408 are energized and light up, reminding the staff that the cooling water flow is too large. The staff can adjust the water flow by turning the rotating rod 411 to adjust the opening of the semicircular block. When the cooling water flow is small, the movable sleeve 401 will move toward the direction close to the water inlet pipe 2 under the action of the tension spring. When the other strong magnetic ring 402 is close to the other two reed switches 407, the second warning light 409 will be energized and light up, reminding the staff that they need to increase the cooling water flow, thereby achieving the purpose of providing a flow warning for the cooling water while facilitating the adjustment of the water flow.

[0031] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon epitaxial furnace cooling water flow warning device, comprising a mounting sleeve (1), characterized in that: A water inlet pipe (2) is arranged on the right side of the installation sleeve (1), a water outlet pipe (3) is arranged on the left side of the installation sleeve (1), and an adjustment and warning device (4) is arranged inside the installation sleeve (1); The adjustment warning device (4) comprises a movable sleeve (401), a strong magnetic ring (402), a rotating shaft (403), a blade (404), a permanent magnet (405), a power generation coil (406), a reed switch (407), a first warning light (408), a second warning light (409), a support sleeve (410) and a rotating rod (411); the movable sleeve (401) is slidably connected inside the mounting sleeve (1); a strong magnetic ring (402) is fixedly installed on the outer surface of the movable sleeve (401); the movable sleeve (401) is rotatably connected inside with a rotating shaft (403); the rotating shaft (403) The outer surface of the mounting sleeve (1) is fixedly mounted with a blade (404), the outer surface of the rotating shaft (403) is fixedly mounted with a permanent magnet (405), the outer surface of the mounting sleeve (1) is fixedly mounted with a power generation coil (406), the outer surface of the mounting sleeve (1) is fixedly mounted with a reed switch (407), the outer surface of the mounting sleeve (1) is fixedly mounted with a first warning light (408), the outer surface of the mounting sleeve (1) is fixedly mounted with a second warning light (409), the interior of the mounting sleeve (1) is fixedly mounted with a support sleeve (410), and the interior of the mounting sleeve (1) is rotatably connected with a rotating rod (411).

2. The cooling water flow warning device for a silicon epitaxial furnace according to claim 1, characterized in that: There are two strong magnetic rings (402), which are respectively fixedly connected to the left and right sides of the movable sleeve (401); there are two blades (404), and opposite sides of the two blades (404) are respectively fixedly connected to the top and bottom of the rotating shaft (403).

3. The silicon epitaxial furnace cooling water flow warning device according to claim 1, characterized in that: The number of the magnetic reed switches (407) is four, and opposite sides of the four magnetic reed switches (407) are fixedly connected to the top and bottom of the installation sleeve (1) respectively.

4. The silicon epitaxial furnace cooling water flow warning device according to claim 1, characterized in that: The number of the first warning lights (408) and the number of the second warning lights (409) are both two, and the opposite sides of the two first warning lights (408) and the opposite sides of the two second warning lights (409) are respectively fixedly connected to the top and the bottom of the installation sleeve (1).

5. The silicon epitaxial furnace cooling water flow warning device according to claim 1, characterized in that: A tension spring is fixedly installed on the left side of the support sleeve (410), and the left side of the tension spring is fixedly connected to the right side of one of the strong magnetic rings (402). A semicircular block is fixedly installed on the outer surface of the rotating rod (411), and the front side of the rotating rod (411) penetrates the inner front wall of the installation sleeve (1) and extends to the outside of the installation sleeve (1).

6. The silicon epitaxial furnace cooling water flow warning device according to claim 1, characterized in that: A bridge rectifier is arranged outside the power generation coil (406), the power generation coil (406) and the bridge rectifier are electrically connected, the bridge rectifier and four reed switches (407) are electrically connected, and the four reed switches (407) are electrically connected to two first warning lights (408) and two second warning lights (409), respectively.

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