Lamination reinspection device

Abstract

The utility model discloses a lamination reinspection device, which comprises a material box feeding mechanism, a lamination carrying mechanism, a main conveying mechanism and a lamination reinspection mechanism, and is characterized in that the material box feeding mechanism is configured to receive material boxes filled with laminations and move the material boxes and the laminations to a feeding station, and the laminations are a group of stacked silicon wafers; the laminated sheet carrying mechanism is configured to pick up the laminated sheets in the material boxes at the feeding station and carry the picked-up laminated sheets to the main conveying mechanism; the main conveying mechanism is provided with a reinspection station, the lamination reinspection mechanism is located at the reinspection station, and the lamination reinspection mechanism is configured to perform appearance inspection on the laminations conveyed to the reinspection station by the main conveying mechanism; the main conveying mechanism is further configured to convey the laminations rechecked at the rechecking station to the next procedure. According to the lamination rechecking device, the lamination rechecking efficiency can be greatly improved, and the fast-takt rechecking operation requirement can be met.

Description

Technical Field

[0001] The present application relates to the field of silicon wafer production equipment manufacturing, and in particular to a stacking re-inspection device. Background Art

[0002] After the silicon wafers are inspected and sorted by the sorting machine, qualified wafers are collected and stacked in the material box one by one to form a stack. The stack in the material box will be taken out by workers, packaged and put into the packaging box. After the stack is taken out of the material box, the silicon wafer may have some quality defects, which are difficult to identify with the naked eye. Therefore, the stack in the material box is generally taken out and inspected for appearance by the stack re-inspection equipment to remove unqualified stacks.

[0003] In the prior art, stack re-inspection is usually performed by transporting the stack from the loading station to the re-inspection station through a transport mechanism, and re-inspecting the stack by the re-inspection assembly at the re-inspection station. After the re-inspection, the stack needs to be moved out of the re-inspection station by the transport mechanism and transported to the next process. Although this method can realize the re-inspection of the stack, the transport mechanism needs to transport the next stack after the stack at the re-inspection station has completed the inspection, which has the problem of low re-inspection efficiency and cannot meet the production requirements of fast beats. Utility Model Content

[0004] The purpose of the present application is to provide a stacking re-inspection device to solve the problem of low re-inspection efficiency in the prior art stacking re-inspection.

[0005] To achieve this goal, this application adopts the following technical solutions:

[0006] The present application proposes a stacking re-inspection device, which includes a material box feeding mechanism, a stacking conveying mechanism, a main conveying mechanism and a stacking re-inspection mechanism, wherein:

[0007] The magazine loading mechanism is configured to receive a magazine containing a stack of wafers and move the magazine and the stack to a loading station, wherein the stack is a stacked group of silicon wafers;

[0008] The stack handling mechanism is configured to pick up the stacks in the material box at the loading station and carry the picked stacks to the main conveying mechanism;

[0009] A re-inspection station is arranged on the main conveying mechanism, and the stacking re-inspection mechanism is located at the re-inspection station. The stacking re-inspection mechanism is configured to perform appearance inspection on the stacking conveyed by the main conveying mechanism to the re-inspection station;

[0010] The main conveying mechanism is also configured to convey the stacked sheets after re-inspection at the re-inspection station to the next process.

[0011] The stack re-inspection device of the present application transports the stacks to the main conveying mechanism in sequence through the stack handling mechanism, and the main conveying mechanism transports the received stacks to the stack re-inspection mechanism in sequence to re-inspect the stacks. At the same time, the re-inspected stacks are directly transported to the next process through the main conveying mechanism. Compared with the prior art that first transports the stacks to the re-inspection station for re-inspection through the handling mechanism, and then waits for the re-inspection to be completed before the handling mechanism moves the re-inspected stacks out of the re-inspection station and transports them to the next process, the stack re-inspection efficiency is greatly improved, and the requirements of fast-paced re-inspection operations can be met.

[0012] Optionally, the stacking re-inspection mechanism includes a first lifting assembly and a plurality of detection cameras, the re-inspection station is provided with a first conveying position and a detection position, the detection position is located above the first conveying position, the plurality of detection cameras are installed at the periphery of the detection position, the plurality of detection cameras are configured to take pictures of the four sides and four chamfers of the stacking at the detection position to obtain image information of the four sides and four chamfers of the stacking, the first lifting assembly is arranged below the first conveying position,

[0013] The first lifting assembly includes a first driving member and a first bearing member, the driving end of the first driving member is connected to the first bearing member, and the first driving member is configured to drive the first bearing member to rise and fall;

[0014] The first driving member is used to drive the first carrier to rise to a preset height, so that the stack at the first conveying position is lifted off the conveying surface of the main conveying mechanism and raised to the detection position by the first carrier;

[0015] The first driving member is further used to drive the first supporting member to descend to a preset height, so as to lower the re-inspected stacked sheets at the detection position to the first conveying position, so that the re-inspected stacked sheets are lowered to the conveying surface of the main conveying mechanism.

[0016] Through the cooperation of the first lifting component and several inspection cameras, the stack on the main conveying mechanism is automatically lifted to the inspection position for re-inspection, and the stack after re-inspection is lowered to the main conveying mechanism, so as to be conveyed to the next process through the main conveying mechanism; at the same time, several inspection cameras are used to photograph and inspect the four side edges and four chamfers of the stack at the inspection position, thereby improving the inspection efficiency of the stack and ensuring the inspection accuracy of the stack.

[0017] Optionally, the main conveying mechanism is provided with a tidying station located in front of the re-inspection station, and a tidying mechanism is provided at the tidying station, and the tidying mechanism is configured to tidy the stacked sheets before re-inspection.

[0018] By arranging a regularization mechanism on the main conveying mechanism, the stacked sheets can be regularized before re-inspection to ensure the position accuracy of the stacked sheets before re-inspection and further improve the detection accuracy of the stacked sheets.

[0019] Optionally, the main conveying mechanism includes two conveyor belts arranged in parallel, the tidying mechanism includes a second jacking assembly, two sets of first tidying assemblies and two sets of second tidying assemblies, the tidying station is provided with a second conveying position and a tidying position, the tidying position is located above the second conveying position, and the second jacking assembly is arranged below the second conveying position;

[0020] The second lifting component includes a second driving member, a lifting member and a second bearing member, the driving end of the second driving member is connected to the lifting member, the second driving member drives the lifting member to rise and fall, the second bearing member is fixed on the lifting member, the two sets of first regular components can be arranged close to or far away from each other on opposite sides of the lifting member in the first direction, the two sets of first regular components are located between the two conveyor belts, the two sets of second regular components can be arranged close to or far away from each other on opposite sides of the lifting member in the second direction, the two sets of second regular components are respectively arranged on the outsides of the two conveyor belts, and the second direction is perpendicular to the first direction;

[0021] The second driving member is used to drive the lifting member to rise to a preset height, and the stacked sheets at the second conveying position are lifted off the conveying surface of the main conveying mechanism and raised to the aligning position through the second bearing member, and the two sets of first aligning assemblies and the two sets of second aligning assemblies are brought close to each other to align the stacked sheets at the aligning position;

[0022] The second driving member is also used to drive the lifting member to descend to a preset height to lower the aligned stack at the alignment position to the second conveying position, so that the aligned stack is lowered to the conveying surface of the main conveying mechanism.

[0023] The stack is first transported to the second transport position by the main conveying mechanism, and then the stack is lifted to the regularization position by the second lifting assembly. After the regularization mechanism regularizes the stack at the regularization position, the second lifting assembly finally lowers the stack to the main conveying mechanism, thereby realizing automatic regularization of the stack; a regularization mechanism with compact structure, small space occupation and stable and reliable operation is provided.

[0024] Optionally, the stack re-inspection device also includes a paper loading mechanism, and an assembly station is arranged at the feeding end of the main conveying mechanism. The paper loading mechanism is arranged close to the assembly station, and the paper loading mechanism is configured to pick up a piece of release paper and transport the picked up release paper to the assembly station. The stack transporting mechanism is configured to pick up the stack at the loading station and transport the picked up stack to the release paper at the assembly station. The main conveying mechanism is configured to transport the stack and release paper at the assembly station to the re-inspection station along the conveying direction, and the main conveying mechanism is also configured to transport the stack and release paper after re-inspection at the re-inspection station to the next process.

[0025] Through the cooperation of the paper feeding mechanism, the main conveying mechanism and the stacking transporting mechanism, a piece of release paper is automatically combined under each stack, which can protect the stack during the conveying and re-inspection of the stack, and is conducive to improving the yield rate of the stack.

[0026] Optionally, the main conveying mechanism includes two conveying belts arranged in parallel, the combination station is provided with a combination position and a third conveying position, the combination position is located above the third conveying position, the paper feeding mechanism includes a feeding assembly and a third lifting assembly, the feeding assembly includes a storage assembly, a feeding drive assembly and a picking assembly, the storage assembly is configured to store a plurality of stacked release papers, the driving end of the feeding drive assembly is connected to the picking assembly, and the picking assembly is configured to pick up or release the release paper,

[0027] The third lifting assembly includes a third driving member and a third bearing member, wherein the driving end of the third driving member is connected to the third bearing member, and the third driving member is configured to drive the third bearing member to rise and fall, so that the third bearing member moves to the assembly position or the third conveying position.

[0028] When the third carrier moves to the combination position, the feeding drive assembly is configured to drive the picking assembly to move above the storage assembly and pick up the topmost release paper in the storage assembly through the picking assembly, and the feeding drive assembly is further configured to move the picked up release paper to the combination station and release the release paper onto the third carrier, and the stack conveying mechanism is configured to pick up the stack at the feeding station and convey the picked up stack to above the release paper to combine the stack and the release paper.

[0029] When the third carrier moves to the third conveying position, the laminate and the release paper descend to the conveying surfaces of the two conveyor belts.

[0030] Through the cooperation of the feeding component and the third lifting component, a piece of release paper is automatically released on the third carrier in the combined position; the picked-up stack is transported to the release paper in the combined position by the stack transporting mechanism, thereby realizing the combination of the stack and the release paper; a paper feeding mechanism with reasonable design, compact structure, space occupancy and stable operation is provided.

[0031] Optionally, the material storage assembly includes a material storage rack, a fourth driving member and a fourth supporting member, the material storage rack includes a material storage space with an upper end open for storing multiple stacked release papers, the fixed end of the fourth driving member is fixed to the material storage rack, the driving end of the fourth driving member is connected to the fourth supporting member, the fourth supporting member is liftably arranged in the material storage space, the fourth supporting member is configured to carry multiple stacked release papers, and the fourth driving member drives the fourth supporting member to rise to a preset height to lift the multiple release papers in the material storage rack upward by a material distance.

[0032] The storage and automatic feeding of release paper are achieved through the cooperation of the material storage rack, the fourth driving member and the fourth bearing member, providing a material storage component with a simple structure and stable and reliable feeding.

[0033] Optionally, a pressing assembly is provided on the first carrier, and the pressing assembly is configured to press down an edge of the release paper at the detection position to avoid affecting the appearance detection of the laminate above the release paper.

[0034] By providing the pressing component, it is possible to avoid the edge of the release paper blocking the laminate during re-inspection, thereby ensuring the accuracy of laminate inspection.

[0035] Optionally, the material box includes a base, a carrying plate and two baffles, the carrying plate is obliquely installed on the base, the carrying plate is used to carry the stacked sheets, the surface area of ​​the carrying plate is smaller than the surface area of ​​the stacked sheets, the two baffles are respectively installed on both sides of the carrying plate that are inclined downward, and the baffles are used to prevent the stacked sheets from leaving the carrying plate;

[0036] The stacking conveying mechanism includes a driving module, a moving seat and a clamping claw assembly. The moving seat is installed at the moving end of the driving module. The driving module is used to drive the moving seat to vertically lift and horizontally slide.

[0037] The clamping jaw assembly comprises a double-headed cylinder, a first clamping jaw and a second clamping jaw. The double-headed cylinder is mounted on a movable seat and is used to drive the first clamping jaw and the second clamping jaw to move closer to or away from each other so as to clamp or release the stacked sheets.

[0038] A clearance gap is reserved between the two baffles for the first clamping jaw to pass through and hold up the laminate, and the second clamping jaw approaches and holds up the laminate from an end of the bearing plate that tilts upward.

[0039] By setting up the stack conveying mechanism, the stacks in the material box can be automatically conveyed to the main conveying mechanism, providing a stack conveying mechanism with a compact structure and high conveying efficiency; at the same time, by setting up the material box, a material box with a simple structure is provided, which is convenient for collecting materials and for the stack conveying mechanism to pick up stacks.

[0040] Optionally, the material box feeding mechanism includes a full material box conveying assembly, an empty material box recovery conveying assembly, a lifting drive member and a loading platform, the full material box conveying assembly is configured to move a full material box with stacked sheets to a feeding station, and the empty material box recovery conveying assembly is configured to receive an empty material box and convey the received empty material box to the next process;

[0041] The driving end of the lifting drive is connected to the loading platform, and the loading platform is configured to carry and transport full material boxes or empty material boxes. The lifting drive drives the loading platform to move alternately to the receiving station and the recycling station;

[0042] When the loading platform moves to the receiving station, the loading platform is configured to receive the empty loading box at the loading station;

[0043] When the loading platform moves to the recycling station, the loading platform is configured to convey the empty material box on the loading platform to the empty material box recycling conveying component.

[0044] Through the cooperation of the full material box conveying component, the empty material box recovery conveying component, the lifting drive component and the loading platform, the automatic loading of the full material box and the recovery circulation of the empty material box are realized; a material box loading mechanism with both full material box loading and empty material box recovery is provided, the overall structure is compact, the space occupied is small, and the loading efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a schematic diagram of the three-dimensional structure of the lamination re-inspection device provided in an embodiment of the present application;

[0046] Figure 2 It is a schematic diagram of the assembly of the lamination re-inspection mechanism and the main conveying mechanism provided in the embodiment of the present application;

[0047] Figure 3 is a schematic diagram of the three-dimensional structure of the first lifting assembly provided in an embodiment of the present application;

[0048] Figure 4 It is a schematic diagram of the three-dimensional structure of the regular mechanism provided in the embodiment of the present application;

[0049] Figure 5 It is a schematic diagram of the three-dimensional structure of the feeding assembly provided in the embodiment of the present application;

[0050] Figure 6 It is a schematic diagram of the three-dimensional structure of the material box provided in the embodiment of the present application;

[0051] Figure 7 It is a three-dimensional structural schematic diagram of the material box feeding mechanism provided in an embodiment of the present application.

[0052] Figures 1 to 7 The following reference numerals are included:

[0053] A material box feeding mechanism 10, a full material box conveying assembly 11, an empty material box recovery conveying assembly 12, a lifting drive member 13, and a loading platform 14;

[0054] The stacking conveying mechanism 20, the driving module 21, the moving seat 22, and the clamping claw assembly 23;

[0055] Main conveying mechanism 30, conveying belt 300;

[0056] The stacking re-inspection mechanism 40, the first lifting assembly 41, the first driving member 410, the first bearing member 411, the first support platform 4110, the second support platform 4111, the locking assembly 4112, the lifting plate 412, the guide rail 413, the pressing assembly 414, the rotary lifting cylinder 4140, the pressing plate 4141, and the detection camera 42;

[0057] The stack 50, the material box 51, the base 510, the baffle 511, and the clearance gap 512;

[0058] The tidying mechanism 60, the second lifting assembly 61, the second driving member 610, the lifting member 611, the second bearing member 612, the first tidying assembly 62, the first tidying driving member 620, the first tidying member 621, the second tidying assembly 63, the second tidying driving member 630, the second tidying member 631;

[0059] Paper feeding mechanism 70 , material storage assembly 71 , material storage rack 710 , fourth driving member 711 , fourth bearing member 712 , feeding driving assembly 72 , picking assembly 73 , third driving member 74 , third bearing member 75 . DETAILED DESCRIPTION

[0060] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0061] After the silicon wafers are inspected and sorted by the sorting machine, qualified wafers are collected and stacked one by one in the material box to form a stack. Before the stack is taken out of the material box for packaging, it needs to be inspected by the stacking re-inspection equipment to remove the unqualified stacks.

[0062] In the prior art, stack re-inspection is usually performed by transporting the stack from the loading station to the re-inspection station through a transport mechanism, and re-inspecting the stack by the re-inspection assembly at the re-inspection station. After the re-inspection, the stack needs to be moved out of the re-inspection station by the transport mechanism and transported to the next process. Although this method can realize the re-inspection of the stack, the transport mechanism needs to transport the next stack after the stack at the re-inspection station has completed the inspection, which has the problem of low re-inspection efficiency and cannot meet the production requirements of fast beats.

[0063] Therefore, this application proposes a lamination re-inspection device, please refer to Figure 1 As shown, the stack re-inspection device proposed in the embodiment of the present application includes a material box loading mechanism 10, a stack conveying mechanism 20, a main conveying mechanism 30 and a stack re-inspection mechanism 40, wherein: the material box loading mechanism 10 is configured to receive a material box 51 containing stacks 50 and move the material box 51 and the stacks 50 to a loading station, and the stacks 50 are a group of stacked silicon wafers; the stack conveying mechanism 20 is configured to pick up the stacks 50 in the material box 51 at the loading station and convey the picked stacks 50 to the main conveying mechanism 30; a re-inspection station is provided on the main conveying mechanism 30, and the stack re-inspection mechanism 40 is located at the re-inspection station, and the stack re-inspection mechanism 40 is configured to perform appearance inspection on the stacks conveyed by the main conveying mechanism 30 to the re-inspection station; the main conveying mechanism 30 is also configured to convey the stacks 50 re-inspected at the re-inspection station to the next process.

[0064] The stacking re-inspection device of the present embodiment transports the stacking sheets 50 to the main conveying mechanism 30 in sequence through the stacking conveying mechanism 20, and the main conveying mechanism 30 transports the received stacking sheets 50 to the stacking re-inspection mechanism 40 in sequence, and the stacking re-inspection mechanism 40 re-inspects the stacking sheets 50. At the same time, the re-inspected stacking sheets 50 are directly conveyed to the next process through the main conveying mechanism 40. Compared with the prior art that first transports the stacking sheets to the re-inspection station for re-inspection by the conveying mechanism, and waits for the re-inspection to be completed before the conveying mechanism moves the re-inspected stacking sheets out of the re-inspection station and transports them to the next process, the stacking re-inspection efficiency is greatly improved, and the requirements of fast-beat re-inspection operations can be met.

[0065] See also Figures 1 to 3 As shown, as an embodiment, the stacking re-inspection mechanism 40 includes a first lifting component 41 and a plurality of detection cameras 42. The re-inspection station is provided with a first conveying position and a detection position. The detection position is located above the first conveying position. The plurality of detection cameras 42 are installed at the periphery of the detection position. The plurality of detection cameras 42 are configured to take pictures of the four sides and four chamfers of the stacking 50 at the detection position to obtain image information of the four sides and four chamfers of the stacking 50. The first lifting component 41 is arranged below the first conveying position.

[0066] The first lifting assembly 41 includes a first driving member 410 and a first bearing member 411. The driving end of the first driving member 410 is connected to the first bearing member 411. The first driving member 410 is configured to drive the first bearing member 411 to rise and fall.

[0067] The first driving member 410 is used to drive the first carrier 411 to rise to a preset height, so that the laminate 50 at the first conveying position is lifted off the conveying surface of the main conveying mechanism 30 and raised to the detection position by the first carrier 411;

[0068] The first driving member 410 is also used to drive the first supporting member 411 to descend to a preset height, so as to lower the re-inspected stack 50 at the detection position to the first conveying position, so that the re-inspected stack is lowered to the conveying surface of the main conveying mechanism 30 .

[0069] In one feasible manner, in order to save installation space, several inspection cameras 42 for photographing the four sides of the stack 50 and several inspection cameras 42 for photographing the four chamfers of the stack 50 are divided into two groups with different heights. The first driving member 410 drives the first supporting member 411 to rise to a first preset height, and the several inspection cameras 42 for photographing the four sides of the stack 50 take pictures of the stack 50. Subsequently, the first driving member 410 drives the first supporting member 411 to rise to a second preset height, and the several inspection cameras 42 for photographing the four chamfers of the stack 50 take pictures of the stack 50 again. Thus, the installation of several inspection cameras 42 is achieved within a limited installation space, so as to respectively photograph the four sides and four chamfers of the stack 50, thereby improving the flexibility of equipment installation.

[0070] Specifically, the first lifting assembly 41 further includes a lifting plate 412 , a driving end of the first driving member 410 is connected to the lifting plate 412 , the first driving member 410 is configured to drive the lifting plate 412 to move up and down, and the first bearing member 411 is disposed on the lifting plate 412 .

[0071] Specifically, two parallel guide rails 413 extending along the first direction are fixed on the lifting plate 412, and the first bearing member 411 includes a first bracket 4110, a second bracket 4111 and a locking assembly 4112. The first bracket 4110 and the second bracket 4111 can be assembled on the guide rail 413 by a slider so as to be close to or away from each other along the first direction, and the locking assembly 4112 is configured to lock and fix the first bracket 4110 and the second bracket 4111 on the guide rail 413 or release the first bracket 4110 and the second bracket 4111 relative to the guide rail 413;

[0072] After the locking assembly 4112 loosens the first bracket 4110 and the second bracket 4111 relative to the guide rail 413, the distance between the first bracket 4110 and the second bracket 4111 is adjusted to accommodate stacking sheets 50 of different specifications and sizes, thereby improving the compatibility of the first lifting assembly 41.

[0073] It should be noted that the first carrier 411 includes a first pallet 4110, a second pallet 4111 and a driving member, and the driving member is configured to drive the first pallet 4110 and the second pallet 4110 to move closer to or away from each other, so as to automatically adjust the distance between the first pallet 4110 and the second pallet 4111 through the driving member.

[0074] Specifically, the first driving member 410 is a vertically arranged electric cylinder.

[0075] Through the cooperation of the first lifting component 41 and a plurality of detection cameras 42, the stack 50 on the main conveying mechanism 30 is automatically lifted to the detection position for re-inspection, and the stack 50 after re-inspection is lowered onto the main conveying mechanism 30, so as to be conveyed to the next process through the main conveying mechanism 30; at the same time, the four side edges and four chamfers of the stack 50 at the detection position are photographed and inspected by a plurality of detection cameras 42, thereby improving the detection efficiency of the stack and ensuring the detection accuracy of the stack.

[0076] As an embodiment, a tidying station located before the re-inspection station is provided on the main conveying mechanism 30, and a tidying mechanism 60 is provided at the tidying station. The tidying mechanism 60 is configured to tidy the stacked sheets 50 before re-inspection.

[0077] By providing the aligning mechanism 60 on the main conveying mechanism 30 , the stack 50 can be aligned before re-inspection to ensure the position accuracy of the stack 50 before re-inspection, thereby further improving the detection accuracy of the stack.

[0078] See also Figure 2 and Figure 4 As shown, as an embodiment, the main conveying mechanism 30 includes two conveying belts 300 arranged in parallel, the tidying mechanism 60 includes a second jacking assembly 61, two sets of first tidying assemblies 62 and two sets of second tidying assemblies 63, and the tidying station is provided with a second conveying position and a tidying position, the tidying position is located above the second conveying position, and the second jacking assembly 61 is arranged below the second conveying position;

[0079] The second lifting component 61 includes a second driving member 610, a lifting member 611 and a second bearing member 612. The driving end of the second driving member 610 is connected to the lifting member 611. The second driving member 610 drives the lifting member 611 to rise and fall. The second bearing member 612 is fixed on the lifting member 611. Two sets of first regular components 62 can be arranged close to or far from each other on opposite sides of the lifting member 611 in the first direction. The two sets of first regular components 62 are located between the two conveyor belts 300. Two sets of second regular components 63 can be arranged close to or far from each other on opposite sides of the lifting member 611 in the second direction. The two sets of second regular components 63 are respectively arranged on the outer sides of the two conveyor belts 300. The second direction is perpendicular to the first direction.

[0080] The second driving member 610 is used to drive the lifting member 611 to rise to a preset height, and the stacked sheets at the second conveying position are lifted off the conveying surface of the main conveying mechanism 30 and raised to the aligning position through the second bearing member 612, and the two sets of first aligning components 62 and the two sets of second aligning components 63 are brought close to each other to align the stacked sheets at the aligning position;

[0081] The second driving member 610 is also used to drive the lifting member 611 to descend to a preset height to lower the aligned stack 50 at the alignment position to the second conveying position, so that the aligned stack 50 descends to the conveying surface of the main conveying mechanism 30 .

[0082] Specifically, the second driving member 610 adopts a vertically arranged electric cylinder, so that the second driving member 610 can adjust the lifting height of the lifting member 611 according to the laminations of different thicknesses.

[0083] Specifically, a circumvention groove for circumventing the two conveyor belts 300 is formed on the second supporting member 612 .

[0084] Specifically, the first regularizing component 62 includes a first regularizing driving member 620 and a first regularizing member 621, the driving end of the first regularizing driving member 620 is connected to the first regularizing member 621, the driving end of the first regularizing driving member 620 is connected to the first regularizing member 621, and the first regularizing driving member 620 drives the first regularizing member 621 to approach or move away from the regularizing position; the second regularizing component 63 includes a second regularizing driving member 630 and a second regularizing member 631, the driving end of the second regularizing driving member 630 is connected to the second regularizing member 631, the driving end of the second regularizing driving member 630 is connected to the second regularizing member 631, and the second regularizing driving member 630 drives the second regularizing member 631 to approach or move away from the regularizing position.

[0085] The stack is first transported to the second transport position by the main conveying mechanism 30, and then lifted to the regularization position by the second lifting assembly 61. After the regularization mechanism 60 regularizes the stack at the regularization position, the second lifting assembly 61 finally lowers the stack to the main conveying mechanism 30, thereby realizing automatic regularization of the stack; a regularization mechanism with compact structure, small space occupation, and stable and reliable operation is provided.

[0086] Specifically, the first regular drive member 620 and the second regular drive member 630 can be a combination of a motor and a ball screw mechanism, and the first regular member 621 and the second regular member 631 are respectively installed on the sliders of the corresponding ball screw mechanism, and the sliders of the roller screw mechanism are driven by the motor to slide, so as to achieve accurate displacement of the first regular member 621 and the second regular member 631. The advantage of adopting the above method is that the displacement of the first regular member 621 and the second regular member 631 can be quickly adjusted to adapt to laminations of different sizes.

[0087] See also Figure 1As shown, as an embodiment, the stack re-inspection device also includes a paper loading mechanism 70, the feeding end of the main conveying mechanism 30 is provided with an assembly station, the paper loading mechanism 70 is arranged close to the assembly station, the paper loading mechanism 70 is configured to pick up a piece of release paper and transport the picked up release paper to the assembly station, the stack transporting mechanism 20 is configured to pick up the stack at the loading station and transport the picked up stack to the release paper at the assembly station, the main conveying mechanism 30 is configured to transport the stack and the release paper at the assembly station to the re-inspection station along the conveying direction, and the main conveying mechanism 30 is also configured to transport the stack and the release paper after re-inspection at the re-inspection station to the next process.

[0088] Through the cooperation of the paper loading mechanism 70, the main conveying mechanism 30 and the stacking transporting mechanism 20, a piece of release paper is automatically combined under each stack, which can protect the stack during the conveying and re-inspection of the stack, and is conducive to improving the yield rate of the stack.

[0089] See also Figure 2 and Figure 5 As shown, as an embodiment, the main conveying mechanism 30 includes two conveying belts 300 arranged in parallel, the assembly station is provided with a combination position and a third conveying position, the combination position is located above the third conveying position, the paper feeding mechanism 70 includes a feeding assembly and a third lifting assembly, the feeding assembly includes a storage assembly 71, a feeding drive assembly 72 and a picking assembly 73, the storage assembly 71 is configured to store a plurality of stacked release papers, the driving end of the feeding drive assembly 72 is connected to the picking assembly 73, and the picking assembly 73 is configured to pick up or release the release paper,

[0090] The third lifting assembly includes a third driving member 74 and a third bearing member 75. The driving end of the third driving member 74 is connected to the third bearing member 75. The third driving member 74 is configured to drive the third bearing member 75 to rise and fall, so that the third bearing member 75 moves to the combined position or the third conveying position.

[0091] When the third carrier 75 moves to the combination position, the feeding drive assembly 72 is configured to drive the picking assembly 73 to move above the storage assembly 71 and pick up the topmost release paper in the storage assembly 71 through the picking assembly 73. The feeding drive assembly 72 is also configured to move the picked up release paper to the combination station and release the release paper onto the third carrier 75. The stacking transport mechanism 20 is configured to pick up the stack at the feeding station and transport the picked up stack to above the release paper to combine the stack and the release paper.

[0092] When the third carrier 75 moves to the third conveying position, the laminate and the release paper descend to the conveying surfaces of the two conveyor belts 300 .

[0093] Through the cooperation of the feeding assembly and the third lifting assembly, a piece of release paper is automatically released on the third carrier 75 in the combined position; the picked up stack is transported to the release paper in the combined position by the stack transporting mechanism 20, thereby realizing the combination of the stack and the release paper; a paper feeding mechanism 70 with reasonable design, compact structure, space occupancy and stable operation is provided.

[0094] As an embodiment, the storage assembly 71 includes a storage rack 710, a fourth driving member 711 and a fourth supporting member 712. The storage rack 710 includes a storage space with an upper end open for storing multiple stacked release papers. The fixed end of the fourth driving member 711 is fixed to the storage rack 710. The driving end of the fourth driving member 711 is connected to the fourth supporting member 712. The fourth supporting member 712 is liftably arranged in the storage space. The fourth supporting member 712 is configured to carry multiple stacked release papers. The fourth driving member 711 drives the fourth supporting member 712 to rise to a preset height to lift the multiple release papers in the storage rack 710 upward by a material distance.

[0095] Through the cooperation of the material storage rack 710, the fourth driving member 711 and the fourth bearing member 712, the storage and automatic feeding of release paper are realized, and a material storage component 71 with a simple structure and stable and reliable feeding is provided.

[0096] See also Figure 3 As shown, as an embodiment, a pressing assembly 414 is disposed on the first carrier 411 , and the pressing assembly 414 is configured to press down the edge of the release paper at the detection position to avoid affecting the appearance detection of the laminate above the release paper.

[0097] Specifically, four sets of the pressing assembly 414 are provided, and the four sets of pressing assembly 414 are arranged at the four corners of the first bearing member 411. Each set of the pressing assembly 414 includes a rotary lifting cylinder 4140 and a pressing plate 4141. The fixed end of the rotary lifting cylinder 4140 is installed on the first bearing member 411, and the driving end of the rotary lifting cylinder 4140 is connected to the pressing plate 4141.

[0098] The rotary lifting cylinder 4140 drives the lower pressing plate 4141 to rotate toward the release paper to above the edge of the release paper, and then drives the lower pressing plate 4141 to descend, thereby pressing down the edge of the release paper at the detection position.

[0099] By providing the pressing assembly 414, it is possible to avoid the edge of the release paper blocking the laminate during re-inspection, thereby ensuring the accuracy of laminate inspection.

[0100] See also Figure 1 , Figure 6 and Figure 7As shown, as an embodiment, the material box 51 includes a base 510, a carrying plate (not shown in the figure) and two baffles 511, the carrying plate 511 is obliquely installed on the base 510, the carrying plate 511 is used to carry the stacked sheets, the surface area of ​​the carrying plate 511 is smaller than the surface area of ​​the stacked sheets, the two baffles 511 are respectively installed on the two side edges of the carrying plate 511 that are inclined downward, and the baffles 511 are used to prevent the stacked sheets from detaching from the carrying plate 511;

[0101] The stacking conveying mechanism 20 includes a driving module 21, a moving seat 22 and a clamping claw assembly 23. The moving seat 22 is installed at the moving end of the driving module 21. The driving module 21 is used to drive the moving seat 22 to vertically rise and fall and horizontally slide.

[0102] The clamping jaw assembly 23 includes a double-headed cylinder, a first clamping jaw, and a second clamping jaw. The double-headed cylinder is installed on the moving base 22. The double-headed cylinder is used to drive the first clamping jaw and the second clamping jaw to move closer to or away from each other to clamp or release the stacked sheets.

[0103] A clearance notch 512 is reserved between the two baffles for the first clamping jaw to pass through and hold up the laminate, and the second clamping jaw approaches and holds up the laminate from an end of the carrier plate 511 that tilts upward.

[0104] By setting up the stack conveying mechanism 20, the stacks in the material box 51 can be automatically conveyed to the main conveying mechanism 30, providing a stack conveying mechanism 20 with a compact structure and high conveying efficiency; at the same time, by setting up the material box 51, a material box with a simple structure is provided, which is convenient for collecting materials and convenient for the stack conveying mechanism 20 to pick up stacks.

[0105] As an embodiment, the material box feeding mechanism 10 includes a full material box conveying component 11, an empty material box recovery conveying component 12, a lifting drive 13 and a loading platform 14. The full material box conveying component 11 is configured to move a full material box with laminated sheets to a feeding station, and the empty material box recovery conveying component 12 is configured to receive an empty material box and convey the received empty material box to the next process;

[0106] The driving end of the lifting drive member 13 is connected to the loading platform 14, and the loading platform 14 is configured to carry and transport full material boxes or empty material boxes. The lifting drive member 13 drives the loading platform to move alternately to the material receiving station and the recycling station;

[0107] When the loading platform 14 moves to the receiving station, the loading platform 14 is configured to receive an empty loading box at the loading station;

[0108] When the loading platform 14 moves to the recycling station, the loading platform 14 is configured to convey the empty material box on the loading platform 14 to the empty material box recycling conveying assembly 12 .

[0109] Through the cooperation of the full material box conveying component 11, the empty material box recovery conveying component 12, the lifting drive component 13 and the loading platform 14, the automatic loading of full material boxes and the recovery of empty material boxes are realized; a material box loading mechanism 10 that has both full material box loading and empty material box recovery is provided, the overall structure is compact, the space occupied is small, and the loading efficiency is high.

[0110] See also Figures 1 to 4 As shown, the specific working principle of the lamination re-inspection device proposed in this embodiment is:

[0111] S1, the third carrier 75 of the loading assembly at the assembly station releases a piece of release paper, the stacking transport mechanism 20 combines the stack to be re-inspected onto the release paper, and the third carrier 75 descends to lower the combined stack and release paper onto the main conveying mechanism 30;

[0112] S2, the main conveying mechanism 30 conveys the combined stacked sheets and release paper to the tidying station, the second driving member 610 drives the lifting member 611 to rise to a preset height, and the stacked sheets at the second conveying position are lifted off the conveying surface of the main conveying mechanism 30 and raised to the tidying position by the second bearing member 612, and the two sets of first tidying components 62 and the two sets of second tidying components 63 approach each other to tidy the stacked sheets at the tidying position, and after the tidying is completed, the second driving member 610 drives the lifting member 611 to descend to a preset height, and the tidy stacked sheets and release paper are lowered to the main conveying mechanism 30;

[0113] S3, the main conveying mechanism 30 conveys the regularized stack and release paper to the re-inspection station, the first driving member 410 drives the first bearing member 411 to rise to a preset height, and the stack 50 and the release paper at the first conveying position are lifted off the conveying surface of the main conveying mechanism 30 and raised to the inspection position by the first bearing member 411; a plurality of inspection cameras 42 take photos and inspect the four side edges and four chamfers of the stack 50 at the inspection position; after the re-inspection is completed, the first driving member 410 drives the first bearing member 411 to descend to a preset height, so that the re-inspected stack 50 and the release paper are lowered to the main conveying mechanism 30;

[0114] S4, the main conveying mechanism 30 directly conveys the re-inspected laminate and release paper to the next process.

[0115] Compared with the prior art, the stacking re-inspection device proposed in this embodiment has the following advantages:

[0116] 1) The efficiency of re-inspection of stacked sheets is greatly improved, which can meet the requirements of fast-paced re-inspection operations.

[0117] 2) The four sides and four chamfers of the stack at the inspection position are photographed and inspected by a number of inspection cameras, thereby improving the inspection efficiency of the stack and ensuring the inspection accuracy of the stack.

[0118] 3) Before re-inspecting the stacking, the stacking should be straightened to ensure the position accuracy of the stacking before re-inspection.

[0119] 4) A paper feeding mechanism is provided to automatically combine a piece of release paper under each laminate, which can protect the laminate during the conveying and re-inspection process of the laminate, and is conducive to improving the yield rate of the laminate.

[0120] 5) The material box feeding mechanism has the functions of feeding full material boxes and recycling empty material boxes.

[0121] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A lamination re-inspection device, characterized in that: The stacking re-inspection device comprises a material box feeding mechanism, a stacking conveying mechanism, a main conveying mechanism and a stacking re-inspection mechanism, wherein: The magazine loading mechanism is configured to receive a magazine containing a stack of wafers and move the magazine and the stack to a loading station, wherein the stack is a group of stacked silicon wafers; The stack conveying mechanism is configured to pick up the stacks in the material box at the loading station and convey the picked stacks to the main conveying mechanism; The main conveying mechanism is provided with a re-inspection station, the stacking re-inspection mechanism is located at the re-inspection station, and the stacking re-inspection mechanism is configured to perform appearance inspection on the stacking conveyed by the main conveying mechanism to the re-inspection station; The main conveying mechanism is also configured to convey the stacked sheets after re-inspection at the re-inspection station to the next process.

2. The lamination re-inspection device according to claim 1, characterized in that: The stacking re-inspection mechanism includes a first lifting component and a plurality of detection cameras. The re-inspection station is provided with a first conveying position and a detection position. The detection position is located above the first conveying position. The plurality of detection cameras are installed at the periphery of the detection position. The plurality of detection cameras are configured to take pictures of the four sides and four chamfers of the stacking at the detection position to obtain image information of the four sides and four chamfers of the stacking. The first lifting component is arranged below the first conveying position. The first lifting assembly includes a first driving member and a first bearing member, the driving end of the first driving member is connected to the first bearing member, and the first driving member is configured to drive the first bearing member to rise and fall; The first driving member is used to drive the first carrier to rise to a preset height, so that the stack at the first conveying position is lifted off the conveying surface of the main conveying mechanism and raised to the detection position by the first carrier; The first driving member is also used to drive the first supporting member to descend to a preset height to lower the re-inspected stack at the detection position to the first conveying position, so that the re-inspected stack is lowered to the conveying surface of the main conveying mechanism.

3. The lamination re-inspection device according to claim 1, characterized in that: The main conveying mechanism is provided with a tidying station located in front of the re-inspection station, and the tidying station is provided with a tidying mechanism, and the tidying mechanism is configured to tidy the stacked sheets before re-inspection.

4. The lamination re-inspection device according to claim 3, characterized in that: The main conveying mechanism includes two conveying belts arranged in parallel, the tidying mechanism includes a second jacking assembly, two sets of first tidying assemblies and two sets of second tidying assemblies, the tidying station is provided with a second conveying position and a tidying position, the tidying position is located above the second conveying position, and the second jacking assembly is arranged below the second conveying position; The second lifting component comprises a second driving member, a lifting member and a second bearing member, the driving end of the second driving member is connected to the lifting member, the second driving member drives the lifting member to rise and fall, the second bearing member is fixed on the lifting member, the two sets of first regular components can be arranged close to or far from each other on opposite sides of the lifting member in the first direction, the two sets of first regular components are located between the two conveyor belts, the two sets of second regular components can be arranged close to or far from each other on opposite sides of the lifting member in the second direction, the two sets of second regular components are respectively arranged on the outsides of the two conveyor belts, and the second direction is perpendicular to the first direction; The second driving member is used to drive the lifting member to rise to a preset height, and the stacked sheets at the second conveying position are lifted off the conveying surface of the main conveying mechanism and raised to the tidying position by the second bearing member, and the two sets of first tidying components and the two sets of second tidying components are brought close to each other to tidy the stacked sheets at the tidying position; The second driving member is also used to drive the lifting member to descend to a preset height to lower the aligned stack at the alignment position to the second conveying position, so that the aligned stack is lowered to the conveying surface of the main conveying mechanism.

5. The lamination re-inspection device according to claim 2, characterized in that: The stack re-inspection device also includes a paper loading mechanism, a combination station is arranged at the feeding end of the main conveying mechanism, the paper loading mechanism is arranged close to the combination station, the paper loading mechanism is configured to pick up a piece of release paper and transport the picked up release paper to the combination station, the stack transporting mechanism is configured to pick up the stack at the loading station and transport the picked up stack to the release paper at the combination station, the main conveying mechanism is configured to transport the stack and release paper at the combination station to the re-inspection station along the conveying direction, and the main conveying mechanism is also configured to transport the stack and release paper after re-inspection at the re-inspection station to the next process.

6. The lamination re-inspection device according to claim 5, characterized in that: The main conveying mechanism includes two conveying belts arranged in parallel, the combination station is provided with a combination position and a third conveying position, the combination position is located above the third conveying position, the paper feeding mechanism includes a feeding assembly and a third lifting assembly, the feeding assembly includes a storage assembly, a feeding drive assembly and a picking assembly, the storage assembly is configured to store a plurality of stacked release papers, the driving end of the feeding drive assembly is connected to the picking assembly, and the picking assembly is configured to pick up or release the release paper, The third lifting assembly includes a third driving member and a third bearing member, wherein the driving end of the third driving member is connected to the third bearing member, and the third driving member is configured to drive the third bearing member to rise and fall, so that the third bearing member moves to the combined position or the third conveying position. When the third carrier moves to the combined position, the feeding drive assembly is configured to drive the picking assembly to move above the material storage assembly and pick up the topmost release paper in the material storage assembly through the picking assembly, and the feeding drive assembly is further configured to move the picked up release paper to the combined station and release the release paper onto the third carrier, and the stack conveying mechanism is configured to pick up the stack at the feeding station and convey the picked up stack to above the release paper to combine the stack and the release paper, When the third carrier moves to the third conveying position, the laminate and the release paper descend to the conveying surfaces of the two conveyor belts.

7. The lamination re-inspection device according to claim 6, characterized in that: The material storage assembly includes a material storage rack, a fourth driving member and a fourth supporting member. The material storage rack includes a material storage space with an upper end open for storing multiple stacked release papers. The fixed end of the fourth driving member is fixed to the material storage rack, and the driving end of the fourth driving member is connected to the fourth supporting member. The fourth supporting member is liftably arranged in the material storage space. The fourth supporting member is configured to carry the multiple stacked release papers. The fourth driving member drives the fourth supporting member to rise to a preset height to lift the multiple release papers in the material storage rack upward by a material distance.

8. The lamination re-inspection device according to claim 5, characterized in that: The first carrier is provided with a pressing assembly, and the pressing assembly is configured to press down the edge of the release paper at the detection position to avoid affecting the appearance detection of the laminate above the release paper.

9. The lamination re-inspection device according to claim 1, characterized in that: The material box comprises a base, a carrying plate and two baffles, wherein the carrying plate is obliquely mounted on the base, the carrying plate is used to carry the stacked sheets, the surface area of ​​the carrying plate is smaller than the surface area of ​​the stacked sheets, the two baffles are respectively mounted on two side edges of the carrying plate that are inclined downward, and the baffles are used to prevent the stacked sheets from detaching from the carrying plate; The stack handling mechanism includes a driving module, a moving seat and a clamping claw assembly, wherein the moving seat is installed at the moving end of the driving module, and the driving module is used to drive the moving seat to vertically lift and horizontally slide; The clamping jaw assembly comprises a double-headed cylinder, a first clamping jaw and a second clamping jaw, wherein the double-headed cylinder is mounted on the moving seat and is used to drive the first clamping jaw and the second clamping jaw to move closer to or away from each other so as to clamp or release the laminate; A clearance gap is reserved between the two baffles for the first clamping jaw to pass through and hold up the laminate, and the second clamping jaw approaches and holds up the laminate from an end of the carrier plate that tilts upward.

10. The lamination re-inspection device according to claim 1, characterized in that: The material box feeding mechanism includes a full material box conveying assembly, an empty material box recovery conveying assembly, a lifting drive and a loading platform, the full material box conveying assembly is configured to move a full material box with stacked sheets to the feeding station, and the empty material box recovery conveying assembly is configured to receive an empty material box and convey the received empty material box to the next process; The driving end of the lifting drive member is connected to the loading platform, and the loading platform is configured to carry and transport the full material box or the empty material box, and the lifting drive member drives the loading platform to move alternately to the material receiving station and the recycling station; When the loading platform moves to the receiving station, the loading platform is configured to receive an empty loading box at the loading station; When the loading platform moves to the recycling station, the loading platform is configured to convey the empty material box on the loading platform to the empty material box recycling and conveying assembly.

Images