Lamination feeding device

Abstract

The utility model discloses a lamination feeding device which comprises a material collecting mechanism, a conveying mechanism and a feeding mechanism, the material collecting mechanism is at least configured to move to all silicon wafer sorting machines in sequence to receive a first kind of material boxes and move to the conveying mechanism, and the first kind of material boxes are full-load lamination material boxes; the conveying mechanism is at least configured to be in butt joint with the material collecting mechanism, obtains the first type of material boxes on the material collecting mechanism and conveys the obtained first type of material boxes towards the feeding mechanism; and the feeding mechanism is at least configured to receive the first type of material boxes conveyed by the conveying mechanism and convey the received first type of material boxes to the pickup station, so that the lamination reinspection equipment picks up the laminations in the first type of material boxes at the pickup station. According to the laminated sheet feeding device, a single laminated sheet reinspection device is matched to reinspect the laminated sheets of a plurality of silicon wafer sorting machines, so that the production cost is reduced, and the reinspection efficiency of the laminated sheets is improved.

Description

Technical Field

[0001] The present application belongs to the field of silicon wafer production equipment manufacturing, and in particular, relates to a stacking feeding device. Background Art

[0002] After the silicon wafers are inspected and sorted by the sorting machine, qualified wafers are collected and stacked in the material box one by one to form a stack. The stack in the material box will be taken out by workers, packaged and put into the packaging box. After the stack is taken out of the material box, the silicon wafer may have some quality defects, which are difficult to identify with the naked eye. Therefore, the stack in the material box is generally taken out and inspected for appearance by the stack re-inspection equipment to remove unqualified stacks.

[0003] In the prior art, the stacking re-inspection method is usually to set up a stacking re-inspection device behind each silicon wafer sorting machine, and directly send the sorted stacks to the corresponding stacking re-inspection device for inspection. Although this can realize the stacking re-inspection, each stacking re-inspection device can only correspond to one silicon wafer sorting machine, which has the problems of high production cost and low re-inspection efficiency. Utility Model Content

[0004] The purpose of the present application is to provide a stack feeding device to solve the problem of high production cost and low re-inspection efficiency in the prior art that each stack re-inspection device can only correspond to one silicon wafer sorting machine.

[0005] To achieve this goal, this application adopts the following technical solutions:

[0006] The present application proposes a stack feeding device, which includes a collecting mechanism, a conveying mechanism and a feeding mechanism, wherein:

[0007] The material collecting mechanism is at least configured to move to each silicon wafer sorting machine in sequence to receive the first type of material box, and move to the conveying mechanism, wherein the first type of material box is a material box fully loaded with stacked wafers;

[0008] The conveying mechanism is at least configured to dock with the collecting mechanism, obtain the first type of material box on the collecting mechanism, and convey the obtained first type of material box toward the feeding mechanism;

[0009] The feeding mechanism is at least configured to receive the first type of material box conveyed by the conveying mechanism, and convey the received first type of material box to the picking station, so that the stack re-inspection device can pick up the stacks in the first type of material box at the picking station.

[0010] The stack loading device of the present application cooperates with a collecting mechanism, a conveying mechanism and a feeding mechanism. After the collecting mechanism collects the material boxes loaded with stacks of each silicon wafer sorting machine, the conveying mechanism receives the material boxes in the collecting mechanism and transfers them to the picking station of the feeding mechanism. The stack re-inspection equipment picks up the stacks at the picking station for re-inspection. A single stack re-inspection equipment can be used to re-inspect the stacks of multiple silicon wafer sorting machines, thereby reducing production costs and improving the re-inspection efficiency of stacks.

[0011] Optionally, the feeding mechanism is further configured to move the second type of material box at the picking station to the recycling station, the second type of material box being an empty material box;

[0012] The conveying mechanism is also configured to receive the second type of material boxes from the recycling station and convey the received second type of material boxes back to the collecting mechanism;

[0013] The material collecting mechanism is also configured to receive the second type of material boxes conveyed by the conveying mechanism, and transport the received second type of material boxes back to each silicon wafer sorting machine.

[0014] Through the cooperation of the collecting mechanism, the conveying mechanism and the feeding mechanism, the feeding mechanism moves the empty material box to the recycling station, the conveying mechanism transports the empty material box back to the collecting mechanism, and the collecting mechanism then transports the second type of material box back to each silicon wafer sorting machine, thereby realizing the automatic recovery and closed-loop circulation of the empty material box, improving the circulation efficiency of the material box, and facilitating improving the re-inspection efficiency of the stacked wafers.

[0015] Optionally, the material collecting mechanism includes a driving component and a material box carrying module, the driving component is configured to drive the material box carrying module to move, and the material box carrying module is configured to carry and transport the first type of material boxes and the second type of material boxes;

[0016] The driving component drives the material box carrying module to move so as to dock with at least one silicon wafer sorting machine, collect the first type of material boxes from the docked silicon wafer sorting machine or deliver the second type of material boxes to the docked silicon wafer sorting machine.

[0017] Through the cooperation of the driving component and the material box carrying module, the material box carrying module carries and transports the first type of material boxes and the second type of material boxes, and the driving component drives the material box carrying module to collect the first type of material boxes from the silicon wafer sorting machine or transport the second type of material boxes to the silicon wafer sorting machine, thereby realizing the automatic docking of the material collecting mechanism with the conveying mechanism and multiple silicon wafer sorting machines.

[0018] Optionally, the material box carrying module includes a first bracket, a first conveying assembly and a second conveying assembly, and the first conveying assembly and the second conveying assembly are installed in parallel on the first bracket, wherein:

[0019] The first conveying assembly is configured to obtain and temporarily store the first type of material boxes from the silicon wafer sorting machine;

[0020] The second conveying component is configured to obtain and temporarily store the second type of material boxes from the conveying mechanism.

[0021] The first conveying component is used to obtain and temporarily store the first type of material boxes from the silicon wafer sorting machine, and the second conveying component is used to obtain and temporarily store the second type of material boxes from the conveying mechanism; thereby achieving separate temporary storage and circulation of the first type of material boxes and the second type of material boxes, further improving the circulation efficiency of the first type of material boxes and the second type of material boxes.

[0022] Optionally, the material box carrying module further includes a linkage component mounted on the first bracket, wherein:

[0023] The first conveying assembly and the second conveying assembly have the same structure. The first conveying assembly includes a conveyor belt, a driven wheel and a driving wheel. The driven wheel and the driving wheel are respectively rotatably mounted on the first bracket. The conveyor belt is sleeved on the driving wheel and the driven wheel. When the driving wheel is driven, the conveyor belt is driven to convey the material box.

[0024] The linkage assembly includes a first linkage chain group and a second linkage chain group, the first linkage chain group is used to drive the driving wheel of the first conveying assembly to rotate, and the second linkage chain group is used to drive the driving wheel of the second conveying assembly to rotate;

[0025] The first linkage chain group and the second linkage chain group are driven to move in opposite directions, so that when the first conveying component receives and temporarily stores the first type of material boxes from the silicon wafer sorting machine along the first direction, the second conveying component synchronously conveys the second type of material boxes to the silicon wafer sorting machine along the second direction; or, when the first conveying component conveys the first type of material boxes to the conveying mechanism along the second direction, the second conveying component synchronously receives the second type of material boxes from the conveying mechanism along the first direction, and the first direction and the second direction are opposite.

[0026] By coordinating the first conveying component, the second conveying component, the first linkage chain group and the second linkage chain group, it is possible to receive and temporarily store the first type of material boxes from the silicon wafer sorting machine while conveying the second type of material boxes to the silicon wafer sorting machine, and to receive the second type of material boxes from the conveying mechanism while conveying the first type of material boxes to the conveying mechanism; thereby improving the circulation efficiency of the first type of material boxes and the second type of material boxes.

[0027] Optionally, the conveying mechanism includes a second bracket, a first driving member and a transmission assembly, wherein:

[0028] The first driving member and the transmission assembly are both mounted on the second bracket of the conveying mechanism, the transmission assembly comprises a transmission gear and an intermediate gear set for meshing transmission, the first driving member is used to drive the intermediate gear set to rotate, so as to drive the transmission gear to rotate;

[0029] The linkage assembly also includes a conversion gear set installed on the first bracket, the conversion gear set includes a first rotating gear, a second rotating gear and a third rotating gear, the second rotating gear is meshed with the first linkage chain set, the third rotating gear is meshed with the second linkage chain set, and the first rotating gear is used to drive the second rotating gear and the third rotating gear to rotate synchronously in the opposite direction;

[0030] When the material collecting mechanism moves to the conveying mechanism, the transmission gear meshes with the first rotating gear of the conversion gear set. When the first driving member drives the intermediate gear set to rotate, the transmission gear drives the first rotating gear of the conversion gear set to rotate.

[0031] Through the cooperation of the first driving member, the transmission assembly, the conversion gear group, the first linkage chain group and the second linkage chain group, the first driving member drives the first conveying assembly and the second conveying assembly to work through the transmission assembly. The first driving member is arranged on the second bracket, which realizes the unpowered design of the material box carrying module, thereby reducing the dead weight of the material box carrying module and facilitating the driving assembly to move the material box carrying module. At the same time, the gear group transmission is used to drive the first conveying assembly and the second conveying assembly to work, which has the advantages of high transmission efficiency, high transmission accuracy, compact structure and high reliability.

[0032] Optionally, the material box carrying module includes a first bracket and a first docking assembly mounted on the first bracket, and the conveying mechanism includes a second bracket and a second docking assembly mounted on the second bracket, wherein:

[0033] The first docking assembly includes two rotatable positioning rollers, and the second docking assembly includes two positioning blocks, each of which is provided with a positioning groove for a positioning roller to fit and insert;

[0034] When the material collecting mechanism moves to the conveying mechanism, the two positioning rollers on the first bracket are inserted into the two positioning grooves on the second bracket.

[0035] Through the cooperation of the first docking component and the second docking component, accurate docking of the material box carrying module and the conveying mechanism is achieved to ensure the smooth flow of the first type of material boxes and the second type of material boxes.

[0036] Optionally, the second docking assembly further includes a second driving member, a movable member, a hooking member and a guiding member, wherein:

[0037] The fixed end of the second driving member is fixed on the second bracket, the driving end of the second driving member is connected to the movable member, the movable member is slidably mounted on the second bracket along the first direction, the first end of the hook member is hinged on the movable member, the second end of the hook member has a hook portion extending upward, the middle part of the hook member has a protrusion extending downward, the guide member is mounted on the second bracket along the first direction, the protrusion of the hook member is pressed against the upper surface of the guide member, and the upper surface of the guide member has a horizontal section and an inclined section inclined downward along the horizontal section;

[0038] The second driving member drives the movable member to slide along the first direction, so as to drive the protrusion of the hook member to press against the horizontal section or the inclined section of the guide member;

[0039] When the protruding portion of the hooking member is pressed against the horizontal section, the hooking portion of the hooking member is buckled on the first bracket of the material collecting mechanism;

[0040] When the protrusion of the hooking member is pressed against the inclined surface section, the hooking member is separated from the first bracket of the material collecting mechanism.

[0041] Through the cooperation of the second driving member, the movable member, the hook member, the guide member and the first bracket, the first bracket and the second bracket are automatically connected or disconnected, providing a second docking assembly with simple structure and stable and reliable operation.

[0042] Optionally, the conveying mechanism includes a second bracket and a third conveying assembly and a fourth conveying assembly mounted on the second bracket, wherein:

[0043] The third conveying assembly is configured to obtain the first type of material box from the first conveying assembly and convey it to the feeding mechanism;

[0044] The fourth conveying assembly is configured to obtain the second type of material box from the feeding mechanism and convey it to the second conveying assembly.

[0045] By setting up the third conveying component, it is possible to convey the first type of material boxes on the first conveying component to the feeding mechanism. By setting up the fourth conveying component, it is possible to convey the second type of material boxes on the feeding mechanism to the second conveying component, so that the circulation speed of the first type of material boxes and the second type of material boxes can be controlled according to the specific production rhythm.

[0046] Optionally, the feeding mechanism includes a feeding drive and a carrier, the driving end of the feeding drive is connected to the carrier, and the carrier is configured to carry and transport the first type of material box or the second type of material box;

[0047] The feeding drive is used to drive the carrier to move to the picking station so as to receive the first type of material box delivered by the conveying mechanism through the carrier;

[0048] After the stacking re-inspection device picks up the stacking in the first-category box at the picking station, the first-category box becomes the second-category box;

[0049] The feeding drive is also used to drive the carrier carrying the second type of material box to move to the recovery station, so as to transport the second type of material box to the conveying mechanism through the carrier.

[0050] Through the cooperation of the feeding drive and the supporting member, after the stacking re-inspection equipment picks up the stacking in the first category of material boxes, the material box that will immediately become the second category of material boxes is moved to the recycling station and transported to the conveying mechanism, further improving the circulation efficiency of the material boxes.

[0051] Optionally, the conveying mechanism includes a second support, two layers of third conveying components and a first transfer component, wherein:

[0052] Two layers of third conveying assemblies are installed on the second bracket in parallel up and down, and the two layers of third conveying assemblies are respectively used to obtain and temporarily store the first type of material boxes from the collecting mechanism;

[0053] The first transfer assembly includes a first lifting drive member and a first transfer conveyor line, the first lifting drive member is installed on the outside of the second bracket, and the first lifting drive member is used to drive the first transfer conveyor line to descend to the first material receiving position, or to rise to the second material receiving position, the first material receiving position is flush with the conveying surface of the third conveying assembly of the lower layer, and the second material receiving position is flush with the conveying surface of the third conveying assembly of the upper layer;

[0054] When the first transfer conveyor line is located at the first material receiving position, the first transfer conveyor line is used to receive the first type of material box delivered by the third conveying component on the lower layer;

[0055] When the first transfer conveyor line is located at the second material receiving position, the first transfer conveyor line is used to receive the first type of material box sent by the third conveying component of the upper layer, and to convey the first type of material box received from the third conveying component of the upper or lower layer to the feeding mechanism.

[0056] Through the cooperation of the two-layer third conveying components and the first transfer component, the first type of material boxes on the two-layer third conveying components are automatically transferred to the feeding mechanism, thereby improving the efficiency of the conveying mechanism in conveying the first type of material boxes. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] Figure 1 is a schematic diagram of the three-dimensional structure of the stack feeding device provided in an embodiment of the present application;

[0058] Figure 2 It is a schematic diagram of the coordination of the conveying mechanism and the feeding mechanism provided in the embodiment of the present application;

[0059] Figure 3 It is a schematic diagram of the three-dimensional structure of the material box carrying module provided in an embodiment of the present application;

[0060] Figure 4 is a schematic diagram of the three-dimensional structure of the second bracket provided in an embodiment of the present application;

[0061] Figure 5 yes Figure 4 A partial enlarged view of the middle A;

[0062] Figure 6 It is a schematic diagram of the assembly of the hook member provided in the embodiment of the present application.

[0063] Figures 1 to 6 The following reference numerals are included:

[0064] The material collecting mechanism 10, the driving assembly 11, the material box carrying module 12, the first bracket 120, the first conveying assembly 121, the conveying belt 1210, the driving wheel 1211, the second conveying assembly 122, the first linkage chain group 123, the second linkage chain group 124, the conversion gear group 125, and the positioning roller 126;

[0065] Conveying mechanism 20, third conveying assembly 200, fourth conveying assembly 201, second bracket 21, first driving member 22, transmission gear 23, intermediate gear set 24, positioning block 25, positioning groove 250, second driving member 26, movable member 27, hooking member 28, hooking portion 280, protruding portion 281, guide member 29, horizontal section 290, inclined section 291;

[0066] Feeding mechanism 30, feeding driving member 31, bearing member 32;

[0067] A first transfer component 40 , a first lifting drive component 400 , and a first transfer conveyor line 401 . DETAILED DESCRIPTION

[0068] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0069] After the silicon wafers are inspected and sorted by the sorting machine, qualified wafers are collected and stacked one by one in the material box to form a stack. Before the stack is taken out of the material box for packaging, it needs to be inspected by the stacking re-inspection equipment to remove the unqualified stacks.

[0070] In the prior art, the stacking re-inspection method is usually to set up a stacking re-inspection device behind each silicon wafer sorting machine, and directly send the sorted stacks to the corresponding stacking re-inspection device for inspection. Although this can realize the stacking re-inspection, each stacking re-inspection device can only correspond to one silicon wafer sorting machine, which has the problems of high production cost and low re-inspection efficiency.

[0071] Therefore, this application proposes a stacking feeding device, please refer to Figure 1As shown, the stack loading device proposed in the embodiment of the present application includes a collecting mechanism 10, a conveying mechanism 20 and a feeding mechanism 30, wherein: the collecting mechanism 10 is at least configured to move to each silicon wafer sorting machine in turn to receive a first type of material box, and move to the conveying mechanism 20, the first type of material box is a material box fully loaded with stacks; the conveying mechanism 20 is at least configured to dock with the collecting mechanism 10, obtain the first type of material box on the collecting mechanism 10, and convey the obtained first type of material box toward the feeding mechanism 30; the feeding mechanism 30 is at least configured to receive the first type of material box conveyed by the conveying mechanism 20, and convey the received first type of material box to the picking station, so that the stack re-inspection equipment can pick up the stacks in the first type of material box at the picking station.

[0072] The stack loading device of the present embodiment cooperates with the collecting mechanism 10, the conveying mechanism 20 and the feeding mechanism 30. After the collecting mechanism 10 collects the material boxes full of stacks of each silicon wafer sorting machine, the conveying mechanism 20 receives the material boxes in the collecting mechanism 10 and transfers them to the picking station of the feeding mechanism. The stack re-inspection equipment picks up the stacks at the picking station for re-inspection. A single stack re-inspection equipment can be used to re-inspect the stacks of multiple silicon wafer sorting machines, thereby reducing production costs and improving the re-inspection efficiency of stacks.

[0073] As an embodiment, the feeding mechanism 30 is further configured to move the second type of material box at the picking station to the recycling station, where the second type of material box is an empty material box;

[0074] The conveying mechanism 20 is further configured to receive the second type of material boxes from the recycling station and convey the received second type of material boxes back to the collecting mechanism 10;

[0075] The material collecting mechanism 10 is further configured to receive the second type of material boxes conveyed by the conveying mechanism 20, and transport the received second type of material boxes back to each silicon wafer sorting machine.

[0076] Through the cooperation of the collecting mechanism 10, the conveying mechanism 20 and the feeding mechanism 30, the feeding mechanism 30 moves the empty material box to the recycling station, and the conveying mechanism 20 transports the empty material box back to the collecting mechanism 10, and the collecting mechanism 10 then transports the second type of material box back to each silicon wafer sorting machine, thereby realizing the automatic recovery and closed-loop circulation of the empty material box, improving the circulation efficiency of the material box, and facilitating improving the re-inspection efficiency of the stacked wafers.

[0077] As an embodiment, the material collecting mechanism 10 includes a driving component 11 and a material box carrying module 12, the driving component 11 is configured to drive the material box carrying module 12 to move, and the material box carrying module 12 is configured to carry and transport the first type of material box and the second type of material box;

[0078] The driving assembly 11 drives the material box carrying module 12 to move so as to dock with at least one silicon wafer sorting machine, and collect the first type of material boxes from the docked silicon wafer sorting machine or deliver the second type of material boxes to the docked silicon wafer sorting machine.

[0079] Specifically, the driving component 11 adopts an AGV trolley or a rail-mounted trolley.

[0080] Through the cooperation of the driving component 11 and the material box carrying module 12, the material box carrying module 12 carries and transports the first type of material boxes and the second type of material boxes, and the driving component 11 drives the material box carrying module to collect the first type of material boxes from the silicon wafer sorting machine or transport the second type of material boxes to the silicon wafer sorting machine, thereby realizing the automatic docking of the material collecting mechanism 10 with the conveying mechanism 20 and multiple silicon wafer sorting machines.

[0081] As an embodiment, the material box carrying module 12 includes a first bracket 120, a first conveying component 121 and a second conveying component 122, and the first conveying component 121 and the second conveying component 122 are installed in parallel on the first bracket 120, wherein:

[0082] The first conveying assembly 121 is configured to obtain and temporarily store the first type of material boxes from the silicon wafer sorting machine;

[0083] The second conveying assembly 122 is configured to obtain and temporarily store the second type of material boxes from the conveying mechanism 20 .

[0084] The first conveying component 121 is used to obtain and temporarily store the first type of material boxes from the silicon wafer sorting machine, and the second conveying component 122 is used to obtain and temporarily store the second type of material boxes from the conveying mechanism 20; thereby achieving separate temporary storage and circulation of the first type of material boxes and the second type of material boxes, further improving the circulation efficiency of the first type of material boxes and the second type of material boxes.

[0085] See also Figure 1 and Figure 3 As shown, as an embodiment, the material box carrying module 12 also includes a linkage component installed on the first bracket 120, wherein:

[0086] The first conveying assembly 121 and the second conveying assembly 122 have the same structure. The first conveying assembly 121 includes a conveying belt 1210, a driven wheel (not shown) and a driving wheel 1211. The driven wheel and the driving wheel 1211 are respectively rotatably mounted on the first bracket 120. The conveying belt 1210 is sleeved on the driving wheel 1211 and the driven wheel. When the driving wheel 1211 is driven, it drives the conveying belt 1210 to transport the material box.

[0087] The linkage assembly includes a first linkage chain group 123 and a second linkage chain group 124. The first linkage chain group 123 is used to drive the driving wheel 1211 of the first conveying assembly 121 to rotate, and the second linkage chain group 124 is used to drive the driving wheel of the second conveying assembly 122 to rotate;

[0088] The first linkage chain group 123 and the second linkage chain group 124 are driven to move in reverse order so that when the first conveying component 121 receives and temporarily stores the first type of material boxes from the silicon wafer sorting machine along the first direction, the second conveying component 122 synchronously conveys the second type of material boxes to the silicon wafer sorting machine along the second direction; or, when the first conveying component 121 conveys the first type of material boxes to the conveying mechanism 20 along the second direction, the second conveying component 122 synchronously receives the second type of material boxes from the conveying mechanism 20 along the first direction, and the first direction and the second direction are opposite.

[0089] By coordinating the first conveying component 121, the second conveying component 122, the first linkage chain group 123 and the second linkage chain group 124, it is possible to receive and temporarily store the first type of material boxes from the silicon wafer sorting machine while conveying the second type of material boxes to the silicon wafer sorting machine, and to convey the first type of material boxes to the conveying mechanism 20 while receiving the second type of material boxes from the conveying mechanism 20, thereby improving the circulation efficiency of the first type of material boxes and the second type of material boxes.

[0090] See also Figures 1 to 5 As shown, as an embodiment, the conveying mechanism 20 includes a second bracket 21, a first driving member 22 and a transmission assembly, wherein:

[0091] The first driving member 22 and the transmission assembly are both mounted on the second bracket 21 of the conveying mechanism 20. The transmission assembly includes a transmission gear 23 and an intermediate gear set 24 that are meshed and driven. The first driving member 22 is used to drive the intermediate gear set 24 to rotate, so as to drive the transmission gear 23 to rotate.

[0092] The linkage assembly further includes a conversion gear set 125 mounted on the first bracket 120, the conversion gear set 125 includes a first rotating gear, a second rotating gear and a third rotating gear, the second rotating gear is meshed with the first linkage chain set 123, the third rotating gear is meshed with the second linkage chain set 124, and the first rotating gear is used to drive the second rotating gear and the third rotating gear to rotate synchronously in the opposite direction;

[0093] When the material collecting mechanism 10 moves to the conveying mechanism 20 , the transmission gear 23 meshes with the first rotating gear of the conversion gear set 125 . When the first driving member 22 drives the intermediate gear set 24 to rotate, the transmission gear 23 drives the first rotating gear of the conversion gear set 125 to rotate.

[0094] Through the cooperation of the first driving member 22, the transmission assembly, the conversion gear group 125, the first linkage chain group 123 and the second linkage chain group 124, the first driving member 22 drives the first conveying assembly 121 and the second conveying assembly 122 to work through the transmission assembly. The first driving member 22 is arranged on the second bracket 21, which realizes the unpowered design of the material box carrying module 12, thereby reducing the dead weight of the material box carrying module 12 and facilitating the driving assembly to move the material box carrying module 12; at the same time, the gear group transmission is used to drive the first conveying assembly 121 and the second conveying assembly 122 to work, which has the advantages of high transmission efficiency, high transmission accuracy, compact structure and high reliability.

[0095] As an embodiment, the material box carrying module 12 includes a first bracket 120 and a first docking assembly mounted on the first bracket 120, and the conveying mechanism 20 includes a second bracket 21 and a second docking assembly mounted on the second bracket 21, wherein:

[0096] The first docking assembly includes two rotatable positioning rollers 126, and the second docking assembly includes two positioning blocks 25, each of which is provided with a positioning groove 250 for a positioning roller 126 to fit and insert;

[0097] When the material collecting mechanism 10 moves to the conveying mechanism 20 , the two positioning rollers 126 on the first bracket 120 are inserted into the two positioning grooves 250 on the second bracket 21 .

[0098] Through the cooperation of the first docking assembly and the second docking assembly, the precise docking of the material box carrying module 12 and the conveying mechanism 20 is achieved to ensure the smooth flow of the first type of material boxes and the second type of material boxes.

[0099] See also Figure 5 and Figure 6 As shown, as an embodiment, the second docking assembly further includes a second driving member 26, a movable member 27, a hook member 28 and a guide member 29, wherein:

[0100] The fixed end of the second driving member 26 is fixed on the second bracket 21, the driving end of the second driving member 26 is connected to the movable member 27, the movable member 27 is slidably mounted on the second bracket 21 along the first direction, the first end of the hook member 28 is hinged on the movable member 27, the second end of the hook member 28 has a hook portion 280 extending upward, the middle part of the hook member 28 has a protrusion 281 extending downward, the guide member 29 is mounted on the second bracket 21 along the first direction, the protrusion 281 of the hook member 28 is pressed against the upper surface of the guide member 29, and the upper surface of the guide member 29 has a horizontal section 290 and an inclined section 291 inclined downward along the horizontal section 290;

[0101] The second driving member 26 drives the movable member 27 to slide along the first direction, so as to drive the protrusion 281 of the hook member 28 to press against the horizontal section 290 or the inclined section 291 of the guide member 29;

[0102] When the protruding portion 281 of the hook member 28 is pressed against the horizontal section 290, the hook portion 280 of the hook member 28 is buckled on the first bracket 120 of the material collecting mechanism 10;

[0103] When the protrusion 281 of the hook member 28 is pressed against the inclined surface section 291 , the hook member 28 is separated from the first bracket 120 of the material collecting mechanism 10 .

[0104] Specifically, the movable member 27 is slidably mounted on the second bracket 21 through a guide pair consisting of a linear guide rail and a slider.

[0105] Through the cooperation of the second driving member 26, the movable member 27, the hook member 28, the guide member 29 and the first bracket 120, automatic docking or disengagement of the first bracket 120 and the second bracket 21 is achieved, providing a second docking component with a simple structure and stable and reliable operation.

[0106] See also Figure 1 and Figure 2 As shown, as an embodiment, the conveying mechanism 20 includes a second bracket 21 and a third conveying assembly 200 and a fourth conveying assembly 201 installed on the second bracket 21, wherein:

[0107] The third conveying assembly 200 is configured to obtain the first type of material box from the first conveying assembly 121 and convey it to the feeding mechanism 30;

[0108] The fourth conveying assembly 201 is configured to obtain the second type of material box from the feeding mechanism 30 and convey it to the second conveying assembly 122 .

[0109] By setting up the third conveying component 200, it is possible to convey the first type of material boxes on the first conveying component 121 to the feeding mechanism 30. By setting up the fourth conveying component 201, it is possible to convey the second type of material boxes on the feeding mechanism 30 to the second conveying component 122, so that the circulation speed of the first type of material boxes and the second type of material boxes can be controlled according to the specific production rhythm.

[0110] As an embodiment, the feeding mechanism 30 includes a feeding driving member 31 and a carrier 32, wherein the driving end of the feeding driving member 31 is connected to the carrier 32, and the carrier 32 is configured to carry and transport the first type of material box or the second type of material box;

[0111] The feeding drive 31 is used to drive the carrier 32 to move to the picking station, so as to receive the first type of material box conveyed by the conveying mechanism 20 through the carrier 32;

[0112] After the stacking re-inspection device picks up the stacking in the first-category box at the picking station, the first-category box becomes the second-category box;

[0113] The feeding drive 31 is also used to drive the carrier 32 carrying the second type of material boxes to move to the recovery station, so as to transport the second type of material boxes to the conveying mechanism 20 through the carrier 32 .

[0114] Through the cooperation of the feeding drive member 31 and the supporting member 32, after the stacking re-inspection equipment picks up the stacking sheets in the first type of material box, the material box that will immediately become the second type of material box is moved to the recycling station and transported to the conveying mechanism, further improving the circulation efficiency of the material box.

[0115] As an embodiment, the conveying mechanism 20 includes a second bracket 21, two layers of third conveying components 200 and a first transfer component 40, wherein:

[0116] Two layers of third conveying assemblies 200 are installed on the second bracket 21 in parallel up and down, and the two layers of third conveying assemblies 200 are respectively used to obtain and temporarily store the first type of material boxes from the collecting mechanism 10;

[0117] The first transfer assembly 40 includes a first lifting drive member 400 and a first transfer conveyor line 401. The first lifting drive member 400 is installed on the outside of the second bracket 21. The first lifting drive member 400 is used to drive the first transfer conveyor line 401 to descend to a first material receiving position, or to rise to a second material receiving position. The first material receiving position is flush with the conveying surface of the third conveying assembly 200 of the lower layer, and the second material receiving position is flush with the conveying surface of the third conveying assembly 200 of the upper layer.

[0118] When the first transfer conveyor line 401 is located at the first receiving position, the first transfer conveyor line 401 is used to receive the first type of material box delivered by the third conveying assembly 200 at the lower layer;

[0119] When the first transfer conveyor line 401 is located at the second material receiving position, the first transfer conveyor line 401 is used to receive the first type of material box delivered by the third conveying component 200 on the upper layer, and to convey the first type of material box received from the third conveying component 200 on the upper or lower layer to the feeding mechanism 30.

[0120] As an embodiment, the fourth conveying assembly 201 is located below the third conveying assembly 200, and the conveying mechanism 20 includes a second bracket 21, two layers of the fourth conveying assembly 201 and a second transfer assembly (not shown in the figure), wherein:

[0121] Two layers of fourth conveying components 201 are installed in parallel on the second bracket 21, and the two layers of fourth conveying components 201 are respectively used to obtain and temporarily store the second type of material boxes from the feeding mechanism 30;

[0122] The second transfer assembly includes a second lifting drive member and a second transfer conveyor line. The second lifting drive member is installed on the outside of the second bracket 21. The second lifting drive member is used to drive the second transfer conveyor line to descend to the third material receiving position, or to rise to the fourth material receiving position. The third material receiving position is flush with the conveying surface of the fourth conveying assembly 201 of the lower layer, and the fourth material receiving position is flush with the conveying surface of the fourth conveying assembly 201 of the upper layer.

[0123] When the second transfer conveyor line is located at the third receiving position, the second transfer conveyor line is used to receive the second type of material box sent by the feeding mechanism 30, and convey the received second type of material box to the fourth conveying assembly 201 on the lower layer;

[0124] When the second transfer conveyor line is located at the fourth material receiving position, the second transfer conveyor line is used to receive the second type of material boxes sent by the feeding mechanism 30, and convey the received second type of material boxes to the fourth conveying component 201 on the upper layer.

[0125] Through the cooperation of the two-layer third conveying component 200 and the first transfer component 40, the first type of material boxes on the two-layer third conveying component 200 are automatically transferred to the feeding mechanism 30, thereby improving the efficiency of the conveying mechanism in conveying the first type of material boxes; through the cooperation of the two-layer fourth conveying component 201 and the second transfer component, the second type of material boxes delivered by the feeding mechanism 30 are automatically transferred to the two-layer fourth conveying component 201, thereby improving the efficiency of the conveying mechanism in conveying the second type of material boxes.

[0126] As an embodiment, the material box carrying module 12 includes two layers of first conveying components 121 and two layers of second conveying components 122, so that after the collecting mechanism 10 is docked with the conveying mechanism 20, the two layers of first conveying components 121 are docked with the two layers of third conveying components 200, and the two layers of second conveying components 122 are docked with the two layers of fourth conveying components 201, thereby improving the circulation efficiency of the material box.

[0127] Compared with the prior art, the stacking feeding device proposed in this embodiment has the following advantages:

[0128] 1) A single stacking re-inspection device can be used to re-inspect stacks of multiple silicon wafer sorting machines, which reduces production costs and improves stacking re-inspection efficiency.

[0129] 2) The closed-loop automatic circulation of the material box is realized, the circulation efficiency of the material box is improved, and the re-inspection efficiency of the stacking is further improved.

[0130] 3) The material box carrying module adopts a non-powered design, thereby reducing the weight of the material box carrying module and facilitating the driving component to move the material box carrying module.

[0131] 4) The precise docking between the material box carrying module and the conveying mechanism is achieved, which can ensure the smooth flow of the first type of material boxes and the second type of material boxes.

[0132] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A stacking feeding device, characterized in that: The stack feeding device comprises a collecting mechanism, a conveying mechanism and a feeding mechanism, wherein: The collecting mechanism is at least configured to move to each silicon wafer sorting machine in sequence to receive a first type of material box, and move to the conveying mechanism, wherein the first type of material box is a material box fully loaded with stacked wafers; The conveying mechanism is at least configured to dock with the collecting mechanism, obtain the first type of material boxes on the collecting mechanism, and convey the obtained first type of material boxes toward the feeding mechanism; The feeding mechanism is at least configured to receive the first type of material box conveyed by the conveying mechanism, and convey the received first type of material box to a picking station, so that the stack re-inspection device can pick up the stacks in the first type of material box at the picking station.

2. The stack feeding device according to claim 1, characterized in that: The feeding mechanism is further configured to move the second type of material box at the picking station to the recycling station, wherein the second type of material box is an empty material box; The conveying mechanism is further configured to receive the second type of material boxes from the recycling station and convey the received second type of material boxes back to the collecting mechanism; The material collecting mechanism is also configured to receive the second type of material boxes conveyed by the conveying mechanism, and transport the received second type of material boxes back to each of the silicon wafer sorting machines.

3. The stack feeding device according to claim 2, characterized in that: The material collecting mechanism comprises a driving assembly and a material box carrying module, wherein the driving assembly is configured to drive the material box carrying module to move, and the material box carrying module is configured to carry and transport the first type of material boxes and the second type of material boxes; The driving component drives the material box carrying module to move so as to dock with at least one silicon wafer sorting machine, collect the first type of material boxes from the docked silicon wafer sorting machine or deliver the second type of material boxes to the docked silicon wafer sorting machine.

4. The stack feeding device according to claim 3, characterized in that: The material box carrying module comprises a first bracket, a first conveying assembly and a second conveying assembly, wherein the first conveying assembly and the second conveying assembly are installed in parallel on the first bracket, wherein: The first conveying assembly is configured to obtain and temporarily store the first type of material boxes from the silicon wafer sorting machine; The second conveying component is configured to obtain and temporarily store the second type of material boxes from the conveying mechanism.

5. The stack feeding device according to claim 4, characterized in that: The material box carrying module further includes a linkage assembly mounted on the first bracket, wherein: The first conveying assembly and the second conveying assembly have the same structure. The first conveying assembly includes a conveyor belt, a driven wheel and a driving wheel. The driven wheel and the driving wheel are respectively rotatably mounted on the first bracket. The conveyor belt is sleeved on the driving wheel and the driven wheel. When the driving wheel is driven, the conveyor belt is driven to convey the material box. The linkage assembly includes a first linkage chain group and a second linkage chain group, wherein the first linkage chain group is used to drive the driving wheel of the first conveying assembly to rotate, and the second linkage chain group is used to drive the driving wheel of the second conveying assembly to rotate; The first linkage chain group and the second linkage chain group are driven to move in opposite directions, so that when the first conveying component receives and temporarily stores the first type of material boxes from the silicon wafer sorting machine along the first direction, the second conveying component synchronously conveys the second type of material boxes to the silicon wafer sorting machine along the second direction; or, when the first conveying component conveys the first type of material boxes to the conveying mechanism along the second direction, the second conveying component synchronously receives the second type of material boxes from the conveying mechanism along the first direction, and the first direction and the second direction are opposite.

6. The stack feeding device according to claim 5, characterized in that: The conveying mechanism comprises a second bracket, a first driving member and a transmission assembly, wherein: The first driving member and the transmission assembly are both mounted on the second bracket of the conveying mechanism, the transmission assembly comprises a transmission gear and an intermediate gear set for meshing transmission, and the first driving member is used to drive the intermediate gear set to rotate, so as to drive the transmission gear to rotate; The linkage assembly further includes a conversion gear set mounted on the first bracket, the conversion gear set including a first rotating gear, a second rotating gear and a third rotating gear, the second rotating gear meshes with the first linkage chain set, the third rotating gear meshes with the second linkage chain set, and the first rotating gear is used to drive the second rotating gear and the third rotating gear to rotate synchronously in the opposite direction; When the material collecting mechanism moves to the conveying mechanism, the transmission gear meshes with the first rotating gear of the conversion gear set. When the first driving member drives the intermediate gear set to rotate, the transmission gear drives the first rotating gear of the conversion gear set to rotate.

7. The stack feeding device according to claim 3, characterized in that: The material box carrying module includes a first bracket and a first docking assembly mounted on the first bracket, and the conveying mechanism includes a second bracket and a second docking assembly mounted on the second bracket, wherein: The first docking assembly includes two rotatable positioning rollers, and the second docking assembly includes two positioning blocks, each of which is provided with a positioning groove for a positioning roller to be inserted into; When the material collecting mechanism moves to the conveying mechanism, the two positioning rollers on the first bracket are inserted into the two positioning grooves on the second bracket.

8. The stack feeding device according to claim 7, characterized in that: The second docking assembly further comprises a second driving member, a movable member, a hooking member and a guiding member, wherein: The fixed end of the second driving member is fixed to the second bracket, the driving end of the second driving member is connected to the movable member, the movable member is slidably mounted on the second bracket along a first direction, the first end of the hook member is hinged to the movable member, the second end of the hook member has a hook portion extending upward, the middle part of the hook member has a convex portion extending downward, the guide member is mounted on the second bracket along the first direction, the convex portion of the hook member is pressed against the upper surface of the guide member, and the upper surface of the guide member has a horizontal section and an inclined section inclined downward along the horizontal section; The second driving member drives the movable member to slide along the first direction, so as to drive the protrusion of the hook member to press against the horizontal section or the inclined section of the guide member; When the protruding portion of the hooking member is pressed against the horizontal section, the hooking portion of the hooking member is buckled on the first bracket of the material collecting mechanism; When the protrusion of the hooking member is pressed against the inclined surface section, the hooking member is separated from the first bracket of the material collecting mechanism.

9. The stack feeding device according to claim 4, characterized in that: The conveying mechanism comprises a second bracket and a third conveying assembly and a fourth conveying assembly mounted on the second bracket, wherein: The third conveying component is configured to obtain the first type of material box from the first conveying component and convey it to the feeding mechanism; The fourth conveying component is configured to obtain the second type of material box from the feeding mechanism and convey it to the second conveying component.

10. The stack feeding device according to claim 2, characterized in that: The feeding mechanism comprises a feeding driving member and a bearing member, wherein a driving end of the feeding driving member is connected to the bearing member, and the bearing member is configured to carry and transport the first type of material box or the second type of material box; The feeding drive is used to drive the carrier to move to the picking station, so as to receive the first type of material box conveyed by the conveying mechanism through the carrier; After the stack re-inspection device picks up the stacks in the first-category material box at the picking station, the first-category material box becomes the second-category material box; The feeding drive is also used to drive the carrier carrying the second type of material box to move to the recovery station, so as to transport the second type of material box to the conveying mechanism through the carrier.

11. The stack feeding device according to claim 1, characterized in that: The conveying mechanism comprises a second support, two layers of third conveying components and a first transfer component, wherein: The two layers of the third conveying components are installed on the second bracket in parallel up and down, and the two layers of the third conveying components are respectively used to obtain and temporarily store the first type of material boxes from the collecting mechanism; The first transfer assembly includes a first lifting drive member and a first transfer conveyor line, the first lifting drive member is installed on the outside of the second bracket, and the first lifting drive member is used to drive the first transfer conveyor line to descend to a first material receiving position, or to rise to a second material receiving position, the first material receiving position is flush with the conveying surface of the third conveying assembly at the lower layer, and the second material receiving position is flush with the conveying surface of the third conveying assembly at the upper layer; When the first transfer conveyor line is located at the first material receiving position, the first transfer conveyor line is used to receive the first type of material box delivered by the third conveying component at the lower layer; When the first transfer conveyor line is located at the second material receiving position, the first transfer conveyor line is used to receive the first type of material boxes sent by the third conveying component of the upper layer, and to convey the first type of material boxes received from the third conveying component of the upper or lower layer to the feeding mechanism.

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