Semiconductor magnetron sputtering anti-adhesion plate cleaning device

Abstract

The utility model discloses a semiconductor magnetron sputtering anti-adhesion plate cleaning device, relates to the technical field of anti-adhesion plate cleaning devices, and aims to solve the problems that the surface of an anti-adhesion plate is cleaned by an arranged scrubbing structure of an existing cleaning device, but a coating material is attached to the surface of the anti-adhesion plate, coating pollutants are difficult to effectively scrape off by pure scrubbing, and the service life of the anti-adhesion plate is prolonged. And the cleaning degree is relatively low. Comprising a base plate, a vertical frame plate is arranged at the upper end of the base plate, the vertical frame plate and the base plate are of an integrated structure, a cleaning pool and a front supporting plate are welded to the front end face of the vertical frame plate, and a distribution box is arranged on one side of the cleaning pool; the cleaning device further comprises clamping seat plates arranged in the cleaning pool, the number of the clamping seat plates is two, one end of each clamping seat plate is provided with a threaded linkage rod, one end of each threaded linkage rod is movably connected with a circular groove in the corresponding clamping seat plate, and the threaded linkage rods are movably connected with the cleaning pool through threaded penetrating holes.

Description

Technical Field

[0001] The utility model relates to the technical field of anti-plate cleaning devices, in particular to a semiconductor magnetron sputtering anti-plate cleaning device. Background Art

[0002] In order to prevent the equipment components and chamber walls in the vacuum chamber from being contaminated during semiconductor magnetron sputtering processing, multiple anti-fog plates need to be installed to form protection to prevent the target material from sputtering to the protected area. In order for the anti-fog plates to be recyclable, they need to be cleaned after the processing is completed.

[0003] For example, the announcement number is: CN218435919U (named as a detachable cleaning device for anti-plate surface residues), which includes a cleaning bucket, a bottom plate is fixedly connected to the inner side of the bottom of the cleaning bucket, a support seat is fixedly connected to the bottom end of the bottom plate, a motor is fixedly installed at the bottom end of the support seat, stirring rods are respectively provided at the front and rear ends of the inner side of the top of the cleaning bucket, the bottom ends of the stirring rods penetrate and are rotatably connected to the inner side of the bottom plate, the output end of the motor is fixedly connected to one end of the two stirring rods penetrating the bottom plate through a transmission assembly, and a number of rubber trees are evenly fixedly connected to the two ends of the stirring rod from top to bottom. Clamping blocks are respectively provided at the two ends of the inner side of the top of the cleaning bucket, and the front and rear ends of the clamping blocks are respectively slidably connected to the limit blocks through guide rails. The two ends of the two limit blocks are respectively fixedly connected to the inner walls of the two ends of the top of the cleaning bucket, and the two clamping blocks are respectively provided with convex through grooves on the opposite sides, and the width of the opposite end of the two convex through grooves is greater than the width of the opposite end. The transmission assembly includes two transmission wheels respectively fixedly connected to the outer sides of one end of the two stirring rods passing through the bottom plate, and a transmission belt is provided between the two transmission wheels. The upper surface of the support seat is provided with an installation groove, and the transmission belt and the two transmission wheels are both installed in the installation groove.

[0004] The above-mentioned cleaning device cleans the surface of the anti-fouling plate by means of a brushing structure, but the surface of the anti-fouling plate is adhered to coating materials, and simple brushing is difficult to effectively scrape off the coating contaminants, resulting in a problem of poor cleaning cleanliness. For this reason, we provide a semiconductor magnetron sputtering anti-fouling plate cleaning device. Utility Model Content

[0005] The purpose of the utility model is to provide a semiconductor magnetron sputtering anti-fouling plate cleaning device to solve the problem that the existing cleaning device proposed in the above background technology cleans the surface of the anti-fouling plate by means of a brushing structure, but the coating material is attached to the surface of the anti-fouling plate, and simple brushing is difficult to effectively scrape off the coating contaminants, resulting in poor cleaning cleanliness.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a semiconductor magnetron sputtering anti-fouling plate cleaning device, comprising a base plate, a vertical frame plate is arranged at the upper end of the base plate, the vertical frame plate and the base plate are an integrated structure, a cleaning pool and a front support plate are welded on the front end surface of the vertical frame plate, and a distribution box is arranged on one side of the cleaning pool;

[0007] Also includes:

[0008] A clamping seat plate, which is arranged inside the cleaning tank, two clamping seat plates are provided, and one end of each of the two clamping seat plates is provided with a threaded linkage rod, one end of the threaded linkage rod is movably connected to a circular groove in the clamping seat plate, the threaded linkage rod is movably connected to the cleaning tank through a threaded through hole, and mounting connecting rods are welded on both side outer walls of the clamping seat plate;

[0009] A water receiving box is arranged below the cleaning pool, and a drainage pipe is arranged between the water receiving box and the cleaning pool, the drainage pipe is connected to the water receiving box and the cleaning pool respectively, and a filter bucket is installed at the water inlet end of the drainage pipe;

[0010] The upper water pump is arranged on one side of the water receiving box. The water outlet end of the water receiving box is sealedly connected to the water inlet end of the upper water pump, and a water injection pipe is sealedly provided on the water outlet end of the upper water pump. The water injection pipe is connected to the vertical frame plate, and the water outlet end of the water injection pipe is connected to the cleaning nozzle.

[0011] Preferably, a movable rod groove is provided at the movable connection position between the erection connecting rod and the cleaning tank, the movable rod groove and the cleaning tank are an integrated structure, a guide inner groove is provided on one side of the movable rod groove, and the guide inner groove is connected to the movable rod groove.

[0012] Preferably, an inner sliding block is arranged inside the inner guiding groove, a plastic roller is arranged at the bottom of the inner sliding block, the plastic roller is movably connected to the inner sliding block via a bearing and a connecting shaft, and the inner sliding block is movably connected to the inner guiding groove via the plastic roller.

[0013] Preferably, a placing table is arranged on the front end surface of the cleaning pool, the placing table and the cleaning pool are an integrated structure, and a cleaning liquid tank and a push scraper are arranged on the upper end of the placing table.

[0014] Preferably, a sleeve seat is provided at the water inlet end of the cleaning nozzle, and the sleeve seat is sleeve-connected to the water injection pipe.

[0015] Preferably, a turning handle is provided on the outer wall of one end of the two threaded linkage rods, and the turning handle and the threaded linkage rod are an integral structure.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] 1. The utility model drives two clamping base plates to move inside the cleaning tank by rotating two threaded linkage rods, so that the two ends of the anti-fouling plate are respectively abutted and clamped by the two clamping base plates, and then the anti-fouling plate cleaning agent in the cleaning liquid tank is dripped and applied to the attached contaminated surface of the anti-fouling plate, so that the cleaning agent and the coating material attached to the surface of the anti-fouling plate can be dissolved and reacted, and at the same time, the cleaning nozzle sprays water to clean away the dissolved contaminants, and the manual grabbing operation pushes the scraper to further scrape off the attached contaminants, thereby improving the cleanliness of the anti-fouling plate cleaning, and overcoming the problem that the existing cleaning device cleans the surface of the anti-fouling plate by means of a brushing structure, but the coating material is attached to the surface of the anti-fouling plate, and it is difficult to effectively scrape off the coating contaminants by simple brushing, resulting in a poor cleaning cleanliness.

[0018] 2. The cleaning water flows out of the filter bucket and enters the water receiving box. Finally, it is pumped out by the water supply pump and injected back into the cleaning nozzle along the water injection pipe for further cleaning, which reduces the water energy consumption required for cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall structure of the semiconductor magnetron sputtering anti-fouling plate cleaning device of the utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of the cleaning pool of the utility model;

[0021] Figure 3 This is a schematic diagram of the connection structure of the cleaning nozzle of the utility model;

[0022] Figure 4 It is a schematic diagram of the connection structure between the erection connecting rod and the guide inner groove of the utility model;

[0023] In the figure: 1. Base plate; 2. Cleaning tank; 3. Vertical frame plate; 4. Front support plate; 5. Casing seat; 6. Cleaning nozzle; 7. Distribution box; 8. Clamp seat plate; 9. Threaded linkage rod; 10. Display table; 11. Cleaning liquid tank; 12. Push scraper; 13. Water receiving tank; 14. Erection connecting rod; 15. Turning handle; 16. Filter bucket; 17. Drain pipe; 18. Water supply pump; 19. Water injection pipe; 20. Movable rod groove; 21. Guide inner groove; 22. Inner slider; 23. Plastic roller. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0025] See also Figure 1-4The utility model provides an embodiment: a semiconductor magnetron sputtering anti-fouling plate cleaning device, comprising a base plate 1, a vertical frame plate 3 is arranged at the upper end of the base plate 1, the vertical frame plate 3 and the base plate 1 are an integral structure, a cleaning pool 2 and a front support plate 4 are welded on the front end surface of the vertical frame plate 3, and a distribution box 7 is arranged on one side of the cleaning pool 2;

[0026] Also includes:

[0027] A clamping seat plate 8 is arranged inside the cleaning tank 2. Two clamping seat plates 8 are provided, and one end of each of the two clamping seat plates 8 is provided with a threaded linkage rod 9. One end of the threaded linkage rod 9 is movably connected to a circular groove in the clamping seat plate 8. The threaded linkage rod 9 is movably connected to the cleaning tank 2 through a threaded through hole. Both side outer walls of the clamping seat plate 8 are welded with mounting rods 14.

[0028] A water receiving box 13 is arranged below the cleaning pool 2, and a drain pipe 17 is arranged between the water receiving box 13 and the cleaning pool 2. The drain pipe 17 is connected to the water receiving box 13 and the cleaning pool 2 respectively, and a filter hopper 16 is installed at the water inlet end of the drain pipe 17;

[0029] The upper water pump 18 is arranged on one side of the water receiving box 13. The water outlet end of the water receiving box 13 is sealed and connected with the water inlet end of the upper water pump 18. The water outlet end of the upper water pump 18 is sealed and connected with a water injection pipe 19. The water injection pipe 19 is connected to the vertical frame plate 3. The water outlet end of the water injection pipe 19 is connected to the cleaning nozzle 6.

[0030] When in use, the two threaded linkage rods are rotated to drive the two clamping base plates to move inside the cleaning tank, so that the two ends of the anti-fouling plate are respectively abutted and clamped by the two clamping base plates, and then the anti-fouling plate cleaning agent in the cleaning liquid tank is dripped and applied to the attached contaminated surface of the anti-fouling plate, so that the cleaning agent and the coating raw materials attached to the surface of the anti-fouling plate can be dissolved and reacted. At the same time, the cleaning nozzle sprays water to clean away the dissolved contaminants, and the manual grabbing operation pushes the scraper to further scrape off the attached contaminants.

[0031] See also Figure 4 A movable rod groove 20 is provided at the movable connection position between the erection connecting rod 14 and the cleaning tank 2. The movable rod groove 20 and the cleaning tank 2 are an integrated structure. A guide inner groove 21 is provided on one side of the movable rod groove 20. The guide inner groove 21 is connected to the movable rod groove 20. The movable rod groove 20 provided at the movable connection position between the erection connecting rod 14 and the cleaning tank 2 serves to facilitate the guiding movement of the erection connecting rod 14.

[0032] See also Figure 4An inner slider 22 is arranged inside the guide inner groove 21, and a plastic roller 23 is arranged at the bottom of the inner slider 22. The plastic roller 23 is movably connected to the inner slider 22 through a bearing and a connecting shaft. The inner slider 22 is movably connected to the guide inner groove 21 through the plastic roller 23. The inner slider 22 arranged inside the guide inner groove 21 plays the role of internal anti-slip guide activity.

[0033] See also Figure 1 A placing table 10 is arranged on the front end surface of the cleaning pool 2. The placing table 10 and the cleaning pool 2 are an integrated structure. A cleaning liquid tank 11 and a push scraper 12 are arranged on the upper end of the placing table 10. The placing table 10 arranged on the front end surface of the cleaning pool 2 serves to facilitate temporary placement.

[0034] See also Figure 1 A sleeve seat 5 is arranged at the water inlet end of the cleaning nozzle 6, and the sleeve seat 5 is sleeve-connected with the water injection pipe 19. The sleeve seat 5 arranged at the water inlet end of the cleaning nozzle 6 plays the role of wrapping and protecting the water injection pipe 19.

[0035] See also Figure 2 A turning handle 15 is provided on the outer wall of one end of the two threaded linkage rods 9. The turning handle 15 and the threaded linkage rod 9 are an integrated structure. The turning handle 15 provided on the outer wall of one end of the two threaded linkage rods 9 serves to facilitate the rotation of the threaded linkage rods 9.

[0036] Working principle: When in use, the anti-fouling plate to be cleaned is placed inside the cleaning tank 2, and the two clamping seat plates 8 are driven to move inside the cleaning tank 2 by rotating the two threaded linkage rods 9, so that the two ends of the anti-fouling plate are respectively abutted and clamped by the two clamping seat plates 8, and then the anti-fouling plate cleaning agent in the cleaning liquid tank 11 is dripped and applied to the attached contaminated surface of the anti-fouling plate, so that the cleaning agent and the coating raw materials attached to the surface of the anti-fouling plate can be dissolved and reacted. At the same time, the cleaning nozzle 6 sprays water to clean away the dissolved contaminants, and the manual grab operation push scraper 12 further scrapes off the attached contaminants, thereby improving the cleanliness of the anti-fouling plate cleaning. The cleaning water flows out of the filter bucket 16 and enters the water receiving box 13. Finally, it is extracted by the water supply pump 18 and injected back into the cleaning nozzle 6 along the water injection pipe 19 for further cleaning, thereby reducing the water energy consumption required for cleaning, and completing the use of the semiconductor magnetron sputtering anti-fouling plate cleaning device.

[0037] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A semiconductor magnetron sputtering anti-fouling plate cleaning device, comprising a base plate (1), a vertical frame plate (3) is arranged at the upper end of the base plate (1), the vertical frame plate (3) and the base plate (1) are an integral structure, a cleaning pool (2) and a front support plate (4) are welded on the front end surface of the vertical frame plate (3), and a distribution box (7) is arranged on one side of the cleaning pool (2); Features: Also includes: A clamping seat plate (8) is arranged inside the cleaning tank (2), two clamping seat plates (8) are arranged, and one end of each of the two clamping seat plates (8) is provided with a threaded linkage rod (9), one end of the threaded linkage rod (9) is movably connected to a circular groove in the clamping seat plate (8), the threaded linkage rod (9) is movably connected to the cleaning tank (2) through a threaded through hole, and mounting connecting rods (14) are welded on both side outer walls of the clamping seat plate (8); A water receiving box (13) is arranged below the cleaning pool (2), and a drainage pipe (17) is arranged between the water receiving box (13) and the cleaning pool (2). The drainage pipe (17) is connected to the water receiving box (13) and the cleaning pool (2) respectively, and a filter bucket (16) is installed at the water inlet end of the drainage pipe (17); A water supply pump (18) is arranged on one side of the water receiving box (13); the water outlet end of the water receiving box (13) is sealedly connected to the water inlet end of the water supply pump (18); and a water injection pipe (19) is sealedly provided on the water outlet end of the water supply pump (18); the water injection pipe (19) is connected to the vertical frame plate (3); and the water outlet end of the water injection pipe (19) is connected to the cleaning nozzle (6).

2. A semiconductor magnetron sputtering anti-fouling plate cleaning device according to claim 1, characterized in that: A movable rod groove (20) is provided at the movable connection position between the erection connecting rod (14) and the cleaning tank (2); the movable rod groove (20) and the cleaning tank (2) are an integrated structure; a guide inner groove (21) is provided on one side of the movable rod groove (20); and the guide inner groove (21) is connected to the movable rod groove (20).

3. A semiconductor magnetron sputtering anti-fouling plate cleaning device according to claim 2, characterized in that: An inner slider (22) is arranged inside the guide inner groove (21), a plastic roller (23) is arranged at the bottom of the inner slider (22), the plastic roller (23) is movably connected to the inner slider (22) through a bearing and a connecting shaft, and the inner slider (22) is movably connected to the guide inner groove (21) through the plastic roller (23).

4. The semiconductor magnetron sputtering anti-fouling plate cleaning device according to claim 1, characterized in that: A placement table (10) is arranged on the front end surface of the cleaning pool (2); the placement table (10) and the cleaning pool (2) are an integrated structure; a cleaning liquid tank (11) and a push scraper (12) are arranged on the upper end of the placement table (10).

5. The semiconductor magnetron sputtering anti-fouling plate cleaning device according to claim 1, characterized in that: A sleeve seat (5) is provided at the water inlet end of the cleaning nozzle (6), and the sleeve seat (5) is sleeve-connected to a water injection pipe (19).

6. The semiconductor magnetron sputtering anti-fouling plate cleaning device according to claim 1, characterized in that: A turning handle (15) is provided on the outer wall of one end of the two threaded linkage rods (9), and the turning handle (15) and the threaded linkage rod (9) are an integrated structure.

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