Clamp for detecting surface shape error and thickness of circular optical part

Abstract

The utility model relates to the technical field of optical measurement, and provides a fixture for detecting surface shape error and thickness of a circular optical part, which comprises a base provided with a first opening penetrating through two end faces of the base in the thickness direction; the bottom support is connected to the base, the bottom support can move in the thickness direction of the base at multiple positions in the circumferential direction to conduct horizontal inclination adjustment, a second opening and a telescopic clamping mechanism are arranged on the bottom support, the second opening is right opposite to the first opening in position, and the telescopic clamping mechanism is arranged on the portion, around the second opening, of the bottom support; during detection, the base is fixedly connected to detection equipment of the optical part, the detected optical part can be clamped and fixed in the second opening by adjusting the telescopic clamping mechanism, and the bottom support is horizontally and obliquely adjusted, so that the detected optical part is kept horizontal; therefore, the accuracy of surface shape error and thickness detection of the optical part is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical measurement, in particular to a fixture used for detecting the surface error and thickness of circular optical parts. Background Art

[0002] Surface error detection and thickness detection are important indicators of optical parts, and are also one of the indicators that have the most obvious impact on the final performance of all optical systems. With the continuous deepening of application scenarios, the surface shape indicators of optical parts are increasingly required. For example, in high-end fields such as aerospace and military industry, the surface shape of parts is even required to exceed 1 / 30 wavelength (PV value), that is, the difference between the highest and lowest points on the surface of the part is only about 21nm. In this context, accurate detection of part surface shape is particularly critical.

[0003] Taking optical parts inspection as an example, the existing method for inspecting the surface shape and thickness of optical parts is mainly to use an inner ring with an external thread to match an outer ring with an internal thread to clamp the lens in the middle, so that the part remains horizontal. However, since the optical parts need to be kept close to horizontal after being fixed on the inspection tooling, the installation accuracy requirements of the parts inspection tooling are very high. Especially during the inspection process, the parts need to be turned over. The micro deformation of the tooling and the parts will cause the optical parts to be unable to remain horizontal, causing the final inspection results to be distorted. Therefore, how to adjust the parts horizontally while ensuring that the parts are clamped is a technical problem that the current circular window optical parts inspection tooling urgently needs to solve. Utility Model Content

[0004] The utility model aims to provide a fixture for detecting the surface error and thickness of circular optical parts, so as to solve the technical problem that after the optical parts to be detected are fixed by the existing detection fixtures, the optical parts cannot be kept level due to the microscopic deformation of the fixtures and the parts, which distorts the final detection results.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A fixture for detecting the surface error and thickness of a circular optical part is provided, comprising:

[0007] A base having a first opening thereon, the first opening penetrating through two end surfaces of the base in a thickness direction;

[0008] A bottom bracket is connected to the base, and the bottom bracket can be moved along the thickness direction of the base at multiple positions in the circumferential direction to adjust the horizontal tilt. The bottom bracket is provided with a second opening and a telescopic clamping mechanism. The second opening is arranged opposite to the first opening, and the telescopic clamping mechanism is arranged on the bottom bracket around the second opening;

[0009] During testing, the base is fixedly connected to the optical component testing equipment, and can clamp the optical component to be tested in the second opening by adjusting the telescopic clamping mechanism, and adjust the horizontal tilt of the base to keep the optical component to be tested horizontal.

[0010] In some optional embodiments, the telescopic clamping mechanism includes claws, the number of which is at least three, and each of the claws is slidingly arranged on the base at circumferential intervals, and the claws include at least a movable connection state and a fastened connection state. When the claws are in the movable connection state, one end of each claw close to the center of the second opening can be extended or shortened to a position abutting against the peripheral side of the optical component.

[0011] In some optional embodiments, the telescopic clamping mechanism further includes a thickness pressing component, which is disposed on one end of the clamping claw close to the second opening and is used to press and fix the edges of both sides of the optical component in the thickness direction.

[0012] In some optional embodiments, the thickness clamping assembly includes a card slot, and when the telescopic clamping mechanism fixes the optical part to be inspected, the two side edges of the optical part in the thickness direction are embedded in the card slot, and the two side edges of the optical part in the thickness direction are clamped and fixed;

[0013] Alternatively, the thickness clamping assembly includes a jaw cover, which is provided with a first through hole, and a first threaded hole is provided at one end of the jaw near the center of the second opening. The jaw cover is connected to the jaw by a first screw passing through the first through hole and cooperating with the first threaded hole. The jaw is provided with a platform at the outer peripheral position of the first threaded hole, and the platform is spaced apart from the jaw cover. When the telescopic clamping mechanism clamps the optical part to be inspected, the jaw cover can change the spacing distance between the platform by adjusting the position of the first screw in the first threaded hole, so that the optical part is clamped and fixed between the jaw cover and the platform on both sides of the thickness direction.

[0014] In some optional embodiments, the base support is provided with sliding grooves with the same number as the claws, and the claws are embedded in the sliding grooves one by one. A second threaded hole is provided at the bottom of each sliding groove, and a positioning hole is provided on the claw. The positioning hole passes through the claw, and the hole diameter is the same as the trajectory of the sliding groove. The claw is fastened or movably connected to the base support by a second screw passing through the positioning hole and cooperating with the second threaded hole. When the claw is in a movably connected state, the claw can move along the sliding groove.

[0015] In some optional embodiments, the trajectory of the slide groove is an arc, the claw is an arc-shaped strip claw, and the curvature of the arc-shaped strip claw is the same as the arc.

[0016] In some optional embodiments, the first opening and the second opening are both circular openings.

[0017] In some optional embodiments, a guide rail is provided on the base support, and a slider is provided on the claw. The claw is slidably connected to the base support through the cooperation of the slider and the guide rail. A locking mechanism is provided between the slider and the guide rail. The locking mechanism includes a locking state and an unlocking state. When the locking mechanism is in the locking state, the claw is firmly connected to the base support; when the locking mechanism is in the unlocking state, the claw can move along the slide groove.

[0018] In some optional embodiments, the locking mechanism includes any one of the following structures: a manual screw locking mechanism, a lever locking mechanism or a spring locking mechanism.

[0019] In some optional embodiments, the base is provided with a second through hole, and the base support is provided with a third through hole. The number of the second through holes and the third through holes are the same, and the positions correspond one to one. The base support is fixedly connected to the base by means of fixing screws that pass through the second through hole, the spring and the third through hole in sequence and then cooperate with the leveling bolts. The spring is located on the fixing screws between the base and the base support and is in a compressed state.

[0020] The beneficial effect of the fixture for detecting the surface error and thickness of circular optical parts provided by the utility model is at least that: the optical part to be detected is fixed by a telescopic clamping mechanism arranged on the base, and then the optical part is leveled by a structure in which the base arranged on the base can be moved at multiple circumferential positions along the thickness direction of the base to perform horizontal tilt adjustment, thereby ensuring that the optical part can be adjusted horizontally under the premise of clamping the optical part. If the optical part needs to be flipped for measurement during the detection process, the optical part can always remain horizontal, thereby avoiding the situation in which the final detection result is distorted due to deformation of the optical part caused by flipping the optical part during the measurement process, and improving the accuracy of the surface error and thickness detection of the optical part. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A stereoscopic diagram of a fixture for detecting the surface error and thickness of a circular optical component provided by an embodiment of the utility model, when the optical component is fixed;

[0023] Figure 2A front view of a fixture for detecting the surface error and thickness of a circular optical component provided by an embodiment of the utility model, when the optical component is fixed;

[0024] Figure 3 A rear view of a fixture for detecting the surface error and thickness of a circular optical component provided by an embodiment of the utility model, when the optical component is fixed;

[0025] Figure 4 A partial structural diagram of a single claw on a base in a telescopic clamping mechanism provided by an embodiment of the utility model;

[0026] Figure 5 This is a diagram of the matching structure of the fixing screw and the spring on the base provided in an embodiment of the utility model.

[0027] Among them, the reference numerals in the figure are:

[0028] 1. Base; 11. First opening; 2. Bottom support; 21. Second opening; 22. Slide groove; 3. Claw; 31. Positioning hole; 32. Claw cover; 33. Platform; 4. First screw; 5. Second screw; 6. Fixing screw; 7. Spring; 8. Leveling bolt; 9. Optical parts. DETAILED DESCRIPTION

[0029] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0030] It should be noted that when a component is referred to as being "fixed on" or "disposed on" another component, it may be directly or indirectly located on the other component. When a component is referred to as being "connected to" another component, it may be directly or indirectly connected to the other component. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positions shown in the accompanying drawings and are only for the convenience of description and cannot be understood as limitations on the present technical solution. The terms "first" and "second" are only used for the convenience of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. "Multiple" means two or more, unless otherwise clearly and specifically defined.

[0031] Terminology explanation:

[0032] Surface error refers to the difference between the actual surface morphology of an optical part and the ideal surface morphology. The optical parts here are mainly flat window optical parts or circular window optical parts.

[0033] Thickness refers to the distance between the upper and lower opposite surfaces of the optical part to be inspected.

[0034] In actual application, the inventor found that the existing detection method mainly uses the method of threaded fastening to fix the circular window optical parts on the detection fixture for detection. However, due to the processing error of the detection fixture and the error generated during the assembly process, the optical parts often have angles in the horizontal direction during detection, affecting the accuracy of the detection results. In addition, the size of the traditional fixture cannot be changed. When detecting optical parts of different sizes, the corresponding fixture needs to be redesigned, which increases the cost. Therefore, the inventor improved the detection fixture for fixing the circular window optical parts to overcome the above problems.

[0035] Please refer to 1-3. In one embodiment of the application, a fixture for detecting the surface error and thickness of a circular optical part is provided, which comprises at least: a base 1 and a base support 2. The base 1 is provided with a first opening 11, and the first opening 11 passes through the two end faces of the base 1 in the thickness direction; the base support 2 is connected to the base 1, and the base support 2 can be moved along the thickness direction of the base 1 at multiple positions in the circumferential direction to perform horizontal tilt adjustment. The base support 2 is provided with a second opening 21 and a telescopic clamping mechanism, and the second opening 21 is arranged opposite to the position of the first opening 11, and the telescopic clamping mechanism is arranged on the base support 2 around the second opening 21; during detection, the base 1 is fixedly connected to the detection equipment of the optical part 9, and the optical part 9 to be detected can be clamped and fixed in the second opening 21 by adjusting the telescopic clamping mechanism, and the base support 2 can be horizontally tilted to keep the optical part 9 to be detected horizontal.

[0036] The working principle of the clamp provided in the embodiment of the present application is that the telescopic clamping mechanism located on the base 2 can be extended or shortened to adapt to the clamping of optical parts 9 of various sizes, so as to fix the optical part 9 to be inspected on the base 2, and then the base 2 is adjusted to be horizontally tilted, thereby achieving safe and effective fixation of the optical part 9 to be inspected while also being able to perform a small-scale leveling operation on the optical part 9, thereby achieving the effect of accurately detecting the surface error and thickness of the optical part 9.

[0037] Therefore, the fixture provided in the embodiment of the present application fixes the optical part 9 to be inspected by means of a telescopic clamping mechanism arranged on the base 2, and then uses the structure that the base 2 arranged on the base 1 can be moved at multiple circumferential positions along the thickness direction of the base 1 to perform horizontal tilt adjustment to perform leveling operations on the optical part 9, thereby ensuring that the optical part 9 can be adjusted horizontally under the premise of clamping the optical part 9. When detecting the surface error of the second surface of the optical part, the optical part 9 needs to be flipped over for measurement. The fixture can be flipped together with the part, and the optical part 9 can also always remain horizontal, thereby avoiding the deformation of the optical part 9 due to flipping the optical part 9 during the measurement process, thereby distorting the final detection result, thereby improving the accuracy of the surface error and thickness detection of the optical part 9.

[0038] The base 1 cooperates with the measuring device of the optical component 9 so that the entire fixture is fixed on the measuring device, and is used to measure the surface error or thickness of the optical component 9, so as to solve the problem of leveling the optical component 9 during the process of measuring the surface error and thickness of the circular plane window by the device. In practical applications, the type of measuring device is not unique, for example, the measuring device can be an optical component measuring device of the model Luphscan of Taylor Hobson.

[0039] The bottom bracket 2 is connected to the base 1 and combined with Figure 1 and Figure 2 For example, the base 1 and the bottom bracket 2 can be discs respectively, and the bottom bracket 2 can be superimposed on the base 1 and connected to the base 1; or, the bottom bracket 2 can also be embedded in the base 1. For example, a sinking groove is arranged around the first opening 11, the bottom bracket 2 is embedded in the sinking groove, and the upper part of the bottom bracket 2 is exposed on the surface of the base 1.

[0040] Specifically, the second opening 21 on the base 2 and the first opening 11 on the base 1 may be in the shape of a circular opening, a square opening, an elliptical opening, etc. In this embodiment, the first opening 11 and the second opening 21 are preferably circular openings, and the diameter of the first opening 11 may be smaller than the diameter of the second opening 21, or may be greater than or equal to the diameter of the second opening 21, which is not limited in this embodiment of the present application.

[0041] The telescopic clamping mechanism on the base 2 is used to fix the optical component 9 to be tested. After the optical component 9 is fixed, the horizontal tilt position of the base 2 is adjusted to keep the optical component 9 horizontal on the fixture so that the measuring equipment can measure its surface error and thickness.

[0042] The specific implementation of the telescopic clamping mechanism is not unique, and a preferred implementation scheme is provided below.

[0043] See also Figure 1 and Figure 4In an optional embodiment, the telescopic clamping mechanism includes claws 3, the number of claws 3 is at least three, each claw 3 is circumferentially and spacedly slidably arranged on the base 2, and the claws 3 at least include a movable connection state and a fixed connection state. When the claws 3 are in the movable connection state, one end of each claw 3 close to the center of the second opening 21 can be extended or shortened to a position abutting against the peripheral side of the optical component 9. When the claws 3 are in the fixed connection state, each claw 3 cannot be extended or shortened at this time, so that the claws 3 and the optical component 9 remain abutted and fixed, and the optical component 9 to be detected is fixed on the telescopic clamping mechanism.

[0044] like Figure 1 As shown, three claws 3 are arranged on the base 2 at intervals around the second opening. When fixing the optical component 9, the optical component 9 is placed in the second opening 21, and then the claws 3 are extended or shortened so that the end of the claw 3 close to the center of the second opening 21 abuts against the peripheral side surface of the optical component 9 to be detected. Specifically, the end of the claw 3 close to the center of the second opening 21 can be extended or shortened. The extension means that the end of the claw 3 close to the center of the second opening 21 can move toward the peripheral side surface of the optical component 9 to be detected until it abuts against the peripheral side surface of the optical component 9 to be detected; and the shortening means that the end of the claw 3 close to the center of the second opening 21 can move in the direction away from the optical component 9, so that the claw 3 is separated from the peripheral side surface of the optical component 9, so as to put in or take out the optical component 9 to be detected. In this embodiment, at least three claws 3 are arranged on the base 2 to fix the optical part 9 to be detected. Since the end of the claw 3 close to the second opening 21 can be extended or shortened to clamp and fix the optical parts 9 to be detected of different sizes, there is no need to design corresponding clamping mechanisms according to the optical parts 9 of different sizes, thereby achieving safe and effective fixation of the optical parts 9 simply and at low cost.

[0045] In the embodiment of the telescopic clamping mechanism, the optical component 9 is fixed in the second opening 21 mainly by abutting the peripheral side surface of the optical component 9 to be detected with one end of the claw 3 close to the second opening 21. This fixing structure fixes the optical component 9 in the radial direction of the optical component 9, but does not fix the optical component 9 in the axial direction of the optical component 9, that is, does not fix the optical component 9 in the thickness direction.

[0046] In an optional embodiment, the telescopic clamping mechanism further includes a thickness pressing component, which is disposed on one end of the clamping claw 3 close to the second opening 21 and is used to press and fix the edges of both sides of the optical component 9 in the thickness direction. The thickness pressing component can be used to press and fix the optical component 9 of a fixed thickness, or can be used to press and fix the optical component 9 of different thicknesses, and the specific implementation of the thickness pressing component is not unique.

[0047] For example, the thickness clamping component is a card slot, and when the telescopic clamping mechanism fixes the optical component 9 to be tested, the edges of the optical component 9 on both sides in the thickness direction are embedded in the card slot, and the edges of the optical component 9 on both sides in the thickness direction are clamped and fixed. Since the width of the card slot (i.e., the minimum distance between the two side walls in the card slot) is fixed, in general, the width of the card slot is the same as the thickness of the optical component 9 to be tested, or slightly larger than the thickness of the optical component 9, so that the edge of the optical component 9 can be inserted into the card slot and fixed, this thickness clamping component structure is suitable for optical components 9 with the same thickness but different diameters.

[0048] For example, combining Figure 1 and Figure 4 The thickness clamping assembly includes a jaw cover 32, a first through hole is provided on the jaw cover 32, a first threaded hole is provided at one end of the jaw 3 near the center of the second opening 21, the jaw cover 32 is connected to the jaw 3 by a first screw 4 passing through the first through hole and cooperating with the first threaded hole, the jaw 3 is provided with a platform 3 at the peripheral position of the first threaded hole, the platform 3 and the jaw cover 32 are spaced and opposite, when the telescopic clamping mechanism clamps the optical part 9 to be detected, the jaw cover 32 can change the spacing distance between the platform 3 by adjusting the position of the first screw 4 in the first threaded hole, so that the edges of the optical part 9 to be detected on both sides in the thickness direction are clamped and fixed between the jaw cover 32 and the platform 3. In this embodiment, the platform 3 on the split jaw 3 cooperates with the jaw cover 32 to adapt to optical parts 9 of different thicknesses, and the edges on both sides of the thickness direction are clamped and fixed.

[0049] Specifically, combined Figure 1 For example, when fixing the optical component 9 to be inspected, first loosen the first screw 4 to adjust the spacing distance between the jaw cover 32 and the platform 3 so that the edge of the optical component 9 can be inserted into the spacing, and then abut the end of the jaw 3 close to the second opening 21 against the peripheral side of the optical component 9, and lock the jaw 3, and then tighten the first screw 4 to make the jaw cover 32 press and fix the edges on both sides of the thickness of the optical component 9, so that the optical component 9 is fixed both axially and radially.

[0050] In practical applications, there is not only one specific implementation method for the claw 3 to extend or shorten on the base 2.

[0051] For example, combined with Figure 1For example, in an optional embodiment, the base 2 is provided with the same number of slide grooves 22 as the claws 3, and the claws 3 are embedded in the slide grooves 22 one by one. The bottom of each slide groove 22 is provided with a second threaded hole, and the claw 3 is provided with a positioning hole 31, which passes through the claw 3, and the hole diameter is the same as the track of the slide groove 22. The claw 3 is fastened or movably connected to the base 2 by the second screw 5 passing through the positioning hole 31 and cooperating with the second threaded hole. When the claw 3 is in a movably connected state, the claw 3 can move along the track of the slide groove 22. When fixing the optical component 9, the second screw 5 is first loosened to allow the claw 3 to extend or shorten along the track of the slide groove 22, and then the optical component 9 is placed in the second opening 21, and the claw 3 is moved so that the end of the claw 3 close to the center of the second opening 21 abuts against the peripheral side of the optical component 9, and then the second screw 5 is tightened to fix the claw 3 relative to the slide groove 22, thereby fixing the optical component 9 on the base 2.

[0052] The number of the claws 3 is at least three, including but not limited to 3, 4, 5 or 6, etc. The number of the slide slots 22 is the same as that of the claws 3, and the two correspond one to one. Figure 1 As shown in the example, the number of the claws 3 is preferably 3, and accordingly, the number of the slide grooves 22 on the base 2 is also 3, and each claw 3 is embedded in a slide groove 22 and can move along the slide groove 22. In this embodiment, the extension movement of the claw 3 refers to the movement of the claw 3 toward the center of the second opening 21 along the trajectory of the slide groove 22; the shortening movement of the claw 3 refers to the movement of the claw 3 toward a position away from the center of the second opening 21 along the trajectory of the slide groove 22. It is worth mentioning that the trajectory of the extension or shortening movement of the end of the claw 3 close to the center of the second opening 21 is the same as the trajectory of the slide groove 22, that is, the extension or shortening movement trajectory of the claw 3 includes but is not limited to at least one of an arc, a broken line and a straight line.

[0053] For example, in a practical application scenario, combined with Figure 1 For example, the track of the slide groove 22 is an arc, the claw 3 is an arc-shaped strip claw, the arc of the arc-shaped strip claw is the same as the arc of the track of the slide groove 22, and part or all of the claw 3 is embedded in the slide groove 22 and can move along the track of the slide groove 22. Figure 1For example, the base 2 is a disc structure, with a second opening 21 at the center of the disc, and the slide 22 is located between the edge of the second opening 21 and the edge of the disc. Under the same size of disc, if the slide 22 of the same length is opened on the disc, then the track of the slide 22 is designed as an arc, and a second opening 21 with a larger diameter can be opened on the disc, so that a larger optical component 9 can be accommodated, expanding the adaptation range of the optical component 9. Of course, the track of the slide 22 can also be a straight line, and correspondingly, the claw 3 is a straight bar, which can also realize the function of the telescopic clamping mechanism, but compared with the slide 22 with an arc track, when the track of the slide 22 is a straight line, the range of the optical component 9 that the claw 3 can adapt to is smaller.

[0054] In addition to using the claw 3 to move in the slide groove 22, the claw 3 can also be extended or shortened on the base 2 by using guide rails and sliders, screws and bolts, hydraulic rods, etc.

[0055] For example, in an optional embodiment, taking the guide rail and the slider as an example, a guide rail is provided on the base 2, and a slider is provided on the claw 3. The claw 3 is slidably connected to the base 2 through the cooperation of the slider and the guide rail. A locking mechanism is provided between the slider and the guide rail. The locking mechanism includes a locking state and an unlocking state. When the locking mechanism is in the locking state, the claw 3 is firmly connected to the base 2; when the locking mechanism is in the unlocking state, the claw 3 can move along the slide groove 22.

[0056] Different from the structure in which the claw 3 is directly embedded in the slide groove 22, in this embodiment, the claw 3 cooperates with the guide rail through a slider, thereby allowing the claw 3 to be designed into various shapes, and is not limited to being the same as the track of the slide groove 22 or the guide rail. In addition, the guide rail can be a guide rod or a guide groove. If the guide rail is a guide rod, the slider includes a bushing or a guide hole, which is sleeved on the guide rail and can slide along the guide rail, thereby realizing the extension or shortening movement of the claw 3; if the guide rail is a guide groove, the guide groove includes but is not limited to the above-mentioned slide groove 22 structure, and accordingly, the slider can also be designed to move in the slide groove 22, and the shape and structure are adapted to the slide groove 22. For example, the guide groove is a rectangular, circular, T-shaped or V-shaped structure, and the slider is also a rectangular slider, a circular slider, a T-shaped slider or a V-shaped slider, and the two slide and cooperate with each other so that the claw 3 can move along the track of the guide groove. Optionally, the track of the guide rail includes a straight line or an arc, and the slider slides along the track of the guide rail.

[0057] The locking mechanism can be arranged on the slider, or on the guide rail, or on the slider and the guide rail. The specific implementation of the locking mechanism is not unique, including but not limited to manual screw locking mechanism, lever locking mechanism, spring locking mechanism and other structures. For example, when the locking mechanism is a manual screw locking mechanism, a locking screw can be installed on the slider or on the side of the guide rail, and then the slider can be locked or unlocked by manually tightening or loosening the screw; when the locking mechanism is a lever locking mechanism, a lever can be installed on the slider, and the slider can be locked to the guide rail by lever force, and the lever can be manually or automatically operated to achieve locking or unlocking; when the locking mechanism is a spring locking mechanism, a spring can be installed inside the slider, and when the slider slides to the specified position, the spring automatically pops out and jams the slider, and the spring is compressed by a button or a pull rod to achieve unlocking. Of course, in practice, the locking mechanism can also be implemented in other ways, and is not limited to the above-mentioned several ways, and the embodiments of the present application are not limited to this.

[0058] By means of the telescopic clamping mechanism exemplified above, the optical component 9 to be inspected can be fixed at the position of the second opening 21 so as to perform surface error and thickness measurement.

[0059] It is worth mentioning that if the claws 3 on the base 2 are horizontal and the platform 3 arranged on the claws 3 is also horizontal, then after the optical component 9 is fixed and installed in place by the telescopic clamping mechanism, the optical component 9 should also be horizontal.

[0060] In an alternative embodiment, see Figure 1 and Figure 5 A second through hole is provided on the base 1, and a third through hole is provided on the bottom bracket 2. The number of the second through holes is the same as that of the third through holes, and the positions of the second through holes and the third through holes correspond one to one. The bottom bracket 2 is fixedly connected to the base 1 by the fixing screw 6 passing through the second through hole, the spring 7 and the third through hole in sequence and then cooperating with the leveling bolt 8. The spring 7 is located on the fixing screw 6 between the base 1 and the bottom bracket 2 and is in a compressed state.

[0061] Specifically, the number of the second through hole and the third through hole is at least three. Figure 1 and 5As shown, the number of the second through hole and the third through hole is preferably 3, and the number of the fixing screws 6 is also 3. The fixing screws 6 can be selected as countersunk screws. The three countersunk screws are inserted from the second through hole below the base 1 (i.e., one side in the thickness direction of the base 1), and then the spring 7 is inserted on the countersunk screw from the top of the base 1 (i.e., the other side in the thickness direction of the base 1). Then, the third through hole on the base 2 is aligned with the countersunk screw so that the base 2 floats above the base 1. Finally, the base 2 is fixed to the base 1 using the leveling bolt 8 in cooperation with the countersunk screw. After the telescopic clamping mechanism installs the optical part 9 to be detected in place, if the optical part 9 is not level, the level of the entire telescopic clamping mechanism can be adjusted by adjusting the pre-tightening force of the leveling bolt 8 above the base 2, and then the level of the optical part 9 clamped therein can be adjusted. Compared with the existing clamping fixtures for optical parts 9, after the optical part 9 is fixed, if the surface of the optical part 9 to be measured is found to be uneven through detection devices such as a level meter, it can only be fine-tuned by redesigning and manufacturing a new fixture. However, according to the clamp provided in the embodiment of the present application, the level of the entire clamping part can be adjusted by adjusting the preload force of each leveling bolt 8, and then the level of the optical part 9 clamped therein can be adjusted, thereby not only reducing manufacturing waste and being able to adapt to optical parts 9 of more sizes, but also because the level of the telescopic clamping mechanism can be fine-tuned, it is not necessary to select an overly precise process when manufacturing the telescopic clamping mechanism, and the error caused by the manufacture of the telescopic clamping mechanism can be compensated by the subsequent leveling, thereby greatly reducing the design and manufacturing costs.

[0062] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A fixture for detecting the surface error and thickness of circular optical parts, characterized in that: include: A base having a first opening thereon, wherein the first opening penetrates two end surfaces of the base in a thickness direction; A bottom bracket is connected to the base, and the bottom bracket can be moved in the thickness direction of the base at multiple positions in the circumferential direction to adjust the horizontal tilt, and a second opening and a telescopic clamping mechanism are provided on the bottom bracket, and the second opening is arranged opposite to the first opening, and the telescopic clamping mechanism is arranged on the bottom bracket around the second opening; During testing, the base is fixedly connected to the optical component testing equipment, and can clamp the optical component to be tested in the second opening by adjusting the telescopic clamping mechanism, and adjust the horizontal tilt of the base to keep the optical component to be tested horizontal.

2. The fixture for detecting the surface error and thickness of circular optical parts according to claim 1, characterized in that: The telescopic clamping mechanism includes claws, the number of which is at least three, and each of the claws is arranged on the base at sliding circumferential intervals, and the claws include at least a movable connection state and a fastened connection state. When the claws are in the movable connection state, one end of each claw close to the center of the second opening can be extended or shortened to a position abutting against the peripheral side of the optical component.

3. The fixture for detecting the surface error and thickness of circular optical parts according to claim 2, characterized in that: The telescopic clamping mechanism further comprises a thickness pressing component, which is arranged on one end of the clamping claw close to the second opening and is used to press and fix the edges on both sides of the optical component in the thickness direction.

4. The fixture for detecting the surface error and thickness of circular optical parts according to claim 3, characterized in that: The thickness clamping assembly includes a card slot, and when the telescopic clamping mechanism fixes the optical part to be tested, the edges on both sides of the optical part in the thickness direction are embedded in the card slot, and the edges on both sides of the optical part in the thickness direction are clamped and fixed; Alternatively, the thickness clamping assembly includes a jaw cover, a first through hole is provided on the jaw cover, a first threaded hole is provided at one end of the jaw close to the center of the second opening, the jaw cover is connected to the jaw by a first screw passing through the first through hole and cooperating with the first threaded hole, the jaw is provided with a platform at the outer peripheral position of the first threaded hole, the platform is spaced apart from the jaw cover, and when the telescopic clamping mechanism clamps the optical part to be inspected, the jaw cover can change the spacing distance between the platform by adjusting the position of the first screw in the first threaded hole, so that the optical part is clamped and fixed on both side edges in the thickness direction between the jaw cover and the platform.

5. The fixture for detecting the surface error and thickness of circular optical parts according to claim 2, characterized in that: The base support is provided with sliding grooves with the same number as the claws, and the claws are embedded in the sliding grooves one by one. A second threaded hole is provided at the bottom of each sliding groove, and a positioning hole is provided on the claw. The positioning hole passes through the claw, and the hole diameter is the same as the trajectory of the sliding groove. The claw is fastened or movably connected to the base support by a second screw passing through the positioning hole and cooperating with the second threaded hole. When the claw is in a movably connected state, the claw can move along the sliding groove.

6. The fixture for detecting the surface error and thickness of circular optical parts according to claim 5, characterized in that: The track of the slide groove is an arc, the clamping claw is an arc-shaped strip-shaped clamping claw, and the curvature of the arc-shaped strip-shaped clamping claw is the same as the arc.

7. The fixture for detecting the surface error and thickness of circular optical parts according to claim 6, characterized in that: The first opening and the second opening are both circular openings.

8. The fixture for detecting the surface error and thickness of circular optical parts according to claim 2, characterized in that: A guide rail is provided on the base support, and a slider is provided on the claw. The claw is slidably connected to the base support through the cooperation of the slider and the guide rail. A locking mechanism is provided between the slider and the guide rail. The locking mechanism includes a locking state and an unlocking state. When the locking mechanism is in the locking state, the claw is firmly connected to the base support; when the locking mechanism is in the unlocking state, the claw can move along the slide groove.

9. The fixture for detecting the surface error and thickness of circular optical parts according to claim 8, characterized in that: The locking mechanism includes any one of the following structures: a manual screw locking mechanism, a lever locking mechanism or a spring locking mechanism.

10. The fixture for detecting the surface error and thickness of circular optical parts according to any one of claims 1 to 9, characterized in that: The base is provided with a second through hole, and the bottom bracket is provided with a third through hole. The number of the second through holes and the third through holes is the same, and the positions correspond one to one. The bottom bracket is fixedly connected to the base by a fixing screw that passes through the second through hole, the spring and the third through hole in sequence and then cooperates with the leveling bolt. The spring is located on the fixing screw between the base and the bottom bracket and is in a compressed state.

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