Magnetron sputtering coating tray

Abstract

The utility model discloses a magnetron sputtering coating tray which comprises a base plate, a fixed plate and a top plate, two sides of the fixed plate are respectively connected with the top plate, the base plate is connected with the top plate on one side of the fixed plate, the base plate is connected with the fixed plate and the top plate through screws, the base plate comprises an outer circle and an inner circle A, and the outer circle and the inner circle A are connected through a connecting rod A. According to the utility model, the distances among the base plate, the fixed plate and the top plate can be adjusted by arranging different numbers of gaskets on the screw, so that the device is suitable for plating pieces with different sizes; and the outer rings with different diameters are arranged to adapt to plated parts with different thicknesses. The tray is made of stainless steel materials and has the advantages of being resistant to corrosion and high temperature, the weight of the tray is reduced due to the fact that the inner circle and the outer circle are connected through the connecting rods, and manufacturing cost is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of clamps, and in particular relates to a magnetron sputtering coating tray. Background Art

[0002] Neodymium iron boron permanent magnets are increasingly widely used, and the requirements for performance are becoming higher and higher. At present, the method of magnetron sputtering coating followed by grain boundary diffusion is used to improve product performance. The commonly used fixture in the magnetron sputtering process is a movable fixture, which clamps the plated parts by pushing the chuck. When the plated parts are too small or too large, the plated parts arranged in a certain area will become loose, resulting in unstable clamping and causing the plated parts to fall inside the equipment and cause losses. Secondly, when placing the plated parts, they need to be held by hand for stability, which is very inconvenient. Therefore, a coating tray that can adapt to different sizes and clamp stably is needed.

[0003] The patent document with the announcement number CN210001921U discloses a tray for rare earth permanent magnet magnetron sputtering coating, comprising: a tray; a baffle, the baffle is arranged on the peripheral wall of one side of the tray; a reinforcing plate, the reinforcing plate is arranged on the other side of the tray, and the reinforcing plate is provided with a plurality of through holes. However, the tray is not suitable for the axis rotation coating process. Utility Model Content

[0004] In order to solve the above technical problems, the utility model provides a magnetron sputtering coating tray.

[0005] The utility model is realized through the following technical solutions.

[0006] The utility model provides a magnetron sputtering coating tray, comprising a bottom plate, a fixed plate and a top plate, wherein the two sides of the fixed plate are respectively connected to the top plate, the bottom plate is connected to the top plate on one side of the fixed plate, the bottom plate is connected to the fixed plate and the top plate by screws, the bottom plate comprises an outer circle and an inner circle A, and the outer circle and the inner circle A are connected by a connecting rod A.

[0007] Preferably, a through hole A is provided on the inner circle A, the through hole A is semicircular, and a screw hole is provided on the connecting rod A.

[0008] Preferably, the fixed disk comprises a connecting rod A, an inner circle B and an outer ring, the inner circle B is connected to the connecting rod A, and the connecting rod A is connected to the outer ring through the connecting rod B.

[0009] Preferably, the top plate comprises an outer circle and an inner circle B, the outer circle and the inner circle B are connected by connecting rods A, and the connecting rods A are arranged on the top plate in a cross distribution.

[0010] Preferably, the connecting rods A are arranged on the chassis in a cross distribution.

[0011] Preferably, a through hole B is provided on the inner circle B.

[0012] Preferably, the connecting rods A are arranged on the fixed plate in a cross-shaped distribution.

[0013] Preferably, the diameter of the outer ring is greater than the diameter of the outer circle.

[0014] The beneficial effects of the utility model are:

[0015] The utility model can adjust the distance between the bottom plate, the fixed plate and the top plate by setting different numbers of washers on the screws, thereby adapting to plated parts of different sizes; and by setting outer rings of different diameters, it can adapt to plated parts of different thicknesses. The materials used for the tray are all stainless steel materials, which have the advantages of corrosion resistance and high temperature resistance, and the setting of the connecting rod connecting the inner and outer circles reduces the weight of the tray and reduces the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the chassis of the utility model;

[0017] Figure 2 It is a structural schematic diagram of the fixed disk of the utility model;

[0018] Figure 3 It is a structural schematic diagram of the top plate of the utility model;

[0019] Figure 4 It is a structural schematic diagram of the utility model;

[0020] In the figure: 1- bottom plate, 11- inner circle A, 12- through hole A, 2- fixed plate, 3- top plate, 4- outer circle, 5- connecting rod A, 6- screw hole, 7- inner circle B, 71- through hole B, 8- outer ring, 9- connecting rod B. DETAILED DESCRIPTION

[0021] The technical solution of the utility model is further described below, but the scope of protection required is not limited to the description.

[0022] Example:

[0023] like Figures 1 to 4 As shown, a magnetron sputtering coating tray includes a bottom plate 1, a fixed plate 2 and a top plate 3, the two sides of the fixed plate 2 are respectively connected to the top plate 3, the bottom plate 1 is connected to the top plate 3 on one side of the fixed plate 2, the bottom plate 1 is connected to the fixed plate 2 and the top plate 3 by screws, the bottom plate 1 includes an outer circle 4 and an inner circle A11, and the outer circle 4 and the inner circle A11 are connected by a connecting rod A5. The bottom plate 1, the fixed plate 2 and the top plate 3 are coaxially arranged, and the materials are all stainless steel.

[0024] The inner circle A11 is provided with a through hole A12, which is semicircular. This setting allows the sputtering coating tray to be fixed on a fixed rod of the same shape, ensuring that the sputtering coating tray can be stably driven by the transmission shaft to rotate during the coating process to avoid slipping. The connecting rod A5 is provided with a screw hole 6, and a number of the screw holes 6 are linearly distributed on the connecting rod A5. The screws are passed through the screw holes 6 on the bottom plate 1, the fixed plate 2 and the top plate 3, and the bottom plate 1, the fixed plate 2 and the top plate 3 are connected with the nuts. The distance between the bottom plate 1, the fixed plate 2 and the top plate 3 can be adjusted by setting different numbers of gaskets on the screws, so as to adapt to plated parts of different sizes.

[0025] The fixed plate 2 includes a connecting rod A5, an inner circle B7 and an outer ring 8, the inner circle B7 is connected to the connecting rod A5, and the connecting rod A5 is connected to the outer ring 8 via a connecting rod B9.

[0026] The top plate 3 includes an outer circle 4 and an inner circle B7, and the outer circle 4 and the inner circle B7 are connected by connecting rods A5, and the connecting rods A5 are arranged on the top plate 3 in a cross distribution.

[0027] The connecting rods A5 are arranged on the chassis 1 in a cross-shaped distribution.

[0028] A through hole B71 is provided on the inner circle B7.

[0029] The through hole A12 and the through hole B71 are coaxially arranged.

[0030] The connecting rods A5 are arranged on the fixing plate 2 in a cross-shaped distribution.

[0031] The connecting rod A5 is arranged in a cross distribution so that the sputtering coating tray can be evenly stressed when placing the plated parts.

[0032] The diameter of the outer ring 8 is larger than the diameter of the outer circle 4, and the diameter of the outer ring 8 can be set according to the thickness of different plated parts. The plated parts are placed on the outer circle 4 of the top plate 3 on the side close to the bottom plate 1, and the top of the plated parts is fixed by the outer circle 4 of the top plate 3 on the other side of the fixing plate 2, and the plated parts are clamped by tightening the screws. The outer ring 8 is used to fix the outside of the plated parts, and several plated parts are arranged around the circumference of the sputtering coating tray.

[0033] The utility model is suitable for the magnetron sputtering coating process in the preparation process of NdFeB permanent magnets.

Claims

1. A magnetron sputtering coating tray, characterized in that: The invention comprises a bottom plate (1), a fixed plate (2) and a top plate (3), wherein the two sides of the fixed plate (2) are respectively connected to the top plate (3), the bottom plate (1) is connected to the top plate (3) on one side of the fixed plate (2), the bottom plate (1) is connected to the fixed plate (2) and the top plate (3) by screws, and the bottom plate (1) comprises an outer circle (4) and an inner circle A (11), and the outer circle (4) and the inner circle A (11) are connected by a connecting rod A (5).

2. A magnetron sputtering coating tray as claimed in claim 1, characterized in that: The inner circle A (11) is provided with a through hole A (12), the through hole A (12) is semicircular, and the connecting rod A (5) is provided with a screw hole (6).

3. A magnetron sputtering coating tray as claimed in claim 1, characterized in that: The fixed disk (2) comprises a connecting rod A (5), an inner circle B (7) and an outer ring (8), wherein the inner circle B (7) is connected to the connecting rod A (5), and the connecting rod A (5) is connected to the outer ring (8) via a connecting rod B (9).

4. The magnetron sputtering coating tray according to claim 1, characterized in that: The top plate (3) comprises an outer circle (4) and an inner circle B (7), wherein the outer circle (4) and the inner circle B (7) are connected via connecting rods A (5), and the connecting rods A (5) are arranged on the top plate (3) in a cross-shaped distribution.

5. The magnetron sputtering coating tray according to claim 1, characterized in that: The connecting rods A (5) are arranged on the chassis (1) in a cross-shaped distribution.

6. A magnetron sputtering coating tray as claimed in claim 3 or 4, characterized in that: The inner circle B (7) is provided with a through hole B (71).

7. The magnetron sputtering coating tray according to claim 3, characterized in that: The connecting rods A (5) are arranged on the fixed plate (2) in a cross-shaped distribution.

8. The magnetron sputtering coating tray according to claim 3, characterized in that: The diameter of the outer ring (8) is greater than the diameter of the outer circle (4).

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