Waste gas treatment equipment and multi-machine mutual backup system

By introducing three-way valves, detection components and gas replenishment components into the exhaust gas treatment equipment, the problems of interruption and backflow of exhaust gas treatment in the event of equipment failure are solved, and the continuous treatment of exhaust gas and the safety of equipment are improved.

CN222811585UActive Publication Date: 2025-04-29SHANGHAI SHENGJIAN SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202421594784.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-05
Publication Date
2025-04-29
Estimated Expiration
2034-07-05

AI Technical Summary

Technical Problem

The existing exhaust gas treatment equipment needs to stop inputting exhaust gas when the equipment fails, which affects the working efficiency. When the pressure of the input pipeline of the faulty equipment is low, the exhaust gas is prone to flow backwards, causing the untreated exhaust gas to be directly discharged.

Method used

An exhaust gas treatment device is designed, including a three-way valve, a first detection assembly and a gas replenishment assembly. The three-way valve can switch the ventilation path when the equipment fails to ensure that the exhaust gas is continued to be processed; the first detection component is used to detect the pipeline pressure and replenish the gas through the gas replenishing component to prevent the exhaust gas backflow caused by too low pressure.

Benefits of technology

It realizes automatic switching of exhaust gas treatment equipment in the event of a failure, ensures continuous treatment of exhaust gas, improves working efficiency, and prevents waste gas from pouring backwards, improving the safety of equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses waste gas treatment equipment and a multi-machine mutual backup system, and relates to the technical field of waste gas treatment. The waste gas treatment equipment comprises an equipment body, a three-way valve, a first detection assembly and a gas supply assembly. A second air inlet and a standby air inlet are formed in the equipment body. The three-way valve comprises a first air inlet, a first air outlet and a second air outlet. The first gas inlet is used for introducing waste gas; the three-way valve can conduct an air path between the first air inlet and the first air outlet or an air path between the first air inlet and the second air outlet. The first air outlet and the second air inlet are connected through a first pipeline. And the second air outlet is connected with a bypass pipeline. The first detection assembly is used for detecting the pressure of the first pipeline and the bypass pipeline. The air supply assembly is used for supplying air to the first pipeline. The multi-machine mutual backup system comprises a plurality of waste gas treatment devices. The waste gas treatment equipment of the multi-machine mutual standby system can realize sustainable production of a production line, improve the working efficiency and prevent waste gas from flowing backwards.
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Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment, in particular to a waste gas treatment device and a multi-machine mutual backup system. Background Art

[0002] The raw materials produced in the semiconductor manufacturing, LCD panel manufacturing, LED, solar energy and other industries contain a variety of flammable, explosive, toxic and harmful gases, which are harmful to the environment or human body. They must be prevented from being directly discharged into the atmosphere, so waste gas treatment equipment is needed to treat the waste gas. When the waste gas treatment equipment treats the waste gas, the waste gas generated by the production is passed into the equipment through a pipeline for treatment. The waste gas is heated to high temperature to change the gas composition. The dust and other products after the reaction of some gases are filtered and washed with water, and then discharged through the drainage pipeline.

[0003] The inventors have found that the existing waste gas treatment equipment uses a pipeline directly connected to the air intake. When the equipment fails, the waste gas input needs to be stopped, which affects the work efficiency. When the equipment fails and other equipment needs to be switched on, if the pressure of the input pipeline of the faulty equipment is low, the waste gas will flow back into the faulty equipment, causing the risk of direct discharge of the waste gas without treatment. Utility Model Content

[0004] The purpose of the utility model is to provide an exhaust gas treatment device and a multi-machine backup system, which can change the running route of the exhaust gas, continuously transport the exhaust gas, and have high working efficiency; and can prevent the exhaust gas from flowing back, thereby improving the safety of the equipment.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides an exhaust gas treatment device, comprising:

[0007] The device body is provided with a second air inlet and a spare air inlet. The second air inlet and the spare air inlet are both used to introduce waste gas into the device body.

[0008] The three-way valve includes a first air inlet, a first air outlet, and a second air outlet. The first air inlet is used to allow exhaust gas to enter. The three-way valve can conduct the air path between the first air inlet and the first air outlet, or the air path between the first air inlet and the second air outlet. The three-way valve is used to allow exhaust gas to enter and selectively discharge the exhaust gas from the first air outlet or the second air outlet. The first air outlet and the second air inlet are connected by a first pipe, and a bypass pipe is connected to the second air outlet. When the equipment body operates normally, the exhaust gas enters the equipment body through the first pipe; when the equipment body fails, the bypass pipe is connected to the spare air inlet of other equipment, and the exhaust gas enters other equipment for treatment through the bypass pipe.

[0009] The first detection component is used to detect the pressure of the first pipeline and the bypass pipeline, and to detect and prevent the pressure of the first pipeline from being lower than the pressure of the bypass pipeline.

[0010] The gas supply component is used to supply gas to the first pipeline. When the pressure of the first pipeline is lower than the pressure of the bypass pipeline, the gas supply component supplies gas to the first pipeline so that the pressure of the first pipeline is greater than or equal to the pressure of the bypass pipeline to prevent gas backflow.

[0011] In the second aspect, the utility model provides a multi-machine mutual backup system, including multiple exhaust gas treatment devices as described in the aforementioned embodiments, and the bypass pipe of the exhaust gas treatment device is connected to the backup air inlet of another exhaust gas treatment device. When the device body is operating normally, the three-way valve switches to the first air outlet to discharge gas, and the exhaust gas enters the three-way valve from the first air inlet, and passes through the first air outlet, the first pipe, and the second air inlet in sequence to enter the device body for treatment; when the device body fails, the three-way valve switches to the second air outlet to discharge gas, and the exhaust gas enters the three-way valve from the first air inlet, and passes through the second air outlet and the bypass pipe in sequence to other device bodies that can operate normally for treatment. At this time, the failed device body can be repaired without affecting the normal operation of the system.

[0012] The beneficial effects of the embodiments of the utility model are:

[0013] The waste gas treatment equipment of the utility model is provided with a three-way valve. When the equipment body fails, the ventilation path is switched to the second air outlet of the three-way valve, and the waste gas is output from the bypass pipe to the equipment that can operate normally for treatment, thereby realizing sustainable production of the production line and improving work efficiency. The waste gas treatment equipment of the utility model detects the pressure of the first pipe and the bypass pipe through the first detection component, and replenishes air to the first pipe through the air replenishing component, thereby avoiding the situation where the pressure of the first pipe is too low and the waste gas backflow occurs.

[0014] The multi-machine mutual backup system of the utility model is interconnected through a plurality of the above-mentioned exhaust gas treatment devices. When one of the exhaust gas treatment devices fails, the exhaust gas channel is switched, and the exhaust gas can be passed into another exhaust gas treatment device for treatment, thereby reducing the downtime and downtime rate of the equipment and the main machine, and avoiding the waste of resources caused by debugging when starting and stopping the main machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a structural schematic diagram of the exhaust gas treatment equipment of the first embodiment of the utility model;

[0017] Figure 2 It is a structural schematic diagram of the exhaust gas treatment equipment of the second embodiment of the utility model;

[0018] Figure 3 A schematic diagram of the structure of a multi-machine mutual backup system according to a third embodiment of the present utility model;

[0019] Figure 4 It is a structural schematic diagram of a multi-machine mutual backup system according to a fourth embodiment of the present utility model.

[0020] Icons: 100-waste gas treatment equipment; 10-equipment body; 11-second air inlet; 12-spare air inlet; 20-three-way valve; 21-first air inlet; 22-first air outlet; 23-second air outlet; 30-first detection component; 31-differential pressure gauge; 32-first detection piece; 33-second detection piece; 40-air supply component; 41-purge pipe; 42-solenoid valve; 50-first pipeline; 60-bypass pipeline; 200-multi-machine mutual backup system; 210-first waste gas treatment equipment; 2101-three-way valve of the first waste gas treatment equipment; 2102-first air inlet of the first waste gas treatment equipment; 2103- The spare air inlet of the first exhaust gas treatment device; 2104-the bypass pipe of the first exhaust gas treatment device; 220-the second exhaust gas treatment device; 2201-the three-way valve of the second exhaust gas treatment device; 2202-the first air inlet of the second exhaust gas treatment device; 2203-the spare air inlet of the second exhaust gas treatment device; 2204-the bypass pipe of the second exhaust gas treatment device; 230-the third exhaust gas treatment device; 2301-the three-way valve of the third exhaust gas treatment device; 2302-the first air inlet of the third exhaust gas treatment device; 2303-the spare air inlet of the third exhaust gas treatment device; 2304-the bypass pipe of the third exhaust gas treatment device. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0022] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0024] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0025] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0026] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] First embodiment

[0028] Please refer to Figure 1 The exhaust gas treatment device 100 includes a device body 10, a three-way valve 20, a first detection component 30 and an air supply component 40.

[0029] The device body 10 is used to treat waste gas. When waste gas needs to be treated, the waste gas is passed into the device body 10 for treatment. The waste gas inside the device body 10 is heated to high temperature to change the gas composition. The dust and other products after some gases react are filtered and washed with water, and then discharged through the drainage pipeline.

[0030] In order to input the waste gas to be treated into the device body 10, a second air inlet 11 and a backup air inlet 12 are provided on the device body 10. Both the second air inlet 11 and the backup air inlet 12 input the waste gas to be treated into the device body 10 when the device body 10 can operate normally. Among them, the second air inlet 11 is used to directly pass the waste gas from the waste gas input source into the device body 10; the backup air inlet 12 is used to pass the waste gas that should have been passed into other waste gas treatment devices 100 into the device body 10 that can operate normally when other waste gas treatment devices 100 fail. At this time, the waste gas treatment device 100 in this embodiment is used as a backup machine.

[0031] Further, the three-way valve 20 of this embodiment includes a first air inlet 21, a first air outlet 22 and a second air outlet 23. The first air inlet 21 is used to introduce waste gas. It should be noted that the first air inlet 21 is used to directly connect to the waste gas source. It is understandable that the waste gas generated by production can be connected to the first air inlet 21 through a pipeline.

[0032] The three-way valve 20 is provided in this embodiment to switch the flow path of the exhaust gas. Specifically, the three-way valve 20 can conduct the gas path between the first air inlet 21 and the first air outlet 22, or the gas path between the first air inlet 21 and the second air outlet 23. The outlet of the three-way valve 20 includes the first air outlet 22 and the second air outlet 23. The first air outlet 22 and the second air inlet 11 are connected through the first pipe 50; the second air outlet 23 is connected to the bypass pipe 60.

[0033] It can be understood that when the equipment body 10 is operating normally, the exhaust gas entering from the first air inlet 21 passes through the three-way valve 20, enters the first pipe 50 from the first air outlet 22, and then enters the interior of the equipment body 10 from the first pipe 50; when the equipment body 10 fails, the flow path of the three-way valve 20 is switched, and the exhaust gas entering from the first air inlet 21 passes through the three-way valve 20, and then enters the bypass pipe 60 from the second air outlet 23, and the exhaust gas is no longer transported to the failed equipment body 10.

[0034] Optionally, the three-way valve 20 of this embodiment is electrically controlled, and the opening and closing or adjustment of the valve is realized by controlling the forward and reverse rotation of the motor, which can realize automation and remote control, and is easy to operate and quick to respond. In other embodiments, the three-way valve 20 can also be pneumatic or other methods that can realize automatic control. As long as the flow path can be adjusted, the utility model is not limited.

[0035] Furthermore, in this embodiment, the first detection assembly 30 includes a pressure detection member, which is connected to the first pipeline 50 and the bypass pipeline 60 respectively, and is used to detect the pressure of the first pipeline 50 and the bypass pipeline 60 .

[0036] Specifically, in this embodiment, the pressure detection component is a differential pressure gauge 31. Two input ends of the differential pressure gauge 31 are respectively connected to the first pipeline 50 and the bypass pipeline 60, and are used to detect the pressure difference between the first pipeline 50 and the bypass pipeline 60.

[0037] It can be understood that the differential pressure gauge 31 obtains the pressure of the first pipeline 50 and the pressure of the bypass pipeline 60 respectively, and calculates the pressure difference between the first pipeline 50 and the bypass pipeline 60. When the equipment body 10 operates normally, the first air inlet 21 and the first air outlet 22 of the three-way valve 20 are connected, at this time, the exhaust gas passes through the first pipeline 50, no gas flows through the bypass pipeline 60, and the pressure of the first pipeline 50 is greater than the pressure of the bypass pipeline 60; when the equipment body 10 fails, the first air inlet 21 and the second air outlet 23 of the three-way valve 20 are connected, at this time, the equipment body 10 stops working, there is still gas in the first pipeline 50, the exhaust gas flows through the bypass pipeline 60, and the pressure of the first pipeline 50 is equal to the pressure of the bypass pipeline 60. Therefore, whether the equipment body 10 is in a normal operating state or a faulty state, the pressure of the first pipeline 50 is always greater than or equal to the pressure of the bypass pipeline 60. When the pressure of the first pipeline 50 is less than the pressure of the bypass pipeline 60, it means that the pressure of the first pipeline 50 is low, and the exhaust gas is easy to flow back and enter the faulty equipment.

[0038] In order to prevent the pressure of the first pipeline from being low, the air replenishment component 40 of this embodiment includes a purge pipe 41. One end of the purge pipe 41 is connected to the side wall of the first pipeline 50, and the other end of the purge pipe 41 is connected to a compressor (not shown). It can be understood that the purge pipe 41 is used to pass compressed air into the first pipeline 50 to increase the air pressure of the first pipeline 50. In this embodiment, a dryer (not shown) is also connected between the compressor and the purge pipe 41 to dry the compressed air output by the compressor, reduce the droplets of the compressed air, and improve the treatment efficiency of the equipment body 10 for exhaust gas.

[0039] Furthermore, in order to control the pressure of the first pipeline 50, a solenoid valve 42 is also provided on the purge pipe 41. When the pressure of the first pipeline 50 is lower than the pressure of the bypass pipeline 60, the solenoid valve 42 opens, and compressed air is input into the first pipeline 50 through the purge pipe 41; when the pressure of the first pipeline 50 is higher than or equal to the pressure of the bypass pipeline 60, there is no need to replenish air to the first pipeline 50, the solenoid valve 42 closes, and the purge pipe 41 stops inputting compressed air into the first pipeline 50.

[0040] Optionally, the solenoid valve 42 of this embodiment is electrically controlled, and the valve is switched on or off or adjusted by controlling the forward and reverse rotation of the motor, which can realize automation and remote control, and is easy to operate and quick to respond. In other embodiments, the solenoid valve 42 can also be pneumatic or other methods that can realize automatic control. As long as the flow path can be switched on and off, the utility model is not limited.

[0041] In this embodiment, a differential pressure gauge 31 is provided to detect the pressure difference state of the first pipeline 50 and the bypass pipeline 60 in real time. When the differential pressure gauge 31 detects that the pressure difference between the first pipeline 50 and the bypass pipeline 60 is greater than or equal to 0, it indicates that the pressure of the first pipeline 50 is in a normal state and the device body 10 can operate normally; when the differential pressure gauge 31 detects that the pressure difference between the first pipeline 50 and the bypass pipeline 60 is less than 0, an alarm is sounded, and compressed air is input into the first pipeline 50 through the air supply component 40 to increase the pressure in the first pipeline 50.

[0042] Furthermore, in order to detect the operating state of the device body 10 , the device body 10 further includes a second detection component (not shown). The second detection component is used to obtain the operating signal of the device body 10 .

[0043] It is understandable that in order to obtain the operation signal of the device body 10 in a timely and effective manner, the set operation signal includes the temperature of the device operation reaction environment, the pressure and flow of the device air supply, the pressure and flow of the device water supply, the current and voltage of the device, and other parameters and states that can affect the normal operation of the device. Therefore, the second detection component includes a temperature sensor, a pressure sensor, a flow meter, a current sensor, a voltage sensor, etc.

[0044] The temperature sensor of the equipment body 10 is mainly arranged in the reaction chamber and the water tank, etc. The pressure sensor is mainly arranged in the gas pipeline and the water supply pipeline.

[0045] Furthermore, the device body 10 presets four states according to the operation signal detected by the second detection component: a standby state, a normal operation state, a first-level alarm state, and a second-level alarm state. The standby state corresponds to a state in which the device body 10 is shut down and not started. The normal operation state corresponds to a state in which the parameters detected by the second detection component of the device body 10 are normal. The first-level alarm state corresponds to a state in which the device body 10 has a serious parameter deviation and the device body 10 is in a fault state. The second-level alarm state corresponds to a state in which the device body 10 has an operation parameter deviation, but the deviation is small and does not affect the operation of the device.

[0046] It should be noted that the device body 10 will fail only when it is in the first-level alarm state, triggering the three-way valve 20 to switch the exhaust gas passage and output the exhaust gas from the bypass pipeline. At this time, the device body 10 stops working and switches to the standby state.

[0047] It is understandable that the second detection component can detect multiple operating signals of the device body 10, such as pressure signals, temperature signals, current signals, voltage signals, etc. When one of the operating signals reaches a preset value that triggers a first-level alarm, the device body 10 is in a first-level alarm state and an alarm is sounded, and then the device body 10 shuts down.

[0048] In order to realize the automatic control of the exhaust gas treatment equipment 100, in the present embodiment, the exhaust gas treatment equipment 100 further includes a control component (not shown). The control component is used to receive the pressure signal of the first detection component 30 and control the air supply component 40 to work or standby. Specifically, when the first detection component 30 detects that the pressure of the first pipeline 50 is less than the pressure of the bypass pipeline 60, the first detection component 30 transmits the pressure signal to the control component, and the control component controls the solenoid valve 42 to open, and supplies air to the first pipeline 50 through the purge valve; when the first detection component 30 detects that the pressure of the first pipeline 50 is greater than or equal to the pressure of the bypass pipeline 60, the first detection component 30 transmits the pressure signal to the control component, and the control component controls the solenoid valve 42 to close, and stops supplying air to the first pipeline 50.

[0049] The control component is also used to receive the operation signal of the second detection component and control the exhaust gas treatment device 100 to work or standby. Specifically, when the second detection component detects that the device body 10 is in the first-level alarm state, that is, when the device fails, the second detection component transmits the operation signal of the device body 10 to the control component, and the control component controls the device body 10 to stop running and controls the outlet of the three-way valve 20 to switch to the bypass pipeline; when the second detection component detects that the device body 10 is in a normal operating state or a second-level alarm state, the second detection component transmits the operation signal of the device body 10 to the control component, and the control component controls the device body 10 to start and controls the outlet of the three-way valve 20 to switch to the first pipeline.

[0050] Specifically, in this embodiment, the control component is a central processing unit.

[0051] The beneficial effects of the waste gas treatment device 100 of the utility model are:

[0052] The waste gas treatment device 100 of the utility model is provided with a three-way valve 20. When the equipment body 10 fails, the ventilation path is switched to the second air outlet 23 of the three-way valve 20, and the waste gas is output from the bypass pipe 60 to the equipment that can operate normally for treatment, thereby realizing sustainable production of the production line and improving work efficiency. The waste gas treatment device 100 of the utility model detects the pressure of the first pipe 50 and the bypass pipe 60 through the first detection component 30, and replenishes air to the first pipe 50 through the air replenishing component 40, thereby avoiding the situation where the pressure of the first pipe 50 is too low and the waste gas backflow occurs.

[0053] Second embodiment

[0054] Please refer to Figure 2 The exhaust gas treatment device 100 of this embodiment includes a device body 10, a three-way valve 20, a first detection component 30 and an air supply component 40. The specific structures of the device body 10, the three-way valve 20 and the air supply component 40 of this embodiment are substantially the same as those of the first embodiment described above, except that:

[0055] The first detection assembly 30 of this embodiment includes a pressure detection member, and the pressure detection member includes a first detection member 32 and a second detection member 33. The first detection member 32 is connected to the first pipeline 50 and is used to detect the pressure of the first pipeline 50. The second detection member 33 is connected to the bypass pipeline 60 and is used to detect the pressure of the bypass pipeline 60.

[0056] It can be understood that when the pressure detected by the first detection component 32 is greater than or equal to the pressure detected by the second detection component 33, it means that the pressure of the first pipeline 50 is in a normal state and the equipment body 10 can operate normally; when the pressure detected by the first detection component 32 is less than the pressure detected by the second detection component 33, an alarm is sounded, and compressed air is input into the first pipeline 50 through the air supply component 40 to increase the pressure in the first pipeline 50.

[0057] Furthermore, the first detection member 32 and the second detection member 33 are both connected to the control component. The pressure signal detected by the first detection member 32 and the pressure signal detected by the second detection member 33 are both transmitted to the control component, which processes the pressure signals and sends out a control signal.

[0058] The exhaust gas treatment device 100 of this embodiment includes most of the features of the first embodiment, and the difference is only the pressure detection method. Therefore, the exhaust gas treatment device 100 of this embodiment has the same working principle and technical effect as the first embodiment, which will not be described here.

[0059] Third embodiment

[0060] Please refer to Figure 3 The multi-machine mutual backup system 200 of this embodiment includes a plurality of exhaust gas treatment devices 100 as described in the first embodiment. The bypass pipe 60 of the exhaust gas treatment device 100 is communicated with the backup air inlet 12 of another exhaust gas treatment device 100.

[0061] Specifically, for example, the multi-machine mutual backup system 200 includes a first exhaust gas treatment device 210 and a second exhaust gas treatment device 220. The bypass pipe 2104 of the first exhaust gas treatment device is connected to the backup air inlet 2203 of the second exhaust gas treatment device, so that when the first exhaust gas treatment device 210 fails, the second exhaust gas treatment device 220 replaces the first exhaust gas treatment device 210 to operate; the bypass pipe 2204 of the second exhaust gas treatment device is connected to the backup air inlet 2103 of the first exhaust gas treatment device, so that when the second exhaust gas treatment device 220 fails, the first exhaust gas treatment device 210 replaces the first exhaust gas treatment device 210 to operate.

[0062] It can be understood that when the first exhaust gas treatment device 210 fails, the three-way valve 2101 of the first exhaust gas treatment device switches the passage, and the exhaust gas enters from the first air inlet 2102 of the first exhaust gas treatment device, passes through the bypass pipe 2104 of the first exhaust gas treatment device, and then enters the second exhaust gas treatment device 220 from the spare air inlet 2203 of the second exhaust gas treatment device for treatment, and the second exhaust gas treatment device 220 is used as a backup machine; when the second exhaust gas treatment device 220 fails, the three-way valve 2201 of the second exhaust gas treatment device switches the passage, and the exhaust gas enters from the first air inlet 2202 of the second exhaust gas treatment device, passes through the bypass pipe 2204 of the second exhaust gas treatment device, and then enters the first exhaust gas treatment device 210 from the spare air inlet 2103 of the first exhaust gas treatment device for treatment, and the first exhaust gas treatment device 210 is used as a backup machine.

[0063] The beneficial effects of the multi-machine mutual backup system 200 of this embodiment are:

[0064] The multi-machine mutual backup system 200 of the utility model is interconnected through multiple of the above-mentioned exhaust gas treatment devices 100. When one of the exhaust gas treatment devices 100 fails, the exhaust gas channel is switched, and the exhaust gas can be passed into another exhaust gas treatment device 100 for treatment, thereby reducing the downtime and downtime rate of the equipment and the main machine, and avoiding the waste of resources caused by debugging when starting and stopping the main machine.

[0065] Fourth embodiment

[0066] Please refer to Figure 4 The multi-machine mutual backup system 200 of this embodiment includes a plurality of exhaust gas treatment devices 100 as in the first embodiment described above, and its structure is substantially the same as that of the third embodiment described above, except that:

[0067] The multi-machine mutual backup system 200 of this embodiment includes a third exhaust gas treatment device 230 in addition to the first exhaust gas treatment device 210 and the second exhaust gas treatment device 220. Specifically, the bypass pipe 2104 of the first exhaust gas treatment device is connected to the backup air inlet 2203 of the second exhaust gas treatment device, so that when the first exhaust gas treatment device 210 fails, the second exhaust gas treatment device 220 replaces the first exhaust gas treatment device 210 to operate; the bypass pipe 2204 of the second exhaust gas treatment device is connected to the backup air inlet 2303 of the third exhaust gas treatment device, so that when the second exhaust gas treatment device 220 fails, the third exhaust gas treatment device 230 replaces the second exhaust gas treatment device 220 to operate; the bypass pipe 2304 of the third exhaust gas treatment device is connected to the backup air inlet 2103 of the first exhaust gas treatment device, so that when the third exhaust gas treatment device 230 fails, the first exhaust gas treatment device 210 replaces the second exhaust gas treatment device 220 to operate.

[0068] It can be understood that when the first exhaust gas treatment device 210 fails, the three-way valve 2101 of the first exhaust gas treatment device switches the passage, and the exhaust gas enters from the first air inlet 2102 of the first exhaust gas treatment device, passes through the bypass pipe 2104 of the first exhaust gas treatment device, and then enters the second exhaust gas treatment device 220 from the backup air inlet 2203 of the second exhaust gas treatment device for treatment. The second exhaust gas treatment device 220 is used as a backup machine for the first exhaust gas treatment device 210; when the second exhaust gas treatment device 220 fails, the three-way valve 2201 of the second exhaust gas treatment device switches the passage, and the exhaust gas enters from the first air inlet 2202 of the second exhaust gas treatment device, and enters from the second exhaust gas treatment device. The exhaust gas passes through the bypass pipe 2204 and then enters the third exhaust gas treatment device 230 from the spare air inlet 2303 of the third exhaust gas treatment device for treatment. The third exhaust gas treatment device 230 is used as a backup machine for the second exhaust gas treatment device 220. When the third exhaust gas treatment device 230 fails, the three-way valve 2301 of the third exhaust gas treatment device switches the passage, and the exhaust gas enters from the first air inlet 2302 of the third exhaust gas treatment device, passes through the bypass pipe 2304 of the third exhaust gas treatment device, and then enters the first exhaust gas treatment device 210 from the spare air inlet 2103 of the first exhaust gas treatment device for treatment. The first exhaust gas treatment device 210 is used as a backup machine for the third exhaust gas treatment device 230.

[0069] The connection relationship between the components of the multi-machine mutual backup system 200 of this embodiment is roughly the same as that of the multi-machine mutual backup system 200 of the third embodiment, except for the difference in quantity. Therefore, the multi-machine mutual backup system 200 of this embodiment also has the same technical effects as the fourth embodiment, which will not be repeated here.

[0070] In summary, the waste gas treatment device 100 of the multi-machine mutual backup system 200 can realize sustainable production of the production line, improve work efficiency, and prevent waste gas backflow.

[0071] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A waste gas treatment device (100), characterized in that: include: A device body (10), wherein the device body (10) is provided with a second air inlet (11) and a backup air inlet (12); A three-way valve (20), the three-way valve (20) comprising a first air inlet (21), a first air outlet (22) and a second air outlet (23), the first air inlet (21) being used to allow exhaust gas to enter, the three-way valve (20) being capable of conducting an air path between the first air inlet (21) and the first air outlet (22), or an air path between the first air inlet (21) and the second air outlet (23), the first air outlet (22) and the second air inlet (11) being connected via a first pipeline (50), and the second air outlet (23) being connected to a bypass pipeline (60); A first detection component (30), the first detection component (30) being used to detect the pressure of the first pipeline (50) and the bypass pipeline (60); An air supply component (40), the air supply component (40) is used to supply air to the first pipeline (50).

2. The exhaust gas treatment device (100) according to claim 1, characterized in that: The first detection assembly (30) comprises a pressure detection component, and the pressure detection component is connected to the first pipeline (50) and the bypass pipeline (60) respectively.

3. The exhaust gas treatment device (100) according to claim 2, characterized in that: The pressure detection component is a differential pressure gauge (31), and two input ends of the differential pressure gauge (31) are respectively connected to the first pipeline (50) and the bypass pipeline (60) for detecting the pressure difference between the first pipeline (50) and the bypass pipeline (60).

4. The exhaust gas treatment device (100) according to claim 2, characterized in that: The pressure detection component comprises a first detection component (32) and a second detection component (33), the first detection component (32) is connected to the first pipeline (50), and the second detection component (33) is connected to the bypass pipeline (60).

5. The exhaust gas treatment device (100) according to claim 1, characterized in that: The air supply assembly (40) comprises a purge pipe (41), one end of which is connected to the side wall of the first pipeline (50) and communicates with the first pipeline (50).

6. The exhaust gas treatment device (100) according to claim 5, characterized in that: The purge pipe (41) is provided with a solenoid valve (42).

7. The exhaust gas treatment device (100) according to claim 1, characterized in that: The device body (10) further comprises a second detection component, wherein the second detection component is used to obtain an operation signal of the device body (10).

8. The exhaust gas treatment device (100) according to claim 7, characterized in that: It also includes a control component, which is used to receive the pressure signal of the first detection component (30) and control the air supply component (40) to work or standby; the control component is also used to receive the operation signal of the second detection component and control the exhaust gas treatment device (100) to work or standby.

9. A multi-machine mutual backup system (200), characterized in that: It comprises a plurality of exhaust gas treatment devices (100) according to any one of claims 1 to 8, wherein the bypass pipe (60) of each exhaust gas treatment device (100) is connected to the backup air inlet (12) of another exhaust gas treatment device (100).

10. The multi-machine mutual backup system (200) according to claim 9, characterized in that: The multi-machine backup system (200) includes a first exhaust gas treatment device (210) and a second exhaust gas treatment device (220); a bypass pipe (2104) of the first exhaust gas treatment device is connected to a backup air inlet (2203) of the second exhaust gas treatment device, so that when the first exhaust gas treatment device (210) fails, the second exhaust gas treatment device (220) replaces the first exhaust gas treatment device (210) for operation; and a bypass pipe (2204) of the second exhaust gas treatment device is connected to the backup air inlet (2103) of the first exhaust gas treatment device, so that when the second exhaust gas treatment device (220) fails, the first exhaust gas treatment device (210) replaces the second exhaust gas treatment device (220) for operation.