Hot plate PIN height measuring device

By designing a hot plate PIN needle height measurement device, the coordination of the slide rod and the limiting mechanism is used to solve the problem of large error in the needle body height measurement of the coating machine, and the accuracy of height measurement and simplicity of operation are achieved.

CN222812305UActive Publication Date: 2025-04-29JCET SEMICON (SHAOXING) CO LTD
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Patent Information

Application Number
CN202420807574.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-18
Publication Date
2025-04-29
Estimated Expiration
2034-04-18

AI Technical Summary

Technical Problem

The prior art error is large when measuring the lifting height of the needle body of the coating machine, which affects the operating accuracy.

Method used

A hot plate PIN needle height measurement device is designed, including a frame rod, a slide rod and a limiting mechanism. It contacts the limiting ring of the needle body through the slide rod, and the slide rod slides along the frame rod. The limiting mechanism fixes the slide rod position and reads the slide rod position to measure the needle body height.

Benefits of technology

Accurate measurement of needle height is achieved, the measurement process is simplified, and the accuracy and convenience of measurement are improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of coating machines, in particular to a hot plate PIN height measuring device which comprises a frame rod, a sliding rod used for being sleeved with a pin body is arranged at the end of the frame rod, a limiting ring used for abutting against the end of the pin body is arranged at one end of the sliding rod, and the sliding rod is arranged in a sliding mode in the direction perpendicular to the frame rod. A limiting mechanism used for abutting against and fixing the position of the sliding rod is further arranged on the frame rod. The device has the following effects that during measurement, the frame rod stretches into the device, the bottom of the sliding rod makes contact with the hot plate, the height of the frame rod is kept unchanged, at the moment, the needle body is lifted, the needle body stretches into the sliding rod, the limiting ring finally abuts against the end of the needle body, the sliding rod slides relative to the frame rod, and then the position of the sliding rod is fixed through the limiting mechanism; when the frame rod is taken out, the height of the needle body can be measured or read according to the final position of the sliding rod, and the measurement is simple and very convenient.
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Description

Technical Field

[0001] The present application relates to the technical field of coating machines, and in particular to a hot plate PIN needle height measuring device. Background Art

[0002] During operation, the coater needs to raise the pin needle and lift the wafer to operate it. After long-term use, the height of the pin body may change, resulting in errors and requiring adjustment.

[0003] Therefore, it is generally necessary to measure the height of the needle body regularly. At present, due to the relatively small internal space, a commonly used method is to extend the end of the measuring ruler into the interior and roughly compare the lifting height of the needle body with the end of the measuring ruler to determine the movement height of the needle body. However, this valuation method often has large errors, which greatly affects subsequent operations. Utility Model Content

[0004] In order to more accurately measure the lifting height of the needle body, the present application provides a hot plate PIN needle height measurement device.

[0005] A hot plate PIN needle height measuring device provided in the present application adopts the following technical solution: a hot plate PIN needle height measuring device, comprising a frame rod, a sliding rod for sleeve-mounted needle body is arranged at the end of the frame rod, one end of the sliding rod has a limiting ring for abutting against the end of the needle body, the sliding rod is slidably arranged in a direction perpendicular to the frame rod, and a limiting mechanism for pressing and fixing the position of the sliding rod is also arranged on the frame rod.

[0006] By adopting the above technical solution, when measuring, the frame rod is extended into the interior so that the bottom of the slide rod contacts the hot plate and the height of the frame rod is kept unchanged. At this time, the needle body is lifted and the needle body will be extended into the slide rod. The limit ring will eventually abut the end of the needle body. The slide rod slides relative to the frame rod, and then the position of the slide rod is fixed by the limit mechanism. When the frame rod is taken out, the height of the needle body can be measured or read according to the final position of the slide rod. The measurement is simple and very convenient.

[0007] Preferably, the side of the slide rod has a receiving groove for the needle body to be embedded.

[0008] Preferably, the limiting mechanism comprises a pressing rod slidably disposed in the middle of the frame rod and used to press against the sliding rod. When the pressing rod acts on the sliding rod, the pressing rod does not contact the needle body.

[0009] Preferably, the rack rod is provided with a force-applying component for driving the pressure rod to move toward the sliding rod.

[0010] Preferably, the force-applying assembly includes a sliding plate sleeved and slidably connected to the frame rod, a fixed plate fixedly arranged at one end of the frame rod away from the sliding rod, and an elastic member arranged between the fixed plate and the sliding plate, and the end of the pressure rod is fixedly connected to the sliding plate.

[0011] Preferably, the elastic member comprises a plurality of springs arranged in parallel, and both the sliding plate and the fixed plate have limiting grooves for the ends of the springs to be embedded and fixed.

[0012] Preferably, the middle portion of the rack rod has a sliding groove for the pressing rod to slide, and the two inner walls of the sliding groove have sliding grooves for the side edges of the pressing rod to be embedded.

[0013] Preferably, the depth of the accommodating groove is greater than the diameter of the needle body, and the end of the pressing rod is in an arc shape adapted to the outer wall of the sliding rod.

[0014] Preferably, the depth of the accommodating groove is smaller than the diameter of the needle body, and the end of the pressing rod has pressing blocks located on both sides of the accommodating groove.

[0015] Preferably, the pressing block has a rubber protrusion for contacting the sliding rod.

[0016] In summary, the present application includes at least one of the following beneficial technical effects:

[0017] 1. When measuring, extend the frame rod into the interior so that the bottom of the slide bar contacts the hot plate, and keep the frame rod at a constant height. At this time, lift the needle body, and the needle body will extend into the slide bar. The limit ring will eventually abut against the end of the needle body. The slide bar slides relative to the frame rod, and then the position of the slide bar is fixed by the limit mechanism. When the frame rod is taken out, the height of the needle body can be measured or read according to the final position of the slide bar. The measurement is simple and very convenient.

[0018] 2. The force-applying component enables the pressure rod to maintain the function of the limiting slide rod under the action of the elastic member after the slide rod moves to the end. During the removal process, the slide rod can maintain the measuring state, thereby improving the accuracy of the measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic diagram of the structure of Example 1 of the present application;

[0020] Figure 2 It is a partial structural diagram of Example 1 of the present application;

[0021] Figure 3 is a partial explosion schematic diagram of Example 1 of the present application;

[0022] Figure 4 is a partial cross-sectional view of Example 1 of the present application;

[0023] Figure 5 It is a partial cross-sectional view of Example 2 of the present application.

[0024] Explanation of the reference numerals: 100, frame rod; 110, slide rod; 111, limit ring; 112, accommodating groove; 113, pressure rod; 114, sliding channel; 115, slide groove; 116, sliding plate; 117, fixing plate; 120, spring; 121, limit groove; 130, pressure block; 131, rubber bump. DETAILED DESCRIPTION

[0025] The present application is further described in detail below in conjunction with the accompanying drawings.

[0026] Example 1: This application example discloses a hot plate PIN needle height measurement device, referring to Figure 1 , Figure 2 , including a frame rod 100, the end of the frame rod 100 is provided with a sliding rod 110 for sleeve-mounting the needle body, one end of the sliding rod 110 has a limiting ring 111 for resisting the end of the needle body, and the sliding rod 110 is slidably arranged in a direction perpendicular to the frame rod 100.

[0027] The side of the slide bar 110 has a receiving groove 112 for the needle body to be embedded in. The top of the receiving groove 112 is blocked by a limiting ring 111. The needle body can enter from one end opening and abut against the limiting ring 111. The slide bar 110 moves upward during the continuous movement of the needle body. It is worth noting that the slide bar 110 has a scale.

[0028] Reference Figure 1 , Figure 3 The rack rod 100 is also provided with a limit mechanism for pressing and fixing the position of the slide bar 110. When the needle body stops rising, the slide bar 110 is fixed by the limit mechanism. After it is taken out, the moving distance of the slide bar 110 can be obtained through the scale. After comparing it with the standard value, the offset can be known, so as to make a judgment.

[0029] In this embodiment, the limiting mechanism includes a pressing rod 113 that is slidably disposed in the middle of the frame rod 100 and is used to press against the slide rod 110. When the pressing rod 113 acts on the slide rod 110, the pressing rod 113 does not contact the needle body. Specifically, a sliding groove 114 is provided in the middle of the frame rod 100, the pressing rod 113 is located in the sliding groove 114, and sliding grooves 115 are provided on the two inner walls of the sliding groove 114. The sliding grooves 115 are parallel to the length of the sliding groove 114, and the two sides of the pressing rod 113 are inserted and slidably disposed in the sliding grooves 115.

[0030] At the same time, a force-applying assembly for driving the pressure rod 113 to move toward the slide rod 110 is also provided on the rack rod 100. The force-applying assembly includes a slide plate 116 sleeved and slidably connected to the rack rod 100, a fixed plate 117 fixedly provided at one end of the rack rod 100 away from the slide rod 110, and an elastic member provided between the fixed plate 117 and the slide plate 116. The end of the pressure rod 113 is fixedly connected to the slide plate 116.

[0031] In this embodiment, the elastic member is a spring 120, and there are four springs 120 in total, which are evenly distributed on both sides of the frame rod 100. The sliding plate 116 and the fixed plate 117 are provided with a limit groove 121 for the end of the spring 120 to be inserted and fixed. Under the action of the spring 120, the pressing rod 113 can be pressed against the sliding rod 110.

[0032] In this embodiment, refer to Figure 4 The depth of the accommodating groove 112 is greater than the diameter of the needle body, and the end of the pressing rod 113 is an arc shape adapted to the outer wall of the slide bar 110. In this way, when pressing, the end of the pressing rod 113 only acts on the slide bar 110 and will not affect the slide bar 110.

[0033] The implementation principle of the embodiment 1 of the present application is as follows: first, the limiting ring 111 is pressed against one side of the frame rod 100, and the rest of the slide bar 110 slides down. At this time, the spring 120 presses the pressing rod 113 against the slide bar 110, and the whole is fixed. The whole is placed on the upper side of the hot plate, so that the end of the slide bar 110 away from the limiting ring 111 is pressed against the upper side of the hot plate. At the same time, the fixing plate 117 needs to be fixed on the machine platform so that the frame rod 100 remains horizontal and motionless.

[0034] Then the needle body is made to rise and inserted into the accommodating groove 112. As the needle body rises, the sliding plate 116 moves toward the side of the fixed plate 117, and the spring 120 is compressed. At this time, the slide bar 110 and the frame rod 100 are relatively slidable, and the needle body will abut against the limiting ring 111, so that the slide bar 110 moves upward together. When the needle body moves to the top, the limiting ring 111 will also stop. At this time, the sliding plate 116 is released, so that the pressing rod 113 presses against the slide bar 110. At this time, the position of the slide bar 110 is fixed, and then the whole is taken out. At this time, the movement distance of the slide bar 110 can be read, and it can be compared with the standard distance to obtain the current lifting height of the needle body, which is more convenient and accurate.

[0035] Embodiment 2: The difference from Embodiment 1 is that, referring to Figure 5The depth of the receiving groove 112 is smaller than the diameter of the needle body, and the ends of the pressing rod 113 have pressing blocks 130 located on both sides of the receiving groove 112. The distance between the ends of the pressing blocks 130 and the inner side of the pressing rod 113 is greater than the diameter of the needle body, and will not interfere with the needle body. In order to increase the stability during pressing, the pressing blocks 130 have rubber bumps 131 for contacting the sliding rod 110.

[0036] The embodiments of this specific implementation method are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. Therefore, all equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A hot plate PIN needle height measuring device, characterized in that: The invention comprises a frame rod (100), wherein a sliding rod (110) for sleeve-mounting a needle body is arranged at the end of the frame rod (100), one end of the sliding rod (110) has a limiting ring (111) for contacting the end of the needle body, the sliding rod (110) is arranged to slide in a direction perpendicular to the frame rod (100), and a limiting mechanism for pressing and fixing the position of the sliding rod (110) is also arranged on the frame rod (100).

2. A hot plate PIN needle height measuring device according to claim 1, characterized in that: The side edge of the sliding rod (110) is provided with a receiving groove (112) for the needle body to be embedded.

3. A hot plate PIN needle height measuring device according to claim 2, characterized in that: The limiting mechanism comprises a pressing rod (113) slidably arranged in the middle of the frame rod (100) and used to press against the sliding rod (110); when the pressing rod (113) acts on the sliding rod (110), the pressing rod (113) does not contact the needle body.

4. A hot plate PIN needle height measuring device according to claim 3, characterized in that: The rack rod (100) is provided with a force-applying component for driving the pressing rod (113) to move toward the sliding rod (110).

5. A hot plate PIN needle height measuring device according to claim 4, characterized in that: The force-applying assembly comprises a sliding plate (116) sleeved on and slidably connected to the frame rod (100), a fixed plate (117) fixedly arranged at one end of the frame rod (100) away from the sliding rod (110), and an elastic member arranged between the fixed plate (117) and the sliding plate (116), and the end of the pressure rod (113) is fixedly connected to the sliding plate (116).

6. A hot plate PIN needle height measuring device according to claim 5, characterized in that: The elastic member comprises a plurality of springs (120) arranged in parallel, and both the sliding plate (116) and the fixed plate (117) are provided with limiting grooves (121) for the ends of the springs (120) to be embedded and fixed.

7. A hot plate PIN needle height measuring device according to claim 3, characterized in that: The middle part of the rack rod (100) has a sliding groove (114) for the pressing rod (113) to slide, and two inner walls of the sliding groove (114) have sliding grooves (115) for the side edges of the pressing rod (113) to be embedded.

8. A hot plate PIN needle height measuring device according to claim 6, characterized in that: The depth of the accommodating groove (112) is greater than the diameter of the needle body, and the end of the pressing rod (113) is in an arc shape adapted to the outer wall of the sliding rod (110).

9. A hot plate PIN needle height measuring device according to claim 6, characterized in that: The depth of the accommodating groove (112) is smaller than the diameter of the needle body, and the end of the pressing rod (113) has pressing blocks (130) located on both sides of the accommodating groove (112).

10. A hot plate PIN needle height measuring device according to claim 9, characterized in that: The pressing block (130) has a rubber protrusion (131) for contacting the sliding rod (110).