Light splitting device for mixed laser

Abstract

The utility model provides a light splitting device for mixed laser. The light splitting device comprises a first prism, a second prism and a diaphragm, the first prism and the second prism are arranged at an interval and form a rotational symmetry structure by taking the central points of the first prism and the second prism as fixed points; the diaphragm is arranged between the first prism and the second prism. The mixed laser is incident to the first triangular prism, is split by the first triangular prism, and then is filtered by the diaphragm to obtain laser with a set wave band; the laser filtered by the diaphragm enters a second prism and is output through the second prism; the output direction of the filtered laser output from the second prism is the same as the direction of the original mixed laser; the optimal design of an optical-mechanical structure is facilitated; the structure is simple, cost is low, and implementation is easy.

Description

Technical Field

[0001] The utility model relates to the field of lasers, in particular to a mixed laser light splitting device. Background Art

[0002] Laser is a special kind of light, and its wavelength is the same as that of ordinary light. Lasers exist from infrared to ultraviolet. Lasers of different wavelengths have different advantages and can be used in different fields. For example, 266nm laser belongs to deep ultraviolet laser, which has higher photon energy and is more easily absorbed by materials. It has broad application prospects in lithography, microlithography, medical treatment and scientific research. However, how to separate lasers of a specific wavelength from mixed lasers of multiple different wavelengths and keep the output in the same direction is one of the technical problems to be solved in this field. Utility Model Content

[0003] Therefore, the utility model provides a mixed laser light splitting device to solve the above problems.

[0004] To achieve the above purpose, the technical solution provided by the utility model is as follows:

[0005] A spectroscopic device for mixed laser, the mixed laser is a mixture of at least two lasers of different wavelength bands, the spectroscopic device for mixed laser comprises a first prism, a second prism and an aperture; the first prism and the second prism are arranged at intervals and form a rotationally symmetrical structure with their center points as fixed points; the aperture is arranged between the first prism and the second prism.

[0006] Furthermore, the aperture is configured to allow only one type of laser to pass through.

[0007] Furthermore, the mixed laser is a mixture of 266nm laser and 532nm laser; the aperture is configured to allow only 266nm laser to pass through.

[0008] Furthermore, the first prism and / or the second prism is made of fused quartz.

[0009] Furthermore, no anti-reflection film is disposed on the surface of the first prism and / or the second prism.

[0010] Furthermore, the mixed laser is incident on the first prism at the Brewster angle, and the 266nm laser is filtered out through the aperture after being split by the first prism; the filtered 266nm laser is incident on the second prism at the Brewster angle and output through the second prism.

[0011] The technical solution provided by the utility model has the following beneficial effects:

[0012] Using the mixed laser spectroscopic device of the present application, the mixed laser is incident on the first prism, and after being split by the first prism, the laser of the set band is filtered out through the aperture (defined as the filtered laser), and the laser of the remaining bands is filtered out; the laser filtered out through the aperture is incident on the second prism and output through the second prism; the output direction of the filtered laser output from the second prism is the same as the direction of the original mixed laser; it is helpful for the optimized design of the optical-mechanical structure; and the structure is simple, the cost is low, and it is easy to implement. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 FIG. 1 is a schematic diagram of the structure of a spectroscopic device for mixing laser light in an embodiment. DETAILED DESCRIPTION

[0014] To further illustrate the various embodiments, the present invention provides drawings. These drawings are part of the disclosure of the present invention, which are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, a person of ordinary skill in the art should be able to understand other possible implementations and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0015] In the description of the present invention, terms such as "up", "down", "left", "right", "front", "back", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

[0016] The utility model is now further described in conjunction with the accompanying drawings and specific implementation methods.

[0017] Reference Figure 1 As shown, this embodiment provides a mixed laser spectrometer. In this specific embodiment, the mixed laser 1 is a mixture of a 266nm laser 2 and a 532nm laser 3; wherein the 266nm laser 2 needs to be separated.

[0018] Specifically, the hybrid laser light splitting device includes a first prism 11, a second prism 12 and an aperture 20; the first prism 11 and the second prism 12 are arranged at intervals, and form a rotationally symmetrical structure with their center points as fixed points; that is, after the first prism 11 and the second prism 12 are rotated 180° with their center points as fixed points, they coincide with the initial pattern. The aperture 20 is arranged between the first prism 11 and the second prism 12, wherein the aperture 20 is arranged to allow only 266nm laser 2 to pass through.

[0019] When splitting is required, the mixed laser 1 is incident on the first prism 11 (specifically, it is incident on the first prism 11 at the Brewster angle in this embodiment), the 266nm laser 2 and the 532nm laser 3 are separated by the first prism 11, the 266nm laser 2 is filtered out by the aperture 20, and the 532nm laser 3 is filtered out by the aperture 20. That is, the 266nm laser 2 is emitted through the aperture 20, while the 532nm laser 3 is blocked and filtered out by the aperture 20. Afterwards, the 266nm laser 2 is incident on the second prism 12 at the Brewster angle, and is output through the second prism 12, thereby changing the direction of the light path deflection, and outputting the 266nm laser 2 that is consistent with the beam direction of the original mixed laser 1. In this way, the mixed laser splitting device has the characteristics of simple structure, low cost, and easy implementation, which is helpful for the optimization design of the optical-mechanical structure.

[0020] Specifically, since the first prism 11 and the second prism 12 form a rotationally symmetrical structure, the mixed laser 1 is incident on the first prism 11 at the Brewster angle, and the separated 266nm laser 2 is also incident on the second prism 12 at the Brewster angle, which can form low-loss transmission.

[0021] Since the 266nm laser 2 is highly destructive and can easily damage lenses coated with a film layer, in this embodiment, no anti-reflection film is provided on the surfaces of the first prism 11 and the second prism 12 to avoid damage to the first prism 11 and the second prism 12 by the 266nm laser 2, thereby extending the service life and improving the stability and economy of the laser.

[0022] Meanwhile, the first prism 11 and the second prism 12 are both made of fused quartz, which has a high transmittance to the 266 nm laser 2 .

[0023] This embodiment takes the mixed laser 1 of 266nm laser 2 and 532nm laser 3 as an example to describe the mixed laser spectrometer of the present application. Of course, in other embodiments, the mixed laser spectrometer can also be other mixed lasers 1 containing at least two bands for spectrometering; the laser beams of multiple bands are separated by the first prism 11, and then filtered through the aperture 20 to obtain a single-band laser, and then the light path deflection direction is changed through the second prism 12, and finally the direction of the light beam is consistent with the initial mixed laser 1. The laser beam can be incident at other angles, and the first prism 11 and / or the second prism 12 can also be made of different materials according to actual conditions, and the surface of the first prism 11 and / or the second prism 12 can also be increased. Anti-reflection film can be used to reduce loss, etc.

[0024] Although the present invention has been specifically demonstrated and described in conjunction with the preferred embodiments, those skilled in the art should understand that various changes may be made to the present invention in form and detail without departing from the spirit and scope of the present invention as defined in the appended claims, all of which are within the scope of protection of the present invention.

Claims

1. A spectroscopic device for mixing laser light, wherein the mixed laser light is a mixture of at least two laser lights of different wavelengths, characterized in that: The mixed laser light splitting device comprises a first prism, a second prism and an aperture; the first prism and the second prism are arranged at intervals and form a rotationally symmetrical structure with their central points as fixed points; the aperture is arranged between the first prism and the second prism.

2. The mixed laser light splitting device according to claim 1, characterized in that: The aperture is configured to allow only one type of laser light to pass through.

3. The mixed laser light splitting device according to claim 2, characterized in that: The mixed laser is a mixture of 266nm laser and 532nm laser; the aperture is set to allow only 266nm laser to pass through.

4. The mixed laser light spectrometer according to claim 1 or 3, characterized in that: The first prism and / or the second prism is made of fused quartz.

5. The mixed laser light spectrometer according to claim 1 or 3, characterized in that: No anti-reflection film is provided on the surface of the first prism and / or the second prism.

6. The mixed laser light splitting device according to claim 3, characterized in that: The mixed laser is incident on the first prism at the Brewster angle, and the 266nm laser is filtered out through the aperture after being split by the first prism; the filtered 266nm laser is incident on the second prism at the Brewster angle and output through the second prism.

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