Swing type flushing device

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a swing type flushing device which comprises a device body, a flushing frame and a swing assembly. The swing assembly comprises a driving piece and a swing frame. The swinging frame is arranged on the device main body in a swinging manner and is used for mounting a substrate sheet; the output end of the driving part is in transmission connection with the swing frame and is used for driving the swing frame to swing; the flushing frame is provided with a water outlet facing the swing frame. In the process of washing the substrate slice, the swing type washing device can drive the swing frame and the substrate slice to swing through the driving piece so as to adjust the distance between different areas of the substrate slice and the water outlet, it can be guaranteed that the washing effect of all the positions of the surface of the substrate slice is uniform, and the problem that the washing effect of the surface of the substrate slice is not uniform is effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a swing-type flushing device. Background Art

[0002] Indium phosphide substrates are widely used in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices. During the substrate manufacturing process, the surface of the substrate needs to be rinsed.

[0003] In the existing substrate sheet washing device, the substrate sheet is generally fixed and then washed by a flushing member. However, the distances from the flushing member on the surface of the substrate sheet are not uniform, so there is a problem of uneven washing effect on the surface of the substrate sheet during washing. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a swing-type washing device for solving the problem of uneven washing effect on the surface of a substrate sheet.

[0005] In order to achieve the above technical purpose, the present application provides a swing-type flushing device, comprising: a device body, a flushing frame and a swinging assembly;

[0006] The swing assembly comprises: a driving member and a swing frame;

[0007] The swing frame can be swingably arranged on the device body and is used for mounting the substrate sheet;

[0008] The output end of the driving member is drivingly connected to the swing frame, and is used to drive the swing frame to swing in a horizontal direction;

[0009] The flushing frame is provided with a water outlet facing the swing frame.

[0010] Further, the swing assembly includes a plurality of the swing frames;

[0011] A plurality of the swing frames are arranged at intervals on the device body along the vertical direction;

[0012] The output end of the driving member is transmission-connected to a plurality of the swing frames.

[0013] Furthermore, the flushing rack is provided with a plurality of water outlets from top to bottom;

[0014] The water outlet is arranged in front of each swing frame.

[0015] Furthermore, the swing assembly further comprises: a vertical rod and a plurality of horizontal rods;

[0016] The vertical rod can be rotatably arranged on the device body;

[0017] A plurality of the cross bars are arranged on the vertical bars at intervals along the vertical direction;

[0018] The plurality of cross bars are fixedly connected to the plurality of swing frames in a one-to-one correspondence;

[0019] The output end of the driving member is drivingly connected to the vertical pole.

[0020] Furthermore, the cross bar is in a U-shape, and the cross bar is fixedly connected to both ends of the swing frame in the horizontal direction.

[0021] Furthermore, a slope is provided on the device body;

[0022] The swing frame is arranged on the inclined plane.

[0023] Furthermore, the swing frame is provided with an obliquely arranged mounting groove;

[0024] The mounting groove is used for the substrate sheet to be placed obliquely.

[0025] Further, the device body includes a support frame;

[0026] The support frame is frame-shaped;

[0027] The driving component is arranged on the supporting frame.

[0028] Furthermore, the device body includes a plurality of the support frames;

[0029] A plurality of the support frames are arranged at intervals along the horizontal direction;

[0030] The swing assembly includes a plurality of;

[0031] The swing assembly is arranged on each of the support frames.

[0032] Further, it also includes an air-filled rack;

[0033] The air charging frame is provided with an air charging port facing the swing frame.

[0034] It can be seen from the above technical scheme that the present application provides a swinging flushing device, comprising: a device body, a flushing frame and a swinging assembly; the swinging assembly comprises: a driving member and a swinging frame; the swinging frame can be swingably arranged on the device body for installation of a substrate sheet; the output end of the driving member is transmission-connected to the swinging frame for driving the swinging frame to swing; the flushing frame is provided with a water outlet facing the swinging frame.

[0035] The swing-type flushing device provided in the present solution can drive the swing frame and the substrate sheet to swing through the driving member during the process of flushing the substrate sheet, so as to adjust the distance between different areas of the substrate sheet and the water outlet, thereby ensuring uniform flushing effect on all parts of the substrate sheet surface and effectively solving the problem of uneven flushing effect on the substrate sheet surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0037] Figure 1 A schematic diagram of the front structure of a swing-type flushing device provided in an embodiment of the present application;

[0038] Figure 2 A schematic diagram of the rear structure of a swing-type flushing device provided in an embodiment of the present application;

[0039] In the figure: 10, device body; 20, flushing frame; 30, swing assembly; 40, air flushing frame; 11, inclined plane; 12, support frame; 13, flushing port; 14, horizontal groove; 21, water outlet; 31, driving member; 32, swinging frame; 33, vertical pole; 34, horizontal rod; 35, mounting groove; 41, air flushing port. DETAILED DESCRIPTION

[0040] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0041] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0042] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0043] See also Figure 1 and Figure 2 A swing-type flushing device provided in an embodiment of the present application includes: a device body 10, a flushing frame 20 and a swinging assembly 30.

[0044] The swing assembly 30 includes: a driving member 31 and a swing frame 32; the swing frame 32 can be swingably set on the device body 10 for mounting the substrate sheet; the output end of the driving member 31 is transmission-connected to the swing frame 32 for driving the swing frame 32 to swing; the flushing frame 20 is provided with a water outlet 21 facing the swing frame 32.

[0045] As an implementation manner, the driving member 31 may be a driving member of a rotating motor.

[0046] As an implementation manner, the flushing frame 20 may be disposed in front of the swing frame 32 , that is, in front of the swing frame 32 in a direction away from the device body 10 .

[0047] As an embodiment, the driving member 31 can drive the swing frame 32 to swing in a horizontal direction, and the driving member 31 can drive the swing frame 32 to swing back and forth during the washing process. Correspondingly, a horizontal groove 14 can be provided on the device body 10 to prevent the swinging substrate sheet from interfering with the device body 10.

[0048] The swing-type washing device provided by the embodiment can drive the swing frame 32 and the substrate sheet to swing back and forth through the driving member 31 during the washing process, ensuring that all parts of the substrate sheet surface can be washed while helping to improve the washing uniformity of the substrate sheet and improve the washing efficiency.

[0049] It should be noted that a flushing port 13 can be provided on the device body 10, so that during the flushing process, while the water outlet 21 flushes one side of the substrate sheet, the flushing port 13 can flush the other side of the substrate sheet, thereby eliminating the need to turn the substrate sheet over after flushing one side, thereby improving the cleaning efficiency and cleaning effect.

[0050] In one embodiment, the swing assembly 30 includes a plurality of swing frames 32; the plurality of swing frames 32 are arranged at intervals on the device main body 10 in the vertical direction; the output end of the driving member 31 is drivingly connected to the plurality of swing frames 32.

[0051] Specifically, a plurality of substrate wafers can be placed by the plurality of swing frames 32, and the driving member 31 can drive the plurality of substrate wafers to swing at the same frequency simultaneously, so as to ensure a uniform flushing effect for the plurality of substrate wafers.

[0052] Furthermore, a plurality of water outlets 21 are arranged on the flushing frame 20 from top to bottom; water outlets 21 are arranged in front of each of the swing frames 32 to ensure that the flushing frame 20 can flush the plurality of swing frames 32 simultaneously.

[0053] In one embodiment, the swing assembly 30 further includes: a vertical rod 33 and a plurality of horizontal rods 34; the vertical rod 33 is rotatably arranged on the device main body 10; the plurality of horizontal rods 34 are arranged at intervals on the vertical rod 33 in the vertical direction; the plurality of horizontal rods 34 are fixedly connected to the plurality of swing frames 32 in one-to-one correspondence; the output end of the driving member 31 is drivingly connected to the vertical rod 33.

[0054] That is to say, in this embodiment, the driving member 31 drives the plurality of swing frames 32 to swing reciprocally simultaneously through the vertical rod 33 and the horizontal rods 34. Moreover, the frame structure formed by the vertical rod 33 and the horizontal rods 34 helps to reduce the weight of the intermediate transmission member and save the driving energy consumption of the driving member 31.

[0055] As an implementation manner, the horizontal rod 34 is in a U shape, and the horizontal rod 34 is fixedly connected to both ends of the swing frame 32 in the horizontal direction, which helps to improve the smoothness of the swing of the horizontal rod 34 driving the swing frame 32.

[0056] In one embodiment, an inclined surface 11 is provided on the device main body 10; the swing frame 32 is arranged on the inclined surface 11.

[0057] During the actual flushing process, after the flushing liquid rushes out from the water outlet 21, it will fall on the inclined surface 11 and flow along the inclined surface 11; corresponding to the embodiment in which the plurality of swing frames 32 are arranged at intervals on the device main body 10 in the vertical direction, the flushing liquid on the inclined surface 11 can flow through the plurality of substrate wafers in sequence, thereby improving the utilization rate of the flushing liquid and realizing the use of less flushing liquid under the same cleaning effect.

[0058] At the same time, corresponding to the swing frame 32 on the inclined surface 11, an inclined mounting groove 35 is provided on the swing frame 32; the mounting groove 35 is used for the substrate sheet to be placed obliquely; the inclined substrate sheet, on the one hand, helps to increase the friction between the substrate sheet and the washing liquid to improve the washing effect, and on the other hand, helps the washing liquid on the upper substrate sheet to flow through the lower substrate sheet to further improve the utilization rate of the washing liquid. The mounting groove 35 can penetrate the swing frame 32 in the horizontal direction, so that the swing frame 32 can install substrate sheets of different sizes.

[0059] In one embodiment, the device body 10 includes a support frame 12; the support frame 12 is frame-shaped; the driving member 31 is disposed on the support frame 12. The frame-shaped support frame 12 is conducive to the maintenance of the swing assembly 30, and the flushing device can be moved as a whole when it is necessary to move it.

[0060] As an implementation manner, the device body 10 includes a plurality of support frames 12 ; the plurality of support frames 12 are arranged at intervals in the horizontal direction; the swing assembly 30 includes a plurality of support frames 12 ; and a swing assembly 30 is arranged on each support frame 12 .

[0061] Furthermore, an air charging frame 40 is included; the air charging frame 40 is provided with an air charging port 41 facing the swing frame 32 .

[0062] The air blowing rack 40 can blow air to the substrate sheet after the substrate sheet is rinsed, so as to dry the surface of the substrate sheet.

[0063] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A swing-type flushing device, characterized in that: include: A device body (10), a flushing frame (20) and a swing assembly (30); The swing assembly (30) comprises: a driving member (31) and a swing frame (32); The swing frame (32) is swingably disposed on the device body (10) and is used for mounting a substrate sheet; The output end of the driving member (31) is drivingly connected to the swing frame (32) and is used to drive the swing frame (32) to swing in a horizontal direction; The flushing frame (20) is provided with a water outlet (21) facing the swing frame (32).

2. The swing-type flushing device according to claim 1, characterized in that: The swing assembly (30) comprises a plurality of swing frames (32); A plurality of the swing frames (32) are arranged at intervals on the device body (10) along the vertical direction; The output end of the driving member (31) is drivingly connected to a plurality of the swing frames (32).

3. The swing-type flushing device according to claim 2, characterized in that: The flushing frame (20) is provided with a plurality of water outlets (21) from top to bottom; The water outlet (21) is arranged in front of each swing frame (32).

4. The swing-type flushing device according to claim 2, characterized in that: The swing assembly (30) further comprises: a vertical rod (33) and a plurality of horizontal rods (34); The vertical rod (33) is rotatably arranged on the device body (10); A plurality of the cross bars (34) are arranged on the vertical bars (33) at intervals along the vertical direction; The plurality of cross bars (34) are fixedly connected to the plurality of swing frames (32) in a one-to-one correspondence; The output end of the driving member (31) is drivingly connected to the vertical rod (33).

5. The swing-type flushing device according to claim 4, characterized in that: The cross bar (34) is in a U-shape, and the cross bar (34) is fixedly connected to both ends of the swing frame (32) in a horizontal direction.

6. The swing-type flushing device according to claim 1, characterized in that: The device body (10) is provided with an inclined surface (11); The swing frame (32) is arranged on the inclined surface (11).

7. The swing-type flushing device according to claim 6, characterized in that: The swing frame (32) is provided with an obliquely arranged mounting groove (35); The mounting groove (35) is used for the substrate sheet to be placed obliquely.

8. The oscillating flushing device according to any one of claims 1 to 7, characterized in that: The device body (10) comprises a support frame (12); The support frame (12) is frame-shaped; The driving member (31) is arranged on the supporting frame (12).

9. The swing-type flushing device according to claim 8, characterized in that: The device body (10) comprises a plurality of support frames (12); A plurality of the support frames (12) are arranged at intervals in the horizontal direction; The swing assembly (30) comprises a plurality of; The swing assembly (30) is arranged on each of the support frames (12).

10. The oscillating flushing device according to any one of claims 1 to 7, characterized in that: Also included is an air-filling frame (40); The air charging frame (40) is provided with an air charging port (41) facing the swing frame (32).

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