Substrate slice flushing device

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses a substrate slice flushing device which comprises a device body and a flushing support. A plurality of mounting frames and a plurality of flushing holes are arranged on the device main body; the mounting rack is used for mounting a substrate sheet; the plurality of flushing holes face the plurality of mounting racks in a one-to-one correspondence manner; the flushing bracket is arranged on the side of the device main body; a plurality of nozzles are arranged on the flushing bracket; the multiple nozzles face the multiple mounting frames in a one-to-one correspondence mode. According to the scheme, the flushing hole is located in the inner side of the mounting frame; the nozzle is positioned outside the mounting frame; therefore, the front face and the back face of the substrate slice on the mounting frame can be flushed at the same time through the spray heads and the flushing holes, the procedure of turning over the substrate slice is not needed, the cleaning efficiency of the substrate slice can be effectively improved, and the problem that an existing substrate slice cleaning device is low in cleaning efficiency is solved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a substrate sheet washing device. Background Art

[0002] Indium phosphide substrates are widely used in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices. In the process of manufacturing indium phosphide substrates, the substrate sheet needs to be cleaned, and both the front and back sides of the substrate sheet need to be cleaned during cleaning. Therefore, the existing cleaning device generally cleans one side of the substrate sheet and then turns the substrate sheet over for another cleaning. This method has low cleaning efficiency. Utility Model Content

[0003] In view of this, the purpose of the present application is to provide a substrate sheet washing device to solve the problem of low cleaning efficiency of existing substrate sheet cleaning devices.

[0004] In order to achieve the above technical purpose, the present application provides a substrate sheet washing device, comprising: a device body and a water washing bracket;

[0005] The device body is provided with a plurality of mounting frames and a plurality of flushing holes;

[0006] The mounting frame is used to mount the substrate sheet;

[0007] The flushing hole faces the mounting frame;

[0008] The flushing bracket is arranged beside the device body;

[0009] The flushing bracket is provided with a plurality of spray heads;

[0010] The spray head faces the mounting frame.

[0011] Furthermore, the mounting frame is provided with an obliquely arranged card slot;

[0012] The slot is used for the substrate sheet to be installed obliquely.

[0013] Furthermore, the mounting frame is a U-shaped frame structure.

[0014] Further, it also includes a base and a motor;

[0015] The device body can be rotatably arranged on the base;

[0016] The motor is connected to the device body and is used to drive the device body to rotate on the base.

[0017] Further, the device body includes a bracket;

[0018] The bracket is provided with an inclined surface which is normally inclined upward;

[0019] The mounting frame and the flushing hole are both arranged on an inclined surface.

[0020] Furthermore, the mounting frames are distributed at intervals in a straight line from top to bottom on the inclined surface.

[0021] Furthermore, the bracket is in the shape of a triangular frame.

[0022] Further, the bracket includes a plurality of;

[0023] The plurality of supports are distributed around the circumference.

[0024] Furthermore, the nozzle faces the inclined surface.

[0025] Furthermore, the flushing bracket is movably arranged relative to the device body.

[0026] It can be seen from the above technical scheme that the present application provides a substrate sheet washing device, comprising: a device body and a flushing bracket; the device body is provided with a plurality of mounting frames and a plurality of flushing holes; the mounting frame is used to mount the substrate sheet; the plurality of flushing holes correspond one-to-one to the plurality of mounting frames; the flushing bracket is arranged on the side of the device body; the flushing bracket is provided with a plurality of nozzles; the plurality of nozzles correspond one-to-one to the plurality of mounting frames.

[0027] In this solution, the flushing hole is located on the inner side of the mounting frame; the nozzle is located on the outer side of the mounting frame; therefore, the front and back sides of the substrate sheet on the mounting frame can be flushed simultaneously through the nozzle and the flushing hole, thereby eliminating the need to flip the substrate sheet, effectively improving the cleaning efficiency of the substrate sheet and solving the problem of low cleaning efficiency of existing substrate sheet cleaning devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0029] Figure 1 A schematic diagram of the structure of a substrate sheet washing device provided in an embodiment of the present application;

[0030] Figure 2 A schematic diagram of a mounting frame of a substrate sheet washing device provided in an embodiment of the present application;

[0031] In the figure: 10, device body; 11, mounting frame; 12, flushing hole; 13, slot; 14, bracket; 15, inclined surface; 20, flushing bracket; 21, nozzle; 30, substrate sheet; 40, base; 50, motor; 60, water inlet pipe. DETAILED DESCRIPTION

[0032] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0033] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0034] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0035] See also Figure 1 A substrate sheet washing device provided in an embodiment of the present application includes: a device body 10 and a flushing bracket 20.

[0036] The device body 10 is provided with a plurality of mounting frames 11 and a plurality of flushing holes 12. The mounting frames 11 are used to mount the substrate sheet 30; and the flushing holes 12 face the mounting frames 11.

[0037] The flushing bracket 20 is disposed beside the device body 10 ; a plurality of spray heads 21 are disposed on the flushing bracket 20 ; the spray heads 21 face the mounting frame 11 .

[0038] In this embodiment, the flushing holes 12 correspond to the mounting frame 11 one by one, or multiple flushing holes 12 correspond to one mounting frame; similarly, the spray heads 21 correspond to the mounting frame 11 one by one, or multiple spray heads 21 correspond to one mounting frame. Specifically, the inner side and outer side of each mounting frame 11 are respectively provided with flushing holes 12 and spray heads 12. In this embodiment, the inner side of the mounting frame 11 refers to the side of the mounting frame 11 close to the device body 10; correspondingly, the outer side of the mounting frame 11 refers to the side of the mounting frame 11 away from the device body 10.

[0039] A water inlet pipe 60 is provided on the device body 10; the water inlet pipe 60 is connected to each flushing hole 12, so that water can be sprayed to the inner side of the mounting frame 11 through the flushing holes 12, so as to clean the inner side surface of the substrate sheet 30 on the mounting frame 11; at the same time, the outer side surface of the substrate sheet 30 on the mounting frame 11 can be cleaned through the nozzle 21, so that the inner side surface and the outer side surface of the substrate sheet 30 can be cleaned simultaneously, which can effectively improve the cleaning efficiency of the substrate sheet 30.

[0040] See also Figure 2 The mounting frame 11 is provided with an inclined slot 13 ; the slot 13 is used for the substrate sheet 30 to be installed obliquely.

[0041] Specifically, after the substrate sheet 30 is installed in the substrate sheet washing device provided in this embodiment, the substrate sheet 30 is inclined relative to the vertical surface, so that when the substrate sheet 30 is washed, water will flow along the inclined surface of the substrate sheet 30 and take away the dust on the surface of the substrate sheet 30. When the substrate sheet 30 is placed vertically, the friction between the water washed into the substrate sheet 30 and the substrate sheet 30 is low, so the dust on the substrate sheet 30 is mainly ejected by water pressure during the washing process. In this solution, the method of placing the substrate sheet 30 at an angle can increase the water and friction during the washing process, which helps the water to flow downward along the surface of the substrate sheet 30, so that the impurities on the surface of the substrate sheet can be cleaned more effectively.

[0042] As an implementation mode, the mounting frame 11 is a U-shaped frame structure, which can reduce the contact area between the mounting frame 11 and the substrate sheet 30 and improve the cleaning effect on the substrate sheet 30.

[0043] In one embodiment, it further includes a base 40 and a motor 50 ; the device body 10 is rotatably disposed on the base 40 ; the motor 50 is connected to the device body 10 and is used to drive the device body 10 to rotate on the base 40 .

[0044] The base 40 and the motor 50 can drive the device body 10 to rotate on the base 40 to spin dry the cleaned substrate sheet 30 .

[0045] In a more specific embodiment, the device body 10 includes a bracket 14; a normal inclined upward inclined surface 15 is provided on the bracket 14; the mounting frame 11 and the flushing hole 12 are both provided on the inclined surface 15. The inclined surface 15 is provided inclined relative to the vertical surface.

[0046] By setting the mounting frame 11 on the inclined surface 15, during the flushing process, the water on the upper substrate sheet 30 will flow from top to bottom onto the lower substrate sheet 30, which can increase the amount of water contacted by the lower substrate sheet 30, thereby achieving a better cleaning effect with the same amount of water.

[0047] As a further improvement, the mounting frames 11 are arranged on the inclined surface 15 in a straight line from top to bottom, which helps the water passing through the upper substrate sheet 30 to flow to the lower substrate sheet.

[0048] As an implementation mode, the bracket 14 is in a triangular frame shape, which helps to reduce the material used for the bracket 14 and reduce the overall weight of the device body 10 .

[0049] In one embodiment, the support 14 includes a plurality of supports 14 ; the plurality of supports 14 are distributed around the circumference.

[0050] In use, the nozzle 21 faces the inclined surface 15. Specifically, the water sprayed by the nozzle 21 toward the substrate sheet 30 will impact the inclined outer surface of the substrate sheet 30, then flow downward along the outer side of the substrate sheet 30, and flow out of the device body 10 after passing the substrate sheet 30 below.

[0051] In one embodiment, the flush bracket 20 is movably arranged relative to the device body 10. The flush bracket 20 can be arranged to be able to rotate or slide relative to the device body 10, so that the flush bracket 20 can be moved away when the substrate sheet 30 is installed, which is helpful for the disassembly and installation of the substrate sheet 30.

[0052] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A substrate sheet washing device, characterized in that: include: A device body (10) and a flushing bracket (20); The device body (10) is provided with a plurality of mounting frames (11) and a plurality of flushing holes (12); The mounting frame (11) is used to mount the substrate sheet (30); The flushing hole (12) faces the mounting frame (11); The flushing bracket (20) is arranged beside the device body (10); The flushing bracket (20) is provided with a plurality of spray heads (21); The spray head (21) faces the mounting frame (11).

2. The substrate sheet washing device according to claim 1, characterized in that: The mounting frame (11) is provided with an inclined card slot (13); The card slot (13) is used for the substrate sheet (30) to be installed at an angle.

3. The substrate sheet washing device according to claim 1, characterized in that: The mounting frame (11) is a U-shaped frame structure.

4. The substrate sheet washing device according to claim 1, characterized in that: Also includes a base (40) and a motor (50); The device body (10) is rotatably disposed on the base (40); The motor (50) is connected to the device body (10) and is used to drive the device body (10) to rotate on the base (40).

5. The substrate sheet washing device according to claim 1, characterized in that: The device body (10) comprises a bracket (14); The bracket (14) is provided with an inclined surface (15) which is inclined normally and faces upward; The mounting frame (11) and the flushing hole (12) are both arranged on an inclined surface (15).

6. The substrate sheet washing device according to claim 5, characterized in that: The mounting frames (11) are distributed at intervals in a straight line from top to bottom on the inclined surface (15).

7. The substrate sheet washing device according to claim 5, characterized in that: The bracket (14) is in the shape of a triangular frame.

8. The substrate sheet washing device according to any one of claims 5 to 7, characterized in that: The bracket (14) comprises a plurality of; The plurality of brackets (14) are distributed around the circumference.

9. The substrate sheet washing device according to claim 5, characterized in that: The nozzle (21) faces the inclined surface (15).

10. The substrate sheet washing device according to claim 1, characterized in that: The flushing bracket (20) is movably arranged relative to the device body (10).

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