Quartz intake and exhaust pipe cleaning tank

Abstract

The utility model discloses a quartz intake and exhaust pipe cleaning tank which comprises a tank body, the tank body is provided with a cleaning cavity, the bottom of the cleaning cavity is provided with a placing assembly, the placing assembly comprises a plurality of placing pieces, the placing pieces are all provided with placing faces used for placing quartz intake and exhaust pipes, the placing faces of the placing pieces are different in height, and the placing faces of the placing pieces are arranged on the cleaning cavity. And the quartz gas inlet and exhaust pipe is obliquely arranged. The utility model provides a quartz air inlet and exhaust pipe cleaning tank which can automatically discharge quartz air inlet and exhaust pipe cleaning liquid.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz inlet and exhaust pipe cleaning tank devices, in particular to a quartz inlet and exhaust pipe cleaning tank. Background Art

[0002] Quartz inlet and exhaust pipes are special industrial technical glass made of silicon dioxide, which is a very good basic material. Due to its excellent physical and chemical properties, quartz inlet and exhaust pipe glass is widely used in various fields such as electric light sources, semiconductors, optical communications, military industry, metallurgy, building materials, machinery, electricity, environmental protection, etc. Quartz inlet and exhaust pipes are used in the oxidation furnace equipment of the semiconductor diffusion process, and they will be cleaned during use. Because the quartz inlet and exhaust pipes have a complex structure and a brittle texture, and the hollow quartz inlet and exhaust pipes are easy to float due to their low density during cleaning, resulting in collision with the tank body and damage, so designing a quartz inlet and exhaust pipe cleaning tank has become a very critical step.

[0003] Currently, existing quartz inlet and exhaust pipes are directly cleaned by immersion in chemical liquid. However, since the quartz inlet and exhaust pipes are hollow devices and there are small quartz inlet and exhaust pipe components at the top and tail ends, it is very easy to cause the quartz inlet and exhaust pipes to be damaged due to density floating problems during cleaning. At the end of cleaning, there is residual acid in the quartz inlet and exhaust pipes that cannot be discharged. People need to manually tilt the quartz inlet and exhaust pipes, increasing the risk of people contacting acid. Therefore, the above problems need to be solved urgently. Utility Model Content

[0004] In order to overcome the deficiency of the prior art that workers need to manually tilt the inlet and exhaust pipes to adapt to the inlet and exhaust pipes, the utility model provides a quartz inlet and exhaust pipe cleaning tank, which has the advantages of automatically discharging the cleaning liquid in the quartz inlet and exhaust pipes.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A quartz inlet and exhaust pipe cleaning tank comprises a tank body, wherein the tank body is provided with a cleaning cavity, a placement assembly is provided at the bottom of the cleaning cavity, the placement assembly comprises a plurality of placement pieces, each of the plurality of placement pieces is provided with a placement surface for placing the quartz inlet and exhaust pipes, and the placement surfaces of the plurality of placement pieces have different heights so that the quartz inlet and exhaust pipes can be placed at an angle.

[0007] By adopting the above-mentioned technical solution, it can be known that the placement component is composed of a plurality of placement pieces, each of which is provided with a placement surface for placing quartz inlet and exhaust pipes, and the heights of the placement surfaces are different, so that the quartz inlet and exhaust pipes placed thereon can form a certain inclination angle. Since the quartz inlet and exhaust pipes are placed at an angle, the cleaning liquid can flow more easily along the inner and outer surfaces of the quartz inlet and exhaust pipes under the action of gravity, which not only improves the cleaning effect, but also allows the inclined quartz inlet and exhaust pipes to allow the residual liquid generated during the cleaning process to flow out naturally along the inclined surface, avoiding manual tilting of the quartz inlet and exhaust pipes, improving operating efficiency and reducing the risk of personnel contact with the cleaning liquid.

[0008] Furthermore, both sides of the placement surface extend upward so that the placement surface forms a structure that is low in the middle and high at both ends, so as to limit the position of the quartz inlet and exhaust pipes.

[0009] By adopting the above-mentioned technical solution, it can be seen that the structure extending upward on both sides of the placement surface forms a limiting boundary, which makes it difficult for the quartz inlet and exhaust pipes to shift or roll during the cleaning process, ensuring the smooth progress of the cleaning process and avoiding the quartz inlet and exhaust pipes from being damaged due to movement. At the same time, it can also ensure that the quartz inlet and exhaust pipes remain stable during the cleaning process to prevent damage due to floating or collision.

[0010] Furthermore, the placement surface is provided with an anti-slip flexible member.

[0011] By adopting the above-mentioned technical scheme, it can be known that the anti-slip flexible part can effectively prevent the quartz inlet and exhaust pipes from directly colliding with the hard placement surface during the placement or cleaning process, thereby reducing the loss and damage of the quartz inlet and exhaust pipes. The buffering effect provided by the flexible part can protect the integrity of the quartz inlet and exhaust pipes. The anti-slip can increase the friction between the quartz inlet and exhaust pipes and the placement surface, thereby enhancing the stability of the quartz inlet and exhaust pipes during the cleaning process, and can reduce the movement and shaking of the quartz inlet and exhaust pipes during the cleaning process, ensuring that the cleaning process is smoother and more reliable, and reducing losses.

[0012] Furthermore, the placement component is rigidly connected to the bottom of the cleaning chamber.

[0013] By adopting the above-mentioned technical solution, it can be known that the rigid connection can make the connection part between the placement component and the bottom of the cleaning chamber not easy to deform and can remain stable. Due to the rigid connection, the connection between the placement component and the bottom of the cleaning chamber is more secure and not easy to loosen or move, ensuring that during the cleaning process, the placement component can maintain its preset position and angle, ensuring the stable placement of the quartz inlet and exhaust pipes. At the same time, the rigid connection reduces the maintenance needs caused by looseness or deformation of the connection part, thereby reducing maintenance costs.

[0014] Furthermore, a clamping assembly is provided on the side wall of the cleaning chamber, and the axis of the clamping assembly is perpendicular to the axis of the placement assembly.

[0015] By adopting the above-mentioned technical solution, it can be known that when the axis of the clamping assembly is perpendicular to the axis of the placement assembly, it can ensure that the clamping force is applied along the radial direction of the quartz inlet and exhaust pipes. This radial clamping force can be evenly distributed around the quartz inlet and exhaust pipes, thereby providing the best clamping effect, which can effectively prevent the quartz inlet and exhaust pipes from shaking or moving during the cleaning process. The stable clamping effect ensures that the quartz inlet and exhaust pipes remain in a fixed position during the cleaning process.

[0016] Furthermore, the clamping assembly includes a left clamping piece and a right clamping piece, the left clamping piece is arranged opposite to the right clamping piece, the left clamping piece is fixedly connected to the side wall of the cleaning chamber, and the right clamping piece is provided with an adjusting rod, the adjusting rod passes through the side wall of the cleaning chamber, and a handle is provided at one end outside the cleaning chamber, and the length of the adjusting rod placed in the cleaning chamber is controlled by the handle to change the gap between the left clamping piece and the right clamping piece.

[0017] By adopting the above-mentioned technical solution, it can be known that since the right clamping piece is provided with an adjustable adjustment rod, the cleaning tank can adapt to quartz inlet and exhaust pipes of different sizes and shapes, thereby improving the versatility and flexibility of the equipment. The staff can easily adjust the length of the adjustment rod through the handle according to the diameter of the quartz inlet and exhaust pipes, thereby adjusting the gap between the left clamping piece and the right clamping piece to ensure that the quartz inlet and exhaust pipes are firmly clamped. The adjustment process is simpler by adjusting the handle. The staff can quickly complete the adjustment of the clamping piece without complicated tools or operations, thereby improving work efficiency. By accurately adjusting the gap of the clamping piece, it can be ensured that the quartz inlet and exhaust pipes will neither be damaged by over-tightening nor shake due to looseness during the cleaning process, which helps to protect the quartz inlet and exhaust pipes and extend their service life.

[0018] Furthermore, the left clamping member is detachably connected to the side wall of the cleaning chamber.

[0019] By adopting the above technical solution, it can be seen that since the left clamping piece is detachably connected to the side wall of the cleaning chamber, when the clamping piece or the side wall is damaged or needs to be repaired, the left clamping piece can be easily removed from the side wall for separate repair or replacement. This design greatly simplifies the maintenance process and improves maintenance efficiency. The detachable connection allows the installation angle of the left clamping piece to be adjusted within a certain range, so that the cleaning tank can adapt to different installation environments or the placement angle requirements of the quartz inlet and exhaust pipes, increasing the adaptability and flexibility of the equipment.

[0020] Furthermore, the side wall of the cleaning chamber also includes a support member, which supports the adjusting rod. The support member is provided with a through hole for the adjusting rod to pass through, and the adjusting rod is slidably matched with the through hole.

[0021] By adopting the above-mentioned technical solution, it can be known that the side wall of the cleaning chamber is provided with a support member for supporting the adjusting rod. When the adjusting rod is adjusted in length by the handle to change the gap between the left clamping member and the right clamping member, the support member can provide additional support for the adjusting rod, which can significantly reduce the shaking of the adjusting rod when clamping the quartz inlet and exhaust pipes, thereby enhancing the stability of the cleaning tank during operation. By improving the stability of the cleaning tank, the quartz inlet and exhaust pipes can be prevented from colliding with the cleaning tank or the clamping member due to shaking during the cleaning process, thereby reducing damage to the quartz inlet and exhaust pipes.

[0022] Furthermore, a liquid inlet assembly is provided in the cleaning tank, and the liquid inlet assembly includes a liquid inlet pipe and a nozzle. The nozzle is detachably mounted on the liquid inlet pipe, the liquid inlet pipe runs through the side wall of the cleaning chamber, and the nozzle is linearly arranged along the liquid inlet pipe.

[0023] By adopting the above-mentioned technical solution, it can be seen that the design of the linear arrangement of the nozzles along the liquid inlet pipe enables the cleaning liquid to be sprayed onto the surface of the quartz inlet and exhaust pipes in a more uniform manner. Compared with the single-point or scattered nozzle layout, the linearly arranged nozzles can cover a wider area, ensuring that all parts of the quartz inlet and exhaust pipes can be fully cleaned. The uniform flushing method helps the cleaning liquid to quickly and effectively remove dirt and impurities on the surface of the quartz inlet and exhaust pipes, which can reduce the cleaning time and improve the cleaning effect. The detachable design of the nozzle makes the maintenance of the cleaning tank more convenient. When the nozzle is damaged or needs to be replaced, the staff can easily remove the old nozzle and install a new nozzle without replacing or repairing the entire liquid inlet assembly.

[0024] Furthermore, a pneumatic valve is provided at the bottom of the cleaning tank.

[0025] By adopting the above-mentioned technical solution, it can be seen that the pneumatic valve has the characteristic of rapid response. When the liquid in the cleaning tank needs to be discharged, the valve can be quickly opened through the pneumatic device to allow the cleaning liquid to flow out quickly. This rapid discharge method greatly improves work efficiency and reduces waiting time. At the same time, pneumatic valves usually have corrosion resistance and high temperature resistance. They can adapt to the corrosion or high temperature environment that may be caused by the liquid in the cleaning tank, avoid the safety risks that may be caused by direct contact with the liquid, and improve the safety of the entire cleaning process.

[0026] The beneficial effects of the utility model are: (1) automatically discharging the cleaning liquid in the quartz inlet and exhaust pipes; and (2) making the quartz inlet and exhaust pipes more stable during the cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of the utility model;

[0028] Figure 2It is a structural schematic diagram of the right clamping piece of the utility model.

[0029] In the figure: 1. tank body; 11. cleaning chamber; 12. placement assembly; 121. placement surface; 13. left clamping member; 14. right clamping member; 141. adjustment rod; 142. handle; 143. support member; 15. clamping head; 16. liquid inlet pipe; 17. nozzle; 18. pneumatic valve. DETAILED DESCRIPTION

[0030] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0031] Embodiment 1:

[0032] like Figure 1 As shown, the utility model provides a quartz inlet and exhaust pipe cleaning tank, including a tank body 1, the tank body 1 is provided with a cleaning chamber 11, the bottom of the cleaning chamber 11 is provided with a placement component 12, the placement component 12 includes two placement pieces, both of which are provided with a placement surface 121 for placing the quartz inlet and exhaust pipes, and the placement surfaces 121 of the two placement pieces have different heights to form an inclined surface for the quartz inlet and exhaust pipes to be placed obliquely.

[0033] It can be understood that in the present embodiment, the placement component 12 is composed of two placement pieces, each of which is provided with a placement surface 121 for placing the quartz inlet and exhaust pipes. The heights of the placement surfaces 121 are different, so that the quartz inlet and exhaust pipes placed thereon can form a certain inclination angle. Since the quartz inlet and exhaust pipes are placed at an angle, the cleaning liquid can flow more easily along the surface of the quartz inlet and exhaust pipes under the action of gravity, which not only improves the cleaning effect, but also allows the inclined quartz inlet and exhaust pipes to allow the residual liquid generated during the cleaning process to flow out naturally along the inclined surface, avoiding manual tilting of the quartz inlet and exhaust pipes, improving operating efficiency and reducing the risk of personnel contact with the cleaning liquid.

[0034] In one embodiment, both sides of the placement surface 121 extend upward so that the placement surface 121 forms a structure with a low middle and high ends to limit the quartz inlet and exhaust pipes.

[0035] Preferably, the limiting structure which is low in the middle and high at both ends is an arc-shaped semi-wrapped structure.

[0036] It can be understood that the structure extending upward on both sides of the placement surface 121 forms a limiting boundary, which makes it difficult for the quartz inlet and exhaust pipes to shift or roll during the cleaning process, ensuring the smooth progress of the cleaning process and avoiding the quartz inlet and exhaust pipes from being damaged due to movement. At the same time, it can also ensure that the quartz inlet and exhaust pipes remain stable during the cleaning process to prevent damage due to floating or collision.

[0037] Preferably, the placement surface 121 is provided with an anti-slip flexible member.

[0038] Preferably, the anti-slip flexible member may be made of rubber or TPE.

[0039] It can be understood that the anti-slip flexible part can effectively prevent the quartz inlet and exhaust pipes from directly colliding with the hard placement surface 121 during the placement or cleaning process, thereby reducing the loss and damage of the quartz inlet and exhaust pipes. The buffering effect provided by the flexible part can protect the integrity of the quartz inlet and exhaust pipes. The anti-slip can increase the friction between the quartz inlet and exhaust pipes and the placement surface 121, thereby enhancing the stability of the quartz inlet and exhaust pipes during the cleaning process, and can reduce the movement and shaking of the quartz inlet and exhaust pipes during the cleaning process, ensuring that the cleaning process is smoother and more reliable, and reducing losses.

[0040] Preferably, the placement component 12 is rigidly connected to the bottom of the cleaning chamber 11 .

[0041] Preferably, the placement component 12 and the bottom of the cleaning chamber 11 can be connected by welding or bolts.

[0042] It can be understood that the rigid connection can make the connection part between the placement component 12 and the bottom of the cleaning chamber 11 not easily deformed and can remain stable. Due to the rigid connection, the connection between the placement component 12 and the bottom of the cleaning chamber 11 is more secure and not easy to loosen or move, ensuring that during the cleaning process, the placement component 12 can maintain its preset position and angle, ensuring the stable placement of the quartz inlet and exhaust pipes. At the same time, the rigid connection reduces the maintenance needs caused by looseness or deformation of the connection part, thereby reducing maintenance costs.

[0043] It can be understood that if the placement component 12 is connected to the bottom of the cleaning chamber 11 by bolts, it can also ensure that a stable structure is formed between the placement component 12 and the bottom of the cleaning chamber 11 to prevent loosening or displacement due to vibration or impact. At the same time, the connection or separation can be completed by tightening or loosening the bolts, making the installation and disassembly of the placement component 12 relatively simple and convenient, and facilitating daily maintenance and replacement. The number of placement components 12 can be adjusted for quartz inlet and exhaust pipes of different sizes and models. This detachable connection method can enhance the versatility of the cleaning tank.

[0044] In another embodiment, refer to Figure 2 A clamping assembly is also provided on the side wall of the cleaning chamber 11 , and the axis of the clamping assembly is perpendicular to the axis of the placement assembly 12 .

[0045] It can be understood that when the axis of the clamping assembly is perpendicular to the axis of the placement assembly 12, it can ensure that the clamping force is applied along the radial direction of the quartz inlet and exhaust pipes. This radial clamping force can be evenly distributed around the quartz inlet and exhaust pipes, thereby providing the best clamping effect, which can effectively prevent the quartz inlet and exhaust pipes from shaking or moving during the cleaning process. The stable clamping effect ensures that the quartz inlet and exhaust pipes remain in a fixed position during the cleaning process.

[0046] Furthermore, the clamping assembly includes a left clamping piece 13 and a right clamping piece 14, the left clamping piece 13 and the right clamping piece 14 are arranged opposite to each other, the left clamping piece 13 is fixedly connected to the side wall of the cleaning chamber 11, and the right clamping piece 14 is provided with an adjusting rod 141, the adjusting rod 141 passes through the side wall of the cleaning chamber, and a handle 142 is provided at one end outside the cleaning chamber. The handle 142 is used to control the length of the adjusting rod 141 placed in the cleaning chamber 11 to change the gap between the left clamping piece 13 and the right clamping piece 14.

[0047] It can be understood that since the right clamping piece 14 is provided with an adjustable adjustment rod 141, the cleaning tank can adapt to quartz inlet and exhaust pipes of different sizes and shapes, thereby improving the versatility and flexibility of the equipment. The staff can easily adjust the length of the adjustment rod 141 through the handle 142 according to the diameter of the quartz inlet and exhaust pipes, thereby adjusting the gap between the left clamping piece 13 and the right clamping piece 14 to ensure that the quartz inlet and exhaust pipes are firmly clamped. The adjustment method of the handle 142 makes the adjustment process simpler. The staff can quickly complete the adjustment of the clamping piece without complicated tools or operations, thereby improving work efficiency. By accurately adjusting the gap of the clamping piece, it can be ensured that the quartz inlet and exhaust pipes will neither be damaged by over-tightening nor shake due to looseness during the cleaning process, which helps to protect the quartz inlet and exhaust pipes and extend their service life.

[0048] Preferably, since the adjustment rod 141 passes through the side wall of the cleaning chamber, a sealing ring is added at the penetration point to ensure that there is no leakage during the cleaning process. The sealing ring can be a flexible sealing ring that can fill the gap between the adjustment rod 141 and the penetration point to make it more stable.

[0049] Preferably, the adjusting rod 141 is made of plastic, specifically polytetrafluoroethylene.

[0050] Preferably, a clamping head 15 is provided at the clamping position of the clamping assembly and the adapting tube, and a clamping surface for clamping the quartz inlet and exhaust pipes is provided on the clamping head 15, and the clamping surface is an arc-shaped semi-wrapped structure, and an anti-slip flexible part is provided on the clamping surface, and the material of the anti-slip flexible part can be rubber or TPE.

[0051] Preferably, the clamping head 15 is detachably connected to the clamping assembly, specifically by threaded fitting or snap-on connection. This detachable connection can adjust the angle of the clamping head 15 according to quartz inlet and exhaust pipes of different sizes. At the same time, this connection method also simplifies the replacement and installation process of the clamping head 15 and improves work efficiency.

[0052] In another embodiment, the left clamping member 13 is detachably connected to the side wall of the cleaning chamber 11 .

[0053] It is understandable that, since the left clamping member 13 is detachably connected to the side wall of the cleaning chamber 11, when the clamping member or the side wall is damaged or needs to be repaired, the left clamping member 13 can be easily removed from the side wall for separate repair or replacement. This design greatly simplifies the repair process and improves the repair efficiency. The detachable connection allows the left clamping member 13 to adjust its installation angle within a certain range, so that the cleaning tank can adapt to different installation environments or the placement angle requirements of the quartz inlet and exhaust pipes, increasing the adaptability and flexibility of the equipment.

[0054] Preferably, the left clamping member 13 and the side wall of the cleaning chamber 11 may be bolted or clamped.

[0055] Preferably, the cleaning chamber side wall further comprises a support member, the support member supports the adjusting rod, the support member is provided with a through hole for the adjusting rod to pass through, and the adjusting rod is slidably fitted in the through hole.

[0056] It can be understood that the side wall of the cleaning chamber is preferably provided with a support member for supporting the adjusting rod. When the adjusting rod is adjusted in length by the handle to change the gap between the left clamping member and the right clamping member, the support member can provide additional support for the adjusting rod, which can significantly reduce the shaking of the adjusting rod when clamping the quartz inlet and exhaust pipes, thereby enhancing the stability of the cleaning tank during operation. By improving the stability of the cleaning tank, the quartz inlet and exhaust pipes can be prevented from colliding with the cleaning tank or the clamping member due to shaking during the cleaning process, thereby reducing damage to the quartz inlet and exhaust pipes.

[0057] Preferably, the adjusting rod 141 is provided with threads, and the extension length of the adjusting rod 141 can be changed by screwing the threads in.

[0058] Preferably, the adjustment rod 141 is made of plastic, specifically polytetrafluoroethylene.

[0059] Preferably, the support member 143 is configured as a support block, which is placed between the handle 142 and the thread and is slidably connected to the adjustment rod 141 .

[0060] Embodiment 2:

[0061] On the basis of Example 1, a liquid inlet assembly is provided in the cleaning tank, and the liquid inlet assembly includes a liquid inlet pipe 16 and a nozzle 17. The nozzle 17 is detachably installed on the liquid inlet pipe 16. The liquid inlet pipe 16 passes through the side wall of the cleaning chamber 11, and the nozzle 17 is linearly arranged along the liquid inlet pipe 16.

[0062] It can be understood that the design of the linear arrangement of the nozzles 17 along the liquid inlet pipe 16 enables the cleaning liquid to be sprayed onto the surface of the quartz inlet and exhaust pipes in a more uniform manner. Compared with the single-point or dispersed layout of the nozzles 17, the linearly arranged nozzles 17 can cover a wider area, ensuring that all parts of the quartz inlet and exhaust pipes can be fully cleaned. The uniform flushing method helps the cleaning liquid to quickly and effectively remove dirt and impurities on the surface of the quartz inlet and exhaust pipes, which can reduce the cleaning time and improve the cleaning effect. The detachable design of the nozzle 17 makes the maintenance of the cleaning tank more convenient. When the nozzle 17 is damaged or needs to be replaced, the staff can easily remove the old nozzle 17 and install a new nozzle 17 without replacing or repairing the entire liquid inlet assembly.

[0063] Preferably, there are two groups of liquid inlet components, which are arranged opposite to each other and respectively placed on the upper side walls of the cleaning chamber 11.

[0064] Preferably, the nozzle 17 is connected to the liquid inlet pipe 16 via threads.

[0065] Preferably, a pneumatic valve 18 is provided at the bottom of the cleaning tank.

[0066] It can be understood that the pneumatic valve 18 has the characteristic of quick response. When the liquid in the cleaning tank needs to be discharged, the valve can be quickly opened through the pneumatic device to allow the cleaning liquid to flow out quickly. This quick discharge method greatly improves work efficiency and reduces waiting time. At the same time, the pneumatic valve 18 usually has corrosion resistance and high temperature resistance. It can adapt to the corrosion or high temperature environment that may be caused by the liquid in the cleaning tank, avoids the safety risks that may be caused by direct contact with the liquid, and improves the safety of the entire cleaning process.

[0067] In addition to the above-mentioned preferred embodiments, the present invention also has other implementation modes. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection requested by the present invention.

Claims

1. A quartz inlet and exhaust pipe cleaning tank, characterized in that: It comprises a trough body, the trough body is provided with a cleaning chamber, a placement component is provided at the bottom of the cleaning chamber, the placement component comprises a plurality of placement pieces, the plurality of placement pieces are all provided with a placement surface for placing quartz inlet and exhaust pipes, and the placement surfaces of the plurality of placement pieces have different heights so that the quartz inlet and exhaust pipes can be placed at an angle.

2. A quartz inlet and exhaust pipe cleaning tank according to claim 1, characterized in that: Both sides of the placement surface extend upwards so that the placement surface forms a structure with a low middle and high ends for limiting the position of the quartz inlet and outlet pipes.

3. A quartz inlet and exhaust pipe cleaning tank according to claim 1, characterized in that: The placement surface is provided with an anti-slip flexible piece.

4. A quartz inlet and exhaust pipe cleaning tank according to claim 1, characterized in that: The placement assembly is rigidly connected to the bottom of the cleaning chamber.

5. The quartz inlet and exhaust pipe cleaning tank according to claim 1, characterized in that: A clamping assembly is provided on the side wall of the cleaning chamber, and the axis of the clamping assembly is perpendicular to the axis of the placement assembly.

6. A quartz inlet and exhaust pipe cleaning tank according to claim 5, characterized in that: The clamping assembly includes a left clamping piece and a right clamping piece, the left clamping piece is arranged opposite to the right clamping piece, the left clamping piece is fixedly connected to the side wall of the cleaning chamber, and the right clamping piece is provided with an adjusting rod, the adjusting rod passes through the side wall of the cleaning chamber, and a handle is provided at one end outside the cleaning chamber. The length of the adjusting rod placed in the cleaning chamber is controlled by the handle to change the gap between the left clamping piece and the right clamping piece.

7. A quartz inlet and exhaust pipe cleaning tank according to claim 6, characterized in that: The left clamping piece is detachably connected to the side wall of the cleaning chamber.

8. A quartz inlet and exhaust pipe cleaning tank according to claim 6, characterized in that: The cleaning chamber side wall also includes a support member, which supports the adjusting rod. The support member is provided with a through hole for the adjusting rod to pass through, and the adjusting rod is slidably matched with the through hole.

9. A quartz inlet and exhaust pipe cleaning tank according to claim 1, characterized in that: A liquid inlet assembly is provided in the cleaning tank, and the liquid inlet assembly includes a liquid inlet pipe and a nozzle. The nozzle is detachably mounted on the liquid inlet pipe, the liquid inlet pipe runs through the side wall of the cleaning chamber, and the nozzles are linearly arranged along the liquid inlet pipe.

10. The quartz inlet and exhaust pipe cleaning tank according to claim 1, characterized in that: A pneumatic valve is arranged at the bottom of the cleaning tank.

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