Air inlet mechanism and film preparation device

Abstract

The air inlet mechanism comprises an air inlet part and a pipeline assembly, an air inlet cavity is formed in the air inlet part, at least two air inlets are formed in the outer side wall of the air inlet part, a plurality of air outlets are formed in the inner side wall of the air inlet part in the circumferential direction, and the air inlets and the air outlets communicate with the air inlet cavity; the pipeline assembly comprises at least two pipeline sets and a main pipeline, the first ends of the pipeline sets communicate with the main pipeline, and the second ends of the pipeline sets communicate with at least one air inlet. The pipeline group comprises straight pipe parts and bent parts, and the plurality of straight pipe parts and / or bent parts form a plurality of gas transmission lines, so that the gas flow rates of the gas inlets corresponding to the gas transmission lines are consistent. According to the gas inlet mechanism, the gas inlet uniformity of the gas inlet part can be improved through the gas inlets with the consistent gas flow speed, the flow speed difference between different gas outlets is reduced, then the uniformity of a gas flow field is improved, and therefore the deposition process effect and the process stability are improved.

Description

Technical Field

[0001] The present application relates to the technical field of thin film preparation devices, and in particular to an air intake mechanism and a thin film preparation device. Background Art

[0002] The gas phase deposition equipment includes an air inlet component, which realizes the uniformity of the gas flow field by setting multiple air outlets. However, in the prior art, the air inlet component usually has only one air inlet. When the air inlet takes in air, the air flow passes through multiple air outlets and is discharged during the flow. The gas flow rate of the air outlet decreases as the distance from the air inlet increases, which leads to obvious differences in gas flow rates between different air outlets, thereby affecting the effect and stability of the deposition process. Utility Model Content

[0003] The present application provides an air intake mechanism and a thin film preparation device to solve the technical problem that the air intake flange in the vapor deposition equipment usually has only one air inlet, and when the air is taken in through the air inlet and passes through multiple air outlets in sequence, the gas flow rate at the air outlet gradually decreases, which leads to obvious differences in gas flow rates between different air outlets, thereby affecting the effect and stability of the deposition process.

[0004] In order to solve the above-mentioned technical problems, the present application proposes an air intake mechanism, including: an air intake member, an air intake cavity is provided inside the air intake member, at least two air inlets are provided on the outer wall of the air intake member, and a plurality of air outlets are circumferentially provided on the inner wall of the air intake member, and both the air inlet and the air outlet are connected to the air intake cavity; a pipeline assembly, including at least two pipeline groups and a main pipeline, a first end of the pipeline group is connected to the main pipeline, and a second end of the pipeline group is connected to at least one air inlet; the pipeline group includes a straight pipe portion and a bent portion, and the plurality of straight pipe portions and / or bent portions constitute a plurality of gas transmission lines, so that the gas flow rate of the air inlet corresponding to each gas transmission line is consistent.

[0005] Wherein, at least part of the pipeline group is a multi-stage bifurcated structure.

[0006] Among them, at least one pipeline group includes: a first air pipe; a second air pipe, the second air pipe is connected to the air inlet, one end of a single first air pipe is connected to at least two second air pipes, and the other end is connected to the main pipeline.

[0007] Among them, the number of air inlets is an even multiple of the number of pipeline groups, and at least one bifurcation point is provided on the pipeline group, and the bifurcation point is located at the connection position of the second air pipe and the first air pipe; the gas transmission line is divided into two when passing through the bifurcation point.

[0008] Among them, the pipeline group structure located downstream of the bifurcation point gas path is symmetrically distributed about the axis of the pipe body connected to the upstream of the bifurcation point gas path.

[0009] The air outlet is correspondingly arranged near the air inlet.

[0010] The plurality of air outlets are evenly distributed near each of the air inlets.

[0011] Wherein, a plurality of air inlets are evenly arranged in the circumferential direction of the outer wall of the air inlet member.

[0012] Wherein, a plurality of air outlets are evenly arranged in the circumferential direction of the inner wall of the air inlet member.

[0013] Among them, the number of air outlets is greater than or equal to 19 and less than or equal to 53.

[0014] To solve the above technical problems, the present application proposes a thin film preparation device, comprising: the above-mentioned air intake mechanism; a cavity, the cavity is used to prepare the thin film, the cavity comprises a first end and a second end arranged opposite to each other, and the air intake mechanism is located at the first end and / or the second end.

[0015] The beneficial effect of the present application is as follows: Different from the prior art, the present application provides an air intake mechanism. The air intake mechanism includes an air intake member and a pipeline assembly. An air intake cavity is provided inside the air intake member. The outer wall of the air intake member is provided with at least two air inlets. The inner wall of the air intake member is provided with a plurality of air outlets in a circumferential direction. Both the air inlet and the air outlet are connected to the air intake cavity. The pipeline assembly includes at least two pipeline groups and a main pipeline. The first end of the pipeline group is connected to the main pipeline. The second end of the pipeline group is connected to at least one air inlet. The pipeline group includes a straight pipe portion and a bent portion. Multiple straight pipe portions and / or multiple bent portions constitute multiple gas transmission lines so that the gas flow rate of the air inlet corresponding to each gas transmission line is consistent. Multiple air inlets with consistent gas flow rates can improve the air intake uniformity of the air intake member, reduce the flow rate difference between different air outlets, and thereby improve the uniformity of the gas flow field of the air intake mechanism, thereby improving the deposition process effect and process stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0017] Figure 1 It is a structural schematic diagram of the air intake component in the air intake mechanism of the present application;

[0018] Figure 2 It is a structural schematic diagram of the first embodiment of the air intake mechanism of the present application;

[0019] Figure 3 is a structural schematic diagram of a second embodiment of the air intake mechanism of the present application;

[0020] Figure 4is a side view of the air intake member in the air intake mechanism of the present application;

[0021] Figure 5 It is a cross-sectional schematic diagram of the air intake component in the air intake mechanism of the present application.

[0022] Figure numbers: 10, air intake mechanism; 1, air intake member; 11, air inlet; 111, first air inlet; 112, second air inlet; 113, third air inlet; 114, fourth air inlet; 12, air outlet; 13, air intake cavity; 2, pipeline assembly; 21, pipeline group; 211, second air pipe; 2111, second bending portion; 2112, second straight pipe portion; 213, first air pipe; 2131, first bending portion; 2132, first straight pipe portion; 214, bifurcation point; 21a, second pipeline group; 211a, second air pipe; 213a, first air pipe; 21b, first pipeline group; 211b, second air pipe; 213b, first air pipe; 22, main pipeline. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0025] The following is a detailed description of an air intake mechanism and a thin film preparation device provided by the utility model in conjunction with the embodiments.

[0026] See also Figure 1 , Figure 2 as well as Figure 3 , Figure 1 It is a structural schematic diagram of the air intake component in the air intake mechanism of the present application; Figure 2 It is a structural schematic diagram of the first embodiment of the air intake mechanism of the present application; Figure 31 is a schematic diagram of the structure of the second embodiment of the air intake mechanism of the present application. The present application provides an air intake mechanism 10. The air intake mechanism 10 includes an air intake member 1 and a pipeline assembly 2. An air intake cavity 13 is provided inside the air intake member 1, and the air intake member 1 can specifically be an air intake flange. At least two air intake ports 11 are provided on the outer wall of the air intake member 1. The number of the air intake ports 11 can be two, three, four, or more than four, etc. Figure 1 The fourth air inlet 114 is schematically shown in FIG. Figure 2 In the figure, the first air inlet 111, the second air inlet 112, the third air inlet 113 and the fourth air inlet 114 are drawn. The inner wall of the air inlet 1 is provided with a plurality of air outlets 12. The air outlets 12 are used to discharge gas. The number of the air outlets 12 is multiple and is not limited here. The air inlet cavity 13 is connected to the air inlet 11 and the air outlet 12 respectively. The air flow enters the air inlet cavity 13 from the air inlet 11, and enters the air outlet 12 from the air inlet cavity 13.

[0027] When the air inlet 1 increases the number of air inlets 11, the air inlets 11 must be at different positions of the air inlet 1. Compared with the air inlet 1 having only one air inlet 11, the gas can enter the different positions of the air inlet 1 from different air inlets 11, reducing the flow path of the gas in the air inlet 1. The airflow entering the air inlet cavity 13 from each air inlet 11 flows out from the nearby air outlet 12, and the flow velocity difference between the multiple air outlets 12 corresponding to a single air inlet 11 becomes smaller, thereby improving the uniformity of the gas flow velocity of different air outlets 12, thereby improving the uniformity of the gas flow field of the air inlet mechanism 10, thereby improving the deposition process effect and process stability.

[0028] The pipeline assembly 2 is connected to the air inlet 1 through different air inlets 11, and is used to provide airflow to different positions of the air inlet 1. The pipeline assembly 2 includes at least two pipeline groups 21 and a main pipeline 22. The number of pipeline groups 21 can be two, three, four or more than four. The first end of the pipeline group 21 is connected to the main pipeline 22. The main pipeline 22 provides gas to at least two pipeline groups 21. The main pipeline 22 can be connected to an external device (not shown in the figure). The external device is used to provide gas to the main pipeline 22. The second end of the pipeline group 21 is connected to at least one air inlet 11. The second end of the pipeline group 21 can be connected to one air inlet 11, or two air inlets 11, or three air inlets 11, or more than four air inlets 11, etc. Among them, the number of air inlets 11 connected to the second end of the pipeline group 21 can be determined according to actual conditions and is not limited here. The gas passes through the main pipeline 22 , the pipeline group 21 and the air inlet 11 in sequence, enters the air inlet member 1 , and then flows out from the air outlet 12 .

[0029] Specifically, the pipeline group 21 includes a straight pipe portion (not shown in the figure) and a bent portion (not shown in the figure). Multiple straight pipe portions and / or multiple bent portions constitute multiple gas transmission lines (not shown in the figure). For example, multiple straight pipe portions constitute a gas transmission line. Alternatively, multiple bent portions constitute a gas transmission line. Alternatively, multiple straight pipe portions and multiple bent portions are combined to constitute a gas transmission line. The number of straight pipe portions and / or the number of bent portions can be determined according to actual needs and are not limited here. The multiple straight pipe portions and / or multiple bent portions in the above-mentioned pipeline group are combined with each other so that the gas flow rate of the air inlet corresponding to each gas transmission line is consistent. Multiple air inlets 11 with consistent gas flow rates can improve the air intake uniformity of the air intake member 1, reduce the flow rate difference between different air outlets 12, and thereby improve the uniformity of the gas flow field of the air intake mechanism 10.

[0030] The above-mentioned straight pipe portion refers to the straight area or the part close to the straight area of ​​the pipeline group 21. The flow resistance in the straight area is relatively small, which is conducive to gas flow. When there are multiple straight pipe portions, the extension lengths and extension directions between the multiple straight pipe portions can be the same or different. The bending portion refers to the bending area of ​​the pipeline group 21. The bending area is used for gas flow and changing the direction of gas flow. At the same time, the flow resistance is relatively large, which can reduce the gas flow rate. When there are multiple bending portions, the bending angles in different bending portions can be the same or different. Among them, the longer the straight pipe portion, the more bending portions, and the larger the bending angle of the bending portion, the slower the gas flow rate. That is, the straight pipe portion and the number of bending portions can be changed according to actual conditions, so that the gas flow rate of each air inlet 11 is consistent, and its specific form can also be adjusted according to the actual pipe layout space without limitation.

[0031] In some embodiments, at least part of the pipeline group 21 is a multi-stage bifurcated structure. At least part of the pipeline group 21 can be, but is not limited to, a two-stage, three-stage, or four-stage or higher bifurcated structure. The multi-stage bifurcated structure not only increases the number of gas transmission lines, and meets the multi-channel gas supply requirements of multiple gas inlets 11 in the gas inlet 1; but also can adjust the flow resistance of the gas transmission line by changing the number of straight pipes and / or bends, thereby adjusting the gas flow rate of different gas inlets 11 and reducing the flow rate difference between adjacent gas outlets 12.

[0032] For example, when the pipeline set 21 is a two-stage bifurcated structure, the pipeline set 21 includes a first air pipe 213 and a second air pipe 211. One end of the first air pipe 213 is bifurcated to form a plurality of second air pipes 211.

[0033] When the pipeline group 21 is three-stage bifurcated, the pipeline group 21 includes a first air pipe 213, a second air pipe 211 and a third air pipe (not shown in the figure). One end of the first air pipe 213 bifurcates to form multiple second air pipes 211. One end of the second air pipe bifurcates to form multiple third air pipes.

[0034] When the pipeline group 21 is a four-stage fork, the pipeline group 21 includes a first air pipe 213, a second air pipe 211, a third air pipe and a fourth air pipe (not shown in the figure), etc. Of course, the pipeline group 21 can also be a five-stage fork structure, a six-stage fork structure, etc., which will not be repeated here.

[0035] The pipeline group 21 is a two-stage bifurcated structure and is described in detail below. In one embodiment, at least one pipeline group 21 includes a second air pipe 211 and a first air pipe 213. The number of the second air pipes 211 may be, but is not limited to, two, four, or more than four. At least two second air pipes 211 are connected to the corresponding air inlet 11. The number of the first air pipes 213 may be, but is not limited to, two, three, four, or more than four. One end of a single first air pipe 213 is connected and connected to at least two second air pipes 211. The other end of a single first air pipe 213 is connected to the main pipeline 22. The first air pipe 213 may include a plurality of straight pipe portions and / or a plurality of bends. The above-mentioned second air pipe 211 may include a plurality of straight pipe portions and / or a plurality of bends. The main pipeline 22, a plurality of first air pipes 213, and a plurality of second air pipes 211 constitute a plurality of the above-mentioned gas transmission lines.

[0036] The gas flow rate in the multiple straight tube portions and / or multiple bent portions in the second air pipe 211 and the multiple straight tube portions and / or multiple bent portions in the first air pipe 213 is adjusted in the above manner to make the gas flow rate of each air inlet 11 consistent, thereby improving the uniformity of the gas flow field of the air intake mechanism 10.

[0037] For example, when the number of the second air pipes 211 is two and the number of the first air pipe 213 is one, one end of the first air pipe 213 is connected to the two second air pipes 211. The other end of the first air pipe 213 is connected to the main pipeline 22. The two second air pipes 211 are respectively connected to the corresponding air inlet 11. The first air pipe 213 is connected to the two adjacent second air pipes 211, so that the gas transmission line near one end of the main pipeline 22 is more concise, which is convenient for processing, installation and arrangement of the pipeline assembly 2.

[0038] When there are three second air pipes 211 and one first air pipe 213, one end of the first air pipe 213 is connected to the three second air pipes 211, and the other end of the first air pipe 213 is connected to the main pipeline 22. The three second air pipes 211 are connected to the corresponding air inlets 11 respectively.

[0039] When the number of the second air pipes 211 is four and the number of the first air pipes 213 is two or three, the connection relationship between the second air pipes 211 and the first air pipes 213 can be set according to actual conditions, which will not be described in detail here.

[0040] In addition, the other pipeline groups 21 of the at least two pipeline assemblies 2 may only include one second air pipe 211 and one first air pipe 213 , etc.

[0041] There are many ways to arrange the pipeline group 21 of the air intake mechanism 10. The gas transmission line in the air intake mechanism 10 can be limited by the number of pipeline groups 21 and the number of air inlets 11. Through different arrangements of the pipeline groups 21, the actual required air intake mechanism 10 is selected to meet different usage requirements.

[0042] When the number of air inlets 11 and the number of pipeline groups 21 are both two, one pipeline group 21 includes a first pipeline (not shown in the figure). The first pipeline includes a second air pipe 211 and a first air pipe 213. The first end of the first pipeline is connected to the main pipeline 22. The second end of the first pipeline is connected to one air inlet 11. Another pipeline group 21 includes another first pipeline (not shown in the figure). The first end of the other first pipeline is connected to the main pipeline 22. The second end of the other first pipeline is connected to another air inlet 11.

[0043] When the number of air inlets 11 is three and the number of pipeline groups 21 is two, one pipeline group 21 includes one first pipeline. The first end of the first pipeline is connected to the main pipeline 22. The second end of the first pipeline is connected to one air inlet 11. Another pipeline group 21 includes two second air pipes 211 and one first air pipe 213. The first ends of the two second air pipes 211 are connected to the first air pipe 213. The second ends of the two second air pipes 211 are connected to the other two air inlets 11. The first air pipe 213 is connected to the main pipeline 22.

[0044] When the number of air inlets 11 is four and the number of pipeline groups 21 is two, one pipeline group 21 includes two second air pipes 211 and one first air pipe 213. The first ends of the two second air pipes 211 are in communication with the first air pipe 213. The second ends of the two second air pipes 211 are in communication with the two air inlets 11. Another pipeline group 21 includes two other second air pipes 211 and another first air pipe 213. The first ends of the two other second air pipes 211 are in communication with the other first air pipe 213. The second ends of the two other second air pipes 211 are in communication with the two other air inlets 11.

[0045] When the number of air inlets 11 is five and the number of pipeline groups 21 is three, one pipeline group 21 includes one first pipeline. The first end of the first pipeline is communicated with the main pipeline 22. The second end of the first pipeline is communicated with one air inlet 11. Another pipeline group 21 includes two second air pipes 211 and one first air pipe 213. The first ends of the two second air pipes 211 are communicated with the first air pipe 213. The second ends of the two second air pipes 211 are communicated with two other air inlets 11. Another pipeline group 21 includes two further second air pipes 211 and further first air pipes 213. The first ends of the two further second air pipes 211 are communicated with the further first air pipe 213. The second ends of the two further second air pipes 211 are communicated with two further air inlets 11.

[0046] Of course, in actual process, the pipeline group 21 may include three second air pipes 211 or four second air pipes 211 or five second air pipes 211, etc. One end of the first air pipe 213 is respectively connected with the above-mentioned different number of second air pipes 211, and the other end of the first air pipe 213 is connected with the main pipeline 22. The number of pipeline components 2 can be based on actual situation, which will not be repeated here.

[0047] It can be seen that the number of air inlets 11 is greater than the number of pipeline groups 21. Specifically, the number of air inlets 11 can be in a multiple relationship with the number of pipeline groups 21. For example, the number of air inlets 11 can be one, two, three, or four or more times the number of pipeline groups 21.

[0048] In a specific embodiment, the number of air inlets 11 is an even multiple of the number of pipeline groups 21. The pipeline group 21 is provided with at least one bifurcation point 214. The number of bifurcation points 214 can be one, two, or more than three. The bifurcation point 214 is located at the connection portion between the second air pipe and the first air pipe. The gas transmission line is divided into two when passing through the bifurcation point 214. The above-mentioned quantity limitation is conducive to evenly distributing the airflow to each gas transmission line step by step, ensuring that the gas flow rate at the air inlet 11 corresponding to each pipeline group 21 is close, and reducing the flow rate difference between adjacent air outlets 12.

[0049] When the above-mentioned single pipeline group 21 includes one bifurcation point 214, the pipeline group 21 can be a two-stage bifurcation structure. When a single pipeline group 21 includes two bifurcation points 214, the pipeline group 21 is a three-stage bifurcation structure, and so on. Different pipeline groups 21 can have the same number of bifurcation points 214, or different numbers of bifurcation points 214. For example, one pipeline group 21 and another pipeline group 21 both include two bifurcation points 214. Alternatively, one pipeline group 21 includes one bifurcation point 214, and the other pipeline group 21 includes two bifurcation points 214.

[0050] The straight tube portion of the second air pipe 211 is defined as the second straight tube portion 2112, and the bent portion of the second air pipe 211 is defined as the second bent portion 2111. The straight tube portion of the first air pipe 213 is defined as the first straight tube portion 2132. The bent portion of the first air pipe 213 is the first bent portion 2131. The above-mentioned second air pipe 211 may include the second straight tube portion 2112 and / or the second bent portion 2111. The first air pipe 213 may include the first straight tube portion 2132 and / or the first bent portion 2131. When the pipeline group 21 also includes a third air pipe, the third air pipe includes a third straight tube portion and / or a third bent portion, and so on. That is, different air pipes can select straight tube portions and / or bent portions according to different needs.

[0051] For example, the number of pipeline groups 21 is one, and the number of air inlets 11 is two. The pipeline group 21 includes two second air pipes 211 and one first air pipe 213. The two second air pipes 211 are respectively connected to two adjacent air inlets 11. The other ends of the two second air pipes 211 are respectively connected to the first air pipe 213. By simultaneously adjusting the number of second straight pipe portions 2112 and / or second bent portions 2111 of the two second air pipes 211 and the number of first straight pipe portions 2132 and / or first bent portions 2131 of the first air pipe 213, the gas flow rate in the second air pipe 211 and the first air pipe 213 can be changed to make the gas flow rate of each air inlet 11 consistent, thereby improving the uniformity of the gas flow field of the air intake mechanism 10. In addition, the pipeline group 21 is connected to the corresponding two air inlets 11, which can simplify the routing of the pipeline assembly 2, making the structure of the pipeline assembly 2 more concise and convenient.

[0052] When the number of pipeline groups 21 is two, the number of air inlets 11 is four. Each pipeline group 21 is connected to two corresponding air inlets 11. When the number of pipeline groups 21 is three, the number of air inlets 11 is six. Each pipeline group 21 is connected to two corresponding air inlets 11. When the number of pipeline groups 21 is four, the number of air inlets 11 is eight. Each pipeline group 21 is connected to two corresponding air inlets 11. Among them, the number of pipeline groups 21 and the number of air inlets 11 can also be other values, which are not repeated here.

[0053] In some embodiments, the pipeline group structure located downstream of the bifurcation point 214 is symmetrically distributed about the axis of the pipe body connected to the upstream of the bifurcation point 214. By defining in the above manner, the complexity of the pipeline can be simplified, the workload of design verification and simulation can be reduced, the consistency of the gas flow rate of each air inlet 11 can be improved, and the uniformity of the gas flow field of the air intake mechanism 10 can be improved.

[0054] For example, when a single pipeline group 21 includes a bifurcation point 214, the single pipeline group 21 includes a first air pipe 213 and two second air pipes 211, wherein the first air pipe 213 is a pipeline group 21 structure upstream of the bifurcation point 214 air path, and the two second air pipes 211 are a pipeline group 21 structure downstream of the bifurcation point 214 air path. The two second air pipes 211 are symmetrically distributed about the axis of the first air pipe 213. The single pipeline group 21 may also include other numbers of bifurcation points 214, and the principle is similar, which is not limited here.

[0055] Specifically, the two air pipes connected to the two adjacent air inlets 11 on the air inlet member 1 may have a structural relationship with the air inlet member 1. For example, the even number of air inlets 11 includes a first air inlet 111, a second air inlet 112, a third air inlet 113 and a fourth air inlet 114. At least two pipeline groups 21 include a second pipeline group 21a and a first pipeline group 21b. The first air inlet 111 and the second air inlet 112 are respectively arranged close to the second pipeline group 21a. The two second air pipes 211a of the second pipeline group 21a are respectively connected to the first air inlet 111 and the second air inlet 112. The third air inlet 113 and the fourth air inlet 114 are respectively arranged away from the first air pipe 213b of the first pipeline group 21b. The two second air pipes 211b of the first pipeline group 21b are respectively connected to the third air inlet 113 and the fourth air inlet 114.

[0056] The above-mentioned main pipeline 22, second pipeline group 21a and first pipeline group 21b are all located on one side of the air inlet 1; the second pipeline group 21a and the first pipeline group 21b are located between the main pipeline 22 and the air inlet 1, and the routing of the pipeline assembly 2 can be adaptively adjusted according to the space inside and outside the equipment. By limiting the straight pipe part and the bent part of the second pipeline group 21a, and at the same time limiting the straight pipe part and the bent part of the first pipeline group 21b, the gas flow rate of each air inlet 11 is made consistent. Specifically, the two second air pipes 211a of the second pipeline group 21a are arranged radially symmetrically along the air inlet 1. The second straight pipe parts 2112 of the two second air pipes 211a are the same. When gas flows from the first air pipe 213a of the second pipeline group 21a to the two second air pipes 211a respectively, the two second air pipes 211a have the same structure, so that the gas flow rate in the two second air pipes 211a is the same, thereby improving the consistency of the gas flow rate between the first air inlet 111 and the second air inlet 112.

[0057] The two second air pipes 211b of the first pipeline group 21b are symmetrically arranged along the radial direction of the air inlet 1. The second straight pipe portion 2112 and the second bent portion 2111 of the two second air pipes 211b are the same. When the gas flows from the first air pipe 213b of the first pipeline group 21b to the two second air pipes 211b respectively, the two second air pipes 211b have the same structure, so that the gas flow rate in the two second air pipes 211b is the same, thereby improving the consistency of the gas flow rate between the third air inlet 113 and the fourth air inlet 114.

[0058] Since the two second air pipes 211a and 211b have the same structure, and the distance between the first air inlet 111, the second air inlet 112 and the first air pipe 213a of the second pipeline group 21a is closer than the distance between the third air inlet 113, the fourth air inlet 114 and the first air pipe 213 of the first pipeline group 21b, the second straight pipe portion 2112 of the two second air pipes 211b is larger than the second straight pipe portion 2112 of the two second air pipes 211a. In addition, since the two second air pipes 211b need to extend to the first air pipe 213b of the first pipeline group 21b, the two second air pipes 211b have a second bent portion 2111, so that the two second air pipes 211b extend from the outer wall of the air inlet 1 to the first air pipe 213b.

[0059] As can be seen from the above, since the two second air pipes 211a are closer to the first air pipe 213a of the second pipeline group 21a, in order to make the gas flow rate of the first air inlet 111, the second air inlet 112 and the third air inlet 113, the fourth air inlet 114 the same, it is necessary to change the structure of the first air pipe 213a of the second pipeline group 21a, such as increasing the number of the second straight pipe portion 2112 and the first bent portion 2131 of the first air pipe 213a; change the structure of the first air pipe 213b of the first pipeline group 21b, such as reducing the number of the first straight pipe portion 2132 and the first bent portion 2131 of the first air pipe 213b. That is, the first straight pipe portion 2132 of the first air pipe 213a is larger than the first straight pipe portion 2132 of the first air pipe 213b, and the number of the first bent portions 2131 of the first air pipe 213a is larger than the number of the first bent portions 2131 of the first air pipe 213b. Through the above method, by changing the number of straight pipe parts and bent parts between the first air pipe 213a and the first air pipe 213b, the consistency of the gas flow rate at the air inlet 11 is further improved.

[0060] In another embodiment, the two second air pipes 211a of the second pipeline group 21a are respectively connected to the second air inlet 112 and the third air inlet 113. The two second air pipes 211b of the first pipeline group 21b are respectively connected to the fourth air inlet 114 and the first air inlet 111. The second pipeline group 21a and the first pipeline group 21b are arranged between the air inlet 1 and the main pipeline 22. The two second air pipes 211a have the same structure and are radially symmetrical. The two second air pipes 211b have the same structure and are radially symmetrical. When the second air inlet 112 and the third air inlet 113 are arranged close to the first air pipe 213, the number of straight pipe portions and bent portions of the first air pipe 213a is greater than the number of straight pipe portions and bent portions of the first air pipe 213b. Alternatively, when the second air inlet 112 and the third air inlet 113 are arranged far away from the first air pipe 213, the number of straight pipe parts and bends of the first air pipe 213a is less than the extension length and the number of bends of the first air pipe 213b. The specific arrangement positions of the second pipeline group 21a, the first pipeline group 21b and the main pipeline 22 can be adjusted according to actual conditions and are not limited here.

[0061] In other embodiments, the two second air pipes 211a of the second pipeline group 21a are respectively connected to the first air inlet 111 and the fourth air inlet 114. The two second air pipes 211b of the first pipeline group 21b are respectively connected to the second air inlet 112 and the third air inlet 113. The specific locations of the second pipeline group 21a, the first pipeline group 21b and the main pipeline 22 can be adjusted according to actual conditions and are not limited here.

[0062] In other alternative embodiments, the two second air pipes 211a of the second pipeline group 21a are respectively connected to the third air inlet 113 and the fourth air inlet 114. The two second air pipes 211b of the first pipeline group 21b are respectively connected to the first air inlet 111 and the second air inlet 112. The specific locations of the second pipeline group 21a, the first pipeline group 21b and the main pipeline 22 can be adjusted according to actual conditions and are not limited here.

[0063] See also Figure 4 and Figure 5 , Figure 4 is a side view of the air intake member in the air intake mechanism of the present application; Figure 5 1 is a cross-sectional schematic diagram of the air intake member in the air intake mechanism of the present application. In some embodiments, the air outlet 12 is correspondingly arranged near the air intake 11, which can shorten the gas flow path. The air intake member 1 is in a circular ring shape, or can be an arc-shaped or linear component.

[0064] In some embodiments, the plurality of air outlets 12 are evenly distributed near each air inlet 11. When the number of air inlets 11 is two, the two air inlets 11 divide the plurality of air outlets 12 into two. When the number of air inlets 11 is six, the six air inlets 11 divide the plurality of air outlets 12 into six. Figure 5 As shown, when there are four air inlets 11 , the four air inlets 11 divide the multiple air outlets 12 into four parts, and three air outlets 12 are evenly distributed between adjacent air inlets 11 .

[0065] In some embodiments, a plurality of air inlets 11 are evenly arranged in the circumferential direction of the outer wall of the air inlet member 1. By arranging the air inlets 11 in this way, the intervals between adjacent air inlets 11 are equal, further improving the uniformity of the gas flow rate of the air outlet 12.

[0066] For example, when the number of air inlets 11 is two, the two air inlets 11 are divided into two parts along the circumferential direction of the outer wall of the air inlet member 1. When the number of air inlets 11 is three, the three air inlets 11 are divided into three parts along the circumferential direction of the outer wall of the air inlet member 1. When the number of air inlets 11 is four, the four air inlets 11 divide the circumferential direction of the outer wall of the air inlet member 1 into four parts. The number of air inlets 11 can also be other values, which are not limited here.

[0067] The inner wall of the air inlet 1 is provided with air outlets 12 evenly arranged along the circumference thereof. The air outlets 12 are evenly arranged along the circumference of the inner wall of the air inlet 1. That is, adjacent air outlets 12 are arranged at equal intervals. By the above-mentioned arrangement of the air outlets 12, the gas flow rate of adjacent air outlets 12 is made uniform, further improving the uniformity of the gas flow field of the air inlet mechanism 10.

[0068] In some embodiments, a plurality of gas outlets 12 are evenly arranged on the inner wall of the gas inlet member in the circumferential direction. By arranging the gas outlets 12 in the above manner, the intervals between adjacent gas outlets 12 are equal, further improving the uniformity of the gas flow rate of the gas outlets 12 .

[0069] In one embodiment, the number of the gas outlets 12 is greater than or equal to 19 and less than or equal to 53. By limiting the number of the gas outlets 12, the gas flow rate between adjacent gas outlets 12 is made consistent. The number of gas outlets 12 may be, but is not limited to, 19, 22, 24, 28, 32, 36, 40, 44, 48, 50, and 53, etc. Further, the number of gas outlets 12 is greater than or equal to 24 and less than or equal to 48. For example, the number of gas outlets 12 may be, but is not limited to, 24, 26, 30, 34, 38, 42, 46, 48, etc.

[0070] The present application also provides a thin film preparation device, which can specifically be an ALD device, a CVD device, etc. The thin film preparation device includes an air intake mechanism 10 and a cavity. The cavity is used to prepare a deposited thin film. The cavity includes a first end and a second end that are relatively arranged. The air intake mechanism 10 is located at the first end and / or the second end. The thin film preparation device uses the above-mentioned air intake mechanism 10 to make the gas flow rate of each air inlet 11 consistent, improve the uniformity of the gas flow rate between adjacent air outlets 12, and then improve the uniformity of the gas flow field of the air intake mechanism 10. It should be noted that the air intake mechanism 10 in this embodiment is the air intake mechanism 10 in the above-mentioned embodiment, and will not be repeated here one by one.

[0071] The terms "first", "second", "third" in this application are only used for descriptive purposes and cannot be understood as indicating the quantity of the indicated technical features. Thus, the features defined as "first", "second", "third" can expressly or implicitly include at least one of these features. In the embodiments of the present application, all directional indications (such as up, down, left, right, front, back ...) are only used to explain the relative positional relationship, motion conditions, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication also changes accordingly. In addition, the terms "include" and "have" and any of their variations are intended to cover non-exclusive inclusions. The process, method, system, product or equipment such as including a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units that are not listed, or optionally also includes other steps or units inherent to these processes, methods, products or equipment.

[0072] The above description is only an embodiment of the present application and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An air intake mechanism, characterized in that: include: An air inlet member, wherein an air inlet cavity is provided inside the air inlet member, at least two air inlets are provided on the outer wall of the air inlet member, and a plurality of air outlets are circumferentially provided on the inner wall of the air inlet member, and the air inlets and the air outlets are both connected to the air inlet cavity; A pipeline assembly, comprising at least two pipeline groups and a main pipeline, wherein a first end of the pipeline group is connected to the main pipeline, and a second end of the pipeline group is connected to at least one of the air inlets; The pipeline group includes a straight pipe portion and a bent portion, and a plurality of the straight pipe portions and / or the bent portions constitute a plurality of gas transmission lines, so that the gas flow rate of the gas inlet corresponding to each gas transmission line is consistent.

2. The air intake mechanism according to claim 1, characterized in that: At least part of the pipeline group is a multi-stage bifurcated structure.

3. The air intake mechanism according to claim 2, characterized in that: At least one of the pipeline groups comprises: First trachea; A second air pipe, wherein the second air pipe is connected to the air inlet, one end of a single first air pipe is connected to at least two of the second air pipes, and the other end is connected to the main pipeline.

4. The air intake mechanism according to claim 3, characterized in that: The number of the air inlets is an even multiple of the number of the pipeline groups. The pipeline group is provided with at least one bifurcation point, which is located at the connection position between the second air pipe and the first air pipe; the gas transmission line is divided into two when passing through the bifurcation point.

5. The air intake mechanism according to claim 4, characterized in that: The pipeline group structure located downstream of the bifurcation point gas path is symmetrically distributed with respect to the axis of the pipe body connected to the upstream of the bifurcation point gas path.

6. The air intake mechanism according to claim 1, characterized in that: The air outlet is correspondingly arranged near the air inlet.

7. The air intake mechanism according to claim 6, characterized in that: The plurality of air outlets are evenly distributed near each of the air inlets.

8. The air intake mechanism according to claim 6, characterized in that: The plurality of air inlets are evenly arranged in the circumferential direction of the outer wall of the air inlet member.

9. The air intake mechanism according to claim 6, characterized in that: The plurality of air outlets are evenly arranged in the circumferential direction of the inner wall of the air inlet member.

10. The air intake mechanism according to claim 1, characterized in that: The number of the air outlets is greater than or equal to 19 and less than or equal to 53.

11. A thin film preparation device, characterized in that: include: The air intake mechanism according to any one of claims 1 to 10; A cavity is used for preparing a film, the cavity comprises a first end and a second end which are arranged opposite to each other, and the air intake mechanism is located at the first end and / or the second end.

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