CVD (Chemical Vapor Deposition) tool suitable for annular product
By designing a CVD tooling suitable for ring-shaped products, the problem of product tooling design in the prior art needs to be designed separately for each product, the multifunctionality and efficient production of tooling are achieved, production efficiency is improved and resource waste is reduced.
Patent Information
- Application Number
- CN202421489843.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-26
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-06-26
AI Technical Summary
In the existing CVD technology, the design of product tooling needs to be designed separately for each different product, resulting in high design costs, long design time, low production efficiency and serious waste of resources.
A CVD tooling suitable for ring-shaped products is designed, including two sets of columns and at least one cross bar connecting two sets of columns. The uprights can be installed at any air outlet of the deposition furnace heat sink plate. The cross bar can be adjusted in height to accommodate ring-shaped products of different shapes and sizes, and through holes and slots are provided on the columns and cross bars to optimize airflow distribution.
It improves the exposed area of the product in the furnace, enhances the thickness uniformity and surface aesthetics of the CVD coating, simplifies the installation and disassembly process of tooling, is suitable for the deposition of a variety of different products, improves production efficiency and reduces resource waste.
Smart Images
Figure CN222821643U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of chemical vapor deposition furnaces, and in particular relates to a CVD tooling suitable for annular products. Background Art
[0002] With the continuous development of materials science and industrial technology, chemical vapor deposition (CVD) technology has become one of the key technologies in the field of surface modification. Through chemical reactions between gas phases, CVD technology can give specific properties to the surface of materials, such as wear resistance, heat resistance, and corrosion resistance, without changing the composition and strength of the base material. At present, materials prepared by chemical vapor deposition technology, such as pyrolytic carbon coating (PyC), silicon carbide coating (SiC), tantalum carbide coating (TaC), boron nitride coating (BN), etc., are not only used in tool materials, wear-resistant, heat-resistant, and corrosion-resistant materials, special composite materials in the aerospace industry, atomic reactor materials, and biomedical materials, but are also widely used in the preparation and synthesis of various powder materials, bulk materials, new crystal materials, ceramic fibers, and diamond films. It is even more indispensable in the thin film preparation technology of ferroelectric materials, insulating materials, magnetic materials, and optoelectronic materials as large-scale integrated circuit technology.
[0003] The chemical vapor deposition furnace is one of the important equipment for realizing the chemical vapor deposition process. It is mainly composed of the electronic control system, air intake system, exhaust system, lifting system, vacuum system, furnace shell, insulation layer, heater, muffle tube, product tooling and other parts. Among them, the product tooling is an important component that carries the product to deposit the CVD coating. Its design directly affects the contact area between the product and the atmosphere and the deposition efficiency.
[0004] However, in the current application of CVD technology, the design of product tooling has obvious limitations. Since different products have different shapes and sizes, most manufacturers need to design tooling for each product separately when performing product deposition operations. The advantage of this method is that it can achieve the best deposition effect for a specific product, but the disadvantages are also very obvious: every time a different deposition product needs to be replaced in the deposition furnace, the tooling needs to be redesigned, which not only increases the design cost, but also takes a long time for each tooling design and processing stage, resulting in low production efficiency and serious waste of resources. Utility Model Content
[0005] The purpose of the utility model is to overcome the deficiencies in the prior art and provide a CVD tooling suitable for annular products to adapt to the use of different annular products during chemical vapor deposition, thereby improving the production efficiency of the replaced products and reducing the waste of tooling.
[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:
[0007] A CVD tooling suitable for annular products comprises two groups of columns and at least one cross bar connecting the two groups of columns. The annular product is mounted on the cross bar. The columns are arranged on the air outlet holes of a deposition furnace air diffuser plate. The lower part of the columns is threadedly connected with a screw sleeve, which is located at the lower part of the deposition furnace heat dissipation plate. The columns are installed at any air outlet hole of the deposition furnace heat dissipation plate using the screw sleeve.
[0008] Furthermore, the upright column is provided with a plurality of first through holes, and the two ends of the cross bar are inserted into the first through holes.
[0009] Furthermore, the upright column, the cross bar and the screw sleeve are all hollow structures, and the cross bar is provided with a plurality of second through holes, and the second through holes at both ends of the cross bar are connected with the upright column.
[0010] Furthermore, the column is a straight rod or a Y-shaped rod. When the column is a Y-shaped rod, a plurality of first through holes are provided on the main rod and the supporting rod of the column, and a cross bar is installed on the main rod and the supporting rod of the column.
[0011] Furthermore, a plurality of blocking plates are provided on the outside of the column, a first plunger is provided on the blocking plate, the first plunger is inserted into the outside of the first through hole, a first end cover is provided at the upper end of the column, and second end covers are provided at both ends of the crossbar.
[0012] Furthermore, a slot is provided on the upper portion of the second through hole of the cross bar, and when the annular product is directly mounted on the cross bar, the annular product is placed in the slot.
[0013] Furthermore, it also includes a hook, the upper end of which is installed in the second through hole, and the diameter of the hook is smaller than the diameter of the second through hole. The upper end of the hook is threadedly connected with a nut, and the annular product is mounted on the hook.
[0014] Furthermore, a gasket is provided at the lower part of the nut, and the gasket is installed inside the slot, and the gasket blocks the upper part of the second through hole.
[0015] Furthermore, the cross bar is provided with a plurality of clamps, the inner wall of the upper clamp body is connected with a clamping block, the clamping block is clamped in the clamping groove, the inner wall of the lower clamp body is connected with a second plunger, the second plunger is inserted into the lower part of the second through hole, and the clamp blocks the second through hole where the annular product is not mounted.
[0016] The beneficial effects of the utility model are:
[0017] 1) The contact surface between the crossbar of the utility model and the annular product is point-line contact, and the contact area is small, which increases the exposed area of the product in the furnace, improves the thickness uniformity and surface aesthetics of the CVD coating on the product surface. In addition, the utility model is easy to install and disassemble without changing the existing spraying process, is suitable for most annular products, and can meet the needs of depositing a variety of different products in one furnace.
[0018] 2) By arranging a plurality of first through holes on the column and installing the cross bar in the first through holes, the height of the cross bar can be adjusted to adapt to the deposition of annular products of different shapes and sizes.
[0019] 3) The columns, crossbars and screw sleeves are designed as hollow structures, and a second through hole is provided on the crossbar, so that the airflow blows from the columns horizontally to the annular product and from the crossbar longitudinally to the annular product, thereby improving the quality and efficiency of the deposition of the annular product.
[0020] 4) The column is designed as a Y-shaped structure, which not only increases the number of annular products mounted on the tooling, but also avoids the lower annular products blocking the airflow from the deposition furnace diffuser plate, ensuring the deposition effect of the annular products on the upper part of the column.
[0021] 5) A sealing plate for sealing the first through hole is provided on the outside of the column, a first end cover for sealing the upper opening of the column is provided at the upper end of the column, and a second end cover for sealing the two ends of the cross bar is provided at both ends of the cross bar. A plurality of clamps are provided on the cross bar to seal the unused second through holes, thereby reducing the loss of airflow and improving the utilization rate of the airflow in the furnace.
[0022] 6) A slot is provided on the second through hole of the cross bar. When the annular product is directly mounted on the cross bar, the annular product is placed in the slot, thereby limiting the movement of the annular product.
[0023] 7) A hook is provided on the crossbar, and a gasket for sealing the upper opening of the second through hole is provided on the upper part of the hook, thereby ensuring the deposition operation of small-aperture annular products. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Attached Figure 1 This is a usage state diagram of Example 1 of a CVD tooling suitable for annular products of the utility model.
[0025] Attached Figure 2 It is a schematic diagram of a central column of a CVD tooling suitable for annular products of the utility model.
[0026] Attached Figure 3 The utility model is a schematic diagram of a crossbar structure of a CVD tooling suitable for annular products.
[0027] Attached Figure 4 This is a usage state diagram of Example 2 of a CVD tooling suitable for annular products of the utility model.
[0028] Attached Figure 5 This is a usage state diagram of Example 3 of a CVD tooling suitable for annular products of the utility model.
[0029] Attached Figure 6 It is a schematic diagram of a clamp in a CVD tooling suitable for annular products of the utility model.
[0030] In the figure, 1. a gas diffuser of a deposition furnace; 2. a column; 3. a first through hole; 4. a screw sleeve; 5. a sealing plate; 6. a first plunger; 7. a first end cover; 8. a cross bar; 9. a second end cover; 10. a slot; 11. a hook; 12. a gasket; 13. a nut; 14. a clamp; 141. a block; 142. a second plunger; 15. an annular product. DETAILED DESCRIPTION
[0031] The following will be combined with the attached Figure 1-Figure 6 , clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0032] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0033] Example 1
[0034] like Figure 1 As shown, a CVD tooling suitable for annular products includes two groups of columns 2 and at least one crossbar 8 connecting the two groups of columns 2. The annular product 15 is mounted on the crossbar 8. The columns 2 are arranged on the gas outlet holes of the gas diffuser plate 1 of the deposition furnace. Figure 2 As shown, the lower part of the column 2 is threadedly connected with a screw sleeve 4, and the screw sleeve 4 is located at the lower part of the heat sink of the deposition furnace. The column 2 is installed at any air outlet of the heat sink of the deposition furnace using the screw sleeve 4, thereby realizing the adjustment of the CVD tooling width and enhancing the adaptability of the CVD tooling.
[0035] like Figure 2 As shown, the column 2 is provided with a plurality of first through holes 3, and both ends of the cross bar 8 are inserted into the first through holes 3, so that the height of the cross bar 8 can be adjusted according to the shape and size of the annular product, further enhancing the adaptability of the CVD tooling.
[0036] like Figure 2As shown, the column 2, cross bar 8 and screw sleeve 4 are all hollow structures, and the cross bar 8 is provided with a plurality of second through holes (not shown in the figure). The second through holes at both ends of the cross bar 8 are connected with the column 2, and the airflow in the deposition furnace is blown horizontally from the first through hole 3 of the column 2 to the annular product. In addition, in addition to the airflow blowing upward from the bottom of the deposition furnace diffuser plate 1 to the annular product, part of the airflow flows from the column 2 to the cross bar 8, and is blown longitudinally (in both up and down directions) to the annular product again from the second through holes on the cross bar 8, thereby improving the quality and efficiency of the deposition of the annular product.
[0037] like Figure 2 As shown, a plurality of sealing plates 5 are provided on the outer side of the column 2, and a first plunger 6 is provided on the sealing plate 5. The first plunger 6 is inserted into the outer side of the first through hole 3 to prevent the airflow from flowing out from the outer side of the column 2. A first end cover 7 is provided at the upper end of the column 2 to prevent the airflow from flowing out from the top of the column 2. Second end covers 9 are provided at both ends of the cross bar 8 to prevent the airflow from flowing out from both ends of the cross bar 8, thereby improving the utilization rate of the airflow in the furnace.
[0038] like Figure 3 As shown, a slot 10 is provided on the upper portion of the second through hole of the cross bar 8. When the annular product 15 is directly mounted on the cross bar 8, the annular product 15 is placed in the slot 10, thereby limiting the movement of the annular product.
[0039] like Figure 3 As shown, it also includes a hook 11, the upper end of which is installed in the second through hole, and the diameter of the hook 11 is smaller than the diameter of the second through hole, so that the airflow in the cross bar 8 can flow out from the second through hole to ensure the quality and efficiency of the vapor deposition. The upper end of the hook 11 is threadedly connected with a nut 13, and the annular product 15 is mounted on the hook 11 to adapt to the deposition operation of small-aperture annular products.
[0040] like Figure 3 As shown, a gasket 12 is provided at the lower part of the nut 13, and the gasket 12 is installed inside the slot 10. The gasket 12 blocks the upper part of the second through hole, so that the airflow can only flow from the lower part of the second through hole to the annular product, but cannot flow out from the upper part of the second through hole, thereby ensuring the utilization rate of the airflow in the furnace.
[0041] like Figure 5 , Figure 6 As shown, the cross bar 8 is provided with a plurality of clamps 14, the inner wall of the upper clamp body of the clamp 14 is connected with a clamping block 141, the clamping block 141 is clamped in the clamping groove 10, the inner wall of the lower clamp body of the clamp 14 is connected with a second plunger 142, the second plunger 142 is inserted into the lower part of the second through hole, the clamp 14 blocks the unused second through hole, reduces the loss of airflow, and further improves the utilization rate of airflow.
[0042] like Figure 1As shown, the column 2 is a straight rod structure, and the columns 2 on both sides are connected by a cross bar 8. The large-diameter annular product is directly mounted on the cross bar 8, and the small-diameter annular product is mounted on the cross bar 8 through a hook 11.
[0043] Example 2
[0044] The difference from Example 1 is that Figure 4 As shown, the column 2 is a straight rod structure, and the columns 2 on both sides are connected by two cross bars 8. The small-aperture annular product is mounted on the cross bar 8 through the hook 11. The small-aperture annular product can also be mounted on the lower cross bar 8 through the hook 11, and the large-aperture annular product can be directly mounted on the upper cross bar 8, thereby increasing the capacity of the CVD tooling.
[0045] Example 3
[0046] The difference from Example 1 is that Figure 5 As shown, the column 2 is a Y-shaped rod, and a plurality of first through holes 3 are provided on the main rod and the support rod of the column 2. A cross bar 8 is installed on the main rod and the support rod of the column 2. The column 2 with a Y-shaped rod structure not only increases the number of annular products mounted by the tooling, but also avoids the lower annular products blocking the airflow from the deposition furnace diffuser plate 1, thereby ensuring the deposition effect of the annular products on the upper part of the column 2.
[0047] The above contents are merely examples and explanations of the structure of the utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of the utility model.
Claims
1. A CVD tooling suitable for annular products, characterized in that: It includes two groups of columns and at least one cross bar connecting the two groups of columns. The annular product is mounted on the cross bar. The columns are arranged on the air outlet holes of the deposition furnace air diffusion plate. The lower part of the columns is threadedly connected with a screw sleeve, which is located at the lower part of the deposition furnace heat dissipation plate. The columns are installed at any air outlet hole of the deposition furnace heat dissipation plate using the screw sleeve.
2. A CVD tooling suitable for annular products according to claim 1, characterized in that: The upright column is provided with a plurality of first through holes, and the two ends of the cross bar are inserted into the first through holes.
3. A CVD tooling suitable for annular products according to claim 2, characterized in that: The upright column, the cross bar and the screw sleeve are all hollow structures, and the cross bar is provided with a plurality of second through holes, and the second through holes at both ends of the cross bar are connected with the upright column.
4. The CVD tooling suitable for annular products according to claim 1, characterized in that: The column is a straight rod or a Y-shaped rod. When the column is a Y-shaped rod, a plurality of first through holes are arranged on the main rod and the supporting rod of the column, and a cross bar is installed on the main rod and the supporting rod of the column.
5. The CVD tooling suitable for annular products according to claim 3, characterized in that: A plurality of blocking plates are arranged on the outside of the column, a first plunger is arranged on the blocking plate, and the first plunger is inserted into the outside of the first through hole. A first end cover is arranged on the upper end of the column, and second end covers are arranged at both ends of the cross bar.
6. The CVD tooling suitable for annular products according to claim 3, characterized in that: A clamping groove is provided on the upper part of the second through hole of the cross bar. When the annular product is directly mounted on the cross bar, the annular product is placed in the clamping groove.
7. The CVD tooling suitable for annular products according to claim 1, characterized in that: It also includes a hook, the upper end of which is installed in the second through hole, and the diameter of the hook is smaller than the diameter of the second through hole. The upper end of the hook is threadedly connected with a nut, and the annular product is mounted on the hook.
8. The CVD tooling suitable for annular products according to claim 7, characterized in that: A gasket is provided at the lower part of the nut, and the gasket is installed inside the slot, and the gasket blocks the upper part of the second through hole.
9. The CVD tooling suitable for annular products according to claim 6, characterized in that: The cross bar is provided with a plurality of clamps, the inner wall of the upper clamp body is connected with a clamping block, the clamping block is clamped in the clamping groove, the inner wall of the lower clamp body is connected with a second plunger, the second plunger is inserted into the lower part of the second through hole, and the clamp blocks the second through hole where the annular product is not mounted.