Isolation structure and graphite boat
By designing an annular isolation structure between graphite boat pages and using annular grooves to separate the deposition of amorphous silicon layer, the problem of graphite boat page short circuit is solved and the yield and production capacity of silicon wafers are improved.
Patent Information
- Application Number
- CN202421640422.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-11
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-07-11
AI Technical Summary
In tube PECVD equipment in the photovoltaic field, the conductive properties of graphite boats are enhanced due to the deposition of amorphous silicon layer, causing short circuits to occur, affecting the deposition of amorphous silicon layer on the silicon wafer.
An annular isolation structure is designed, including an annular isolation body, a first annular groove distributed in the axial direction and a second annular groove distributed in the radial direction, through which amorphous silicon is difficult to deposit, thereby partitioning the conduction of adjacent graphite boat pages.
It effectively reduces the probability of short-circuiting of adjacent graphite boat pages, reduces the risk of damage to graphite boat pages, enables the deposition of amorphous silicon layer of the silicon wafer to proceed normally, and improves the yield and production capacity of the silicon wafer.
Smart Images
Figure CN222821644U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic cells, in particular to an isolation structure and a graphite boat. Background Art
[0002] At present, in the photovoltaic field, tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) is a common equipment for silicon wafer coating. Graphite boats, as carriers of silicon wafers, are widely used in tubular PECVD equipment. Silicon wafers are inserted into graphite boats, and then the graphite boats are sent into quartz tubes for coating deposition. Graphite boats are usually composed of several graphite boat pages, and two adjacent graphite boat pages are separated by spacers to play an insulating role.
[0003] However, during the deposition of the amorphous silicon layer on the wafer, amorphous silicon will also be deposited on the outer wall of the spacer located in the electric field. As the amorphous silicon layer deposited on the spacer becomes thicker and thicker, the conductivity gradually increases, which will cause the adjacent graphite boat pages to short-circuit, causing the graphite boat pages to be damaged, affecting the deposition of the amorphous silicon layer on the silicon wafer. Utility Model Content
[0004] The utility model aims to provide an isolation structure and a graphite boat to solve the defects and shortcomings in the prior art.
[0005] In order to achieve the above object, the utility model provides an isolation structure, comprising:
[0006] An isolated body in the shape of a ring;
[0007] At least two first annular grooves are provided on the outer peripheral surface of the isolation body, and the first annular grooves are spaced apart from each other along the axial direction of the isolation body;
[0008] At least two second annular grooves are arranged on the end surface of the isolation body, and each of the second annular grooves is spaced apart along the radial direction of the isolation body.
[0009] The isolation structure provided by the utility model also includes:
[0010] The annular protrusion is protrudingly arranged on the end surface of the isolation body.
[0011] According to the isolation structure provided by the utility model, the second annular groove is provided on both end surfaces of the isolation body.
[0012] According to the isolation structure provided by the utility model, the annular protrusions are provided on both end surfaces of the isolation body.
[0013] According to the isolation structure provided by the utility model, the annular protrusion is coaxially arranged with the isolation body.
[0014] According to the isolation structure provided by the utility model, the groove depths of each of the first annular grooves remain consistent.
[0015] According to the isolation structure provided by the utility model, the groove depths of each of the second annular grooves remain consistent.
[0016] According to the isolation structure provided by the utility model, the first annular groove is a square groove, and / or the second annular groove is a square groove.
[0017] According to the isolation structure provided by the utility model, the isolation body includes at least two isolation monomers, each of which is arranged in sequence along the axial direction of the isolation body, the outer peripheral surface of the isolation monomer is provided with at least two of the first annular grooves, and the end face of the isolation monomer is provided with the annular protrusion and at least two of the second annular grooves.
[0018] The utility model also provides a graphite boat, comprising the isolation structure as described in any one of the above items.
[0019] The isolation structure provided by the utility model comprises: an annular isolation body; at least two first annular grooves arranged on the outer peripheral surface of the isolation body, each of which is spaced apart along the axial direction of the isolation body; at least two second annular grooves arranged on the end surface of the isolation body, each of which is spaced apart along the radial direction of the isolation body. In this way, a plurality of annular grooves are arranged on the isolation body along the axial direction and radial direction, so that it is difficult for amorphous silicon to be deposited inside the annular grooves, and amorphous silicon is prevented from being continuously deposited along the axial direction of the isolation body, so that the amorphous silicon layer deposited on the surface of the isolation body can be isolated by the annular grooves, reducing the probability of conduction and short circuit between two adjacent graphite boat pages, thereby reducing the risk of damage to the graphite boat pages, so that the amorphous silicon layer deposition of the silicon wafer can be carried out normally, and the yield and production capacity of the silicon wafer are improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0021] Figure 1 It is a cross-sectional view of an isolation structure provided by an embodiment of the utility model.
[0022] Figure 2It is a cross-sectional view of an isolation structure provided by another embodiment of the utility model.
[0023] Reference numerals:
[0024] 1: Isolation body; 2: First annular groove; 3: Second annular groove; 4: Annular protrusion; 5: Isolation monomer. DETAILED DESCRIPTION
[0025] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0026] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "horizontal", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0028] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.
[0029] Please refer to Figure 1 to Figure 2 As shown, the embodiment of the utility model provides an isolation structure, including an isolation body 1, at least two first annular grooves 2, and at least two second annular grooves 3. Specifically, as Figure 1As shown, the isolation body 1 is an annular structure. Generally, the isolation body 1 can be processed with ceramics and placed between two adjacent graphite boat sheets to play an insulating isolation role. Each first annular groove 2 is arranged on the outer peripheral surface of the isolation body 1, and each first annular groove 2 is distributed along the axial direction of the isolation body 1. Specifically, each first annular groove 2 is evenly spaced along the axial direction of the isolation body 1, so that the amorphous silicon continuous along its axial direction can be prevented from being deposited on the outer peripheral wall of the annular isolation body 1. Each second annular groove 3 is arranged on the end face of the isolation body 1, and each second annular groove 3 is distributed along the radial direction of the isolation body 1. Specifically, each second annular groove 3 is evenly spaced along the radial direction of the isolation body 1, so that the surface area of the isolation body 1 can be further increased, and the possibility of amorphous silicon being deposited in the annular groove can be reduced. It should be noted that the distance between two adjacent first annular grooves 2 and the distance between two adjacent second annular grooves 3 can be specifically determined according to actual design requirements.
[0030] In this way, a number of annular grooves are arranged on the isolation body 1 along its axial and radial directions, making it difficult for amorphous silicon to be deposited inside the annular grooves, and avoiding continuous deposition of amorphous silicon along the axial direction of the isolation body 1, so that the amorphous silicon layer deposited on the surface of the isolation body 1 can be isolated by the annular grooves, reducing the probability of conduction and short circuit between two adjacent graphite boat pages, thereby reducing the risk of graphite boat page damage, allowing the deposition of the amorphous silicon layer of the silicon wafer to proceed normally, and improving the yield and production capacity of the silicon wafer. It should be noted that, with the following configuration, Figure 1 As for the placement position of the isolation structure shown in the figure, the up and down direction in the figure is the axial direction of the isolation body 1, and the left and right direction in the figure is the radial direction of the isolation body 1.
[0031] Further, in the embodiment of the present utility model, if Figure 1 As shown, the isolation structure further includes an annular protrusion 4, which is protrudingly arranged on the end surface of the isolation body 1. In this way, by arranging the annular protrusion 4 so that the annular protrusion 4 abuts against the graphite boat page, the isolation body 1 can be prevented from directly contacting the graphite boat page, the contact area between the isolation body 1 and the graphite boat page is reduced, and the conductivity of the isolation body 1 after coating is reduced.
[0032] In an optional embodiment of the utility model, a second annular groove 3 is provided on both end faces of the isolation body 1. In this way, the second annular groove 3 is arranged on both end faces of the isolation body 1, so that the surface area of both ends can be increased, thereby effectively reducing the possibility of electrical conduction of the isolation body 1, and further reducing the probability of conduction and short circuit of two adjacent graphite boat pages.
[0033] As an optional embodiment of the utility model, an annular protrusion 4 is provided on both end faces of the isolation body 1. In this way, the annular protrusions 4 are arranged on both end faces of the isolation body 1, and the annular protrusions 4 abut against the graphite boat pages, which can fully avoid direct contact between the isolation body 1 and the graphite boat pages at both ends, further reducing the contact area between the isolation body 1 and the graphite boat pages at both ends, thereby reducing the probability of conduction and short circuit between two adjacent graphite boat pages.
[0034] In a specific embodiment of the utility model, the annular protrusion 4 is coaxially arranged with the isolation body 1. With such an arrangement, the isolation body 1 is easy to process as a whole, has good structural performance, can effectively ensure that the isolation body 1 and the graphite boat pages are isolated, and reduce the probability of conduction and short circuit between two adjacent graphite boat pages.
[0035] In an optional embodiment of the utility model, the groove depth of each first annular groove 2 is kept consistent. With such a configuration, the isolation body 1 is easy to manufacture, and the possibility of continuous deposition of amorphous silicon along the axial direction of the isolation body 1 during coating can be effectively reduced, thereby reducing the probability of conduction and short circuit between two adjacent graphite boat pages.
[0036] As an optional embodiment of the utility model, the groove depth of each second annular groove 3 is kept consistent. Such a configuration facilitates the processing of the second annular groove 3 on the end face of the isolation body 1, which can effectively increase its end face area, reduce the possibility of continuous deposition of amorphous silicon on the end face of the isolation body 1 during film coating, and reduce the probability of conduction and short circuit between two adjacent graphite boat pages.
[0037] In a specific embodiment of the utility model, the first annular groove 2 is a square groove, and / or the second annular groove 3 is a square groove. Such an arrangement facilitates the processing of the annular groove on the isolation body 1, and has good processing performance. Figure 1 As shown, when processing the first annular groove 2, the bottom of the groove may be an arc transition, which is convenient for processing and manufacturing on the one hand, and can also increase the surface area of the first annular groove 2 on the other hand, thereby reducing the possibility of amorphous silicon being deposited in the first annular groove 2. Of course, in other embodiments, the shapes of the first annular groove 2 and the second annular groove 3 include but are not limited to square grooves, and can also be arc grooves, etc., and their specific shapes and specifications and other parameters can be specifically determined according to actual design requirements.
[0038] In other embodiments of the present invention, the isolation body 1 includes at least two isolation monomers 5, each of which is sequentially arranged along the axial direction of the isolation body 1, thereby being split into a plurality of spacer forms, further reducing the probability of conduction and short circuit between two adjacent graphite boat pages. For example, there are two isolation monomers 5, so that the isolation body 1 can be divided into two, forming two spacer halves, which are sequentially placed between two adjacent graphite boat pages, which can greatly increase the overall surface area of the spacer, and effectively reduce the probability of conduction and short circuit between two adjacent graphite boat pages.
[0039] Specifically, if Figure 2 As shown, the outer peripheral surface of the isolation monomer 5 is provided with at least two first annular grooves 2, and each first annular groove 2 is arranged at intervals along the axial direction of the isolation monomer 5. And the end surface of the isolation monomer 5 is provided with an annular protrusion 4 and at least two second annular grooves 3, and each second annular groove 3 is arranged at intervals along the radial direction of the isolation monomer 5. Specifically, both side end surfaces of the isolation monomer 5 are provided with an annular protrusion 4 and multiple second annular grooves 3, and the annular protrusion 4 is coaxially arranged with the isolation monomer 5. With this design, the annular protrusions 4 of two adjacent isolation monomers 5 abut against each other, the annular protrusions 4 of the isolation monomer 5 located at the edge abut against the graphite boat sheet, and a plurality of first annular grooves 2 and a plurality of second annular grooves 3 are arranged on the surface of any isolation monomer 5, thereby greatly increasing the overall surface area of the isolation structure, enhancing the isolation effect on amorphous silicon, reducing the possibility of amorphous silicon deposition inside the annular grooves, and effectively avoiding the continuous deposition of amorphous silicon along the axial direction, reliably reducing the probability of conduction and short circuit between two adjacent graphite boat sheets, thereby reducing the risk of damage to the graphite boat sheet, allowing the deposition of the amorphous silicon layer of the silicon wafer to proceed normally, and improving the yield and production capacity of the silicon wafer. It should be noted that, with Figure 2 As for the placement position of the isolation structure shown in the figure, the up-down direction in the figure is the axial direction of the isolation monomer 5, and the left-right direction in the figure is the radial direction of the isolation monomer 5.
[0040] The graphite boat provided by the present invention is described below. The graphite boat described below and the isolation structure described above can be referred to each other.
[0041] The utility model embodiment also provides a graphite boat, including the isolation structure as described in the above embodiments. Specifically, the above isolation structure is arranged between two adjacent graphite boat pages. In this way, a plurality of annular grooves are arranged on the isolation body 1 along its axial and radial directions, so that it is difficult for amorphous silicon to be deposited inside the annular grooves, and the amorphous silicon is prevented from being continuously deposited along the axial direction of the isolation body 1, so that the amorphous silicon layer deposited on the surface of the isolation body 1 can be isolated by the annular grooves, reducing the probability of conduction and short circuit between two adjacent graphite boat pages, thereby reducing the risk of damage to the graphite boat pages, so that the amorphous silicon layer deposition of the silicon wafer can proceed normally, and the yield and production capacity of the silicon wafer can be improved. The derivation process of this beneficial effect is roughly similar to the derivation process of the beneficial effect of the above isolation structure, so it will not be repeated here.
[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.
Claims
1. An isolation structure, characterized in that: include: An annular isolation body (1); At least two first annular grooves (2) are arranged on the outer peripheral surface of the isolation body (1), and each of the first annular grooves (2) is spaced apart along the axial direction of the isolation body (1); At least two second annular grooves (3) are arranged on the end surface of the isolation body (1), and each of the second annular grooves (3) is distributed at intervals along the radial direction of the isolation body (1).
2. The isolation structure according to claim 1, characterized in that: Also includes: An annular protrusion (4) is protrudingly arranged on the end surface of the isolation body (1).
3. The isolation structure according to claim 1, characterized in that: The second annular groove (3) is provided on both end surfaces of the isolation body (1).
4. The isolation structure according to claim 2, characterized in that: The annular protrusions (4) are provided on both end surfaces of the isolation body (1).
5. The isolation structure according to claim 2, characterized in that: The annular protrusion (4) is coaxially arranged with the isolation body (1).
6. The isolation structure according to claim 1, characterized in that: The groove depths of each of the first annular grooves (2) remain consistent.
7. The isolation structure according to claim 1, characterized in that: The groove depths of each of the second annular grooves (3) remain consistent.
8. The isolation structure according to claim 1, characterized in that: The first annular groove (2) is a square groove, and / or the second annular groove (3) is a square groove.
9. The isolation structure according to any one of claims 2, 4 and 5, characterized in that: The isolation body (1) comprises at least two isolation monomers (5), each of which is arranged in sequence along the axial direction of the isolation body (1), and the outer peripheral surface of the isolation monomer (5) is provided with at least two of the first annular grooves (2), and the end surface of the isolation monomer (5) is provided with the annular protrusion (4) and at least two of the second annular grooves (3).
10. A graphite boat, characterized in that: Comprising the isolation structure as described in any one of claims 1-9.