Monolithic MPCVD equipment
By designing a single-piece MPCVD device with fully enclosed shielded housing, open-closed doors and multiple supporting feet, the existing equipment has been solved in terms of operational reliability, safety and convenience, and has achieved higher operating safety, reliability and convenience.
Patent Information
- Application Number
- CN202420975073.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-08
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-05-08
AI Technical Summary
The existing monolithic MPCVD equipment has shortcomings in terms of operational reliability, safety and convenience, especially the equipment's misoperation and microwave leakage problems.
A single-piece MPCVD device including a fully enclosed shielded housing, open-closed doors and multiple supporting feet is designed. The fully enclosed shielded cover is used to shield microwaves and provides redundant protection; it can open and close doors for easy operation and maintenance of operators; multiple supporting feet improve the convenience of equipment installation and transportation.
The installation of the fully enclosed shielded cover improves the operating safety and reliability of the equipment, avoiding misoperation and microwave leakage; multiple support feet improve the convenience of the equipment and simplify the installation and transportation process.
Smart Images
Figure CN222821647U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of film coating, and more specifically to a single-body MPCVD device. Background Art
[0002] In recent decades, with the continuous development of CVD equipment, the artificial diamond industry has been effectively developed. Microwave plasma chemical vapor deposition (MPCVD) has developed particularly rapidly in recent years due to its unique advantages, and has gradually become the most recognized and widely used manufacturing equipment in the diamond crystal and diamond film industry.
[0003] At present, except for some high-power MPCVDs that adopt split design, most MPCVD equipment is generally integrated design (i.e. integrated / single-body design MPCVD equipment). The equipment integrates the microwave generation system, reaction chamber, cooling system, pneumatic system, gas supply system, control system, exhaust system, etc. into the equipment machine or equipment rack. The integration, aesthetics, convenience, operational reliability, and operational safety of MPCVD equipment are particularly important. Utility Model Content
[0004] In view of the problems existing in the background technology, an object of the present disclosure is to provide a single-body MPCVD device which can improve operational reliability.
[0005] Another object of the present disclosure is to provide a single-body MPCVD device that can improve operational safety.
[0006] Another object of the present disclosure is to provide a single-body MPCVD device that can improve convenience.
[0007] Thus, a single-body MPCVD device is provided, which includes a fully enclosed shielding cover, an openable and closable door, and a plurality of supporting feet; the fully enclosed shielding cover is used to shield the microwaves generated when the single-body MPCVD device is working; the openable and closable door is installed on the fully enclosed shielding cover, and the openable and closable door is used for an operator to open or close the single-body MPCVD device when operating the single-body MPCVD device; a plurality of supporting feet are arranged at the bottom of the fully enclosed shielding cover, and the plurality of supporting feet are used to provide support for the single-body MPCVD device so that the single-body MPCVD device is located on a working surface.
[0008] The beneficial effects of the present disclosure are as follows.
[0009] In the single-body MPCVD equipment, the fully enclosed shielding cover constitutes the appearance of the single-body MPCVD equipment. The microwave generating system, reaction chamber, cooling system, pneumatic system, gas supply system, control system, exhaust system, etc. integrated in the fully enclosed shielding cover have been subjected to interlocking, mechanical locking and other protections. The setting of the fully enclosed shielding cover can provide redundant protection to avoid misoperation of the single-body MPCVD equipment caused by certain components exposed to the outside, thereby improving operational reliability.
[0010] In the single-body MPCVD equipment, the fully enclosed shielding cover is used to shield the microwaves generated when the single-body MPCVD equipment is working, thereby improving the operational safety.
[0011] In the single-body MPCVD equipment, the provision of multiple supporting legs provides convenience for the installation and transportation of the single-body MPCVD equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 is a perspective view of a single-body MPCVD device according to the present disclosure.
[0013] Figure 2 yes Figure 1 A stereogram viewed from another angle.
[0014] Figure 3 yes Figure 1 A stereogram viewed from another angle.
[0015] The reference numerals are described as follows:
[0016] 100 single-body MPCVD equipment 3 support feet
[0017] 1Fully enclosed shielding shell 4Shielding perspective window
[0018] 11 lifting holes 5 maintenance doors
[0019] 2 open and close doors 6 control computers DETAILED DESCRIPTION
[0020] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.
[0021] Reference Figures 1 to 3 According to the present disclosure, the single-body MPCVD device 100 includes a fully enclosed shielding shell 1, an openable and closable door 2, and a plurality of supporting legs 3.
[0022] The fully enclosed shielding shell 1 is used to shield the microwaves generated when the single-type MPCVD device 100 is working. The openable and closable door 2 is installed on the fully enclosed shielding shell 1, and the openable and closable door 2 is used for the operator to open or close when operating the single-type MPCVD device 100. A plurality of supporting feet 3 are arranged at the bottom of the fully enclosed shielding shell 1, and the plurality of supporting feet 3 are used to provide support for the single-type MPCVD device 100 so that the single-type MPCVD device 100 is located on the working surface.
[0023] In the single-body MPCVD device 100, the fully enclosed shielding shell 1 constitutes the appearance of the single-body MPCVD device 100, and the microwave generating system, reaction chamber, cooling system, pneumatic system, gas supply system, control system, exhaust system, etc. integrated in the fully enclosed shielding shell 1 have been subjected to interlocking, mechanical locking and other protections. The setting of the fully enclosed shielding shell 1 can provide redundant protection to avoid erroneous operation of the single-body MPCVD device 100 caused by certain components being exposed to the outside, thereby improving operational reliability.
[0024] In the single-body MPCVD device 100, the fully enclosed shielding cover 1 is used to shield the microwaves generated when the single-body MPCVD device 100 is working, thereby improving the operational safety.
[0025] In the single-body MPCVD device 100 , the provision of multiple supporting legs 3 provides convenience for the installation and transportation of the single-body MPCVD device 100 .
[0026] In the single-body MPCVD device 100, the working surface may be the ground, or the surface of a working table on the ground.
[0027] The fully enclosed shielding shell 1 can be a sheet metal shell, which can reduce the weight and cost of the fully enclosed shielding shell 1. Further, a sprayed sheet metal shell can be used to improve the aesthetics of the fully enclosed shielding shell 1, and the color of the sprayed material can be appropriately selected according to the working environment.
[0028] like Figures 1 to 3 As shown, the fully enclosed shielding shell 1 is of box-type design, which improves the aesthetics of the fully enclosed shielding shell 1.
[0029] like Figures 1 to 3As shown, in one example, the fully enclosed shielding shell 1 is a block-assembly type shell, which improves the convenience of manufacturing, assembling and disassembling the fully enclosed shielding shell 1. Specifically, the portion of the fully enclosed shielding shell 1 corresponding to the openable and closable door 2 can be made into a shielding shell, the portion of the fully enclosed shielding shell 1 below the openable and closable door 2 can be made into a shielding shell, and the portion of the fully enclosed shielding shell 1 on one side of the openable and closable door 2 in the left and right directions can be made into two shielding shells (one corresponding to the control computer 6 and the portion below, and one corresponding to the portion above the control computer 6, which is described later). The four shielding shells can be assembled using a detachable structure, and the detachable structure uses, for example, buckles, screws / screw holes. Of course, in an alternative embodiment, the fully enclosed shielding shell 1 does not use a block-assembly type shell but a single integral one-piece shell. Therefore, compared with the block-assembly type shell, the single integral one-piece shell does not require an assembly structure, and the structure is simpler.
[0030] Combination Figure 1 and Figure 2 In one example, the three openable and closable doors 2 are arranged on three adjacent faces in sequence among the four front, back, left, and right faces of the fully enclosed shielding shell 1, and the three openable and closable doors 2 are directly adjacent to each other. The design of the three openable and closable doors 2 greatly improves the convenience of the operator when operating the single-body MPCVD equipment 100. By arranging the three openable and closable doors 2 on three adjacent faces in sequence among the four front, back, left, and right faces of the fully enclosed shielding shell 1 and the three openable and closable doors 2 are directly adjacent to each other, the operator's operating area is located on one side of the left-right direction of the single-body MPCVD equipment 100, and the operator's operating area and non-operating area are separated, thereby improving the operational safety and reliability of the single-body MPCVD equipment 100.
[0031] Combination Figure 1 and Figure 2 The middle openable and closable door 2 among the three openable and closable doors 2 is located on the side surface on one side in the left-right direction, while the other two openable and closable doors 2 are respectively located on the two side surfaces on both sides in the front-back direction. The two openable and closable doors 2 respectively located on the two side surfaces on both sides in the front-back direction are symmetrical with respect to the openable and closable door 2 located on the side surface on one side in the left-right direction, which improves the aesthetics of the single-body MPCVD equipment 100.
[0032] Combination Figure 1 and Figure 2 , located on one side in the front-to-back direction ( Figure 1 The openable and closable door 2 on the front side of the left and right sides is opened or closed in a back-to-back manner relative to the openable and closable door 2 on the side of the left and right sides, while the openable and closable door 2 on the other side of the front and back sides is opened or closed in a back-to-back manner. Figure 2The opening or closing of the openable and closable door 2 on the front side of the device is face to face with respect to the openable and closable door 2 on the side of one side in the left-right direction.
[0033] like Figures 1 to 3 As shown, the openable and closable door 2 is pivotally connected to the fully enclosed shielding shell 1 by a hinge embedded in the fully enclosed shielding shell 1, thereby improving the aesthetic appearance of the fully enclosed shielding shell 1.
[0034] exist Figure 3 In the embodiment, the number of the supporting legs 3 is six, but the number of the supporting legs 3 can be more or less than six according to actual needs. Figures 1 to 3 As shown, each support leg 3 is a caster. The use of casters improves the convenience of installation and transfer of the single-body MPCVD device 100. For example, the caster can be a Forma wheel structure.
[0035] like Figures 1 to 3 As shown, in one example, the monolithic MPCVD device 100 further includes a shielding perspective window 4. The shielding perspective window 4 is provided on the openable and closable door 2, and the shielding perspective window 4 is used for the operator to observe the operation of the device in the fully enclosed shielding housing 1 in real time and to shield the microwaves generated when the monolithic MPCVD device 100 is working. By providing the shielding perspective window 4, the operational reliability and safety of the monolithic MPCVD device 100 are improved. In addition, the shielding perspective window 4 can also improve the aesthetic appearance of the monolithic MPCVD device 100.
[0036] like Figures 1 to 3 As shown, the shape of the shielding perspective window 4 is the same as that of the openable and closable door 2, and the perspective window occupies more than 50% of the area of the openable and closable door 2 (i.e., the shielding perspective window 4 is designed as a large window). The large window design is more conducive to the operator to observe the operation of the equipment in the fully enclosed shielding shell 1 in real time, thereby improving the operational reliability of the single-body MPCVD equipment 100.
[0037] In one example, a metal mesh interlayer is provided in the shielding perspective window 4 and is connected to the fully enclosed shielding shell 1. Specifically, the metal mesh interlayer can be connected to the hinge of the openable and closable door 2 installed on the fully enclosed shielding shell 1 by means of metal screws or the like. In this way, although the shielding perspective window 4 occupies a part of the fully enclosed shielding shell 1, the entire surface of the fully enclosed shielding shell 1 still has the function of shielding microwaves, thereby preventing microwaves from leaking out of the fully enclosed shielding shell 1.
[0038] The shielding perspective window 4 may be made of an acrylic or glass structure with a metal mesh interlayer.
[0039] In one example, the single-body MPCVD device further includes a plurality of detachable maintenance doors 5 (such as Figures 1 to 3 ) and control computer 6 (such as Figure 1 As shown in the figure, each maintenance door 5 is used for operators to remove when maintaining the equipment in the fully enclosed shielding case 1 and to install when not performing maintenance. In this way, operators do not need to open the closable door 2 to perform maintenance, but can directly perform equipment maintenance at the corresponding maintenance door 5, which improves the convenience of maintenance, and the control computer 6 is set in the fully enclosed shielding case 1, which improves the convenience of on-site operation.
[0040] like Figure 1 and Figure 2 As shown, the top of the fully enclosed shielding shell 1 is provided with a plurality of lifting holes 11, each of which is used to install a lifting device when the single-body MPCVD device 100 is placed on a work surface. Each of the lifting holes 11 can be a threaded hole structure, and accordingly, the lifting device can be a hook with a threaded column. Figure 1 In the embodiment, the number of the hoisting holes 11 is eight, but the number of the hoisting holes 11 can be more or less than eight according to actual needs.
[0041] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.
Claims
1. A single-body MPCVD device, characterized in that: The single-body MPCVD device (100) comprises a fully enclosed shielding shell (1), an openable and closable door (2), and a plurality of supporting legs (3); The fully enclosed shielding casing (1) is used to shield microwaves generated when the single-body MPCVD device (100) is in operation; The openable and closable door (2) is installed on the fully enclosed shielding housing (1), and the openable and closable door (2) is used for an operator to open or close the door when operating the single-body MPCVD device (100); A plurality of support legs (3) are arranged at the bottom of the fully enclosed shielding shell (1), and the plurality of support legs (3) are used to provide support for the single-body MPCVD device (100) so that the single-body MPCVD device (100) is located on a working surface.
2. The single-body MPCVD device according to claim 1, characterized in that: The fully enclosed shielding housing (1) is a block-assembled housing.
3. The single-body MPCVD device according to claim 1, characterized in that: The openable door (2) has three settings: The three openable and closable doors (2) are arranged on three adjacent faces in sequence among the four faces of the fully enclosed shielding shell (1), and the three openable and closable doors (2) are directly adjacent to each other.
4. The single-body MPCVD device according to claim 1, characterized in that: The openable and closable door (2) is pivotally connected to the fully enclosed shielding casing (1) via a hinge embedded in the fully enclosed shielding casing (1).
5. The single-body MPCVD device according to claim 1, characterized in that: The fully enclosed shielding casing (1) is a sheet metal casing; and / or Each supporting foot (3) is a caster.
6. The single-body MPCVD device according to claim 1, characterized in that: The single-body MPCVD device (100) further comprises a shielding perspective window (4), The shielding perspective window (4) is arranged on the openable and closable door (2), and is used for allowing an operator to observe the operation of the equipment in the fully enclosed shielding housing (1) in real time and to shield microwaves generated when the single-body MPCVD equipment (100) is in operation.
7. The single-body MPCVD device according to claim 6, characterized in that: The shape of the shielding perspective window (4) is the same as that of the openable and closable door (2), and the perspective window occupies more than 50% of the area of the openable and closable door (2).
8. The single-body MPCVD device according to claim 5, characterized in that: A metal mesh interlayer which is in electrical communication with the fully enclosed shielding housing (1) is arranged in the shielding perspective window (4).
9. The single-body MPCVD device according to claim 1, characterized in that: The single-body MPCVD device also includes a plurality of detachable maintenance doors (5) and a control computer (6) arranged on a fully enclosed shielding housing (1). Each maintenance door (5) is used for operators to remove when maintaining equipment in the fully enclosed shielding housing (1) and to install it when not maintaining.
10. The single-body MPCVD device according to claim 1, characterized in that: The top of the fully enclosed shielding housing (1) is provided with a plurality of lifting holes (11). Each lifting hole (11) is used to install lifting equipment when placing the single-body MPCVD equipment (100) on a work surface.