Sealing structure for vacuum coating

Abstract

The utility model discloses a sealing structure for vacuum coating in the field of conductive film production, which comprises a cooling main roller connected with the cavity wall of a vacuum cavity, the cavity wall of the vacuum cavity is provided with a cooling main roller mounting hole, and one end of the cooling main roller is rotatably arranged in the cooling main roller mounting hole through a sealing structure; the sealing structure comprises a mounting flange plate and a plurality of rolling bearings which are sequentially arranged in a cooling main roller mounting hole, a sealing cavity is formed in the mounting flange plate, a sealing assembly is arranged in the sealing cavity and comprises a sealing shaft sleeve arranged on the outer side of the cooling main roller in a sleeving mode, and a plurality of first sealing rings are arranged between the sealing shaft sleeve and the cooling main roller. The outer side of the sealing shaft sleeve is sleeved with a framework oil seal, and the framework oil seal abuts against the inner wall of the sealing cavity. The cooling roller solves the problem that air leakage occurs between an existing cooling roller and evaporation equipment, the sealing effect between the cooling roller and the evaporation equipment is ensured through the double-sealing design of the framework oil seal and the first sealing ring, and the air leakage phenomenon is effectively avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive film production, in particular to a sealing structure used for vacuum coating. Background Art

[0002] Conductive film is a polymer material with copper or aluminum layers plated on the top and bottom surfaces of substrates such as PET and PP. It has a sandwich structure and is also called a composite thin film current collector. It is a type of material with many good properties and is widely used in lithium-ion batteries, mainly as a battery current collector in lithium-ion batteries.

[0003] Conductive films can be prepared by vacuum evaporation coating method, which is a vacuum coating method that heats the evaporating material with an evaporator under vacuum conditions to make it sublime, and the evaporating particle flow is directly shot to the substrate, and deposited on the base film to form a thin film, or heated evaporation coating material. In the process of evaporation coating, in order to prevent the base film from burning through due to high temperature, the film is usually cooled in real time by a rotating cooling roller. This cooling roller is precisely driven by an external drive component to ensure that it rotates at a constant speed. At the same time, in order to more effectively reduce the temperature, coolant is also introduced into the outside of the cooling roller, and the heat is quickly taken away by the circulation of the liquid.

[0004] However, despite these measures, how to ensure the vacuum inside the evaporation equipment is still a key factor affecting the coating quality. In particular, the sealing between the cooling roller and the evaporation equipment is even more critical. In the existing technology, the sealing between these two parts usually relies on the sealing ring. However, as time goes by, the continuous rotation of the cooling roller will cause the sealing ring to gradually wear, resulting in air leakage between the cooling roller and the evaporation equipment. Once the air leaks, the vacuum inside the evaporation equipment will be affected, causing the coating process to be disturbed, and ultimately affecting the quality of the conductive film.

[0005] The above defects need to be solved urgently. Utility Model Content

[0006] In order to solve the problem that the continuous rotation of the existing cooling roller causes the sealing ring to gradually wear out, thereby causing air leakage between the cooling roller and the evaporation device, the utility model provides a sealing structure for vacuum coating.

[0007] The technical solution of the utility model is as follows:

[0008] A sealing structure for vacuum coating, comprising a cooling main roller connected to a vacuum chamber wall, wherein a cooling main roller mounting hole is provided on the vacuum chamber wall, and one end of the cooling main roller is rotatably arranged in the cooling main roller mounting hole through a sealing structure;

[0009] The sealing structure includes a mounting flange and a plurality of rolling bearings which are sequentially arranged in the mounting hole of the cooling main roller. A sealing cavity is arranged inside the mounting flange. A sealing assembly is arranged in the sealing cavity. The sealing assembly includes a sealing sleeve which is sleeved on the outer side of the cooling main roller. A plurality of first sealing rings are arranged between the sealing sleeve and the cooling main roller. A skeleton oil seal is sleeved on the outer side of the sealing sleeve, and the skeleton oil seal abuts against the inner wall of the sealing cavity.

[0010] According to the utility model of the above scheme, a plurality of first annular grooves arranged at intervals are arranged on the inner side of the sealing sleeve, a plurality of the first sealing rings are arranged in the corresponding first annular grooves, and the first sealing rings are sleeved on the cooling main roller.

[0011] According to the utility model of the above scheme, there are two skeleton oil seals, the two skeleton oil seal sleeves are arranged at both ends of the sealing sleeve, and an oil seal spacer is arranged between the two skeleton oil seals.

[0012] According to the utility model of the above scheme, a first annular limiting groove is arranged on the sealing cavity, and an oil seal retaining spring is arranged in the first annular limiting groove to limit the skeleton oil seal close to the end of the cooling main roller.

[0013] According to the above-mentioned solution of the utility model, an abutment portion is provided on a side of the mounting flange close to the rolling bearing, and one of the skeleton oil seals abuts against the abutment portion.

[0014] According to the utility model of the above scheme, a second annular limiting groove is arranged on the cooling main roller, and a sleeve retaining spring is arranged in the second annular limiting groove to limit the sealing sleeve.

[0015] According to the above solution of the utility model, there are three first sealing rings, and the three first sealing rings are evenly spaced and sleeved on the cooling main roller.

[0016] According to the above-mentioned solution of the utility model, a second sealing ring groove is provided on one side of the mounting flange and the wall of the vacuum chamber, and a second sealing ring is provided in the second sealing ring groove.

[0017] According to the above-mentioned solution of the utility model, there are two rolling bearings, and a bearing spacer is arranged between the two rolling bearings, and the bearing spacer is sleeved on the outer side of the cooling main roller.

[0018] According to the utility model of the above scheme, a first connecting hole is provided on the wall of the vacuum chamber, a second connecting hole is provided on the mounting flange, and the connecting member passes through the first connecting hole and is connected to the second connecting hole.

[0019] According to the utility model of the above solution, a part installation opening is provided on the side of the mounting flange away from the rolling bearing.

[0020] The utility model according to the above scheme has the following beneficial effects:

[0021] In the above-mentioned sealing structure for vacuum coating, a plurality of first sealing rings are arranged between the sealing sleeve and the cooling main roller, and a skeleton oil seal is arranged on the outer side of the sealing sleeve. The double sealing design of the skeleton oil seal and the first sealing ring ensures the sealing effect between the cooling roller and the evaporation device, effectively avoiding the occurrence of air leakage, which not only ensures the high vacuum degree inside the evaporation device, making the coating process more stable and efficient, but also prolongs the service life of the evaporation device and reduces the maintenance cost caused by air leakage. In addition, by regularly adding lubricating oil, the skeleton oil seal can maintain its good lubrication state, thereby reducing the wear of the sealing ring, prolonging the service life of the first sealing ring, and reducing the risk of air leakage caused by the wear of the first sealing ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the structure of the utility model;

[0023] Figure 2 It is a cross-sectional view of the utility model;

[0024] Figure 3 for Figure 2 Enlarged view of part A.

[0025] In the figure, 1, vacuum chamber wall; 2, cooling main roller; 3, sealing structure; 31, mounting flange; 311, abutment portion; 32, rolling bearing; 33, connecting piece; 341, sealing sleeve; 342, skeleton oil seal; 343, first sealing ring; 344, sealing sleeve; 345, oil seal retaining spring; 346, sleeve retaining spring; 35, bearing spacer; 36, second sealing ring. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0027] like Figure 1 As shown, the utility model provides a sealing structure for vacuum coating, including a cooling main roller 2 connected to a vacuum chamber wall 1, a cooling main roller mounting hole is provided on the vacuum chamber wall 1, one end of the cooling main roller 2 is rotatably arranged in the cooling main roller mounting hole through a sealing structure 3, so that the cooling main roller 2 is sealed and rotatably connected to the evaporation device.

[0028] like Figure 2 As shown, in this embodiment, the sealing structure 3 includes a mounting flange 31 and a plurality of rolling bearings 32 which are sequentially arranged in the mounting hole of the cooling main roller. One end of the mounting flange 31 is plugged into the side of the mounting hole of the cooling main roller away from the inside of the evaporation device, and the other end of the mounting flange 31 is provided with a first connecting hole, and the mounting flange 31 is provided with a second connecting hole. The connecting member 33 passes through the first connecting hole and is connected with the second connecting hole to install the mounting flange on the mounting hole of the cooling main roller. In addition, the first connecting member 33 can be designed as a bolt. Of course, in actual design, the structure of the first connecting member 33 can be designed according to actual needs. In addition, a part installation opening is provided on the side of the mounting flange 31 away from the rolling bearing 32, which is convenient for parts to be installed inside the mounting flange 31, thereby improving the convenience of operation.

[0029] like Figure 2 As shown, in this embodiment, a sealing cavity is provided inside the mounting flange 31, and a sealing assembly is provided inside the sealing cavity. The sealing assembly includes a sealing sleeve 344, and the sealing sleeve 344 is sleeved on the outside of the cooling main roller 2. A plurality of first sealing rings 343 are provided between the sealing sleeve 344 and the cooling main roller 2, and a skeleton oil seal 342 is sleeved on the outside of the sealing sleeve 344, and the skeleton oil seal 342 abuts against the inner wall of the sealing cavity. The function of the skeleton oil seal 342 is to isolate the parts of the transmission parts that need lubrication from the external environment to prevent the lubricating oil from leaking. The skeleton is like the steel bar inside the concrete component, which plays a reinforcing role and enables the oil seal to maintain its shape and tension. The skeleton oil seal 342 can be divided into a single-lip skeleton oil seal 342 and a double-lip skeleton oil seal 342 according to the structural form. The lip of the double-lip skeleton oil seal 342 plays a dustproof role to prevent external dust, impurities, etc. from entering the machine. In actual design, the structure of the skeleton oil seal 342 can be designed according to actual needs.

[0030] In this embodiment, the double sealing design of the skeleton oil seal 342 and the first sealing ring 343 ensures the sealing effect between the cooling roller and the evaporation device, effectively avoiding the occurrence of air leakage. It not only ensures the high vacuum degree inside the evaporation device, making the coating process more stable and efficient, but also extends the service life of the evaporation device and reduces the maintenance cost caused by air leakage.

[0031] like Figure 2 , Figure 3As shown, in this embodiment, a plurality of first annular grooves arranged at intervals are arranged on the inner side of the sealing sleeve 344, a plurality of first sealing rings 343 are arranged in the corresponding first annular grooves, and the first sealing ring 343 is sleeved on the cooling main roller 2, so that the first sealing ring 343 can be closely matched with the sealing sleeve 344, thereby enhancing the sealing effect between the cooling main shaft and the evaporation device. In addition, the number of first annular grooves can be designed to be three, and the three first annular grooves are evenly arranged at intervals, that is, the three first sealing rings 343 are evenly sleeved on the cooling main roller 2 at intervals. Of course, the number of first annular grooves can also be designed to be four or five. In actual design, the number of first annular grooves and first sealing rings 343 can be designed according to actual needs.

[0032] like Figure 2 , Figure 3 As shown, in this embodiment, the skeleton oil seal 342 can be designed as two, the two skeleton oil seals 342 are sleeved at both ends of the sealing sleeve 344, and an oil seal spacer is arranged between the two skeleton oil seals 342, and the oil seal spacer is sleeved on the sealing sleeve 344, the oil seal spacer can set the two skeleton oil seals 342 at intervals, and at the same time can connect the sealing sleeve 344 with the first sealing ring 343 on the cooling main shaft more tightly, so as to prevent air leakage, and then improve the vacuum degree of the evaporation setting. In addition, by regularly adding lubricating oil, the skeleton oil seal 342 can maintain its good lubrication state, thereby reducing the wear of the sealing ring, extending the service life of the first sealing ring 343, and reducing the risk of air leakage caused by the wear of the first sealing ring 343.

[0033] like Figure 2 , Figure 3 As shown, in this embodiment, an abutment portion 311 is provided on one side of the mounting flange 31 close to the rolling bearing 32, and the skeleton oil seal 342 close to the abutment portion 311 abuts against it. In addition, a first annular limiting groove is provided on the sealing cavity, and an oil seal retaining spring 345 is provided in the first annular limiting groove to limit the skeleton oil seal 342 close to the end of the cooling main roller 2, that is, the abutment portion 311 and the oil seal retaining spring 345 limit the two skeleton oil seals 342, so that when the cooling main shaft rotates, the skeleton oil seal 342 will not move along the axial direction of the sealing sleeve 344, thereby improving the stability of the assembly.

[0034] like Figure 2 , Figure 3 As shown, in this embodiment, a second annular limiting groove is provided on the cooling main roller 2, and a sleeve retaining spring 346 is provided in the second annular limiting groove to limit the sealing sleeve 344, so that the sealing sleeve 344 will not move along the axial direction of the cooling main shaft when the cooling main shaft rotates, thereby facilitating the rotation of the cooling main roller 2.

[0035] like Figure 2 , Figure 3As shown, in this embodiment, a plurality of rolling bearings 32 are sequentially arranged side by side on one side of the cooling main roller mounting hole close to the inside of the evaporation device. Two rolling bearings 32 can be designed, and a bearing spacer 35 is arranged between the two rolling bearings 32, and the bearing spacer 35 is sleeved on the outside of the cooling main roller 2, so that the two rolling bearings 32 are separated and arranged, so that the cooling main roller 2 is more stable when rotating, and the balance of the rotation of the cooling main roller 2 is improved. Of course, in actual design, the number of rolling bearings 32 can be designed according to actual needs.

[0036] like Figure 2 , Figure 3 As shown, in this embodiment, a second sealing ring groove is provided on one side of the mounting flange and the vacuum chamber wall 1, and a second sealing ring 36 is provided in the second sealing ring groove to improve the sealing between the mounting flange and the vacuum chamber wall 1, thereby further preventing air leakage between the cooling roller and the evaporation device and improving the vacuum degree of the evaporation device.

[0037] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0038] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A sealing structure for vacuum coating, comprising a cooling main roller connected to a vacuum chamber wall, wherein a cooling main roller mounting hole is provided on the vacuum chamber wall, and one end of the cooling main roller is rotatably arranged in the cooling main roller mounting hole through a sealing structure, characterized in that: The sealing structure includes a mounting flange and a plurality of rolling bearings which are sequentially arranged in the mounting hole of the cooling main roller. A sealing cavity is arranged inside the mounting flange. A sealing assembly is arranged in the sealing cavity. The sealing assembly includes a sealing sleeve which is sleeved on the outer side of the cooling main roller. A plurality of first sealing rings are arranged between the sealing sleeve and the cooling main roller. A skeleton oil seal is sleeved on the outer side of the sealing sleeve, and the skeleton oil seal abuts against the inner wall of the sealing cavity.

2. The sealing structure for vacuum coating according to claim 1, characterized in that: A plurality of first annular grooves arranged at intervals are arranged on the inner side of the sealing sleeve, a plurality of the first sealing rings are arranged in the corresponding first annular grooves, and the first sealing rings are sleeved on the cooling main roller.

3. The sealing structure for vacuum coating according to claim 1 or 2, characterized in that: There are two skeleton oil seals, and the two skeleton oil seal sleeves are arranged at both ends of the sealing shaft sleeve, and an oil seal spacer is arranged between the two skeleton oil seals.

4. The sealing structure for vacuum coating according to claim 3, characterized in that: The sealing cavity is provided with a first annular limiting groove, and the oil seal retaining spring is arranged in the first annular limiting groove to limit the skeleton oil seal close to the end of the cooling main roller.

5. The sealing structure for vacuum coating according to claim 3, characterized in that: A contact portion is provided on one side of the mounting flange close to the rolling bearing, and one of the skeleton oil seals contacts the contact portion.

6. The sealing structure for vacuum coating according to any one of claims 1, 2, 4 or 5, characterized in that: The cooling main roller is provided with a second annular limiting groove, and the sleeve retaining spring is arranged in the second annular limiting groove to limit the sealing sleeve.

7. The sealing structure for vacuum coating according to claim 6, characterized in that: There are three first sealing rings, and the three first sealing rings are evenly spaced and sleeved on the cooling main roller.

8. The sealing structure for vacuum coating according to any one of claims 1, 2, 4, 5 or 7, characterized in that: A second sealing ring groove is arranged on one side of the mounting flange close to the wall of the vacuum chamber, and a second sealing ring is arranged in the second sealing ring groove.

9. The sealing structure for vacuum coating according to any one of claims 1, 2, 4, 5 or 7, characterized in that: There are two rolling bearings, and a bearing spacer is arranged between the two rolling bearings, and the bearing spacer is sleeved on the outer side of the cooling main roller.

10. The sealing structure for vacuum coating according to any one of claims 1, 2, 4, 5 or 7, characterized in that: A first connecting hole is provided on the wall of the vacuum chamber, a second connecting hole is provided on the mounting flange, and a connecting member passes through the first connecting hole and is connected to the second connecting hole.

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