Heat preservation module and drying furnace

Abstract

The heat preservation module is used for heat preservation of a lower backflow section of a transmission assembly, the heat preservation module comprises an upper module, and the upper module comprises an upper shell with an opening in the lower end and a first heat preservation cotton assembly located in the upper shell. The lower module comprises a lower shell with an opening in the upper end and a second heat preservation cotton assembly located in the lower shell. The upper shell can cover the lower shell, a heat preservation cavity is defined by the first heat preservation cotton assembly and the second heat preservation cotton assembly, and the lower backflow section only penetrates through the heat preservation cavity in the conveying direction of the lower backflow section. The lower backflow section can be insulated, and heat dissipation of the lower backflow section is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing equipment, in particular to a heat preservation module and a drying furnace. Background Art

[0002] In the field of solar cell photovoltaic drying, silicon wafers are usually dried in a drying furnace. Among the types of drying furnaces, the insert furnace is favored by downstream manufacturers for its extremely high output and drying efficiency. Today, the insert furnace has a very slow transmission speed for silicon wafers due to its insert transmission and its unique way of loading and unloading. This can meet the requirements of loading and unloading and drying silicon wafers, that is, the transmission speed of the transmission device for transmitting silicon wafers is slow. The transmission device includes a transmission carrier, and the silicon wafer is inserted into the transmission carrier. It enters the heating cavity under the drive of the transmission carrier. During this process, the transmission carrier will absorb the temperature in the heating cavity.

[0003] The existing heating chamber can only wrap the transfer vehicle moved to the upper transfer section. When the transfer vehicle moves away from the upper transfer section, especially on the lower reflow section, the transfer vehicle is exposed to the air and the heat on the transfer vehicle will diffuse outward, causing extreme waste of energy. Utility Model Content

[0004] In order to overcome the above-mentioned shortcomings, the purpose of the utility model is to provide a heat preservation module and a drying furnace, which can keep the lower reflow section warm and reduce the heat dissipation of the lower reflow section.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is: a heat preservation module, which is used for heat preservation of the lower reflux section of the transmission component, and the heat preservation module comprises:

[0006] An upper mold assembly, the upper mold assembly comprising an upper shell with an opening at the lower end and a first thermal insulation cotton component located in the upper shell;

[0007] A lower mold assembly, the lower mold assembly comprising a lower shell with an opening at the upper end and a second thermal insulation cotton component located in the lower shell;

[0008] The upper shell can be covered on the lower shell, the first thermal insulation cotton component and the second thermal insulation cotton component define a thermal insulation cavity, and the lower reflux section only passes through the thermal insulation cavity along its transmission direction.

[0009] The beneficial effects of the utility model are:

[0010] 1. An insulation module is added outside the lower reflux section to insulate the lower reflux section and reduce the heat dissipation of the lower reflux section, so that the transmission components returning to the upper reflux section still have a certain amount of heat, which greatly reduces heat dissipation and saves energy.

[0011] Second, the upper shell can be covered on the lower shell, and the upper die set and the lower die set adopt a separate structure. When maintenance is needed, the upper die set or the lower die set can be opened.

[0012] 3. The lower reflux section only passes through the insulation cavity along its transmission direction, that is, the transmission component moved into the insulation module can be completely located in the insulation cavity. At this time, the transmission component will not extend out of the insulation module in the X direction, the insulation module has fewer openings, and the insulation performance is good.

[0013] Furthermore, the upper shell includes a horizontal plate and vertical plates on both sides;

[0014] The first thermal insulation cotton component includes upper thermal insulation cotton and first side thermal insulation cotton on both sides. A spacing is left between the upper thermal insulation cotton and the transverse plate of the upper shell. An upper buffer cavity is formed between the upper thermal insulation cotton, the transverse plate of the upper shell and the first side thermal insulation cotton. The upper buffer cavity is connected to the thermal insulation cavity and can introduce heating gas.

[0015] At this time, external heating gas can also be introduced into the insulation cavity to heat the transmission components in the insulation cavity. The upper insulation cotton separates the space in the upper shell into an upper buffer cavity located above the insulation cavity. After the external heating gas enters the upper buffer cavity, it can be evenly mixed in the upper buffer cavity and then enter the insulation cavity.

[0016] Furthermore, the upper thermal insulation cotton is breathable thermal insulation cotton, or a through hole connecting the thermal insulation cavity and the upper buffer cavity is opened on the upper thermal insulation cotton.

[0017] The thermal insulation cotton not only plays a role in heat preservation, but also plays a role in guiding the hot air in the upper buffer cavity into the thermal insulation cavity. At the same time, it can also play a filtering role to prevent some impurities from entering the thermal insulation cavity.

[0018] Furthermore, a mesh plate located below the upper heat-insulating cotton and above the transmission assembly is fixed to the upper shell body, and the mesh plate is used to evenly guide the hot air overflowing from the upper buffer cavity into the heating cavity.

[0019] Furthermore, the lower shell and the upper shell have the same structure;

[0020] The second thermal insulation cotton component includes lower thermal insulation cotton and second side thermal insulation cotton on both sides. A spacing is left between the lower thermal insulation cotton and the transverse plate of the lower shell. A lower buffer cavity is formed between the lower thermal insulation cotton, the transverse plate of the lower shell and the second side thermal insulation cotton. The lower buffer cavity is connected to the thermal insulation cavity and can introduce heating gas.

[0021] The lower insulation cotton separates the space in the lower shell into a lower buffer cavity located below the insulation cavity. After the external heating gas enters the lower buffer cavity, it can be evenly mixed in the lower buffer cavity and then enter the insulation cavity.

[0022] Furthermore, the transmission component includes two transmission chains and a plurality of transmission brackets located between the transmission chains, each transmission bracket includes at least one accommodating space for inserting a silicon wafer; and an isolating member located between two adjacent accommodating spaces is fixed in the insulation cavity.

[0023] The spacer reduces the space of the thermal insulation cavity, making the heat of the thermal insulation cavity more concentrated.

[0024] Furthermore, the upper shell and the lower shell are hinged and can be buckled with each other, and the buckled upper shell and the lower shell form an inlet and an outlet connected to the heat preservation cavity at both ends along the transmission direction of the transmission component. The hinged form of the upper shell and the lower shell facilitates opening the upper shell or the lower shell for maintenance or replacement.

[0025] Furthermore, a temperature sensor is also arranged in the heat preservation cavity, and the temperature sensor is used to collect the temperature in the heat preservation cavity.

[0026] The temperature collected by the temperature sensor can be used to determine whether the insulation module introduces heating gas from the outside.

[0027] The utility model also discloses a drying furnace, comprising:

[0028] The transmission component is a closed-loop structure, including an upper transmission section and a lower reflux section spaced apart and arranged in parallel, wherein the upper transmission section and the lower reflux section are connected via a transition section;

[0029] A drying module, wherein the upper transmission section passes through the drying module, and the drying module performs drying;

[0030] The insulation module adopts the above insulation module, and the lower reflux section runs through the insulation module.

[0031] An insulation module is added outside the lower reflux section to insulate the lower reflux section and reduce the heat dissipation of the lower reflux section, so that the transmission components returning to the upper reflux section still have a certain amount of heat, greatly reducing heat dissipation.

[0032] Furthermore, the drying module is connected to the heat preservation cavity through a hot air pipe, and a one-way valve is provided on the hot air pipe, which can only guide the heating gas in the drying module into the heat preservation cavity in one direction.

[0033] The excess heating gas in the drying module is introduced into the insulation gas through the hot gas pipeline well, so as to realize the full application of the heating gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a cross-sectional view of the first embodiment of the utility model;

[0035] Figure 2 This is a schematic diagram of the three-dimensional structure of the second embodiment of the present utility model;

[0036] Figure 3 It is a side view of the three-dimensional structure of the second embodiment of the present utility model.

[0037] In the figure:

[0038] 100, transmission component; 101, upper transmission section; 102, lower return section; 103, transition section; 1a, transmission chain; 1b, transmission bracket; 11b, accommodation space;

[0039] 200, thermal insulation module;

[0040] 1. Upper die set; 11. Upper shell; 111. Horizontal plate; 112. Vertical plate; 12. Upper thermal insulation cotton; 13. First side thermal insulation cotton; 2. Lower die set; 21. Lower shell; 22. Lower thermal insulation cotton; 23. Second side thermal insulation cotton; 3. Thermal insulation cavity; 31. Exit; 41. Upper buffer cavity; 42. Lower buffer cavity; 5. Mesh plate; 6. Isolation piece;

[0041] 300, drying module;

[0042] 400. Stand. DETAILED DESCRIPTION

[0043] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0044] Embodiment 1

[0045] See attached Figure 1 and attached Figure 3 As shown, an insulation module 200 of the utility model is used for insulating the lower reflow section 102 of the transmission component 100. The insulation module 200 includes an upper module 1 and a lower module 2. The upper module 1 and the lower module 2 are hinged and can be covered to form an insulation cavity 3. The lower reflow section 102 of the transmission component 100 passes through the insulation cavity 3.

[0046] See attached Figure 2As shown, the transmission component 100 is a closed-loop structure, including an upper transmission section 101 and a lower reflow section 102 that are spaced apart and arranged in parallel. The upper transmission section 101 and the lower reflow section 102 are connected by a transition section 103. The upper transmission section 101 will pass through a drying module 300 to transmit the silicon wafer into the drying module 300 for drying. Compared with the prior art, in which only the upper transmission section 101 passes through the drying module 300, in this embodiment, an insulation module 200 is added outside the lower reflow section 102 to insulate the lower reflow section 102, reduce the heat dissipation of the lower reflow section 102, and allow the transmission component 100 that returns to the upper reflow section to still have a certain amount of heat, greatly reducing the heat dissipation. At the same time, the upper module 1 and the lower module 2 adopt a flip-top structure, and the upper module 1 or the lower module 2 can be opened when maintenance is required.

[0047] See attached Figure 1 As shown, the upper module 1 includes an upper shell 11 with an opening at the lower end and a first insulation cotton component located in the upper shell 11, and the first insulation cotton component includes an upper insulation cotton 12 and first side insulation cotton 13 on both sides. The lower module 2 includes a lower shell 21 with an opening at the upper end and a second insulation cotton component located in the lower shell 21, and the second insulation cotton component includes a lower insulation cotton 22 and second side insulation cotton 23 on both sides. The first insulation cotton component and the second insulation cotton component form an insulation cavity 3. Due to the insulation effect of the two insulation cotton components, the transmission component 100 is insulated in four directions of up, down, left and right, reducing the heat in the insulation cavity 3 from being dissipated to the outside of the insulation module 200.

[0048] In one embodiment, one end of the upper shell 11 and the lower shell 21 in the X direction is hinged by a hinge seat, and the other end is provided with a buckling structure for buckling the two. After the upper shell 11 and the lower shell 21 are buckled, the two form an inlet and an outlet 31 connected to the heat preservation cavity 3 at both ends in the Y direction, and the transmission component 100 passes through the heat preservation cavity 3 from the inlet and the outlet 31. The Y direction is the transmission direction of the transmission component 100.

[0049] In one embodiment, see the attached Figure 1 As shown, both the upper shell 11 and the lower shell 21 include a horizontal plate 111 and vertical plates 112 on both sides, and the horizontal plate 111 and the vertical plates 112 form a door-type structure. The upper insulation cotton 12 is fixed to the horizontal plate 111 of the upper shell 11, and the first side insulation cotton 13 is fixed to the vertical plate 112 of the upper shell 11. The lower insulation cotton 22 is fixed to the horizontal plate 111 of the lower shell 21, and the second side insulation cotton 23 is fixed to the vertical plate 112 of the lower shell 21. At this time, the insulation cotton only plays a role of heat preservation to prevent the heat on the transmission component 100 from being dissipated to the outside of the insulation cavity 3.

[0050] In one embodiment, a space is left between the upper thermal insulation cotton 12 and the transverse plate 111 of the upper shell 11, and an upper buffer cavity 41 is formed between the upper thermal insulation cotton 12, the transverse plate 111 of the upper shell 11 and the first side thermal insulation cotton 13. The upper buffer cavity 41 is connected to the thermal insulation cavity 3 and can introduce heating gas.

[0051] In this embodiment, the upper insulation cotton 12 separates the space inside the upper shell 11 into an upper buffer cavity 41 located above the insulation cavity 3. After the external heating gas enters the upper buffer cavity, it can be evenly mixed in the upper buffer cavity and then enter the insulation cavity 3.

[0052] In one embodiment, the upper insulation cotton 12 is a breathable insulation cotton, or a through hole is provided on the upper insulation cotton 12 to connect the insulation cavity 3 and the upper buffer cavity 41, and the through holes are distributed in an array. At this time, the upper insulation cotton 12 plays a role of heat preservation on the one hand, and on the other hand, plays a role of guiding the hot air in the upper buffer cavity 41 into the insulation cavity 3, and at the same time plays a role of filtering to prevent some impurities from entering the insulation cavity 3.

[0053] In one embodiment, a mesh plate 5 is fixed to the upper shell 11 and is located below the upper thermal insulation cotton 12 and above the transmission component 100. The mesh plate 5 is used to evenly guide the hot air overflowing from the upper buffer cavity 41 into the heating cavity.

[0054] In one embodiment, a space is left between the lower insulation cotton 22 and the transverse plate 111 of the lower shell 21, and a lower buffer cavity 42 is formed between the lower insulation cotton 22, the transverse plate 111 of the lower shell 21 and the second side insulation cotton 23. The lower buffer cavity 42 is connected to the insulation cavity 3 and can introduce heating gas.

[0055] In this embodiment, the lower insulation cotton 22 separates the space inside the lower shell 21 into a lower buffer cavity 42 located below the insulation cavity 3. After the external heating gas enters the lower buffer cavity, it can be evenly mixed in the lower buffer cavity and then enter the insulation cavity 3.

[0056] See attached Figure 1 As shown, the transmission component 100 includes two transmission chains 1a and a plurality of transmission brackets 1b located between the transmission chains 1a, and each transmission bracket 1b includes at least one accommodating space 11b for inserting a silicon wafer. The transmission component 100 moved into the insulation module 200 can be completely located in the insulation cavity 3. At this time, the transmission component 100 will not extend out of the insulation module 200 in the X direction. In addition to the inlet and outlet 31, the insulation module 200 will not have other openings that can dissipate heat, and the insulation performance is good.

[0057] In one embodiment, a transmission bracket 1b includes two accommodating spaces 11b, and an isolating member 6 located between the two accommodating spaces 11b is fixed in the heat preservation cavity 3, and the isolating member 6 is fixed on the lower heat preservation cotton 22. The isolating member 6 reduces the space of the heat preservation cavity 3, so that the heat of the heat preservation cavity 3 is more concentrated.

[0058] In one embodiment, the isolation member 6 is also made of heat-insulating material, and an isolation member 6 is disposed between any two adjacent accommodating cavities.

[0059] See attached Figure 1 As shown, the accommodating cavity is defined by a pair of transmission carriers, which are components that easily absorb and dissipate heat. Therefore, the thermal insulation cotton on both sides of the transmission carrier needs to be as close to the transmission carrier as possible to reduce the gap between the transmission carrier and avoid heat dissipation on the transmission carrier.

[0060] In one embodiment, a temperature sensor is further provided in the heat preservation cavity 3, and the temperature sensor is used to collect the temperature in the heat preservation cavity 3 in real time. According to the measurement result of the temperature sensor, it is judged whether heating gas needs to be introduced. When the temperature sensor detects that the temperature in the heat preservation cavity 3 is lower than the set threshold, heating gas is poured into the heat preservation cavity 3, otherwise there is no need to introduce heating gas from the outside.

[0061] Embodiment 2

[0062] See attached Figure 2 and attached Figure 3 As shown, a drying furnace of the utility model includes a transmission component 100, a drying module 300 and the insulation module 200 recorded in Example 1. The transmission component 100 is a closed-loop structure, including an upper transmission section 101 and a lower reflow section 102 that are spaced apart and arranged in parallel. The upper transmission section 101 and the lower reflow section 102 are connected by a transition section 103. The upper transmission section 101 will pass through a drying module 300 to transmit silicon wafers into the drying module 300 for drying, and the lower reflow section 102 runs through the insulation cavity 3.

[0063] In this embodiment, an insulation module 200 is added outside the lower reflow section 102 to insulate the lower reflow section 102 and reduce the heat dissipation of the lower reflow section 102, so that the transmission component 100 returning to the upper reflow section still has a certain amount of heat, which greatly reduces the heat dissipation.

[0064] In one embodiment, the drying module 300 includes a drying chamber, and both ends of the upper transmission section 101 pass through the drying chamber. A heating component is arranged in the drying chamber, and the heating component heats the drying chamber to dry the silicon wafers entering the drying chamber.

[0065] In one embodiment, the drying cavity is connected to the heat preservation cavity 3 through a hot air pipe, and a one-way valve is provided on the hot air pipe, which can only guide the heating gas in the drying cavity into the heat preservation cavity 3 in one direction.

[0066] In one embodiment, the hot air pipe is directly connected to the upper buffer cavity or the lower buffer cavity. The hot air introduced by the hot air pipe is mixed, buffered and filtered in the upper buffer cavity or the lower buffer cavity before entering the insulation cavity 3, thereby improving the cleanliness and uniformity of the heating gas entering the insulation cavity 3.

[0067] In one embodiment, the heating gas poured into the heat preservation cavity 3 may also be unused hot gas from other equipment. In this case, the heat preservation cavity 3 does not need to be connected to the drying cavity.

[0068] In one embodiment, the drying oven further includes a transmission assembly, which is used to drive the transmission assembly 100 to move. The transmission assembly is located in the transition section 103, and the transmission assembly includes a driving member, a driving wheel and a driven wheel. The transmission chain 1a is wound around the driving wheel and the driven wheel and meshes with the driving wheel and the driven wheel. The driving member drives the driving wheel to rotate.

[0069] In this embodiment, excessively high temperature may damage the transmission component and reduce the service life of the transmission component, so the transmission component is arranged in the transition section 103 without any heat preservation structure. However, the length of the transition section 103 is relatively short, so even if heat dissipation occurs, there will not be much heat loss.

[0070] See attached Figure 2 and attached Figure 3 As shown, the drying machine further comprises a stand 400 , on which the drying module 300 is fixed. One of the upper shell 11 or the lower shell 21 is fixed on the stand 400 .

[0071] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A heat preservation module, used for heat preservation of the lower reflux section of a transmission component, characterized in that: The thermal insulation module comprises: An upper mold assembly, the upper mold assembly comprising an upper shell with an opening at the lower end and a first thermal insulation cotton component located in the upper shell; A lower mold assembly, the lower mold assembly comprising a lower shell with an opening at the upper end and a second thermal insulation cotton component located in the lower shell; The upper shell can be covered on the lower shell, the first thermal insulation cotton component and the second thermal insulation cotton component define a thermal insulation cavity, and the lower reflux section only passes through the thermal insulation cavity along its transmission direction.

2. The thermal insulation module according to claim 1, characterized in that: The upper shell includes a horizontal plate and vertical plates on both sides; The first thermal insulation cotton component includes upper thermal insulation cotton and first side thermal insulation cotton on both sides. A spacing is left between the upper thermal insulation cotton and the transverse plate of the upper shell. An upper buffer cavity is formed between the upper thermal insulation cotton, the transverse plate of the upper shell and the first side thermal insulation cotton. The upper buffer cavity is connected to the thermal insulation cavity and can introduce heating gas.

3. The thermal insulation module according to claim 2, characterized in that: The upper thermal insulation cotton is breathable thermal insulation cotton, or a through hole connecting the thermal insulation cavity and the upper buffer cavity is provided on the upper thermal insulation cotton.

4. The thermal insulation module according to claim 2, characterized in that: A mesh plate located below the upper thermal insulation cotton and above the transmission component is also fixed on the upper shell.

5. The thermal insulation module according to any one of claims 1 to 4, characterized in that: The lower shell and the upper shell have the same structure; The second thermal insulation cotton component includes lower thermal insulation cotton and second side thermal insulation cotton on both sides. A spacing is left between the lower thermal insulation cotton and the transverse plate of the lower shell. A lower buffer cavity is formed between the lower thermal insulation cotton, the transverse plate of the lower shell and the second side thermal insulation cotton. The lower buffer cavity is connected to the thermal insulation cavity and can introduce heating gas.

6. The thermal insulation module according to claim 1, characterized in that: The transmission assembly includes two transmission chains and a plurality of transmission brackets located between the transmission chains, and each transmission bracket includes at least one accommodating space for inserting a silicon wafer; An isolating piece located between two adjacent accommodating spaces is fixed in the heat-insulating cavity.

7. According to the thermal insulation module according to claim 1, it is characterized in that: The upper shell and the lower shell are hinged and can be buckled with each other. After being buckled, the upper shell and the lower shell form an inlet and an outlet connected to the heat preservation cavity at both ends along the transmission direction of the lower reflux section.

8. According to the thermal insulation module according to claim 1, it is characterized in that: A temperature sensor is also arranged in the heat preservation cavity, and the temperature sensor is used to collect the temperature in the heat preservation cavity.

9. A drying furnace, characterized in that: include: The transmission component is a closed-loop structure, including an upper transmission section and a lower reflux section spaced apart and arranged in parallel, wherein the upper transmission section and the lower reflux section are connected via a transition section; A drying module, wherein the upper transmission section passes through the drying module, and the drying module performs drying; The insulation module adopts the insulation module described in any one of claims 1 to 8, and the lower reflux section runs through the insulation module.

10. The drying oven according to claim 9, characterized in that: The drying module is connected to the heat preservation cavity through a hot air pipeline, and a one-way valve is arranged on the hot air pipeline, so that the heating gas in the drying module can only be introduced into the heat preservation cavity in one direction.

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