Diffusion furnace door and diffusion furnace

Abstract

The utility model relates to the technical field of solar crystalline silicon cell production equipment, and discloses a diffusion furnace door and a diffusion furnace, the diffusion furnace door is used for opening and closing a diffusion furnace tube, the diffusion furnace door comprises a first plate body made of high temperature resistant material, and the first plate body is suitable for preliminarily blocking the furnace tube; the second plate body is arranged on the side, away from the diffusion furnace tube, of the first plate body, and the second plate body is suitable for abutting against the end face of the diffusion furnace tube so as to further block the diffusion furnace tube; the first sealing part is suitable for sealing between the second plate body and the furnace tube; the second plate body is further provided with a cooling flow channel, the cooling flow channel and the first sealing component are oppositely arranged, and a cooling medium is suitable for flowing in the cooling flow channel. According to the diffusion furnace door provided by the utility model, not only can the second plate body be prevented from deforming due to high temperature, but also the first sealing part can be cooled and protected, and high-temperature damage caused by long-time operation of the first sealing part is avoided, so that the high-temperature resistance of the whole diffusion furnace door is improved, and the service life of the diffusion furnace door is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of solar crystalline silicon cell production equipment, in particular to a diffusion furnace door and a diffusion furnace. Background Art

[0002] Diffusion furnace is one of the important process equipment in the front process of semiconductor and solar cell production line, used for diffusion, oxidation, annealing, alloying and sintering processes. During the operation of the diffusion furnace, the process temperature of the diffusion furnace tube is as high as 800℃~1200℃, so the high temperature resistance performance of the furnace door is very high.

[0003] In the prior art, the high temperature resistance of the diffusion furnace door is not high. After long-term use, the furnace door is easily damaged and deformed. After deformation, it is difficult to achieve a good seal with the diffusion furnace tube. The service life is short, and frequent replacement of the furnace door easily leads to a waste of resources. Utility Model Content

[0004] In view of this, the utility model provides a diffusion furnace door and a diffusion furnace to solve the problem that the diffusion furnace door in the prior art has low high temperature resistance and is easily damaged after long-term use.

[0005] In a first aspect, the utility model provides a diffusion furnace door for opening and closing a diffusion furnace tube, comprising:

[0006] A first plate body, made of a high temperature resistant material, and suitable for preliminarily plugging the diffusion furnace tube;

[0007] The second plate body is arranged on a side of the first plate body away from the diffusion furnace tube, and the second plate body is suitable for abutting against the end surface of the diffusion furnace tube to further block the diffusion furnace tube;

[0008] A first sealing component is arranged on a side of the second plate body close to the diffusion furnace tube, and the first sealing component is suitable for sealing between the second plate body and the diffusion furnace tube;

[0009] The second plate body is also provided with a cooling channel, which is arranged opposite to the first sealing component. The cooling channel is suitable for circulating a cooling medium to cool the second plate body and the first sealing component.

[0010] In an optional embodiment, the first sealing component is an annular structure.

[0011] In an optional embodiment, a dovetail groove is provided on one side of the second plate body close to the diffusion furnace tube, the dovetail groove is arranged opposite to the cooling channel, and the first sealing component is suitable for being installed in the dovetail groove;

[0012] The end surface of the diffusion furnace tube is provided with a sealing groove, which is arranged opposite to the dovetail groove; the side of the first sealing component close to the diffusion furnace tube is compressed in the sealing groove.

[0013] In an optional embodiment, a cooling groove is provided on one side of the second plate away from the diffusion furnace tube, the cooling groove is an annular structure, the cooling groove is arranged opposite to the first sealing component, and the cooling groove is suitable for being sealed to form a cooling channel;

[0014] A water inlet and a water return port are also provided on a side of the second plate body away from the diffusion furnace tube, and both the water inlet and the water return port are connected to the cooling flow channel.

[0015] In an optional embodiment, the diffusion furnace door further includes a second sealing component and a cover plate, the second sealing component is suitable for enclosing together with the inner wall of the cooling groove to form a cooling channel, the cover plate is detachably connected to the second plate body, and the cover plate is suitable for fixing the second sealing component.

[0016] In an optional embodiment, a first mounting groove and a second mounting groove coaxially arranged with the cooling groove are provided on one side of the second plate body axially away from the diffusion furnace tube, the second mounting groove is formed by the end face of the second plate body axially opened, the first mounting groove is formed by the bottom wall of the second mounting groove axially opened, the first mounting groove is connected with the cooling groove, the first mounting groove is suitable for setting a second sealing component, and the second mounting groove is suitable for setting a cover plate.

[0017] In an optional embodiment, a accommodating space is opened in the first plate body, and thermal insulation cotton is arranged in the accommodating space, and the thermal insulation cotton is suitable for heat preservation and thermal insulation.

[0018] In an optional embodiment, the diffusion furnace door further comprises a connecting frame, which is fixedly disposed on a side of the second plate body facing the diffusion furnace tube, and is connected to the first plate body by bolts and / or screws.

[0019] In a second aspect, the utility model further provides a diffusion furnace, comprising: a diffusion furnace tube, and a diffusion furnace door as described above, wherein the diffusion furnace door is arranged at one axial end of the diffusion furnace tube, and the diffusion furnace door is used to open and close the diffusion furnace tube.

[0020] The beneficial effects of the utility model are:

[0021] The diffusion furnace door provided by the utility model firstly blocks the diffusion furnace tube by the first plate body, and then further blocks the diffusion furnace tube by the second plate body, thereby realizing double sealing of the diffusion furnace tube, making the sealing better; the first plate body is made of high temperature resistant material, the first plate body is used to directly seal the diffusion furnace tube, and the second plate body is arranged on the side of the first plate body away from the diffusion furnace tube, avoiding direct contact between the second plate body and the high temperature working medium in the furnace chamber, which is beneficial to improving the high temperature resistance of the entire diffusion furnace door and extending the service life of the entire diffusion furnace door; by arranging the first sealing component on the side of the second plate body close to the diffusion furnace tube, the diffusion furnace tube can be sealed with a double seal, so that the sealing performance is better; the first plate body is made of high temperature resistant material, the first plate body is used to directly seal the diffusion furnace tube, and the second plate body is arranged on the side of the first plate body away from the diffusion furnace tube, so that the second plate body is prevented from directly contacting with the high temperature working medium in the furnace chamber, and the high temperature resistance of the entire diffusion furnace door is improved, and the service life of the entire diffusion furnace door is extended; the first sealing component is arranged on the side of the second plate body close to the diffusion furnace tube, so that the diffusion furnace tube can be sealed with a double seal ... The first sealing component is fitted with the end face of the diffusion furnace tube to seal the second plate body and the diffusion furnace tube, thereby ensuring the vacuum state in the diffusion furnace tube; by arranging a cooling channel on the second plate body and injecting a circulating cooling medium into the cooling channel to dissipate heat and cool down, not only can the second plate body be prevented from being deformed and damaged due to high temperature, but also the first sealing component can be cooled and protected, thereby avoiding high-temperature damage caused by long-term operation of the first sealing component. Even if the first plate body is deformed, it can also be sealed by the second plate body, thereby improving the high-temperature resistance of the entire diffusion furnace door, which is beneficial to extending the service life of the diffusion furnace door.

[0022] Furthermore, the second sealing component is pressed and fixed by the cover plate to ensure the sealing between the second sealing component and the second plate body, thereby ensuring the sealing of the cooling channel and avoiding leakage of the cooling medium in the cooling channel; the cover plate and the second plate body are disassembled and connected, so that when the cooling channel is blocked by scale or the equipment is shut down, it is convenient to disassemble and clean. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a side view of a diffusion furnace door according to an embodiment of the utility model;

[0025] Figure 2 This is a schematic diagram of the assembly of a diffusion furnace door and a diffusion furnace tube according to an embodiment of the utility model;

[0026] Figure 3 for Figure 2 A partial cross-sectional enlarged schematic diagram at center A;

[0027] Figure 4 for Figure 2 A in the middle is an enlarged schematic diagram of a partial cross-section after the first sealing component, the cover plate and the second sealing component are hidden;

[0028] Figure 5 It is a front cross-sectional view of a diffusion furnace door according to an embodiment of the utility model;

[0029] Figure 6 It is a rear cross-sectional view of a diffusion furnace door according to an embodiment of the utility model.

[0030] Description of reference numerals:

[0031] 10. first plate; 11. accommodating space;

[0032] 20. Second plate body; 200. Cooling channel; 21. Cooling groove; 22. First mounting groove; 23. Second mounting groove; 24. Water inlet; 25. Water return port; 26. Dovetail groove;

[0033] 30. a first sealing member;

[0034] 40. Cover plate;

[0035] 50. A second sealing member;

[0036] 60. Thermal insulation cotton;

[0037] 70. Connecting frame;

[0038] 80. Diffusion furnace tube; 81. Sealing groove. DETAILED DESCRIPTION

[0039] In order to solve the problem that the existing diffusion furnace door in the prior art has low high temperature resistance and is easily damaged and corroded after long-term use, the utility model provides a diffusion furnace door and a diffusion furnace, the diffusion furnace door comprising: a first plate body 10, made of high temperature resistant material, the first plate body 10 is suitable for sealing the diffusion furnace tube 80; a second plate body 20, arranged on the side of the first plate body 10 away from the diffusion furnace tube 80, the second plate body 20 is suitable for abutting against the outer wall of the diffusion furnace tube 80 to cover the diffusion furnace tube 80; a first sealing component 30, arranged on the side of the second plate body 20 close to the diffusion furnace tube 80, the first sealing component 30 is suitable for sealing between the second plate body 20 and the diffusion furnace tube 80; a cooling channel 200 is provided on the second plate body 20, and a cooling medium is suitable for flowing in the cooling channel 200 to cool the second plate body 20 and the first sealing component 30.

[0040] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0041] Combine the following Figures 1 to 6 , describing an embodiment of the utility model.

[0042] According to an embodiment of the present utility model, on the one hand, a diffusion furnace door is provided, which is used to open and close the diffusion furnace tube 80, and the diffusion furnace door includes:

[0043] The first plate 10 is made of high temperature resistant material. Figure 2 As shown, the first plate body 10 is suitable for extending into the inner cavity of the diffusion furnace tube 80, and the first plate body 10 is suitable for preliminarily blocking the diffusion furnace tube 80;

[0044] The second plate 20 is disposed on a side of the first plate 10 away from the diffusion furnace tube 80, see Figure 2 As shown, the diameter of the second plate body 20 is greater than the diameter of the first plate body 10, and the second plate body 20 is suitable for abutting against the end surface of the diffusion furnace tube 80 to further block the diffusion furnace tube 80;

[0045] The first sealing component 30 is disposed on a side of the second plate body 20 close to the diffusion furnace tube 80, and the first sealing component 30 is suitable for sealing between the second plate body 20 and the diffusion furnace tube 80;

[0046] The second plate body 20 is further provided with a cooling channel 200 . The cooling channel 200 is arranged opposite to the first sealing component 30 . A cooling medium is suitable for flowing through the cooling channel 200 to cool the second plate body 20 and the first sealing component 30 .

[0047] It should be noted that the first plate body 10 can be made of quartz material, which has a high melting point, good corrosion resistance, and stable chemical properties, which is conducive to extending the service life of the entire diffusion furnace door; the second plate body 20 can be made of metal materials such as aluminum and alloys for easy machining. The first plate body 10 and the second plate body 20 can jointly double-close the diffusion furnace tube 80, which is conducive to ensuring the sealing of the inner cavity of the diffusion furnace tube 80. The first sealing component 30 can use a high temperature resistant and corrosion resistant sealing ring, which is conducive to extending the service life.

[0048] The diffusion furnace door provided by the utility model firstly blocks the diffusion furnace tube 80 through the first plate body 10, and then further blocks the diffusion furnace tube 80 through the second plate body 20, thereby realizing double sealing of the diffusion furnace tube 80, so that the sealing is better; the first plate body 10 is made of high temperature resistant material, and the first plate body 10 is used to directly seal the diffusion furnace tube 80, and the second plate body 20 is arranged on the side of the first plate body 10 away from the diffusion furnace tube 80, so as to avoid direct contact between the second plate body 20 and the high temperature working medium in the furnace chamber, which is beneficial to improving the high temperature resistance of the entire diffusion furnace door and extending the service life of the entire diffusion furnace door; by arranging the first sealing component 30 on the side of the second plate body 20 close to the diffusion furnace tube 80 , so that the first sealing component 30 is fitted with the end surface of the diffusion furnace tube 80 to seal the second plate body 20 and the diffusion furnace tube 80, thereby ensuring the vacuum state in the diffusion furnace tube 80; by arranging a cooling channel 200 in the second plate body 20, and injecting a circulating cooling medium into the cooling channel 200 for heat dissipation and cooling, not only can the second plate body 20 be prevented from being deformed and damaged due to high temperature, but also the first sealing component 30 can be cooled and protected, thereby avoiding high-temperature damage caused by long-term operation of the first sealing component 30. Even if the first plate body 10 is deformed, it can also be sealed by the second plate body 20, thereby improving the high temperature resistance of the entire diffusion furnace door, which is beneficial to extending the service life of the diffusion furnace door.

[0049] Furthermore, the cooling medium may be cooling water.

[0050] In some embodiments, see Figure 6 As shown, the first sealing component 30 is an annular structure to ensure the sealing between the second plate body 20 and the diffusion furnace tube 80 .

[0051] In some embodiments, see Figure 4 As shown, a dovetail groove 26 is provided on one side of the second plate 20 close to the diffusion furnace tube 80. The dovetail groove 26 is arranged opposite to the cooling channel 200. The first sealing component 30 is suitable for being installed in the dovetail groove 26.

[0052] A sealing groove 81 is formed on the end surface of the diffusion furnace tube 80 , and the sealing groove 81 is arranged opposite to the dovetail groove 26 ; the first sealing component 30 is compressed in the sealing groove 81 on one side close to the diffusion furnace tube 80 .

[0053] In this embodiment, a dovetail groove 26 is provided on the second plate 20 for installing the first sealing component 30, thereby preventing the first sealing component 30 from being offset between the second plate 20 and the diffusion furnace tube 80; a sealing groove 81 is provided on the end surface of the diffusion furnace tube 80 and is arranged opposite to the dovetail groove 26, so that during the process of the second plate 20 and the end surface of the diffusion furnace tube 80 abutting, the first sealing component 30 is compressed in the sealing groove 81, thereby ensuring the sealing between the second plate 20 and the diffusion furnace tube 80; the dovetail groove 26 is arranged opposite to the cooling channel 200, which is beneficial to improving the cooling efficiency of the cooling medium on the first sealing component 30, and effectively avoiding high-temperature damage to the first sealing component 30 caused by long-term operation.

[0054] In some embodiments, see Figure 4 As shown, a cooling groove 21 is provided on one side of the second plate 20 away from the diffusion furnace tube 80. The cooling groove 21 is an annular structure. The cooling groove 21 is arranged opposite to the first sealing component 30. The cooling groove 21 is suitable for being sealed to form a cooling channel 200.

[0055] Please combine Figure 1 and Figure 5 As shown, a water inlet 24 and a water return port 25 are also provided on the side of the second plate body 20 away from the diffusion furnace tube 80. The water inlet 24 and the water return port 25 are both connected to the cooling channel 200, so that a continuous cooling medium circulation is formed between the cooling channel 200 and the external cold source, thereby continuously circulating cooling the second plate body 20 and the first sealing component 30, which can not only prevent the second plate body 20 from being deformed due to high temperature, but also prevent the first sealing component 30 from being damaged by high temperature due to long-term operation.

[0056] In this embodiment, a cooling groove 21 is provided on the second plate 20 and is arranged opposite to the first sealing component 30 to improve the cooling efficiency of the cooling medium on the first sealing component 30, thereby effectively preventing the first sealing component 30 from being damaged by high temperature due to long-term operation.

[0057] In some embodiments, see Figure 3 As shown, the diffusion furnace door also includes a second sealing component 50 and a cover plate 40. The second sealing component 50 is suitable for enclosing together with the inner wall of the cooling groove 21 to form a cooling channel 200. The cover plate 40 is detachably connected to the second plate body 20, and the cover plate 40 is suitable for covering and fixing the second sealing component 50.

[0058] In this embodiment, the second sealing component 50 is covered and fixed by the cover plate 40 to ensure the sealing between the second sealing component 50 and the second plate body 20, thereby ensuring the sealing of the cooling channel 200 and avoiding leakage of the cooling medium in the cooling channel 200; the cover plate 40 is disassembled and connected to the second plate body 20, so that when the cooling channel 200 is blocked by scale or the equipment is shut down, it is convenient to disassemble and clean it.

[0059] Furthermore, the cover plate 40 and the second plate body 20 can be detachably connected by bolts and / or screws.

[0060] In some embodiments, see Figure 4 As shown, the second plate body 20 is further provided with a first mounting groove 22 and a second mounting groove 23 coaxially arranged with the cooling groove 21 on one side axially away from the diffusion furnace tube 80. The second mounting groove 23 is formed by the end face of the second plate body 20 being opened axially, and the first mounting groove 22 is formed by the bottom wall of the second mounting groove 23 being opened axially. The first mounting groove 22 is communicated with the cooling groove 21. The first mounting groove 22 is suitable for arranging the second sealing component 50, thereby avoiding the displacement of the cover plate 40, which is beneficial to ensuring the stability of the cover plate 40 pressing the second sealing component 50, thereby ensuring the sealing of the cooling channel 200; the second mounting groove 23 is suitable for arranging the cover plate 40, thereby avoiding the displacement of the second sealing component 50 relative to the cooling groove 21, ensuring the sealing of the cooling channel 200, and further avoiding leakage of the cooling medium.

[0061] In some embodiments, see Figure 1 and Figure 2 As shown, a accommodating space 11 is opened in the first plate body 10, and a thermal insulation cotton 60 is arranged in the accommodating space 11. The thermal insulation cotton 60 is suitable for heat preservation and heat insulation. On the one hand, it enhances the heat preservation and heat insulation effect in the furnace cavity. On the other hand, it can prevent the high temperature in the furnace cavity from spreading to the second plate body 20, which is beneficial to avoid deformation of the second plate body 20 due to high temperature.

[0062] In some embodiments, see Figure 1 As shown, the diffusion furnace door further includes a connecting frame 70 , which is fixedly disposed on a side of the second plate body 20 facing the diffusion furnace tube 80 , and the connecting frame 70 is connected to the first plate body 10 by bolts and / or screws.

[0063] The second plate 20 is connected to the first plate 10 by the connecting frame 70, so that direct contact between the second plate 20 and the first plate 10 is avoided, and the heat transfer area between the second plate 20 and the first plate 10 is reduced, which is beneficial to avoid deformation of the second plate 20 due to high temperature.

[0064] According to an embodiment of the present invention, on the other hand, a diffusion furnace is provided, including: a diffusion furnace tube, and a diffusion furnace door as described above, wherein the diffusion furnace door is arranged at one axial end of the diffusion furnace tube 80 , and the diffusion furnace door is used to open and close the diffusion furnace tube 80 .

[0065] The diffusion furnace provided by the utility model, by arranging the above-mentioned diffusion furnace door at one axial end of the diffusion furnace tube 80, avoids damage and deformation of the furnace door after long-term use, ensures the sealing between the diffusion furnace door and the diffusion furnace tube, extends the service life, avoids frequent replacement of the furnace door, and is conducive to saving resources.

[0066] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A diffusion furnace door, used for opening and closing a diffusion furnace tube (80), characterized in that: include: A first plate body (10) is made of a high temperature resistant material, and the first plate body (10) is suitable for preliminarily blocking the diffusion furnace tube (80); A second plate body (20) is arranged on a side of the first plate body (10) away from the diffusion furnace tube (80), and the second plate body (20) is suitable for abutting against an end surface of the diffusion furnace tube (80) to further block the diffusion furnace tube (80); A first sealing component (30) is arranged on a side of the second plate body (20) close to the diffusion furnace tube (80), and the first sealing component (30) is suitable for sealing between the second plate body (20) and the diffusion furnace tube (80); The second plate body (20) is further provided with a cooling channel (200), the cooling channel (200) being arranged opposite to the first sealing component (30), and the cooling channel (200) is suitable for circulating a cooling medium to cool the second plate body (20) and the first sealing component (30).

2. The diffusion furnace door according to claim 1, characterized in that: The first sealing component (30) is an annular structure.

3. The diffusion furnace door according to claim 1, characterized in that: A dovetail groove (26) is provided on one side of the second plate body (20) close to the diffusion furnace tube (80), the dovetail groove (26) is arranged opposite to the cooling channel (200), and the first sealing component (30) is suitable for being installed in the dovetail groove (26); The end surface of the diffusion furnace tube (80) is provided with a sealing groove (81), and the sealing groove (81) is arranged opposite to the dovetail groove (26); the first sealing component (30) is compressed in the sealing groove (81) on a side close to the diffusion furnace tube (80).

4. The diffusion furnace door according to claim 1, characterized in that: A cooling groove (21) is provided on a side of the second plate body (20) away from the diffusion furnace tube (80), the cooling groove (21) is an annular structure, the cooling groove (21) is arranged opposite to the first sealing component (30), and the cooling groove (21) is suitable for sealing to form the cooling channel (200); A water inlet (24) and a water return port (25) are also provided on a side of the second plate body (20) away from the diffusion furnace tube (80), and both the water inlet (24) and the water return port (25) are connected to the cooling channel (200).

5. The diffusion furnace door according to claim 4, characterized in that: The diffusion furnace door further comprises a second sealing component (50) and a cover plate (40); the second sealing component (50) is adapted to be enclosed together with the inner wall of the cooling groove (21) to form the cooling channel (200); the cover plate (40) is detachably connected to the second plate body (20); and the cover plate (40) is adapted to fix the second sealing component (50).

6. The diffusion furnace door according to claim 5, characterized in that: A first mounting groove (22) and a second mounting groove (23) coaxially arranged with the cooling groove (21) are provided on one side of the second plate body (20) axially away from the diffusion furnace tube (80); the second mounting groove (23) is formed by the end surface of the second plate body (20) axially opened; the first mounting groove (22) is formed by the bottom wall of the second mounting groove (23) axially opened; the first mounting groove (22) is connected to the cooling groove (21); the first mounting groove (22) is suitable for arranging the second sealing component (50); and the second mounting groove (23) is suitable for arranging the cover plate (40).

7. The diffusion furnace door according to any one of claims 1 to 6, characterized in that: A receiving space (11) is provided in the first plate body (10), and thermal insulation cotton (60) is arranged in the receiving space (11). The thermal insulation cotton (60) is suitable for heat preservation and thermal insulation.

8. The diffusion furnace door according to any one of claims 1 to 6, characterized in that: The diffusion furnace door further comprises a connecting frame (70), wherein the connecting frame (70) is fixedly arranged on a side of the second plate body (20) facing the diffusion furnace tube (80), and the connecting frame (70) is connected to the first plate body (10) by bolts and / or screws.

9. A diffusion furnace, characterized in that: include: A diffusion furnace tube (80), and a diffusion furnace door as claimed in any one of claims 1 to 8, wherein the diffusion furnace door is arranged at one axial end of the diffusion furnace tube (80), and the diffusion furnace door is used to open and close the diffusion furnace tube (80).

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