Lithography-like machine experiment device based on digital projection equipment and liquid crystal device

Abstract

The utility model relates to a photoetching machine-like experimental device based on digital projection equipment and a liquid crystal device. The photoetching machine-like experimental device comprises a system control module, an image projection module, a polarization control module, an image scaling module and a sample placement module, the image projection module is used for controlling the pixels to pass through light with a specific wavelength; the polarization control module is used for controlling the linear polarization direction of light; the image scaling module is used for adjusting the size of the image; the sample placement module is used for applying an electric signal or heat to the liquid crystal box sample, so that liquid crystals are in a vertical substrate arrangement state or are heated to an isotropic state, and at least one transparent substrate of the liquid crystal box sample is coated with an optical alignment material; and the system control module is used for controlling the electrically driven optical components of the image projection module and the polarization control module, the lens position in the image scaling module and the electrifying or heating state of the sample placement module. Compared with the prior art, the photoetching machine-like experimental device is endowed with a simpler equipment structure and more intuitive principle display.

Description

Technical Field

[0001] The utility model relates to the field of photolithography machine experimental equipment, in particular to a photolithography machine-like experimental device based on digital projection equipment and liquid crystal devices. Background Art

[0002] The photolithography machine uses light to depict tiny circuit patterns. It is a precision device. Photolithography technology essentially uses the interaction between light and matter, and it is very important in the field of high-end manufacturing. In reality, the photoresist used in the photolithography machine is a photosensitive material and a corrosion-resistant material. It can protect the target position of the substrate from chemical corrosion. This material has completely different chemical properties when it is exposed to light and when it is not exposed to light. Using this specificity, the layout of the microscopic circuit can be achieved through the process of "photolithography" and then chemical cleaning. Due to the subsequent chemical cleaning process, if the existing photolithography machine science demonstration device is to restore the entire photolithography process 100% in principle, it cannot bypass the subsequent chemical process. For safety reasons, this chemical process needs to be completed by professionals in a specific environment. Therefore, this type of science popularization device is difficult to demonstrate publicly in any place, not to mention allowing the audience to operate it by hand, and the interactive effect is very limited, which also makes it difficult for them to be widely promoted.

[0003] In patent CN219303212U, Long Jinjing of the China Science and Technology Museum mentioned a popular science demonstration device that shows the working principle of a lithography machine. However, this device has a complex structure and many parts need to be customized, which greatly increases the cost. In addition, it is only available for demonstration by professionals.

[0004] Recently, a liquid crystal photo-alignment technology has gradually emerged. It is a high-end technology for achieving contactless alignment of liquid crystals. It uses the characteristics of photo-alignment materials responding to linearly polarized light. That is to say, under saturated light dose, the arrangement direction of the material molecules will rotate in the plane of the substrate to be perpendicular to the linear polarization direction of the light. After contacting the injected liquid crystal molecules, the photo-alignment material then induces the liquid crystal molecules to arrange in an orderly manner, thereby achieving regional alignment of the liquid crystal molecules. The pixelated distribution of liquid crystal alignment can be achieved by constructing a pixelated distribution of light polarization states. This photo-alignment process is similar to the "photolithography" process of a photolithography machine. The common point is that they both need to project the designed pattern in a miniature style onto the target area to form a microstructure, and both use the interaction between light and material. The difference is that the photosensitive materials that form the microstructure are different, and the post-processing methods are also different. The liquid crystal film using photo-alignment technology to demonstrate photolithography technology does not require complex post-processing, eliminating the cumbersome and unsafe links of the chemical process, and only two polarizers are needed to directly observe the experimental results.

[0005] In order to enable students to have a more intuitive and in-depth understanding of photolithography technology, and to make the equipment simpler and the experiments more interesting, there is an urgent need to design a simplified version of the "photolithography machine". Utility Model Content

[0006] The purpose of the utility model is to overcome the defects of the above-mentioned prior art and to provide a lithography machine-like experimental device based on digital projection equipment and liquid crystal devices, so as to achieve a simpler equipment structure and a more intuitive principle demonstration.

[0007] The purpose of the utility model can be achieved through the following technical solutions:

[0008] A photolithography machine-like experimental device based on a digital projection device and a liquid crystal device, comprising a system control module, an image projection module, a polarization control module, an image zoom module and a sample placement module;

[0009] The image projection module is used to control whether each pixel unit inside can pass light of a specific wavelength to irradiate the liquid crystal cell sample;

[0010] The polarization control module is used to control the linear polarization direction of light of a specific wavelength irradiated onto the liquid crystal cell sample;

[0011] The image scaling module is used to adjust the size of the image projected onto the liquid crystal cell sample;

[0012] The sample placement module is used to fix the liquid crystal box sample and apply an electrical signal or heat to the liquid crystal box sample so that the liquid crystal in the liquid crystal box sample is in a vertical substrate arrangement state or heated to an isotropic state, and at least one transparent substrate of the liquid crystal box sample is coated with a photo-alignment material;

[0013] The system control module is respectively connected to the image projection module, polarization control module, image zoom module and sample placement module, and is used to control the electrically driven optical components of the image projection module and polarization control module, the lens position in the image zoom module, and the power-on or heating state of the sample placement module.

[0014] Further, the image projection module is a digital projection device;

[0015] Or it includes a light generating module for sequentially distributing light of a specific wavelength and an array liquid crystal module for controlling whether each pixel unit is light-transmitting.

[0016] Furthermore, the specific wavelength light includes light in any wavelength band from ultraviolet to blue spectrum.

[0017] Further, the polarization control module includes a linear polarizer, an electrically controlled liquid crystal plate and a quarter wave plate which are distributed in sequence;

[0018] Or comprising a linear polarizer, a rotatable half-wave plate and a stepping motor which are sequentially distributed, wherein the rotatable half-wave plate rotates under the driving of the stepping motor;

[0019] Or it includes a linear polarizer, a quarter wave plate, a rotatable linear polarizer and a stepping motor which are distributed in sequence, and the rotatable linear polarizer rotates under the driving of the stepping motor.

[0020] Furthermore, the image zoom module is a lens system composed of at least one lens and capable of reducing or enlarging the projection image.

[0021] Furthermore, the image zoom module is a lens; or includes a first lens and a second lens distributed in sequence.

[0022] Furthermore, the system control module includes a system control device, which is respectively connected to the image projection module, the polarization control module, the image zoom module and the sample placement module.

[0023] Furthermore, the system control module also includes a multi-channel signal generating device, which is controlled by the system control module and connected to the sample placement module to apply electrical signals to the liquid crystal box sample.

[0024] Further, the sample placement module includes a liquid crystal box placement platform and a liquid crystal box sample, a liquid crystal box stopper and an elastic metal electrode located on the liquid crystal box placement platform. The liquid crystal box sample is fixed in the liquid crystal box placement platform. There are multiple elastic metal electrodes, which are respectively connected to the two ends of the liquid crystal box sample. Each elastic metal electrode is connected to the multi-channel signal generating device. The liquid crystal box stopper is used to limit the top movement space of the liquid crystal box sample.

[0025] Or it includes a liquid crystal box sample and a sample heating stage, wherein the liquid crystal box sample is mounted on the sample heating stage.

[0026] Furthermore, the liquid crystal box sample is a Z-shaped structure, one end of which is fixed on the liquid crystal box placement platform through an elastic metal electrode; the bottom of the other end is supported by the elastic metal electrode, and the top is limited by the liquid crystal box limiter.

[0027] Compared with the prior art, the utility model has the following advantages:

[0028] (1) The utility model realizes a simpler equipment structure and a more intuitive principle demonstration of a photolithography machine-like experimental device based on liquid crystal photo-alignment technology. By selecting a liquid crystal box sample coated with a photo-alignment material on at least one transparent substrate, a sample placement module is set to install the liquid crystal box sample, and the liquid crystal of the liquid crystal box sample can be arranged in a state perpendicular to the substrate or heated to an isotropic state by means of an electrical signal or heating; an image projection module is set to project light of a specific wavelength, a polarization control module is used to adjust the linear polarization direction of the light beam, and an image zoom module is used to adjust the size of the image projected onto the liquid crystal box sample, thereby realizing the regional alignment of liquid crystal molecules on the liquid crystal box sample, which is similar to the "photolithography" process of a photolithography machine;

[0029] Students can understand the working principle of the photolithography machine and independently design the "photolithography" pattern through the analogy of the interaction between light and matter in liquid crystal photoalignment technology, which makes the experimental process more interesting. The "photolithography" process is simple and efficient, does not require complicated post-processing, and eliminates the tedious and unsafe steps of the chemical process. The experimental results can be observed through two polarizers.

[0030] (2) Different from the photolithography machine popular science demonstration device currently on the market, the utility model provides a simpler equipment structure and more intuitive principle display for the photolithography machine-like experimental device, allowing students to have a more intuitive understanding of photolithography technology from the level of interaction between light and matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A structural framework diagram of a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device provided in an embodiment of the utility model;

[0032] Figure 2 It is a structural schematic diagram of a photolithography machine-like experimental device (vertical direction of the optical path) based on a digital projection device and a liquid crystal device and including an electrically controlled liquid crystal sheet provided in an embodiment of the utility model;

[0033] Figure 3 It is a structural schematic diagram of a photolithography machine-like experimental device (horizontal direction of the optical path) based on a digital projection device and a liquid crystal device and including an electrically controlled liquid crystal sheet provided in an embodiment of the present utility model;

[0034] Figure 4 It is a structural schematic diagram of a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device, including an electrically controlled liquid crystal sheet and a sample heating stage, provided in an embodiment of the utility model;

[0035] Figure 5 A schematic structural diagram of a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device and including a rotatable half-wave plate provided in an embodiment of the utility model;

[0036] Figure 6 A schematic structural diagram of a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device, including a rotatable half-wave plate and a sample heating stage, provided in an embodiment of the utility model;

[0037] Figure 7 A schematic structural diagram of a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device and including a rotatable linear polarizer provided in an embodiment of the utility model;

[0038] Figure 8 A schematic structural diagram of a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device, including a rotatable linear polarizer and a sample heating stage, provided in an embodiment of the utility model;

[0039] In the figure, 1. system control module, 100. system control equipment, 101. multi-channel voltage signal generating device, 2. image projection module, 200. digital projection equipment, 3. polarization control module, 300. linear polarizer, 301. electrically controlled liquid crystal plate, 302. quarter wave plate, 303. rotatable half wave plate, 304. stepping motor, 305. rotatable linear polarizer, 4. image zoom module, 400. first lens, 401. second lens, 5. sample placement module, 500. liquid crystal box placement platform, 501. liquid crystal box sample, 502. liquid crystal box stopper, 503. elastic metal electrode, 504. sample heating table. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0043] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0044] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0045] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0046] Example 1

[0047] like Figure 1 As shown, the utility model provides a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device, comprising a system control module 1, an image projection module 2, a polarization control module 3, an image zoom module 4, a sample placement module 5, and brackets and wires connecting the modules;

[0048] The image projection module 2 is used to control whether each pixel unit inside can pass light of a specific wavelength to illuminate the liquid crystal box sample 501. The specific wavelength refers to any band in the ultraviolet to blue spectrum range, that is, 300-490 nanometers;

[0049] The polarization control module 3 is used to control the linear polarization direction of the light of a specific wavelength irradiated onto the liquid crystal cell sample 501;

[0050] The image scaling module 4 is used to adjust the size of the image projected onto the liquid crystal cell sample 501;

[0051] The sample placement module 5 is used to fix the liquid crystal cell sample 501 and apply an electrical signal or heat to the liquid crystal cell sample 501 so that the liquid crystal in the liquid crystal cell sample 501 is in a vertical substrate alignment state or heated to an isotropic state, and at least one transparent substrate of the liquid crystal cell sample 501 is coated with a photo-alignment material;

[0052] The system control module 1 is respectively connected to the image projection module 2, the polarization control module 3, the image zoom module 4 and the sample placement module 5, and is used to control the electrically driven optical components of the image projection module 2 and the polarization control module 3, the lens position in the image zoom module 4, and the power-on or heating state of the sample placement module 5.

[0053] Specifically, the system control module 1 includes a system control device 100, such as a desktop computer, a laptop computer, a tablet computer, etc., which is used to control electrical signals and image projection. The system control device 100 is respectively connected to the image projection module 2, the polarization control module 3, the image scaling module 4 and the sample placement module 5.

[0054] Optionally, the system control module 1 further includes a multi-channel signal generating device 101 , which is controlled by the system control module 1 and connected to the sample placement module 5 for applying an electrical signal to the liquid crystal box sample 501 .

[0055] The image projection module 2 may be a digital projection device 200, such as an ordinary home projector;

[0056] It may also include a light generating module for sequentially distributing light of a specific wavelength and an arrayed liquid crystal module for controlling whether each pixel unit is light-transmitting. The light generating module may be a blue light source, and the arrayed liquid crystal module may be a liquid crystal display module.

[0057] The polarization control module 3 may include a linear polarizer 300, an electrically controlled liquid crystal plate 301 and a quarter wave plate 302 which are sequentially distributed, and the electrically controlled liquid crystal plate 301 may be controlled by the multi-channel signal generating device 101;

[0058] It may also include a linear polarizer 300, a rotatable half-wave plate 303 and a stepping motor 304 that are sequentially distributed, and the rotatable half-wave plate 303 rotates under the drive of the stepping motor 304;

[0059] It may also include a linear polarizer 300 , a quarter wave plate 302 , a rotatable linear polarizer 305 and a stepping motor 304 which are sequentially distributed, and the rotatable linear polarizer 305 rotates under the driving of the stepping motor 304 .

[0060] The image zoom module 4 is a lens system composed of at least one lens capable of reducing or enlarging the projected image. It may be only one lens, or a lens system composed of a first lens 401 and a second lens 402 distributed in sequence capable of reducing or enlarging the projected image.

[0061] The sample placement module 5 may include a liquid crystal box placement platform 500, a liquid crystal box sample 501, a liquid crystal box stopper 502 and an elastic metal electrode 503 located on the liquid crystal box placement platform 500. The liquid crystal box sample 501 is fixed in the liquid crystal box placement platform 500. There are multiple elastic metal electrodes 503, which are respectively connected to both ends of the liquid crystal box sample 501. Each elastic metal electrode 503 is connected to the multi-channel signal generating device 101. The liquid crystal box stopper 502 is used to limit the top moving space of the liquid crystal box sample 501.

[0062] It may also include: a liquid crystal box sample 501 and a sample heating platform 504 , and the liquid crystal box sample 501 is mounted on the sample heating platform 504 .

[0063] Optionally, the liquid crystal box sample 501 is a Z-shaped structure, with one end fixed on the liquid crystal box placement platform 500 through an elastic metal electrode 503 ; the bottom of the other end is supported by the elastic metal electrode 503 , and the top is limited by the liquid crystal box limiter 502 .

[0064] Example 2

[0065] This embodiment is substantially the same as Embodiment 1, except that a more specific design is adopted in this embodiment, and the system control module 1 includes a system control device 100 (such as a desktop computer, a laptop computer, a tablet computer, etc., a device for controlling electrical signals and image projection) and a multi-channel voltage signal generating device 101.

[0066] The image projection module 2 includes a digital projection device 200, such as a common home projector.

[0067] The polarization control module 3 includes a linear polarizer 300 , an electrically controlled liquid crystal plate 301 and a quarter wave plate 302 .

[0068] The image zoom module 4 includes a lens system composed of a first lens 400 and a second lens 401 which can reduce or enlarge the projection image.

[0069] The sample placement module 5 comprises: a liquid crystal cell sample 501 coated with a photo-alignment material on at least one transparent substrate, a liquid crystal cell placement platform 500, a liquid crystal cell stopper 502 connected to the platform, and an elastic metal electrode 503 electrically connected to a signal generator.

[0070] Example 3

[0071] like Figure 3 As shown, this embodiment is substantially the same as Embodiment 2, except that a horizontal light path is used in this embodiment, rather than a vertical light path as in Embodiment 2.

[0072] Example 4

[0073] like Figure 4As shown, this embodiment is substantially the same as Embodiment 1, except that a more specific design is adopted in this embodiment, and the system control module 1 includes a system control device 100 (such as a desktop computer, a laptop computer, a tablet computer, etc., a device for controlling electrical signals and image projection) and a multi-channel voltage signal generating device 101.

[0074] The image projection module 2 includes a digital projection device 200, such as a common home projector.

[0075] The polarization control module 3 includes a linear polarizer 300 , an electrically controlled liquid crystal plate 301 and a quarter wave plate 302 .

[0076] The image zoom module 4 includes a lens system composed of a first lens 400 and a second lens 401 which can reduce or enlarge the projection image.

[0077] The sample placement module 5 comprises: a liquid crystal cell sample 501 coated with a photo-alignment material on at least one transparent substrate and a sample heating stage 504 .

[0078] Example 5

[0079] like Figure 5 As shown, this embodiment is substantially the same as Embodiment 1, except that a more specific design is adopted in this embodiment, and the system control module 1 includes a system control device 100 (such as a desktop computer, a laptop computer, a tablet computer, etc., a device for controlling electrical signals and image projection) and a multi-channel voltage signal generating device 101.

[0080] The image projection module 2 includes a digital projection device 200, such as a common home projector.

[0081] The polarization control module 3 includes a linear polarizer 300 , a rotatable half-wave plate 303 and a stepping motor 304 .

[0082] The image zoom module 4 includes a lens system composed of a first lens 400 and a second lens 401 which can reduce or enlarge the projection image.

[0083] The sample placement module 5 comprises: a liquid crystal cell sample 501 coated with a photo-alignment material on at least one transparent substrate, a liquid crystal cell placement platform 500, a liquid crystal cell stopper 502 connected to the platform, and an elastic metal electrode 503 electrically connected to a signal generator.

[0084] Example 6

[0085] like Figure 6As shown, this embodiment is substantially the same as Embodiment 1, except that a more specific design is adopted in this embodiment, and the system control module 1 includes a system control device 100 (such as a desktop computer, a laptop computer, a tablet computer, etc., a device for controlling electrical signals and image projection) and a multi-channel voltage signal generating device 101.

[0086] The image projection module 2 includes a digital projection device 200, such as a common home projector.

[0087] The polarization control module 3 includes a linear polarizer 300 , a rotatable half-wave plate 303 and a stepping motor 304 .

[0088] The image zoom module 4 includes a lens system composed of a first lens 400 and a second lens 401 which can reduce or enlarge the projection image.

[0089] The sample placement module 5 comprises: a liquid crystal cell sample 501 coated with a photo-alignment material on at least one transparent substrate and a sample heating stage 504 .

[0090] Example 7

[0091] like Figure 7 As shown, this embodiment is substantially the same as Embodiment 1, except that a more specific design is adopted in this embodiment, and the system control module 1 includes a system control device 100 (such as a desktop computer, a laptop computer, a tablet computer, etc., a device for controlling electrical signals and image projection) and a multi-channel voltage signal generating device 101.

[0092] The image projection module 2 includes a digital projection device 200, such as a common home projector.

[0093] The polarization control module 3 includes a linear polarizer 300 , a quarter wave plate 302 , a rotatable linear polarizer 305 and a stepping motor 304 .

[0094] The image zoom module 4 includes a lens system composed of a first lens 400 and a second lens 401 which can reduce or enlarge the projection image.

[0095] The sample placement module 5 comprises: a liquid crystal cell sample 501 coated with a photo-alignment material on at least one transparent substrate, a liquid crystal cell placement platform 500, a liquid crystal cell stopper 502 connected to the platform, and an elastic metal electrode 503 electrically connected to a signal generator.

[0096] Example 8

[0097] like Figure 8As shown, this embodiment is substantially the same as Embodiment 1, except that a more specific design is adopted in this embodiment, and the system control module 1 includes a system control device 100 (such as a desktop computer, a laptop computer, a tablet computer, etc., a device for controlling electrical signals and image projection) and a multi-channel voltage signal generating device 101.

[0098] The image projection module 2 includes a digital projection device 200, such as a common home projector.

[0099] The polarization control module 3 includes a linear polarizer 300 , a quarter wave plate 302 , a rotatable linear polarizer 305 and a stepping motor 304 .

[0100] The image zoom module 4 includes a lens system composed of a first lens 400 and a second lens 401 which can reduce or enlarge the projection image.

[0101] The sample placement module 5 comprises: a liquid crystal cell sample 501 coated with a photo-alignment material on at least one transparent substrate and a sample heating stage 504 .

[0102] In summary, the utility model proposes a photolithography machine-like experimental device based on digital projection equipment and liquid crystal devices for popular science experimental teaching. Different from the popular science demonstration device of photolithography machine on the market, the utility model gives the photolithography machine-like experimental device a simpler equipment structure and a more intuitive principle display, allowing students to understand the working principle of the photolithography machine by analogy with the interaction between light and matter in liquid crystal photoalignment technology. The photolithography machine-like experimental device of the utility model allows students to design "photolithography" patterns independently, which also makes the experimental process more interesting, and the "photolithography" process is simple and efficient, and the experimental effect can be observed through two polarizers.

[0103] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. A photolithography machine-like experimental device based on a digital projection device and a liquid crystal device, characterized in that: It comprises a system control module (1), an image projection module (2), a polarization control module (3), an image zoom module (4) and a sample placement module (5); The image projection module (2) is used to control whether each pixel unit inside can pass light of a specific wavelength so as to irradiate the liquid crystal box sample (501); The polarization control module (3) is used to control the linear polarization direction of light of a specific wavelength irradiated onto the liquid crystal cell sample (501); The image scaling module (4) is used to adjust the size of the image projected onto the liquid crystal box sample (501); The sample placement module (5) is used to fix the liquid crystal box sample (501) and apply an electrical signal or heat to the liquid crystal box sample (501) so that the liquid crystal in the liquid crystal box sample (501) is in a vertical substrate alignment state or is heated to an isotropic state, and at least one transparent substrate of the liquid crystal box sample (501) is coated with a photo-alignment material; The system control module (1) is respectively connected to the image projection module (2), the polarization control module (3), the image zoom module (4) and the sample placement module (5), and is used to control the electrically driven optical components of the image projection module (2) and the polarization control module (3), the lens position in the image zoom module (4), and the power-on or heating state of the sample placement module (5).

2. According to claim 1, a photolithography machine-like experimental device based on a digital projection device and a liquid crystal device is characterized in that: The image projection module (2) is a digital projection device (200); Or it includes a light generating module for sequentially distributing light of a specific wavelength and an array liquid crystal module for controlling whether each pixel unit is light-transmitting.

3. The lithography machine-like experimental device based on a digital projection device and a liquid crystal device according to claim 2, characterized in that: The specific wavelength light includes light in any wavelength band from ultraviolet to blue spectrum.

4. The lithography machine-like experimental device based on a digital projection device and a liquid crystal device according to claim 1, characterized in that: The polarization control module (3) comprises a linear polarizer (300), an electrically controlled liquid crystal plate (301) and a quarter wave plate (302) which are distributed in sequence; Or it includes a linear polarizing plate (300), a rotatable half-wave plate (303) and a stepping motor (304) which are sequentially distributed, wherein the rotatable half-wave plate (303) rotates under the drive of the stepping motor (304); Alternatively, the invention comprises a linear polarizer (300), a quarter wave plate (302), a rotatable linear polarizer (305) and a stepping motor (304) which are distributed in sequence, wherein the rotatable linear polarizer (305) rotates under the drive of the stepping motor (304).

5. The lithography machine-like experimental device based on digital projection equipment and liquid crystal devices according to claim 1, characterized in that: The image zoom module (4) is a lens system composed of at least one lens and capable of reducing or enlarging a projection image.

6. The lithography machine-like experimental device based on digital projection equipment and liquid crystal devices according to claim 5, characterized in that: The image zoom module (4) is a lens; or comprises a first lens (401) and a second lens (402) which are sequentially distributed.

7. The lithography machine-like experimental device based on a digital projection device and a liquid crystal device according to claim 1, characterized in that: The system control module (1) comprises a system control device (100), and the system control device (100) is respectively connected to an image projection module (2), a polarization control module (3), an image zoom module (4) and a sample placement module (5).

8. The photolithography machine-like experimental device based on a digital projection device and a liquid crystal device according to claim 7, characterized in that: The system control module (1) further comprises a multi-channel signal generating device (101), which is controlled by the system control module (1) and connected to the sample placement module (5) to apply an electrical signal to the liquid crystal box sample (501).

9. The lithography machine-like experimental device based on digital projection equipment and liquid crystal devices according to claim 8, characterized in that: The sample placement module (5) comprises a liquid crystal box placement platform (500), a liquid crystal box sample (501), a liquid crystal box stopper (502) and an elastic metal electrode (503) located on the liquid crystal box placement platform (500); the liquid crystal box sample (501) is fixed in the liquid crystal box placement platform (500); there are a plurality of elastic metal electrodes (503) connected to two ends of the liquid crystal box sample (501), each elastic metal electrode (503) is connected to the multi-channel signal generating device (101); and the liquid crystal box stopper (502) is used to limit the top movement space of the liquid crystal box sample (501); Alternatively, the method comprises a liquid crystal box sample (501) and a sample heating platform (504), wherein the liquid crystal box sample (501) is mounted on the sample heating platform (504).

10. The lithography machine-like experimental device based on digital projection equipment and liquid crystal devices according to claim 9, characterized in that: The liquid crystal box sample (501) is a Z-shaped structure, one end of which is fixed on the liquid crystal box placement platform (500) through an elastic metal electrode (503); the bottom of the other end is supported by the elastic metal electrode (503) and the top is limited by the liquid crystal box limiter (502).

Images