Monocrystalline silicon wafer transfer support
By designing a single crystal silicon wafer transfer bracket including positioning plate, screw and cylinder, the problem of inconvenience of shaking and removal of single crystal silicon wafers during transfer is solved, and higher safety and operational convenience are achieved.
Patent Information
- Application Number
- CN202421154712.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The existing single-crystal silicon wafer transfer bracket lacks positioning structure, which causes the single-crystal silicon wafer to shake when moving, making it easy to collide and damage, and it is inconvenient to operate when removing the single-crystal silicon wafer.
A single crystal silicon wafer transfer bracket is designed, using components such as bottom plate, mounting frame, partition plate, placement frame, top rod, positioning plate, screw rod and cylinder. Through the cooperation of the screw rod and cylinder, the positioning and ejection of the single crystal silicon wafer is achieved for easy operation.
The positioning structure prevents the single crystal silicon wafer from shaking and collision, which increases the safety during transfer, and pushes the single crystal silicon wafer upward through the cylinder, simplifies the removal process and improves the convenience of operation.
Smart Images
Figure CN222826384U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon slices, in particular to a single crystal silicon slice transfer bracket. Background Art
[0002] Monocrystalline silicon wafers are mainly used to make semiconductor components. Monocrystalline silicon rods are the raw materials for producing monocrystalline silicon wafers. The market demand for monocrystalline silicon rods is growing rapidly. When monocrystalline silicon wafers are produced, a transfer bracket is needed to transfer the monocrystalline silicon wafers:
[0003] However, the placement frame on the transfer bracket for transferring the single crystal silicon wafers currently lacks positioning capabilities, resulting in a certain gap between the single crystal silicon wafer and the transfer bracket, causing shaking during movement and easily causing collisions. At the same time, when the transfer bracket removes the single crystal silicon wafer, it does not have a ejection structure, requiring staff to reach deep into the placement frame inside the transfer bracket to remove it, which is inconvenient to operate. Utility Model Content
[0004] In order to solve the above-mentioned problems, the purpose of the present invention is to provide a single crystal silicon wafer transfer bracket.
[0005] In order to solve the above technical problems, the utility model adopts the following technical scheme: a single crystal silicon wafer transfer bracket, comprising a base plate, a mounting frame is fixedly provided on the upper surface of the base plate, the mounting frame is penetrated from top to bottom, a plurality of equally spaced partitions are fixedly provided in the mounting frame, the partitions are vertically arranged, one side of the partitions is provided with a vertically arranged placement frame, two symmetrically distributed push rods are fixedly provided on the side of the partition facing the placement frame, a positioning plate is provided inside the placement frame near the push rod, both ends of the positioning plate are fixedly connected to the push rod respectively, screw rods are movably inserted at both ends of the partition, both ends of the placement frame are threaded on the screw rods, one end of the two screw rods passes through the mounting frame, a top plate is provided at the bottom of the mounting frame, and an ejection assembly is provided between the top plate and the placement frame.
[0006] Preferably, the ejection assembly includes a connecting rod, which movably passes through the bottom of the placement frame, and a top block is provided at the bottom of the placement frame. The top of the connecting rod is fixedly set on the lower surface of the top block, and the bottom of the connecting rod is connected to the top plate. A cylinder is installed at the middle end of the lower surface of the bottom plate, and the output end of the cylinder is coaxially fixed on the top plate. A movable plate is slidably provided on the upper surface of the top plate, and the bottom of the connecting rod is fixedly set on the movable plate. The movable plate is slidably set on the bottom plate.
[0007] Compared with the prior art, the beneficial effects of the utility model are:
[0008] 1. In the utility model, the single crystal silicon wafers to be transferred in multiple placement frames can be positioned by using a rotating wheel and a screw rod, which can prevent the single crystal silicon wafers from shaking and causing damage due to collision during transfer, thereby increasing the safety of the single crystal silicon wafers during transfer;
[0009] 2. The cylinder provided in the utility model cooperates with the top plate, the connecting rod and the top block to push the single crystal silicon wafer upward, thereby facilitating the staff to take the moved-up single crystal silicon wafer and facilitating the staff to operate. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0011] Figure 1 It is a schematic diagram of the structure of the utility model from top view.
[0012] Figure 2 It is a schematic diagram of the structure of the utility model when viewed from above.
[0013] Figure 3 This is a schematic diagram of the partition structure of the utility model.
[0014] Figure 4 This is a schematic diagram of the structure of the placement frame of the utility model.
[0015] In the figure: 1. bottom plate; 11. mounting frame; 12. partition; 13. placement frame; 14. ejector rod; 15. positioning plate; 16. screw rod; 17. rotating wheel; 18. synchronous wheel; 19. synchronous belt; 2. ejector plate; 21. connecting rod; 22. ejector block; 23. cylinder; 24. movable plate; 25. limit rod; 3. universal wheel; 31. push rack. DETAILED DESCRIPTION
[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0017] Example: Figure 1-4As shown, the utility model provides a single crystal silicon wafer transfer bracket, including a base plate 1, a mounting frame 11 is fixedly provided on the upper surface of the base plate 1, the mounting frame 11 is penetrated from top to bottom, a plurality of equally spaced partitions 12 are fixedly provided in the mounting frame 11, the partitions 12 are vertically arranged, one side of the partitions 12 is provided with a vertically arranged placement frame 13, two symmetrically distributed top rods 14 are fixedly provided on the side of the partition 12 facing the placement frame 13, a positioning plate 15 is provided inside the placement frame 13 near the top rod 14, both ends of the positioning plate 15 are fixedly connected to the top rod 14 respectively, screw rods 16 are movably inserted at both ends of the partition 12, both ends of the placement frame 13 are threadedly arranged on the screw rod 16, one end of the two screw rods 16 penetrates the mounting frame 11, a top plate 2 is provided at the bottom of the mounting frame 11, and an ejection assembly is provided between the top plate 2 and the placement frame 13.
[0018] One of the screw rods 16 is located at one end outside the installation frame 11 and is fixedly provided with a rotating wheel 17. The provision of the rotating wheel 17 can facilitate the staff to drive the screw rod 16 to rotate, which is convenient for the staff to operate. At the same time, according to the actual situation, it can also be driven by a servo motor on the market, which is convenient for the staff to operate; the two screw rods 16 are located at one end outside the installation frame 11 and are commonly connected to a synchronous wheel 18, and a synchronous belt 19 is provided on a common transmission sleeve between the two synchronous wheels 18. The provision of the synchronous wheel 18 and the synchronous belt 19 can enable the two screw rods 16 to rotate at the same time, thereby improving the operational linkage of the device.
[0019] The inner wall of the placement frame 13 and the positioning plate 15 are both made of flexible cushion materials. The flexible cushion materials can provide cushioning properties and also prevent the single crystal silicon wafer from being damaged by hard contact.
[0020] The ejection assembly includes a connecting rod 21, which movably passes through the bottom of the placement frame 13. A top block 22 is provided at the bottom of the placement frame 13. The top of the connecting rod 21 is fixedly set on the lower surface of the top block 22, and the bottom of the connecting rod 21 is connected and set on the top plate 2. A cylinder 23 is installed at the middle end of the lower surface of the bottom plate 1, and the output end of the cylinder 23 is coaxially fixed on the top plate 2. When the cylinder 23 is working, the cylinder 23 will push the top plate 2 on the top to move up, and at the same time, the top plate 2 will push the connecting rod 21 and the top block 22 on the top to move up. At this time, the top block 22 will push the single crystal silicon wafer placed on the top to move up, so as to facilitate the staff to take the moved single crystal silicon wafer and facilitate the staff to operate. A flexible pad is also provided on the upper surface of the top block 22 to protect the single crystal silicon wafer.
[0021] A movable plate 24 is slidably provided on the upper surface of the top plate 2, and the bottom of the connecting rod 21 is fixedly provided on the movable plate 24. When the movable plate 24 is slidably provided on the bottom plate 1, when the moving block is driven to move by the screw rod 16, the connecting rod 21 can move along with it without affecting the subsequent pushing by the cylinder 23; a vertically arranged limit rod 25 is fixedly provided at the four corners of the lower side of the top plate 2, and the bottom of the limit rod 25 movably passes through the bottom plate 1. The limit rods 25 arranged at the four corners can enable the top plate 2 to move upward stably, thereby ensuring the stability of the top plate 2 when moving.
[0022] Universal wheels 3 are installed at the four corners of the lower surface of the base plate 1, and the universal wheels 3 can make the device movable and convenient to transfer. A trolley 31 is installed at one end of the upper surface of the base plate 1 close to the rotating wheel 17, and the trolley 31 can facilitate the staff to push the device to move.
[0023] Working principle: In actual use, the staff can first drive the screw 16 to rotate through the rotating wheel 17. At this time, the screw 16 will drive the placement frame 13 threaded therewith to move. At this time, all the placement frames 13 will move toward the end away from the top rod 14 at the same time. As the placement frame 13 moves, the positioning plate 15 fixed on the top of the top rod 14 will move to the inner wall of the placement frame 13. At this time, a large space will be reserved in the placement frame 13 to wait for the placement of the single crystal silicon wafer. Then the staff can put the single crystal silicon wafer to be transferred into the placement frame 13. At this time, the staff reverses the rotating wheel 17, and the screw 16 will reverse together. At this time, the placement frame 13 will gradually move closer to the top rod 14, and the positioning plate 15 in the placement frame 13 will gradually contact the single crystal silicon wafer until it is positioned in the placement frame 13. At this time, the single crystal silicon wafer will be stably set in the placement frame 13, which can prevent the single crystal silicon wafer from shaking during transfer, resulting in collision and damage;
[0024] At the same time, when the single crystal silicon wafer needs to be taken out later, the cylinder 23 will push the top plate 2 to move upward, and the top plate 2 will push the connecting rod 21 and the top block 22 to move upward. At this time, the top block 22 will push the single crystal silicon wafer placed on the top to move upward, so as to facilitate the staff to take the moved single crystal silicon wafer and facilitate the staff to operate.
[0025] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.
Claims
1. A single crystal silicon wafer transfer support, comprising a bottom plate (1), characterized in that: A mounting frame (11) is fixedly provided on the upper surface of the bottom plate (1), and the mounting frame (11) is penetrated from top to bottom. A plurality of equally spaced partitions (12) are fixedly provided inside the mounting frame (11), and the partitions (12) are vertically provided. A vertically provided placement frame (13) is provided on one side of the partition (12), and two symmetrically distributed top rods (14) are fixedly provided on the side of the partition (12) facing the placement frame (13). The placement frame (13) has a plurality of partitions (12) arranged at equal intervals. A positioning plate (15) is provided near the push rod (14), and the two ends of the positioning plate (15) are respectively fixedly connected to the push rod (14). The two ends of the partition (12) are movably inserted with screw rods (16). The two ends of the placement frame (13) are threadedly arranged on the screw rods (16). One end of each of the two screw rods (16) passes through the installation frame (11). A top plate (2) is provided at the bottom of the installation frame (11), and an ejection assembly is provided between the top plate (2) and the placement frame (13).
2. The single crystal silicon wafer transfer bracket according to claim 1, characterized in that: One end of one of the screw rods (16) located outside the installation frame (11) is fixedly provided with a rotating wheel (17).
3. The single crystal silicon wafer transfer bracket according to claim 2, characterized in that: The two screw rods (16) are located at one end outside the installation frame (11) and are connected together with a synchronous wheel (18), and a synchronous belt (19) is provided on a common transmission sleeve between the two synchronous wheels (18).
4. The single crystal silicon wafer transfer bracket according to claim 1, characterized in that: The inner wall of the placement frame (13) and the positioning plate (15) are both made of flexible cushion materials.
5. The single crystal silicon wafer transfer stand according to claim 1, characterized in that: The ejection assembly comprises a connecting rod (21), the connecting rod (21) movably passes through the bottom of the placement frame (13), a top block (22) is provided at the bottom of the placement frame (13), the top of the connecting rod (21) is fixedly arranged on the lower surface of the top block (22), the bottom of the connecting rod (21) is connected and arranged on the top plate (2), a cylinder (23) is installed at the middle end of the lower surface of the bottom plate (1), and the output end of the cylinder (23) is coaxially fixedly arranged on the top plate (2).
6. The single crystal silicon wafer transfer stand according to claim 5, characterized in that: A movable plate (24) is slidably disposed on the upper surface of the top plate (2), the bottom of the connecting rod (21) is fixedly disposed on the movable plate (24), and the movable plate (24) is slidably disposed on the bottom plate (1).
7. The single crystal silicon wafer transfer stand according to claim 5, characterized in that: Vertically arranged limiting rods (25) are fixedly provided at the four corners of the lower side of the top plate (2), and the bottom of the limiting rod (25) movably passes through the bottom plate (1).
8. The single crystal silicon wafer transfer stand according to claim 2, characterized in that: Universal wheels (3) are installed at the four corners of the lower surface of the base plate (1), and a hand push frame (31) is installed at one end of the upper surface of the base plate (1) close to the rotating wheel (17).