Mounting device for wafer cleaning machine

Abstract

The utility model discloses a mounting device for a wafer cleaning machine, which comprises a first mounting piece, a second mounting piece and a third mounting piece, the first mounting piece is arranged at two ends of a base of the wafer cleaning machine and connected with bearing seats arranged at two ends of the base, the first mounting piece is provided with a mounting groove, and the bearing seats are arranged in the mounting groove; the second mounting piece is arranged on motor mounting pieces of the wafer cleaning machine, the two motor mounting pieces are arranged at the two ends of the base respectively, the motor mounting pieces are connected with the bearing seats, the motor mounting pieces are provided with motor mounting holes, the second mounting piece comprises a main plate and a clamping plate, the clamping plate is arranged on the main plate and arranged in the motor mounting holes, and the clamping plate is connected with the main plate. And the top end of the main plate is aligned with the top end of the motor mounting piece. According to the utility model, the coaxiality of the motor installation sheet can be calibrated during the installation process of the wafer cleaning machine.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to an installation device for a wafer cleaning machine. Background Art

[0002] Wafer cleaning machine is the main equipment for wafer cleaning. The wafer cleaning module includes two cleaning units: megasonic cleaning and cleaning brush cleaning. The cleaning brush cleaning unit has at least two parallel cleaning brushes, namely a supporting roller and a driving roller. During cleaning, the wafer contacts the cleaning brush, and the dirt on the wafer is removed by the rotation of the cleaning brush.

[0003] When installing a wafer cleaning machine, the two ends of the cleaning brush roller need to be installed on the installation plate of the cleaning machine. At present, during the installation process, the bearing mounting seat of the cleaning machine is directly fixed on the bottom plate, and then the mounting plate is installed on the bearing mounting seat, and the coaxiality of the mounting hole on the mounting plate is not corrected. This results in the cleaning brush not being installed coaxially or parallel to the cleaning machine, which in turn affects the stability of the overall transmission of the cleaning machine and the service life of the cleaning brush drive motor. Utility Model Content

[0004] In order to solve at least one technical problem in the prior art, the embodiment of the utility model provides an installation device for a wafer cleaning machine. The technical solution is as follows:

[0005] The utility model discloses a mounting device for a wafer cleaning machine, comprising:

[0006] A first mounting member, the first mounting member is arranged at two ends of the base of the wafer cleaning machine and connected to bearing seats arranged at two ends of the base, and the first mounting member is provided with: a mounting groove, and the bearing seat is arranged in the mounting groove;

[0007] The second mounting member is arranged on the motor mounting plate of the wafer cleaning machine, two motor mounting plates are respectively arranged at both ends of the base, the motor mounting plates are connected to the bearing seat, and the motor mounting plates have a motor mounting hole. The second mounting member includes: a main board and a clip-on plate, the clip-on plate is arranged on the main board, the clip-on plate is arranged in the motor mounting hole and fits tightly with the motor mounting hole, and the top of the main board is aligned with the top of the motor mounting plate.

[0008] Furthermore, the second mounting member further includes: a connecting plate, which is connected to the top of the main board and is arranged on the top of the motor mounting piece.

[0009] Furthermore, the first mounting member is further provided with a card slot, which is provided at the bottom of the first mounting member, and the first mounting member is card-connected to the end of the base through the card slot.

[0010] Furthermore, a connecting spindle is arranged between the motor mounting plates at both ends of the base.

[0011] Furthermore, the bearing seat includes: a mounting portion and a connecting portion, the mounting portion and the connecting portion are vertically connected, the mounting portion is arranged in the mounting groove of the first mounting member, and the connecting portion is connected to the motor mounting plate.

[0012] Furthermore, the wafer cleaning machine also includes: a fixing seat, which is arranged at both ends of the base, and the bearing seat is arranged on the fixing seat, the bearing seat has a waist-shaped hole, and the bearing seat is connected to the fixing seat through the waist-shaped hole.

[0013] The beneficial effects brought by the technical solution provided by the embodiment of the utility model include at least:

[0014] The utility model discloses an installation device for a wafer cleaning machine, which limits the position of a bearing seat by a first installation component to ensure that the installation positions of motor mounting plates on both sides of the base are relative, and ensures the parallelism of the installation positions of the motor mounting plates on the same side of the base by a second installation component, so that the coaxiality of the motor mounting plates can be calibrated during the installation of the wafer cleaning machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 It is a schematic diagram of the assembly structure of the installation device and the wafer cleaning machine provided by the embodiment of the utility model;

[0017] Figure 2 It is a structural schematic diagram of a first mounting member provided in an embodiment of the utility model;

[0018] Figure 3 It is a structural schematic diagram of a second mounting member provided in an embodiment of the utility model;

[0019] Figure 4 It is a schematic diagram of the structure of the motor mounting plate provided by the embodiment of the utility model;

[0020] Figure 5It is a schematic diagram of the bearing seat structure provided by an embodiment of the utility model;

[0021] Figure 6 It is a schematic diagram of the fixing seat assembly structure provided by an embodiment of the utility model.

[0022] In the figure: 11 base, 12 bearing seat, 13 motor mounting plate; 14 connecting spindle; 15 fixed seat;

[0023] 121 mounting portion; 122 connecting portion; 123 waist-shaped hole; 131 motor mounting hole;

[0024] 21 first mounting member; 22 second mounting member;

[0025] 211 is a mounting slot, 212 is a card slot; 221 is a main board; 222 is a card connection board; 223 is a connecting board. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] It should be noted that the expressions "first" and "second" used in the embodiments of the present invention are intended to distinguish two non-identical entities with the same name or non-identical parameters. It can be seen that "first" and "second" are only for the convenience of expression and should not be understood as limitations on the embodiments of the utility model. The subsequent embodiments will not explain this one by one.

[0028] In order to solve the problem of the coaxiality of the motor mounting plate of the cleaning brush during the assembly process of the wafer cleaning machine, the utility model proposes an installation device for the wafer cleaning machine. The specific technical solution is as follows:

[0029] like Figure 1As shown, the wafer cleaning machine includes: a base 11, a bearing seat 12, and a motor mounting plate 13. The installation requirements of the wafer cleaning machine include: installing the bearing seat 12 at both ends of the base 11, and ensuring that the bearing seats 12 at both ends of the base 11 are aligned along the axial direction of the base 11. The motor mounting plate 13 is used to install the roller of the cleaning brush. There are four motor mounting plates 13, and two motor mounting plates 13 are respectively installed at both ends of the base 11. The motor mounting plate 13 is connected to the bearing seat 12. The motor mounting plate 13 has a motor mounting hole 131. It is necessary to ensure that the motor mounting holes 131 on the motor mounting plates 13 at both ends of the base 11 are coaxially arranged, and the motor mounting holes 131 on the motor mounting plates 13 at the same end of the base 11 are aligned.

[0030] The installation device for a wafer cleaning machine includes: a first installation member 21 and a second installation member 22. The first installation member 21 is arranged at both ends of a base 11 and connected to a bearing seat 12 arranged at both ends of the base 11. Figure 2 As shown, the first mounting member 21 has a mounting groove 211, and the bearing seat 12 is disposed in the mounting groove 211. For example, the first mounting member 21 is a plate, and one side of the plate is recessed inward to form the mounting groove 211. The side surface of the first mounting member 21 can abut against the end surface of the base 11. Figure 1 As shown, the first mounting member 21 is used to limit the position of the bearing seat 12 to ensure that the motor mounting pieces 13 on both sides of the base 11 are installed in opposite positions, that is, to ensure that the motor mounting pieces 13 are in opposite positions in the x-axis direction.

[0031] In one embodiment, Figure 2 As shown, the first mounting member 21 also has a card slot 212. The card slot 212 is arranged at the bottom of the first mounting member 21, and is used to make the first mounting member 21 be carded on the end of the base 11. Exemplarily, the first mounting member 21 is a plate, and the card slot 212 is recessed from the bottom surface to the top surface of the first mounting member 21, and has an open mouth at one end of the plate. The shape of the card slot 212 is adapted to the shape of the end of the base 11, so that when the first mounting member 21 is installed, the first mounting member 21 can be pushed from the open mouth of the card slot 212 to be installed on the base 11, so that the end of the base 11 enters the card slot 212.

[0032] The second mounting member 22 is disposed on the motor mounting plate 13. Figure 3 As shown, the second mounting member 22 includes: a main board 221 and a clamping plate 222, the clamping plate 222 is arranged on the main board 221, the clamping plate 222 is embedded in the motor mounting hole 131, and is tightly fitted with the motor mounting hole 131, and the top of the main board 221 is aligned with the tops of the two motor mounting plates 13 on the same side. For example, Figure 4As shown, the motor mounting hole 131 on the motor mounting plate 13 is a round hole, the clamping plate 222 of the second mounting member 22 is a round plate, the main plate 221 is a rectangular plate, and the clamping plate 222 is arranged in the motor mounting hole 131. Figure 1 As shown, the second mounting member 22 is used to ensure the parallelism of the installation position of the motor mounting piece 13 located on the same side of the base 11, that is, to ensure that the motor mounting piece 13 is relatively positioned in the y-axis direction, and to ensure that the parallelism and height of the motor mounting piece 13 on the same side are consistent.

[0033] In one embodiment, Figure 1 As shown, the second mounting member 22 further includes: a connecting plate 223, which is connected to the top of the main board 221 and is arranged on the top of the motor mounting plate 13. Specifically, the connecting plate 223 is vertically connected to the main board 221, the main board 221 is fixed on the side of the motor mounting plate 13, and the connecting plate 223 is fixed on the top of the motor mounting plate 13. Further, the connecting plate 223 and the main board 221 can be an integral connecting member.

[0034] In one embodiment, a connecting spindle 14 is disposed between the motor mounting plates 13 at both ends of the base 11. Further, the connecting spindle 14 is fixed by bolt connection. The connecting spindle 14 and the second mounting member 22 together ensure the parallelism of the motor mounting plates 13.

[0035] In one embodiment, Figure 5 As shown, the bearing seat 12 includes: a mounting portion 121 and a connecting portion 122. The mounting portion 121 and the connecting portion 122 are vertically connected to form a right-angle structure. The mounting portion 121 is arranged in the mounting groove 211 of the first mounting member 21, and the connecting portion 122 is connected to the motor mounting plate 13. It should be noted that, as Figure 1 As shown, in one case, one bearing seat 12 can be connected to two motor mounting plates 13, and a bearing seat 12 is respectively provided at both ends of the base 11; Figure 6 As shown, in another case, a main bearing seat 12 can be connected to a motor mounting plate 13, and two bearing seats 12 are respectively arranged at both ends of the base 11.

[0036] In one embodiment, Figure 6 As shown, the wafer cleaning machine also includes: a fixed seat 15, the fixed seat 15 is arranged at both ends of the base 11, the bearing seat 12 is arranged on the fixed seat 15, the bearing seat 12 has a waist-shaped hole 123, and the bearing seat 12 is connected to the fixed seat through the waist-shaped hole 123. As mentioned above, the bearing seat 12 is connected to the fixed seat 15 through the waist-shaped hole 123, so that the bearing seat 12 has a certain sliding space relative to the fixed seat 15, which can be used to adjust the position of the bearing seat 12. Further, the fixed seat 15 is a right-angle corner structure, the fixed seat 15 is arranged in the mounting groove 211 of the first mounting member 21, and the bearing seat 12 is arranged in the corner space of the fixed seat 15.

[0037] Based on the installation device for a wafer cleaning machine disclosed in the above-mentioned embodiment of the utility model, the installation method of the wafer cleaning machine includes:

[0038] S1. Install the first mounting member 21 at both ends of the base 11 of the wafer cleaning machine. The first mounting member 21 has a mounting groove 211 , and the bearing seat 12 is arranged in the mounting groove 211 .

[0039] In one embodiment, the first mounting member 21 further has a slot 212, and the slot 212 is disposed at the bottom of the first mounting member 21. The above step S1 specifically includes:

[0040] The first mounting member 21 is clamped to the end of the base 11 through the clamping slot 212 , and the position of the first mounting member 21 is determined by the cooperation between the clamping slot 212 and the base 11 .

[0041] In one embodiment, the bearing seat 12 includes: a mounting portion 121 and a connecting portion 122 , the mounting portion 121 and the connecting portion 122 are vertically connected, the mounting portion 121 is disposed in the mounting groove 211 of the first mounting member 21 , and the connecting portion 122 is connected to the motor mounting plate 13 .

[0042] In one embodiment, the bearing seat 12 has a waist-shaped hole 123. In the process of setting the fixed seat of the wafer cleaning machine in the mounting groove 211 of the first mounting member 21, step S1 disclosed in the embodiment of the utility model also includes: connecting the bearing seat 12 to the fixed seat 15 through the waist-shaped hole 123. As mentioned above, the bearing seat 12 can slide on the fixed seat 15 through the waist-shaped hole 123. According to the process requirements, the relative position of the bearing seat 12 and the fixed seat 15 can be adjusted after the motor mounting plate 13 is installed. After the adjustment, the bearing seat 12 is fixed to the base 11 through the waist-shaped hole 123 on the bearing seat 12.

[0043] S2, pre-install the motor mounting plate 13 of the wafer cleaning machine on the bearing seat 12, set two motor mounting plates 13 at both ends of the base 11 respectively, and remove the first mounting parts 21 at both ends of the base 11.

[0044] In one embodiment, after removing the first mounting member 21, the method further includes: installing the connecting spindle 14 of the wafer cleaning machine between the motor mounting plates 13 at both ends of the base 11. Exemplarily, the connecting spindle 14 and the motor mounting plates 13 are pre-connected (not locked) by 5 screws, and the second mounting member 22 is installed on the two motor mounting plates 13 and locked by screws to adjust the coaxiality and horizontality of the two motor mounting plates 13. At this time, the two motor mounting plates 13 on the same side are calibrated, and then the position between the motor mounting plate 13 and the connecting spindle 14 is limited by the top screw, and then the 5 screws are tightened.

[0045] S3. Install the second mounting member 22 on the top of the motor mounting plate 13. The motor mounting member has a motor mounting hole 131. The second mounting member 22 includes: a main board 221 and a clamping plate 222. The clamping plate 222 is arranged on the main board 221. The clamping plate 222 is arranged in the motor mounting hole 131 so that the clamping plate 222 fits tightly with the motor mounting hole 131. The top of the main board 221 is aligned with the top of the motor mounting plate 13.

[0046] In one embodiment, the second mounting member 22 further includes: a connecting plate 223. Step S3 disclosed in the embodiment of the utility model further includes: installing the connecting plate 223 on the top of the main board 221 and the motor mounting plate 13. In this embodiment, the connecting plate 223 is mainly used to ensure that the main board 221 is flush with the top of the motor mounting plate 13. Further, the connecting plate 223, the main board 221 and the clamping plate 222 can be an integral connecting member.

[0047] S4, fix the motor mounting plate 13 on the bearing seat 12, and remove the second mounting member 22.

[0048] As described above, the above installation method can realize the coaxiality calibration of the motor mounting plate 13 during the installation process, avoid the problem of tilting when the cleaning brush is installed later, and ensure the wafer cleaning effect.

[0049] The technical solution provided by the present application is described in detail above. The principle and implementation method of the present application are described in detail using specific examples. The description of the above embodiments is only used to help understand the solution and core idea of ​​the present application. At the same time, for those skilled in the art, according to the idea of ​​the present application, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as limiting the present application.

[0050] All the above optional technical solutions can be arbitrarily combined to form optional embodiments of the present utility model, which will not be described one by one here.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A mounting device for a wafer cleaning machine, characterized in that: include: A first mounting member, the first mounting member is arranged at two ends of the base of the wafer cleaning machine and connected to bearing seats arranged at two ends of the base, and the first mounting member is provided with: a mounting groove, and the bearing seat is arranged in the mounting groove; The second mounting member is arranged on the motor mounting plate of the wafer cleaning machine, two motor mounting plates are respectively arranged at both ends of the base, the motor mounting plates are connected to the bearing seat, and the motor mounting plates have a motor mounting hole. The second mounting member includes a main board and a clip-on plate, the clip-on plate is arranged on the main board, the clip-on plate is arranged in the motor mounting hole and is tightly fitted with the motor mounting hole, and the top of the main board is aligned with the top of the motor mounting plate.

2. The installation device for a wafer cleaning machine according to claim 1, characterized in that: The second mounting member further includes: a connecting plate, which is connected to the top of the main board and is arranged on the top of the motor mounting piece.

3. The installation device for a wafer cleaning machine according to claim 1, characterized in that: The first mounting member is further provided with a clamping slot, which is arranged at the bottom of the first mounting member, and the first mounting member is clamped on the end of the base through the clamping slot.

4. The installation device for a wafer cleaning machine according to claim 1, characterized in that: A connecting main shaft is arranged between the motor mounting plates at both ends of the base.

5. The mounting device for a wafer cleaning machine according to claim 1, characterized in that: The bearing seat comprises: a mounting portion and a connecting portion, the mounting portion and the connecting portion are vertically connected, the mounting portion is arranged in the mounting groove of the first mounting member, and the connecting portion is connected to the motor mounting plate.

6. The mounting device for a wafer cleaning machine as claimed in claim 5, characterized in that: The wafer cleaning machine also includes: a fixing seat, which is arranged at both ends of the base, and the bearing seat is arranged on the fixing seat. The bearing seat has a waist-shaped hole, and the bearing seat is connected to the fixing seat through the waist-shaped hole.

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