Ultrafine bubble cleaning device system

Abstract

The utility model provides an ultra-fine bubble cleaning device system which comprises a cleaning tank, an auxiliary tank and an ultra-fine bubble generating device, the auxiliary tank is circularly connected with the cleaning tank through a liquid inlet pipeline and a liquid outlet pipeline, and a first circulating pump is arranged on the liquid inlet pipeline; the ultra-fine bubble generating device is provided with an air inlet, a liquid inlet and a liquid outlet, the liquid inlet is connected with the auxiliary tank through a liquid supply branch pipe, a first throttling valve and a first flow detection assembly are sequentially arranged on the liquid supply branch pipe in the liquid flowing direction, and the liquid outlet is used for providing ultra-fine bubbles into the cleaning tank; and the air inlet is connected with an external air source. Saturated ultra-fine bubbles are used as a cleaning medium, so that the ultra-fine bubbles permeate into a microstructure of a workpiece, and the cleaning effect is greatly improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor cleaning and relates to an ultra-fine bubble cleaning device system. Background Art

[0002] In the pan-semiconductor cleaning process, bubbling cleaning is the most widely used. For example, when bubbling silicon wafers, a number of bubbling tubes with dense small holes are usually installed at the bottom of the cleaning tank. By ventilating the small holes, the gas floats up through the bubbling tubes and flushes the product surface to achieve the purpose of cleaning. The bubble size used in bubbling cleaning is all in the millimeter or centimeter range. For the surface of pan-semiconductor products with surface microstructures, it cannot be cleaned quickly and effectively. A large number of studies have shown that when the bubble size is reduced to ultra-fine bubbles (ISO defines it as 10 -6 m), the bubbles in the liquid will exhibit the following characteristics: (1) Tyndall effect, ultrafine bubbles move upward in the liquid, and a large number of bubbles exhibit disordered Brownian motion characteristics. Based on this characteristic, when these bubbles are used to clean pan-semiconductor devices, high-density bubbles can be effectively used to deeply clean every surface and microstructure of the product; (2) According to molecular dynamics analysis, the gas-liquid interface of nanobubbles has a state of equilibrium of positive and negative charges. Based on this characteristic, charged microbubbles have a strong spontaneous adsorption, wrapping and detachment ability for similarly charged micro foreign matter, thereby achieving deep cleaning power; (3) For microbubbles of 100nm size, the bursting pressure in the bubble will reach 30atm. The energy brought by the bubble bursting will significantly enhance the ability to remove pollutants attached to the surface of the product or even inside the microstructure.

[0003] The devices disclosed in CN112939245A, CN117942801A, CN220723774U, etc. all use flow channels to cut the fluid, so that the water body is cut into small particles, and then dissolved with gas to form microbubble water. Based on the above principle, when the water body leaves the generator, the water presents a relatively turbulent and non-steady flow state, which can be used for dissolved gas sterilization or antibacterial. The microbubbles formed by the device present a normal distribution, the concentration of microbubbles is low, and there are a large number of large bubbles. Since large bubbles will float rapidly in water, when cleaning, the large bubbles will take away the microbubbles at a very high speed, thereby greatly weakening the function of the microbubbles, and thus the effect on improving cleaning is extremely limited.

[0004] The existing ultra-fine bubble generator uses mechanical mixing and jetting to generate bubbles ranging in size from hundreds of nanometers to centimeters, but the number of bubbles is normally distributed. Due to the presence of large bubbles, their floating will quickly reduce the number of ultra-fine bubbles in the liquid and reduce the cleaning effect. Therefore, a micro-bubble cleaning device is needed that generates bubbles of stable and consistent size and can play an effective cleaning role. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of the utility model is to provide an ultrafine bubble cleaning device system, which uses saturated ultrafine bubbles as a cleaning medium to deeply clean the surface of a workpiece, so that the ultrafine bubbles penetrate into the interior of the workpiece microstructure, greatly improving the cleaning effect.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The utility model provides an ultrafine bubble cleaning device system, the ultrafine bubble cleaning device system comprises a cleaning tank, an auxiliary tank and an ultrafine bubble generating device, the auxiliary tank is cyclically connected to the cleaning tank through a liquid inlet pipe and a liquid outlet pipe respectively, and a first circulation pump is arranged on the liquid inlet pipe; the ultrafine bubble generating device is provided with an air inlet, a liquid inlet and a liquid outlet, the liquid inlet is connected to the auxiliary tank through a liquid supply branch pipe, a first throttle valve and a first flow detection component are arranged in sequence on the liquid supply branch pipe along the liquid flow direction, the liquid outlet is used to provide ultrafine bubbles into the cleaning tank, and the air inlet is connected to an external air source.

[0008] The cleaning tank of the utility model is used to accommodate workpieces to be cleaned, and pure water liquid is provided to the ultrafine bubble generating device through an auxiliary tank. Pure water and gas are used as media, and the ultrafine bubble generating device is used to generate ultrafine bubbles in a suspended state with an extremely low natural floating speed, and the ultrafine bubbles are sent into the cleaning tank. Based on the high permeability of the ultrafine bubbles, rapid stripping of workpiece pollutants is achieved, thereby improving the cleaning effect. At the same time, the liquid inlet flow rate of the ultrafine bubble cleaning device is adjusted to ensure that the ultrafine bubble generation amount meets the cleaning requirements, thereby improving the flexibility of the cleaning system, and the entire system forms a cycle, thereby improving the stability of the ultrafine bubble concentration.

[0009] The utility model has a wide application range and can be applied to the cleaning of workpieces of any shape and material, including but not limited to metal workpieces, alloy workpieces, polymer material workpieces, etc., and is particularly suitable for the cleaning of semiconductor workpieces.

[0010] It should be noted that the liquid provided by the auxiliary tank includes but is not limited to pure water.

[0011] As a preferred technical solution of the utility model, a plurality of flow equalizers are evenly arranged at the bottom of the inner cavity of the cleaning tank, the flow equalizers are connected to the liquid inlet pipe, and a plurality of ventilation holes are evenly distributed on the surface of the flow equalizers.

[0012] The utility model evenly lays a flow-uniform pipe at the bottom of the inner cavity of the cleaning tank, so that ultrafine bubbles flow into the flow-uniform pipe and enter the cleaning tank through the vent hole, and flow evenly and slowly from bottom to top, which is beneficial to improving the cleaning effect of the workpiece.

[0013] As a preferred technical solution of the utility model, an overflow port is provided along the outer peripheral wall of the top of the cleaning tank, and the overflow port is connected to the liquid outlet pipe.

[0014] The ultrafine bubbles generated by the ultrafine bubble generating device in the utility model gradually float up after entering the cleaning tank and clean the workpiece, then overflow from the top of the cleaning tank and flow back to the auxiliary tank through the liquid outlet pipe to form a cycle.

[0015] As a preferred technical solution of the utility model, the inlet of the liquid inlet pipe is connected to the auxiliary tank, and the outlet of the liquid inlet pipe is divided into two paths, one path is connected to the liquid supply branch pipe, and the other path is connected to the cleaning tank through the supply pipe, and the liquid outlet of the ultra-fine bubble generating device is connected to the supply pipe through the supply branch pipe.

[0016] As a preferred technical solution of the utility model, a diversion regulating valve is provided on the feed pipeline.

[0017] The utility model utilizes a first circulation pump to extract pure water from an auxiliary tank and transport it through a liquid inlet pipe, and the pure water flowing out of the liquid inlet pipe is divided into two parts, one part flows into a liquid supply branch pipe to provide a pure water medium for generating ultrafine bubbles to an ultrafine bubble generating device, and the other part enters a feed pipe and carries the ultrafine bubbles flowing out of the feed branch pipe into a cleaning tank for workpiece cleaning.

[0018] As a preferred technical solution of the utility model, a main pipe is provided at the outlet end of the auxiliary tank, and the outlet of the main pipe is divided into two routes, one route is connected to the cleaning tank through the liquid inlet pipe, and the other route is connected to the liquid supply branch pipe. The liquid outlet of the ultrafine bubble generating device is connected to the inlet end of the auxiliary tank through the feed branch pipe.

[0019] As a preferred technical solution of the utility model, a second throttle valve and a second flow detection component are sequentially arranged on the liquid inlet pipeline along the liquid flow direction.

[0020] The liquid supply branch pipe is also provided with a second circulation pump.

[0021] The utility model inputs the ultrafine bubbles generated by the ultrafine bubble generating device into the auxiliary tank, and the bubble water flowing out of the auxiliary tank is divided into two parts, one part is extracted by the first circulation pump and transported to the cleaning tank through the liquid inlet pipe for cleaning, and the other part is extracted by the second circulation pump and transported to the ultrafine bubble generating device through the liquid supply branch pipe for generating ultrafine bubbles to maintain bubble saturation and stable concentration. In addition, the workpiece cleaning and ultrafine bubble generation processes are independent of each other and do not affect each other, which improves the process stability, widens the process window, and is more suitable for high-precision cleaning processes.

[0022] As a preferred technical solution of the utility model, the air inlet is connected to the external air source through an air inlet pipe.

[0023] The air intake pipe is provided with a third throttle valve and a third flow detection component in sequence along the gas flow direction.

[0024] The utility model realizes the adjustment of the air intake flow rate to ensure the air-water ratio in the ultra-fine bubble generating device and meet the bubble concentration requirement.

[0025] As a preferred technical solution of the utility model, the ultrafine bubble generating device includes a venturi tube and a liquid storage container, the venturi tube is located outside the liquid storage container, the venturi tube has the air inlet and the liquid inlet respectively, the liquid storage container has the liquid outlet, the venturi tube is provided with a nozzle assembly, and the nozzle assembly is partially located inside the liquid storage container.

[0026] As a preferred technical solution of the utility model, the liquid storage container is provided with a pressure sensor, and a back pressure valve is provided at the liquid outlet, and the back pressure valve is electrically connected to the pressure sensor.

[0027] The ultrafine bubble generating device in the utility model generates saturated ultrafine bubbles in pure water, and the size distribution range of the bubbles covers from hundreds of nanometers to tens of micrometers, thereby preventing the generation of large bubbles. Under a standard atmospheric pressure of the liquid, the ultrafine bubbles are suspended, and the natural floating speed is extremely low. The high permeability of the bubbles is utilized to greatly improve the cleaning ability of the microstructure of the workpiece to be cleaned.

[0028] Compared with the prior art, the beneficial effects of the utility model are:

[0029] The utility model provides an ultrafine bubble cleaning device system, which uses ultrafine bubbles as a cleaning medium for circulated cleaning, allowing the bubbles to penetrate into the micro-nanoscale microstructure of a workpiece, thereby achieving deep cleaning of the microscopic surface of the workpiece. The ultrafine bubbles are small in size, high in concentration, and strong in stability, which significantly improves the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of the structure of the ultra-fine bubble cleaning device system provided in Example 1 of the utility model;

[0031] Figure 2 This is a schematic diagram of the structure of the ultra-fine bubble cleaning device system provided in Example 2 of the utility model.

[0032] Among them, 1-cleaning tank; 2-auxiliary tank; 3-ultrafine bubble generating device; 301-Venturi tube; 302-liquid storage container; 4-workpiece to be cleaned; 5-liquid inlet pipe; 6-liquid outlet pipe; 7-first circulation pump; 8-liquid supply branch pipe; 9-feeding pipe; 10-feeding branch pipe; 11-diverter regulating valve; 12-first throttle valve; 13-first flow detection component; 14-intake pipe; 15-third throttle valve; 16-third flow detection component; 17-uniform flow pipe; 18-overflow port; 19-feeding branch pipe; 20-second circulation pump; 21-second throttle valve; 22-second flow detection component. DETAILED DESCRIPTION

[0033] It should be understood that, in the description of the present utility model, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" and "several" mean two or more.

[0034] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0035] Those skilled in the art should understand that the present invention necessarily includes necessary pipelines, conventional valves and general pump equipment for realizing a complete process, but the above content does not constitute the main improvement of the present invention. Those skilled in the art can add layouts on their own based on the process flow and equipment structure selection, and the present invention does not make special requirements or specific limitations on this.

[0036] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0037] In a specific embodiment, the utility model provides an ultrafine bubble cleaning device system, including a cleaning tank, an auxiliary tank and an ultrafine bubble generating device, wherein the auxiliary tank is circulatedly connected to the cleaning tank through a liquid inlet pipe and a liquid outlet pipe respectively, and a first circulation pump is arranged on the liquid inlet pipe. The ultrafine bubble generating device is provided with an air inlet, a liquid inlet and a liquid outlet, wherein the liquid inlet is connected to the auxiliary tank through a liquid supply branch pipe, and a first throttle valve and a first flow detection component are arranged in sequence along the liquid flow direction on the liquid supply branch pipe, and the liquid outlet is used to provide ultrafine bubbles into the cleaning tank, and the air inlet is connected to an external gas source. The cleaning tank is used to accommodate the workpiece to be cleaned, and pure water is provided to the ultrafine bubble generating device through the auxiliary tank. With pure water and gas as the medium, the ultrafine bubble generating device is used to generate ultrafine bubbles in a "smoking" state, and the ultrafine bubbles are sent into the cleaning tank. Based on the high permeability of the ultrafine bubbles, the contaminants on the workpiece are quickly stripped off, which effectively improves the cleaning effect. Since a large amount of bubbles are consumed during the cleaning process, the ultrafine bubble concentration is stabilized through the circulation between the cleaning tank, the auxiliary tank and the ultrafine bubble generating device. At the same time, the first throttle valve and the first flow detection component are used to adjust the liquid inlet flow of the ultrafine bubble cleaning device to ensure that the ultrafine bubble generation amount meets the cleaning requirements.

[0038] It should be noted that the present invention does not make special requirements for the shape, material and volume of the cleaning tank and the auxiliary tank, and those skilled in the art can make adjustments according to actual conditions. For example, the shapes of the cross sections of the cleaning tank and the auxiliary tank can be independently selected from a circle or a rectangle, but are not limited to the above shapes. In addition, the cleaning tank and the auxiliary tank are also provided with necessary connecting pipes and switch control valves, which are not specifically limited in the present invention. Those skilled in the art need to make reasonable adjustments, additions or deletions according to actual production needs. It should be clear that new technical solutions generated by deleting some unnecessary connecting pipes and switch control valves, or replacing a single-function switch control valve with a multi-function integrated control valve, or an automatic control system in which an external device is electrically connected to the switch control valve to control the opening of the corresponding valve, etc., which are commonly used and well-known conventional technical means by those skilled in the art, also fall within the scope of disclosure and protection of the present invention.

[0039] In some embodiments, a plurality of flow-distributing tubes are evenly arranged at the bottom of the inner cavity of the cleaning tank, and the flow-distributing tubes are connected to the liquid inlet pipes, and a plurality of vents are evenly distributed on the surface of the flow-distributing tubes, so that ultrafine bubbles flow into the flow-distributing tubes and enter the cleaning tank through the vents, flowing evenly and slowly from bottom to top. The present invention does not make special requirements for the specific layout of the flow-distributing tubes. As long as the ultrafine bubbles can be evenly dispersed inside the cleaning tank, any layout commonly used by those skilled in the art can be adopted. Exemplarily, a plurality of flow-distributing tubes can be arranged side by side and at equal intervals at the bottom of the inner cavity of the cleaning tank along the length direction of the cleaning tank; a plurality of flow-distributing tubes can also be arranged in pairs in a "cross" shape. Of course, it can be understood that other layout methods disclosed in the prior art or not disclosed in the new technology can be used in the present invention, and are not limited to the above layout methods.

[0040] In some embodiments, an overflow port is provided along the peripheral wall at the top of the cleaning tank, and the overflow port is connected to the liquid outlet pipe. The ultrafine bubbles entering the cleaning tank gradually float up, overflow from the top of the cleaning tank, and flow back to the auxiliary tank through the liquid outlet pipe to form a cycle, which is conducive to the stability of the ultrafine bubble concentration. The utility model does not make special requirements for the structure of the overflow port, and those skilled in the art can adjust it based on the structure and volume of the cleaning tank. Exemplarily, it can be formed by pointing the top open end of the cleaning tank upward and cutting it into an oblique shape, or it can be formed by opening a rectangular groove at the top open end of the cleaning tank.

[0041] In some embodiments, the inlet of the liquid inlet pipe is connected to the auxiliary tank, and the outlet of the liquid inlet pipe is divided into two paths, one of which is connected to the liquid supply branch pipe, and the other is connected to the cleaning tank through the feed pipe, and the liquid outlet of the ultrafine bubble generating device is connected to the feed pipe through the feed branch pipe. Further, a shunt regulating valve is provided on the feed pipe. During the application process, pure water is extracted from the auxiliary tank by a first circulation pump and transported through the liquid inlet pipe, and the pure water flowing out of the liquid inlet pipe is divided into two parts, one of which flows into the liquid supply branch pipe, and the first throttle valve and the first flow detection component are used to adjust the pure water flow rate to provide the ultrafine bubble generating device with a pure water medium for generating ultrafine bubbles, and the other part enters the feed pipe and merges with the ultrafine bubbles flowing out of the feed branch pipe into the cleaning tank for workpiece cleaning, and a shunt regulating valve is used to adjust the bubble concentration entering the cleaning tank. When saturated bubble water is not required, the opening of the shunt regulating valve can be appropriately adjusted to reduce the concentration of ultrafine bubbles in the cleaning tank.

[0042] In some embodiments, the outlet end of the auxiliary tank is provided with a main pipe, and the outlet of the main pipe is divided into two ways, one way is connected to the cleaning tank through the liquid inlet pipe, and the other way is connected to the liquid supply branch pipe. The liquid outlet of the ultrafine bubble generating device is connected to the inlet end of the auxiliary tank through the feed branch pipe. Further, the liquid inlet pipe is also provided with a second throttle valve and a second flow detection component in sequence along the liquid flow direction. The liquid supply branch pipe is also provided with a second circulation pump. The overflow liquid overflowing from the cleaning tank and the ultrafine bubbles generated by the ultrafine bubble generating device are both input into the auxiliary tank, and the bubble water flowing out of the auxiliary tank from the main pipe is divided into two parts, one part is extracted by the first circulation pump, and is transported to the cleaning tank through the liquid inlet pipe for cleaning, and the second throttle valve and the second flow detection component are used for flow regulation. After the cleaning is completed, it overflows to the auxiliary tank for a new cycle; the other part is extracted by the second circulation pump, and is transported to the ultrafine bubble generating device through the liquid supply branch pipe, and the first throttle valve and the first flow detection component are used for flow regulation to achieve a stable generation of ultrafine bubbles. The workpiece cleaning and ultra-fine bubble generation processes are independent of each other and do not affect each other, which improves process stability, widens the process window, and is more suitable for high-precision cleaning processes, including but not limited to precision degumming cleaning and precision etching cleaning.

[0043] In some embodiments, the air inlet is connected to the external air source via an air inlet pipe, and a third throttle valve and a third flow detection component are sequentially arranged on the air inlet pipe along the gas flow direction to adjust the air intake flow rate to ensure the gas-water ratio in the ultrafine bubble generating device to meet the bubble concentration requirements.

[0044] In some embodiments, the ultrafine bubble generating device includes a venturi tube and a liquid storage container, the venturi tube is located outside the liquid storage container, the venturi tube is respectively provided with the air inlet and the liquid inlet, the liquid storage container is provided with the liquid outlet, the venturi tube is provided with a nozzle assembly, and the nozzle assembly is partially located in the liquid storage container. Preferably, the liquid storage container is provided with a pressure sensor, and a back pressure valve is provided at the liquid outlet, and the back pressure valve is electrically connected to the pressure sensor. The ultrafine bubble generating device is based on the Bernoulli principle, adopts a venturi tube for air intake, uses the inlet water to actively inhale air, uses pure water as the medium, and the pure water carries air through the venturi tube into the liquid storage container, and the nozzle assembly atomizes and releases the water in the liquid storage container. The sprayed pure water is deposited at the bottom of the liquid storage container, the gas gathers at the top, and continues to dissolve with the atomized water. When the pressure balance of the liquid storage container is reached, the liquid level is synchronously balanced. The balance pressure of the liquid storage container is controlled by a combination of a back pressure valve and a pressure sensor. When the pressure reaches the set value, the back pressure valve will be pushed open by water, thereby delivering water and ultrafine bubbles to the demand unit. After leaving the liquid storage container, the pressure of pure water entering the liquid supply branch pipe decreases rapidly, causing the bubbles dissolved in the water body to enter a supersaturated state from a saturated state, thereby causing gasification in the water body, forming a "smoking" state in the fluid, and improving the permeability of the bubbles. In order to further improve the atomization performance, the utility model exemplifies the relationship between the atomization parameters of the nozzle assembly and the container volume: using pure water and air as the medium, under normal temperature conditions, when the atomization particle size of the nozzle assembly is less than 100μm, the spray pressure is 3kgf / cm 2 The gas saturation dissolution time is about 10 to 13 seconds. Continue to reduce the atomization particle size of the nozzle assembly or continue to increase the water pressure to 5 kgf / cm 2 Under the same conditions, the difference in dissolution time is not obvious. Based on the highest energy efficiency ratio, select the nozzle assembly with atomization particle size parameter ≤100μm, and select a water pressure of 3kgf / cm2. The volume of the liquid storage container is calculated by the dissolution time, volume (V) ≥ dissolution time × flow rate. Assuming the flow rate is 2L / s, the volume of the liquid storage container V ≥ 13s × 2L / s, that is, V ≥ 26L. Accordingly, those skilled in the art can refer to the above method to obtain parameters under other temperature and pressure conditions.

[0045] Example 1

[0046] This embodiment provides an ultra-fine bubble cleaning device system, such as Figure 1As shown, it includes a cleaning tank 1, an auxiliary tank 2 and an ultrafine bubble generating device 3. The cleaning tank 1 is used to accommodate a workpiece 4 to be cleaned, the auxiliary tank 2 is used to provide pure water, and the ultrafine bubble generating device 3 is used to generate ultrafine bubbles. The ultrafine bubble generating device 3 includes a venturi tube 301 and a liquid storage container 302. The venturi tube 301 is located outside the liquid storage container 302. The venturi tube 301 is respectively provided with an air inlet and a liquid inlet. The liquid storage container 302 is provided with a liquid outlet. The venturi tube 301 is also provided with a nozzle assembly, and the nozzle assembly extends into the liquid storage container 302. The liquid storage container 302 is provided with a pressure sensor, and a back pressure valve is provided at the liquid outlet, and the back pressure valve is electrically connected to the pressure sensor. The auxiliary tank 2 is circulatedly connected to the cleaning tank 1 through a liquid inlet pipe 5 and a liquid outlet pipe 6, respectively, and a first circulation pump 7 is provided on the liquid inlet pipe 5. The inlet of the liquid inlet pipeline 5 is connected to the auxiliary tank 2, and the outlet of the liquid inlet pipeline 5 is divided into two paths, one of which is connected to the liquid supply branch pipe 8 and connected to the liquid inlet of the venturi tube 301, and the other is connected to the cleaning tank 1 through the feeding pipe 9, and the liquid outlet of the venturi tube 301 is connected to the feeding pipe 9 through the feeding branch pipe 10. A shunt regulating valve 11 is provided on the feeding pipe 9, and a first throttle valve 12 and a first flow detection component 13 are sequentially provided on the liquid supply branch pipe 8 along the flow direction of pure water. The air inlet of the venturi tube 301 is connected to the external gas source through the air inlet pipeline 4, and a third throttle valve 15 and a third flow detection component 16 are sequentially provided on the air inlet pipeline 4 along the flow direction of gas. A plurality of uniform flow pipes 17 are evenly arranged at the bottom of the inner cavity of the cleaning tank 1, and the uniform flow pipes 17 are connected to the feeding pipe 9, and the surface of the uniform flow pipes 17 is evenly covered with vents. An overflow port 18 is provided along the outer peripheral wall at the top of the cleaning tank 1, and the overflow port 18 is connected to the liquid outlet pipe 6 to realize circulation.

[0047] The first circulation pump 7 of this embodiment extracts pure water from the auxiliary tank 2. After leaving the first circulation pump 7, the pure water is divided into two paths. One path enters the ultrafine bubble generating device 3 through the liquid supply branch pipe 8. The pure water flow is controlled or adjusted by the first throttle valve 12 and the first flow detection component 13, and the gas flow is controlled or adjusted by the third throttle valve 15 and the third flow detection component 16; the other path enters the feed pipe 9, and after converging with the feed branch pipe 10, enters the cleaning tank 1. The bubble water flows out from the flow-uniform pipe 17 and evenly spreads over the entire cleaning tank 1. The bubble water flows evenly from bottom to top, and returns to the auxiliary tank 2 after evenly overflowing around the top of the cleaning tank 1, forming a cycle. During the entire cleaning process, when the workpiece 4 to be cleaned is immersed in the cleaning tank 1, the nano effect and high permeability of the ultrafine bubbles are used to quickly peel off the microscopic pollutants on the surface of the workpiece to achieve a cleaning effect, and through the circulation of the cleaning tank 1 and the auxiliary tank 2, a stable concentration is achieved, solving the problem of large-scale consumption of bubbles due to the rapid peeling of pollutants by bubbles during the cleaning process.

[0048] Example 2

[0049] This embodiment provides an ultra-fine bubble cleaning device system, such as Figure 2 As shown, it includes a cleaning tank 1, an auxiliary tank 2 and an ultrafine bubble generating device 3. The cleaning tank 1 is used to accommodate a workpiece 4 to be cleaned, the auxiliary tank 2 is used to provide pure water, and the ultrafine bubble generating device 3 is used to generate ultrafine bubbles. The ultrafine bubble generating device 3 includes a venturi tube 301 and a liquid storage container 302. The venturi tube 301 is located outside the liquid storage container 302. The venturi tube 301 is respectively provided with an air inlet and a liquid inlet. The liquid storage container 302 is provided with a liquid outlet. The venturi tube 301 is also provided with a nozzle assembly, and the nozzle assembly extends into the liquid storage container 302. The liquid storage container 302 is provided with a pressure sensor, and a back pressure valve is provided at the liquid outlet, and the back pressure valve is electrically connected to the pressure sensor. The auxiliary tank 2 is circulated and connected to the cleaning tank 1 through a liquid inlet pipe 5 and a liquid outlet pipe 6, respectively. The outlet end of the auxiliary tank 2 is provided with a main pipe, and the outlets of the main pipe are divided into two routes, one route is connected to the cleaning tank 1 through the liquid inlet pipe 5, and the other route is connected to the liquid inlet of the venturi tube 301 through the liquid supply branch pipe 8. The liquid outlet of the venturi tube 301 is connected to the inlet end of the auxiliary tank 2 through the feed branch pipe 19. The second circulation pump 20, the first throttle valve 12 and the first flow detection component 13 are sequentially arranged on the liquid supply branch pipe 8 along the flow direction of pure water. The first circulation pump 7, the second throttle valve 21 and the second flow detection component 22 are sequentially arranged on the liquid inlet pipe 5 along the flow direction of pure water. The air inlet of the venturi tube 301 is connected to the external gas source through the air inlet pipe 4, and the third throttle valve 15 and the third flow detection component 16 are sequentially arranged on the air inlet pipe 4 along the gas flow direction. A plurality of uniform flow pipes 17 are evenly arranged at the bottom of the inner cavity of the cleaning tank 1, and the uniform flow pipes 17 are connected to the feed pipe 9, and the surface of the uniform flow pipes 17 is evenly covered with vents. An overflow port 18 is provided along the outer peripheral wall at the top of the cleaning tank 1, and the overflow port 18 is connected to the liquid outlet pipe 6 to achieve circulation.

[0050] In this embodiment, the overflow liquid from the cleaning tank 1 and the ultrafine bubbles generated by the ultrafine bubble generating device 3 are both input into the auxiliary tank 2. The bubble water formed by the bubble water flowing out of the auxiliary tank 2 from the main pipe is divided into two parts. One part is extracted by the first circulation pump 7 and transported to the cleaning tank 1 through the liquid inlet pipe 5. The bubble water flows out from the flow-uniform pipe 17 and evenly spreads over the entire cleaning tank 1. The bubble water flows evenly from bottom to top, and returns to the auxiliary tank 2 after evenly overflowing around the top of the cleaning tank 1, forming a cycle, and the flow is adjusted by the second throttle valve 21 and the second flow detection component 22; the other part is extracted by the second circulation pump 20 and transported to the ultrafine bubble generating device 3 through the liquid supply branch pipe 8. The flow is adjusted by the first throttle valve 12 and the first flow detection component 13 to achieve a stable generation of ultrafine bubbles. The workpiece cleaning and ultrafine bubble generation processes are independent of each other and do not affect each other. Any flow adjustment will not affect the saturated state of the bubble water in the auxiliary tank 2. The bubble water always remains in a saturated state, which is more suitable for high-precision cleaning processes.

[0051] The applicant declares that the above is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. The technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by the technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. An ultra-fine bubble cleaning device system, characterized in that: The ultrafine bubble cleaning device system comprises a cleaning tank, an auxiliary tank and an ultrafine bubble generating device, wherein the auxiliary tank is cyclically connected to the cleaning tank through a liquid inlet pipe and a liquid outlet pipe, and a first circulation pump is arranged on the liquid inlet pipe; The ultrafine bubble generating device is provided with an air inlet, a liquid inlet and a liquid outlet. The liquid inlet is connected to the auxiliary tank through a liquid supply branch pipe. The liquid supply branch pipe is provided with a first throttle valve and a first flow detection component in sequence along the liquid flow direction. The liquid outlet is used to provide ultrafine bubbles into the cleaning tank, and the air inlet is connected to an external air source.

2. The ultrafine bubble cleaning device system according to claim 1, characterized in that: A plurality of flow-uniform pipes are evenly arranged at the bottom of the inner cavity of the cleaning tank, the flow-uniform pipes are connected to the liquid inlet pipe, and a plurality of vent holes are evenly distributed on the surface of the flow-uniform pipes.

3. The ultrafine bubble cleaning device system according to claim 1, characterized in that: An overflow port is arranged along the outer peripheral wall of the top of the cleaning tank, and the overflow port is connected to the liquid outlet pipe.

4. The ultrafine bubble cleaning device system according to any one of claims 1 to 3, characterized in that: The inlet of the liquid inlet pipe is connected to the auxiliary tank, and the outlet of the liquid inlet pipe is divided into two paths, one of which is connected to the liquid supply branch pipe, and the other is connected to the cleaning tank through the supply pipe. The liquid outlet of the ultrafine bubble generating device is connected to the supply pipe through the supply branch pipe.

5. The ultrafine bubble cleaning device system according to claim 4, characterized in that: The feed pipeline is provided with a flow diversion regulating valve.

6. The ultrafine bubble cleaning device system according to any one of claims 1 to 3, characterized in that: The outlet end of the auxiliary tank is provided with a main pipe, and the outlet of the main pipe is respectively divided into two paths, one of which is connected to the cleaning tank through the liquid inlet pipe, and the other is connected to the liquid supply branch pipe. The liquid outlet of the ultrafine bubble generating device is connected to the inlet end of the auxiliary tank through the feed branch pipe.

7. The ultrafine bubble cleaning device system according to claim 6, characterized in that: A second throttle valve and a second flow detection component are sequentially arranged on the liquid inlet pipeline along the liquid flow direction; The liquid supply branch pipe is also provided with a second circulation pump.

8. The ultrafine bubble cleaning device system according to claim 1, characterized in that: The air inlet is connected to the external air source through an air inlet pipeline; The air intake pipe is provided with a third throttle valve and a third flow detection component in sequence along the gas flow direction.

9. The ultrafine bubble cleaning device system according to claim 1, characterized in that: The ultrafine bubble generating device comprises a venturi tube and a liquid storage container, wherein the venturi tube is located outside the liquid storage container, the air inlet and the liquid inlet are respectively provided on the venturi tube, the liquid storage container is provided with the liquid outlet, the venturi tube is provided with a nozzle assembly, and the nozzle assembly is partially located inside the liquid storage container.

10. The ultrafine bubble cleaning device system according to claim 9, characterized in that: The liquid storage container is provided with a pressure sensor, and the liquid outlet is provided with a back pressure valve, and the back pressure valve is electrically connected to the pressure sensor.

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