Laser processing light path and laser processing equipment

Abstract

The utility model discloses a laser processing light path and laser processing equipment, including beam expanding subassembly, transflective mirror, galvanometer, field lens and visual inspection subassembly, transflective mirror includes the opposite transmission surface and reflection surface, beam expanding subassembly, the transmission surface of transflective mirror, galvanometer and field lens are arranged on the laser propagation path in proper order, the visual inspection subassembly is equipped with the visual inspection subassembly, the visual inspection subassembly is equipped with the visual inspection subassembly. Reflected light of a laser processing area sequentially passes through the field lens, the galvanometer and the reflecting surface of the transflective mirror and then enters the visual inspection assembly. In the laser machining process and the detecting and positioning process, the light path of laser machining and the light path of detecting and positioning partially coincide, reflected light and laser both pass through the field lens and the galvanometer, even if the temperature change of the galvanometer is large, the positioning position of the visual detection assembly is still consistent with the actual scribing position of the galvanometer, and the actual laser machining precision is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of laser processing, in particular to a laser processing optical path and laser processing equipment. Background Art

[0002] The screen is a printing template used in the photovoltaic cell circuit printing process. Before using the screen, the excess steel wire needs to be cut off by laser cutting to prepare for subsequent processing. During the laser cutting process of the screen, a positioning camera is required to position the screen, that is, to move the positioning camera or processing platform so that the lens of the positioning camera is aimed at the part to be processed, and then take pictures to position it. However, since a large amount of heat is generated during the cutting process, the temperature of the galvanometer changes greatly, which can easily make the positioning position of the positioning camera different from the actual marking position of the galvanometer, thereby causing processing errors. Utility Model Content

[0003] In view of the above-mentioned deficiencies in the prior art, the present application provides a laser processing optical path and a laser processing device, which can improve the accuracy of laser processing.

[0004] This embodiment adopts the following technical solutions:

[0005] A laser processing optical path comprises a beam expansion component, a transflective mirror, a galvanometer, a field lens and a visual detection component, wherein the transflective mirror comprises a transmission surface and a reflection surface which are arranged opposite to each other, the beam expansion component, the transmission surface of the transflective mirror, the galvanometer and the field lens are arranged in sequence on a propagation path of the laser, and reflected light from a laser processing area passes through the field lens, the galvanometer and the reflection surface of the transflective mirror in sequence and enters the visual detection component.

[0006] Furthermore, the laser processing optical path also includes a first reflector and a second reflector. After the laser is emitted by the laser, it is reflected by the first reflector and the second reflector in sequence and then enters the beam expansion component.

[0007] Furthermore, in the laser processing optical path, the first reflector is rotatably disposed at the output end of the laser, the second reflector is rotatably disposed at the incident end of the beam expansion assembly, and the rotation centerline of the first reflector is parallel to the rotation centerline of the second reflector.

[0008] Furthermore, the laser processing optical path also includes a first mounting member, a first telescopic member and a second mounting member, the first mounting member is provided with a first reflection cavity, the first reflection mirror is placed in the first reflection cavity, the second mounting member is provided with a second reflection cavity, the second reflection mirror is placed in the second reflection cavity, the first telescopic member is provided with a first laser channel, the first mounting member is rotatably disposed at the output end of the laser, the second mounting member is rotatably disposed at the incident end of the beam expansion assembly, the two ends of the first telescopic member are respectively connected to the first mounting member and the second mounting member, and the first laser channel is respectively connected to the first reflection cavity and the second reflection cavity.

[0009] Furthermore, the laser processing optical path also includes a lifting component, and the transflective mirror, the galvanometer, the field lens and the visual detection component are all arranged at the driving end of the lifting component, and the lifting component drives the transflective mirror, the galvanometer, the field lens and the visual detection component to move along a first direction.

[0010] Furthermore, the laser processing optical path also includes a third reflector, which is arranged at the driving end of the lifting assembly and located between the beam expansion assembly and the galvanometer. The laser is emitted toward the third reflector along a first direction, and after being reflected by the third reflector, is emitted toward the galvanometer along a second direction.

[0011] Furthermore, in the laser processing optical path, a fourth reflector is also included, and the fourth reflector is arranged between the beam expansion component and the third reflector.

[0012] Furthermore, the laser processing optical path also includes a third mounting member, a fourth mounting member and a second telescopic member, the third mounting member is provided with a third reflection cavity, the third reflection mirror is placed in the third reflection cavity, the fourth mounting member is provided with a fourth reflection cavity, the fourth reflection mirror is placed in the fourth reflection cavity, the second telescopic member is provided with a second laser channel, the two ends of the second telescopic member are respectively connected to the third mounting member and the fourth mounting member, and the second laser channel is respectively connected to the third reflection cavity and the fourth reflection cavity.

[0013] Furthermore, the laser processing optical path also includes a light source, which is used to illuminate the laser processing area, and the light source is arranged at the driving end of the lifting component.

[0014] A laser processing device comprises the above-mentioned laser processing optical path.

[0015] Compared with the prior art, the present application provides a laser processing optical path and laser processing equipment, in which the laser passes through the beam expansion component, the transmission surface of the transflector, the galvanometer and the field lens in sequence, and is focused on the laser processing area to achieve laser marking, laser cutting, laser welding and other laser processing. The reflected light from the laser processing area passes through the field lens, the galvanometer and the reflection surface of the transflector in sequence to enter the visual detection component to position the laser processing area. It can be seen that the optical path of the laser processing partially overlaps with the optical path of the detection and positioning, and both the reflected light and the laser pass through the field lens and the galvanometer. Even if the temperature of the galvanometer changes greatly, the positioning position of the visual detection component and the actual marking position of the galvanometer will still be consistent, ensuring the actual laser processing accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the overall structure of a specific embodiment of the laser processing optical path provided in this application.

[0017] Figure 2 for Figure 1 Schematic diagram of the laser processing light path shown.

[0018] Figure 3 This is a schematic diagram of the overall structure of a specific embodiment of the laser processing equipment provided in this application.

[0019] Among them, 11, beam expansion component; 12, transflective component; 121, transflective mirror; 13, galvanometer; 14, field lens; 15, visual detection component; 16, first reflection component; 17, second reflection component; 18, first telescopic component; 19, lifting component; 110, third reflection component; 111, fourth reflection component; 112, light source; 20, laser; 30, rack; 40, motion platform; 50, processing fixture; 100, product. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and effect of the present application clearer and more specific, the present application is further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application. Without further description, the elements, structures and features in one embodiment can also be beneficially combined with other embodiments.

[0021] It should be noted that when a metastructure is referred to as being "fixed to" or "set on" another metastructure, it may be directly on the other metastructure or indirectly on the other metastructure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0022] The orientation or positional relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element structure referred to must have a specific orientation, be constructed and operate in a specific orientation.

[0023] This application provides a laser processing optical path, which can be applied to laser processing equipment, such as laser cutting machines, laser marking machines, laser welding machines, etc. Figure 1 and Figure 2 The laser processing optical path provided in the present application includes a beam expansion component 11, a transflective component 12, a galvanometer 13, a field lens 14 and a visual detection component 15. The transflective component 12 includes a transflective mirror 121, which is provided with a transmission surface and a reflection surface that are relatively arranged. The beam expansion component 11, the transmission surface of the transflective mirror 121, the galvanometer 13 and the field lens 14 are sequentially arranged on the propagation path of the laser.

[0024] During the processing, after the laser 20 generates laser light, the laser light passes through the beam expansion component 11, the transmission surface of the reflective mirror 121, the galvanometer 13 and the field lens 14 in sequence, and is focused on the surface of the product to be processed to achieve laser processing such as laser marking, laser cutting, and laser welding.

[0025] The beam expansion assembly 11 includes a beam expander, which is used to enlarge the spot of the incident laser. According to the calculation formula of the theoretical spot size, it can be known that when the wavelength of the laser is determined, the larger the laser spot entering the galvanometer 13 and the field lens 14, the thinner the beam after being focused by the field lens 14, and a better laser processing effect can be achieved.

[0026] The visual inspection component 15 is arranged in the reflection direction of the reflection surface of the transflective mirror 121. During the positioning process, the reflected light from the laser processing area sequentially passes through the field lens 14, the galvanometer 13 and the reflection surface of the transflective mirror 121 and enters the visual inspection component 15 to locate the product on the laser processing area and determine the accurate position of the product.

[0027] Reflected light refers to the ambient light reflected from the laser processing area. The ambient light can be natural ambient light or additional lighting. Figure 2 As shown, the optical path A of laser processing partially overlaps with the optical path B of detection and positioning, and both the reflected light and the laser pass through the field lens 14 and the galvanometer 13. Even if the temperature of the galvanometer 13 changes greatly, the positioning position of the visual detection component 15 will still be consistent with the actual marking position of the galvanometer 13, ensuring the actual laser processing accuracy.

[0028] Furthermore, since the optical path A of the laser processing partially overlaps with the optical path B of the detection and positioning, after the laser processing is completed, there is no need to move the position of the processing area or the position of the visual inspection component 15 when positioning the next product processing. The visual inspection component 15 can be realigned with the product in the processing area, which can effectively improve the positioning efficiency and thereby improve the overall processing efficiency of the equipment.

[0029] In some embodiments, the laser processing optical path further includes a first reflection component 16 and a second reflection component 17. The first reflection component 16 includes a first reflection mirror, and the second reflection component 17 includes a second reflection mirror. After the laser is emitted by the laser 20, it is reflected by the first reflection mirror and the second reflection mirror in sequence and then enters the beam expansion component 11.

[0030] The first reflector and the second reflector are used to change the propagation direction of the laser. By setting the first reflector and the second reflector, the setting direction of the laser 20 can be the same as the setting direction of the beam expansion component 11, making the optical path structure more compact.

[0031] Furthermore, the first reflector is rotatably disposed at the output end of the laser 20, and the second reflector is rotatably disposed at the incident end of the beam expander assembly 11, and the rotation center line of the first reflector is parallel to the rotation center line of the second reflector.

[0032] By rotating the first reflector and the second reflector, the laser light passing through the first reflector can be emitted from different angles to the second reflector, and then emitted from the second reflector to the beam expander 11. At this time, the arrangement positions of the beam expander 11 and the laser 20 are not limited to the same height, and the first reflector and the second reflector can be rotated to a suitable angle as needed, so that the beam expander 11 and the laser 20 are respectively at different heights, so as to better arrange the beam expander 11 and the laser 20.

[0033] More specifically, the first reflection component 16 also includes a first mounting member, which is rotatably disposed at the output end of the laser 20, and a first reflection cavity is disposed in the first mounting member. The first reflection mirror is placed in the first reflection cavity and is fixed by a corresponding mirror seat or mounting structure; the second reflection component 17 also includes a second mounting member, which is rotatably disposed at the incident end of the beam expansion component 11, and a second reflection cavity is disposed in the second mounting member. The second reflection mirror is placed in the second reflection cavity and is also fixed by a corresponding mirror seat or mounting structure.

[0034] Meanwhile, the laser processing optical path may also include a first telescopic member 18, in which a first laser channel is arranged, and two ends of the first telescopic member 18 are respectively connected to the first mounting member and the second mounting member, and the first laser channel is respectively connected to the first reflection cavity and the second reflection cavity.

[0035] The first reflection cavity, the first laser channel, and the second reflection cavity can form a sealed optical path channel to prevent external interference during laser propagation.

[0036] The first telescopic member 18 can be telescopic, and combined with the rotation of the first mounting member and the second mounting member, the relative position of the laser 20 and the beam expansion assembly 11 can be conveniently adjusted according to actual needs, thereby making the overall layout of the laser processing optical path more reasonable and compact.

[0037] The first telescopic member 18 can be a light path sealing cylinder, which includes two relatively movable sleeves, one sleeve is sleeved on the other sleeve to achieve the telescopic function. Alternatively, the first telescopic member 18 can also be selected from other common telescopic structures.

[0038] In some embodiments, the beam expansion assembly 11 further includes a beam expansion mounting member, in which a beam expansion cavity is provided, and a beam expansion mirror is disposed in the beam expansion cavity and fixed by a corresponding mirror seat or mounting structure. In the process of laser beam expansion, the beam expansion cavity can play a role of sealing and protection.

[0039] In some embodiments, the laser processing optical path also includes a lifting component 19, and the transflective mirror 121, the galvanometer 13, the field lens 14 and the visual detection component 15 are all arranged at the driving end of the lifting component 19, and the lifting component 19 drives the transflective mirror 121, the galvanometer 13, the field lens 14 and the visual detection component 15 to move along the first direction.

[0040] The first direction can be any direction approaching / moving away from the product. For example, the first direction is a vertical direction, and the laser processing optical path performs laser processing on the product from above the product. The lifting component 19 can drive the transflective mirror 121, the galvanometer 13, the field lens 14 and the visual detection component 15 to move to a suitable height along the first direction, so that the focus of the laser falls on the surface of the product or the desired position, so as to perform the laser processing operation.

[0041] At this time, the fixture that fixes the product does not need to be raised or lowered, and the verticality and horizontality of the fixture are not easy to change, thereby ensuring the laser processing effect on the product.

[0042] Furthermore, the laser processing optical path also includes a third reflection component 110, and the third reflection component 110 includes a third reflection mirror. The third reflection mirror is also arranged at the driving end of the lifting component 19 and is located between the beam expansion component 11 and the galvanometer 13. The laser is emitted toward the third reflection mirror along the first direction, and after being reflected by the third reflection mirror, it is emitted toward the galvanometer 13 along the second direction.

[0043] The first direction and the second direction form a preset angle, for example, the preset angle is 90 degrees.

[0044] Since the laser is incident on the third reflector from the first direction and the movement direction of the third reflector is also along the first direction, the position where the laser is incident on the third reflector will not change, thereby ensuring that the laser reflected by the third reflector can be incident on the galvanometer 13 along the second direction.

[0045] The laser processing optical path may further include a fourth reflective component 111 , wherein the fourth reflective component 111 includes a fourth reflector, and the fourth reflector is disposed between the beam expansion component 11 and the third reflector.

[0046] In the actual processing, the first direction is the vertical direction and the second direction is the horizontal angle. Since the beam expander 11 is usually arranged horizontally, the laser it emits will also be in the horizontal direction. The fourth reflector can convert the horizontal laser into a vertical laser and project it onto the third reflector.

[0047] More specifically, the third reflective component 110 also includes a third mounting member, a third reflective cavity is provided in the third mounting member, and a third reflector is placed in the third reflective cavity; the fourth reflective component 111 also includes a fourth mounting member, a fourth reflective cavity is provided in the fourth mounting member, and a fourth reflector is placed in the fourth reflective cavity.

[0048] The laser processing optical path also includes a second telescopic member (not shown), a second laser channel is provided in the second telescopic member, two ends of the second telescopic member are respectively connected to the third mounting member and the fourth mounting member, and the second laser channel is respectively connected to the third reflection cavity and the fourth reflection cavity.

[0049] The third reflection cavity, the second laser channel and the fourth reflection cavity can form a sealed optical path channel to prevent the laser from being disturbed by the outside world during propagation.

[0050] The second telescopic member can be telescopic, so that when the lifting assembly 19 drives the third mounting member to rise and fall, the second telescopic member is connected to the third mounting member and the fourth mounting member. Specifically, the second telescopic member can use a dustproof bellows cover to play a dustproof and sealing role, or other common telescopic structures can be used.

[0051] Furthermore, a transflective mounting member may be disposed in the laser processing optical path, a transflective cavity is formed in the transflective mounting member, and the transflective mirror 121 is disposed in the transflective cavity.

[0052] The third mounting member can be combined with the transflective mounting member, or form an integral structure; the fourth mounting member can be combined with the beam expanding mounting member, or form an integral structure.

[0053] In short, the first mounting member, the first telescopic member 18, the second mounting member, the beam expanding member, the fourth mounting member, the second telescopic member, the third mounting member, the transflective mounting member, the galvanometer 13 and the field lens 14 (visual detection component 15) are connected in sequence and are internally connected, so that the laser is always propagating in a sealed space.

[0054] In some embodiments, the visual detection component 15 may include a camera and a lens, the lens is connected to the transflective cavity, and the ambient light reflected from the laser processing area passes through the field lens 14, the galvanometer 13 and the reflective surface of the transflective mirror 121 in sequence into the lens, and then enters the camera from the lens.

[0055] Furthermore, a light source 112 may be provided to illuminate the laser processing area so that the camera can obtain a clearer image.

[0056] Specifically, the light source 112 is also disposed at the driving end of the lifting assembly 19 , and may be disposed below the field lens 14 to move together with the field lens 14 .

[0057] The lifting component 19 can adopt a lifting module, a lifting cylinder, etc., which is not limited in this application.

[0058] See also Figure 3 The present application also provides a laser processing device, including the above-mentioned laser processing optical path, and may also include a frame 30, a motion platform 40, a processing fixture 50 and a laser 20. The motion platform 40, the laser 20 and the laser processing optical path are all arranged on the frame 30, the laser 20 is connected to the laser processing optical path, and the processing fixture 50 is arranged at the driving end of the motion platform 40.

[0059] A product 100 is placed on the processing jig 50. The laser generated by the laser 20 is magnified by the beam expander 11 to enlarge the light spot, the position is controlled by the galvanometer 13, and then focused onto the product 100 through the field lens 14. At the same time, the motion platform 40 drives the product 100 to move in a two-dimensional direction, so that the laser processes the product 100 along a preset processing trajectory.

[0060] The following is a description of the processing of the laser processing equipment in conjunction with a specific embodiment:

[0061] In this embodiment, the product 100 to be processed is a screen, and an adsorption hole is opened on the processing jig 50. By connecting a vacuum generator, the processing jig 50 can adsorb the screen under negative pressure, which can achieve the effect of not damaging the screen film surface and making the cutting surface more stable during processing.

[0062] During processing, the laser 20 generates laser light, which is reflected by the first reflection component 16 and the second reflection component 17, enters the beam expander 11, and amplifies the diameter of the light spot. After being reflected by the fourth reflection component 111 and the third reflection component 110, it passes through the transmission surface of the reflector 121 and enters the galvanometer 13. The two reflectors in the galvanometer 13 reflect the laser light onto the field lens 14 under the control of the program. After being focused by the field lens 14, the laser light hits the screen and cuts the steel wire on the screen.

[0063] In addition, the lifting assembly 19 can move up and down to find a suitable height for cutting, and the motion platform 40 can drive the processing fixture 50 and the screen to move horizontally to select a cutting area.

[0064] During positioning, the light source 112 is used to illuminate the screen. The light reflected by the screen passes through the field lens 14, the galvanometer 13, the reflective surface of the transflective mirror 121, and the lens, and is finally received by the camera. The image received by the camera is then transmitted to the industrial computer. The industrial computer can locate the screen processing position according to the visual inspection system or present the image on the display screen for the operator to observe.

[0065] Since the visual detection component 15 uses an internal coaxial structure, that is, the optical path of the visual detection component 15 receiving the reflected light partially overlaps with the optical path of the laser cutting, this structure can effectively eliminate the influence of temperature drift, while increasing the processing speed and expanding the processing range.

[0066] It is understandable that those skilled in the art can make equivalent substitutions or changes based on the technical solution and application concept of the present application, and all these changes or substitutions should fall within the protection scope of the claims attached to the present application.

Claims

1. A laser processing optical path, characterized in that: The invention comprises a beam expander assembly, a transflective mirror, a galvanometer, a field lens and a visual detection assembly, wherein the transflective mirror comprises a transmission surface and a reflection surface which are arranged opposite to each other, the beam expander assembly, the transmission surface of the transflective mirror, the galvanometer and the field lens are arranged in sequence on the propagation path of the laser, and the reflected light in the laser processing area passes through the field lens, the galvanometer and the reflection surface of the transflective mirror in sequence and enters the visual detection assembly.

2. The laser processing optical path according to claim 1, characterized in that: It also includes a first reflector and a second reflector. After the laser is emitted by the laser, it is reflected by the first reflector and the second reflector in sequence and then enters the beam expansion component.

3. The laser processing optical path according to claim 2, characterized in that: The first reflector is rotatably disposed at the output end of the laser, and the second reflector is rotatably disposed at the incident end of the beam expansion assembly. The rotation centerline of the first reflector is parallel to the rotation centerline of the second reflector.

4. The laser processing optical path according to claim 3, characterized in that: It also includes a first mounting member, a first telescopic member and a second mounting member, wherein the first mounting member is provided with a first reflection cavity, the first reflection mirror is placed in the first reflection cavity, the second mounting member is provided with a second reflection cavity, the second reflection mirror is placed in the second reflection cavity, a first laser channel is provided in the first telescopic member, the first mounting member is rotatably disposed at the output end of the laser, the second mounting member is rotatably disposed at the incident end of the beam expansion assembly, two ends of the first telescopic member are respectively connected to the first mounting member and the second mounting member, and the first laser channel is respectively connected to the first reflection cavity and the second reflection cavity.

5. The laser processing optical path according to claim 1, characterized in that: It also includes a lifting component, and the transflective mirror, the galvanometer, the field lens and the visual detection component are all arranged at the driving end of the lifting component, and the lifting component drives the transflective mirror, the galvanometer, the field lens and the visual detection component to move along a first direction.

6. The laser processing optical path according to claim 5, characterized in that: It also includes a third reflector, which is arranged at the driving end of the lifting assembly and located between the beam expander assembly and the galvanometer. The laser is emitted toward the third reflector along a first direction, and after being reflected by the third reflector, it is emitted toward the galvanometer along a second direction.

7. The laser processing optical path according to claim 6, characterized in that: It also includes a fourth reflector, which is arranged between the beam expansion component and the third reflector.

8. The laser processing optical path according to claim 7, characterized in that: It also includes a third mounting member, a fourth mounting member and a second telescopic member, wherein the third mounting member is provided with a third reflection cavity, and the third reflection mirror is placed in the third reflection cavity, the fourth mounting member is provided with a fourth reflection cavity, and the fourth reflection mirror is placed in the fourth reflection cavity, the second telescopic member is provided with a second laser channel, the two ends of the second telescopic member are respectively connected to the third mounting member and the fourth mounting member, and the second laser channel is respectively connected to the third reflection cavity and the fourth reflection cavity.

9. The laser processing optical path according to claim 5, characterized in that: It also includes a light source, which is used to illuminate the laser processing area and is arranged at the driving end of the lifting component.

10. A laser processing device, characterized in that: Comprising the laser processing optical path as described in any one of claims 1-9.

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