Sealing mechanism, vacuum sealing valve and vacuum sealing system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a sealing mechanism, a vacuum sealing valve and a vacuum sealing system. A sealing mechanism includes at least one sealing surface and a sealing gasket. The sealing face comprises an annular knife edge, and the annular knife edge is arranged on the sealing face in a protruding mode. The sealing gasket comprises a sealing gasket inner ring and a sealing gasket outer ring. And the inner ring of the sealing gasket is matched with the annular knife edge of at least one sealing surface for sealing. The sealing gasket outer ring comprises at least one protruding structure facing the at least one sealing face so as to limit the pressing-in depth of the annular knife edge of the at least one sealing face and the sealing gasket inner ring in a matched sealing mode.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a sealing mechanism, a vacuum sealing valve and a vacuum sealing system. Background Art

[0002] In the field of vacuum technology, the sealing performance of sealing components is crucial as they are one of the components that ensure the maintenance of the internal vacuum of the system and prevent the penetration of external gases. For example, the ultra-high vacuum (UHV) rectangular gate valve is a component used in industrial molecular beam epitaxy equipment (MBE). It is used to isolate the negative pressure environment between the various cavities of the system. When samples need to be transferred or communicated between cavities, the valve core is opened to achieve communication between cavities. At present, the UHV rectangular valve used in industrial MBE uses a flat metal seal, which can achieve high-temperature baking and UHV sealing. However, the existing metal flat seals have strict requirements on the positional stability of the sealing surface, sealing gasket and docking cavity. Different thermal expansion and contraction, ground settlement or vibration will cause the seal to fail. Utility Model Content

[0003] The present disclosure provides a sealing mechanism, comprising:

[0004] At least one sealing surface, the sealing surface comprising an annular blade, the annular blade protrusion being disposed on the sealing surface;

[0005] Gasket, including:

[0006] An inner ring of the sealing gasket cooperates with the annular edge of at least one sealing surface for sealing; and

[0007] The outer ring of the sealing gasket includes at least one protruding structure facing at least one sealing surface, so as to limit the pressing depth of the annular cutting edge of at least one sealing surface and the sealing gasket inner ring for sealing.

[0008] In some embodiments of the present disclosure, the sealing surface further includes a sealing surface groove formed around the annular blade edge, and the sealing surface groove is used to position the sealing gasket.

[0009] In some embodiments of the present disclosure, at least one sealing surface includes a first sealing surface, the first sealing surface includes a first annular blade, the first annular blade protrusion is arranged on the first sealing surface, the first sealing surface is arranged on a first side of the sealing gasket, the inner ring of the sealing gasket cooperates with the first annular blade on the first side of the sealing gasket for sealing, and at least one protrusion structure includes a first protrusion structure facing the first sealing surface on the first side of the sealing gasket to limit the pressing depth of the first annular blade and the inner ring of the sealing gasket for sealing.

[0010] In some embodiments of the present disclosure, the first protrusion structure includes:

[0011] At least one protrusion disposed on the first surface facing the first sealing surface and extending along the circumference of the outer ring of the sealing gasket; or

[0012] A plurality of protrusions are arranged on the first surface facing the first sealing surface and are spaced apart along the circumference of the outer ring of the sealing gasket; or

[0013] On the first side of the outer ring of the sealing gasket, the thickness of the outer ring of the sealing gasket is greater than the thickness of the inner ring of the sealing gasket, and it protrudes from the inner ring of the sealing gasket to the first sealing surface, so that the first side of the outer ring of the sealing gasket forms a first protrusion structure.

[0014] In some embodiments of the present disclosure, at least one sealing surface also includes a second sealing surface, which is arranged on the second side of the sealing gasket relative to the first side of the sealing gasket, and the second sealing surface includes a second annular blade, and the second annular blade protrusion is arranged on the second sealing surface.

[0015] In some embodiments of the present disclosure, the inner ring of the sealing gasket cooperates with the second annular cutting edge on the second side of the sealing gasket for sealing, and at least one protruding structure includes a second protruding structure facing the second sealing surface on the second side of the sealing gasket to limit the pressing depth of the second annular cutting edge and the inner ring of the sealing gasket for sealing.

[0016] In some embodiments of the present disclosure, the second protrusion structure includes:

[0017] at least one protrusion disposed on the second surface facing the second sealing surface and extending along the circumference of the outer ring of the sealing gasket; or

[0018] A plurality of protrusions are arranged on the second surface facing the second sealing surface and are arranged at intervals along the circumference of the outer ring of the sealing gasket; or

[0019] On the second side of the outer ring of the sealing gasket, the thickness of the outer ring of the sealing gasket is greater than the thickness of the inner ring of the sealing gasket, and it protrudes from the inner ring of the sealing gasket to the second sealing surface, so that the second side of the outer ring of the sealing gasket forms a second protrusion structure.

[0020] The present disclosure provides a vacuum sealing valve, comprising:

[0021] Valve body;

[0022] A valve core is arranged in the valve body;

[0023] a valve core drive assembly including a drive flange; and

[0024] According to the sealing mechanism in any one of the embodiments of the present disclosure,

[0025] The sealing gasket of the sealing mechanism is arranged between the driving flange and the valve body, and at least one sealing surface of the sealing mechanism includes a sealing surface opposite to the driving flange and the valve body and / or a sealing surface opposite to the valve body and the driving flange.

[0026] The present disclosure provides a vacuum sealing system, comprising:

[0027] at least one vacuum chamber, the vacuum chamber comprising a chamber flange;

[0028] Valve body;

[0029] A valve core is arranged in the valve body;

[0030] a valve core drive assembly including a drive flange; and

[0031] At least one sealing mechanism according to any one of the embodiments of the present disclosure, wherein the at least one sealing mechanism comprises a valve sealing mechanism and at least one vacuum chamber sealing mechanism,

[0032] The sealing gasket of the valve sealing mechanism is arranged between the driving flange and the valve body, and at least one sealing surface of the valve sealing mechanism includes a sealing surface of the driving flange opposite to the valve body and / or a sealing surface of the valve body opposite to the driving flange.

[0033] The sealing gasket of at least one vacuum chamber sealing mechanism is respectively arranged between the cavity flange and the valve body of at least one vacuum chamber, and at least one sealing surface of the vacuum chamber sealing mechanism includes a sealing surface opposite to the cavity flange and the valve body and / or a sealing surface opposite to the valve body and the cavity flange.

[0034] In some embodiments of the present disclosure, at least one vacuum chamber comprises:

[0035] A first vacuum chamber, comprising a first chamber flange;

[0036] A second vacuum chamber, comprising a second chamber flange;

[0037] The valve body comprises a first butt flange and a second butt flange which are arranged opposite to each other; and

[0038] At least one vacuum chamber sealing mechanism includes a first vacuum chamber sealing mechanism and a second vacuum chamber sealing mechanism, the sealing gasket of the first vacuum chamber sealing mechanism is arranged between the first chamber flange and the first docking flange, at least one sealing surface of the first vacuum chamber sealing mechanism includes the sealing surface opposite to the first chamber flange and the first docking flange and / or the sealing surface opposite to the first chamber flange, the sealing gasket of the second vacuum chamber sealing mechanism is arranged between the second chamber flange and the second docking flange, at least one sealing surface of the second vacuum chamber sealing mechanism includes the sealing surface opposite to the second chamber flange and / or the sealing surface opposite to the second docking flange and the second chamber flange.

[0039] According to some embodiments of the present disclosure, the sealing mechanism, vacuum sealing valve and vacuum sealing system can bring beneficial technical effects. For example, the sealing mechanism, vacuum sealing valve and vacuum sealing system of some embodiments of the present disclosure use an annular blade and a sealing gasket for sealing, and use at least one protruding structure to limit the pressing depth of the annular blade and the sealing gasket for sealing, so that the sealing torque originally required for the plane sealing is reduced to, for example, only less than 10N*M / rpm, and the sealing stroke is increased from microns to millimeters, which greatly increases the success rate and fault tolerance of the seal. For another example, the sealing mechanism, vacuum sealing valve and vacuum sealing system of some embodiments of the present disclosure can avoid the strict requirements of the plane sealing structure on the stability of the equipment operating environment, and eliminate the sealing failure caused by uneven thermal expansion and contraction of the flange and the sealing gasket, ground subsidence of the equipment site, and resonance of the surrounding environment after sealing. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0041] Figure 1A A schematic structural diagram of a sealing mechanism according to some embodiments of the present disclosure is shown.

[0042] Figure 1B A side view of a sealing mechanism according to some embodiments of the present disclosure is shown.

[0043] Figure 2 A schematic structural diagram of a sealing surface according to some embodiments of the present disclosure is shown.

[0044] Figure 3A A schematic structural diagram of a sealing gasket according to some embodiments of the present disclosure is shown.

[0045] Figure 3B A schematic cross-sectional view of a sealing gasket according to some embodiments of the present disclosure is shown.

[0046] Figure 3C Show Figure 3B Side view of.

[0047] Figure 4 A schematic diagram showing the sealing state of a sealing mechanism according to some embodiments of the present disclosure.

[0048] Figure 5 A schematic structural diagram of a vacuum sealing valve according to some embodiments of the present disclosure is shown.

[0049] Figure 6 A schematic structural diagram of a vacuum-tight sealing system according to some embodiments of the present disclosure is shown.

[0050] Figure 7 A schematic diagram of the exploded structure of a vacuum-tight sealing system according to some other embodiments of the present disclosure is shown.

[0051] In the above drawings, the reference numerals represent:

[0052] 10000-Vacuum Sealing System

[0053] 1000-Vacuum Sealing Valve

[0054] 100-Sealing mechanism

[0055] 110-Sealing surface

[0056] 111-Ring edge

[0057] 112- Sealing surface groove

[0058] 113-First sealing surface

[0059] 1131-First annular blade

[0060] 1132-First sealing surface groove

[0061] 114-Second sealing surface

[0062] 1141-Second annular blade

[0063] 1142-Second sealing surface groove

[0064] 120-Sealing Gasket

[0065] F - First side of the gasket

[0066] S - Second side of the gasket

[0067] 121-Inner ring of sealing gasket

[0068] 122- Sealing gasket outer ring

[0069] 1221- Raised structure

[0070] 12211-First raised structure

[0071] 122111-First side of the outer ring of the sealing gasket

[0072] 12212-Second raised structure

[0073] 122121-Second side of the outer ring of the sealing gasket

[0074] 130-valve sealing mechanism

[0075] 131-Sealing gasket of valve sealing mechanism

[0076] 140-Vacuum chamber sealing mechanism

[0077] 141-First vacuum chamber sealing mechanism

[0078] 1411-Sealing gasket of the first vacuum chamber sealing mechanism

[0079] 142-Second vacuum chamber sealing mechanism

[0080] 1421-Sealing gasket of the second vacuum chamber sealing mechanism

[0081] 200-Valve Body

[0082] 210-First docking flange

[0083] 220-Second docking flange

[0084] 300-Spool

[0085] 400-Spool drive device

[0086] 410-Drive flange

[0087] 500-Vacuum Chamber

[0088] 510-Cavity flange

[0089] 520-First vacuum chamber

[0090] 521-First cavity flange

[0091] 530-Second vacuum chamber

[0092] 531-Second cavity flange DETAILED DESCRIPTION

[0093] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0094] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). Alternatively, the end or the side that is close to the driving device is the proximal end or the proximal side, and the end or the side that is away from the driving device is the distal end or the distal side. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0095] Figure 1A A schematic structural diagram of a sealing mechanism 100 according to some embodiments of the present disclosure is shown. Figure 1B A side view of a sealing mechanism 100 is shown according to some embodiments of the present disclosure. Figure 2 A schematic structural diagram of the sealing surface 110 according to some embodiments of the present disclosure is shown. Figure 3A A schematic structural diagram of a sealing gasket 120 according to some embodiments of the present disclosure is shown. Figure 3B A schematic cross-sectional view of a sealing gasket 120 according to some embodiments of the present disclosure is shown. Figure 3C Show Figure 3B Side view of.

[0096] like Figure 1A and Figure 1B In some embodiments of the present disclosure, the sealing mechanism 100 may include at least one sealing surface 110 and a sealing gasket 120. Figure 2 As shown, the sealing surface 110 may include an annular blade 111. The annular blade 111 is convexly disposed on the sealing surface 110. Figure 3A , 3BAs shown in FIG. 3C , the sealing gasket 120 may include a sealing gasket inner ring 121 and a sealing gasket outer ring 122. The sealing gasket inner ring 121 cooperates with the annular blade 111 of at least one sealing surface 110 for sealing. The sealing gasket outer ring 122 may include at least one protruding structure 1221 facing at least one sealing surface 110 to limit the pressing depth of the annular blade 111 of at least one sealing surface 110 and the sealing gasket inner ring 121 for sealing.

[0097] Those skilled in the art will understand that Figure 2 The sealing surface 113 is taken as an example to generally describe the sealing surface 110, but it is not intended to limit the sealing surface 110. The description of the sealing surface 110 can also be applied to other sealing surfaces, such as the sealing surface 114. Those skilled in the art understand that the annular blade 111 refers to a blade that is closed and continuous in form. The annular blade 111 can be set to any suitable shape as required, such as a special-shaped annular blade, a rectangular annular blade, a circular annular blade, an elliptical annular blade, etc.

[0098] In some embodiments of the present disclosure, an annular blade 111 and a sealing gasket 120 are used for sealing, and at least one protruding structure 1221 is used to limit the pressing depth of the annular blade 111 and the sealing gasket 120 for sealing, so that the sealing torque originally required for planar sealing is reduced to less than 25N*M / rpm, for example, only about 10N*M / rpm, for example, 8N*M / rpm, and the sealing stroke is increased from micrometer level to millimeter level, which greatly increases the success rate and fault tolerance of sealing.

[0099] like Figure 2 As shown, in some embodiments of the present disclosure, the sealing surface 110 may further include a sealing surface groove 112 formed around the annular blade 111, and the sealing surface groove 112 is used to position the sealing gasket 120. The sealing gasket 120 may be accommodated in the sealing surface groove 112 in an adaptable manner.

[0100] In some embodiments of the present disclosure, the sealing surface groove 112 can not only simplify the installation process of the sealing gasket 120, but also prevent the sealing gasket 120 from moving or shifting during use, especially when affected by external factors such as pressure fluctuations, vibrations or temperature changes, thereby maintaining a stable sealing state.

[0101] Those skilled in the art understand that although Figure 3A The sealing gasket 120 shown is a special-shaped sealing gasket, but this is only exemplary. The sealing gasket 120 can be set to any suitable shape as needed, for example, it can be a rectangular sealing gasket (refer to Figure 7 The sealing gasket 1411 of the first vacuum chamber sealing mechanism and the sealing gasket 1421 of the second vacuum chamber sealing mechanism), or other shapes, such as a circle.

[0102] In some embodiments of the present disclosure, the sealing gasket 120 may include a sealing gasket made of various suitable materials, such as an oxygen-free copper sealing gasket, etc.

[0103] Figure 4 A schematic diagram showing the sealing state of the sealing mechanism 100 according to some embodiments of the present disclosure.

[0104] like Figure 1B and Figure 4 In some embodiments of the present disclosure, at least one sealing surface 110 may include a first sealing surface 113. The first sealing surface 113 may include a first annular blade 1131. The first annular blade 1131 is convexly disposed on the first sealing surface 113. The first sealing surface 113 is disposed on the first side F of the sealing gasket 120. The sealing gasket inner ring 121 cooperates with the first annular blade 1131 on the first side F of the sealing gasket 120 for sealing. Figure 3B , Figure 3C and Figure 4 As shown, at least one protrusion structure 1221 may include a first protrusion structure 12211 on the first side F of the sealing gasket 120 facing the first sealing surface 113 to limit the pressing depth of the first annular blade 1131 and the sealing gasket inner ring 121 for sealing.

[0105] Those skilled in the art will understand that Figure 2 In the description of the sealing surface 110 and the annular blade 111, the sealing surface 113 is taken as an example, and Figure 3A The description of the protruding structure 1221 in Figure 4 The first sealing surface 113, the first annular blade 1131, and the first protruding structure 12211 shown in the figure are not described in detail here.

[0106] In some embodiments of the present disclosure, the first protrusion structure 12211 may include at least one protrusion disposed on the first surface facing the first sealing surface 113 and extending along the circumference of the sealing gasket outer ring 122, such as an annular protrusion extending along the circumference of the sealing gasket outer ring 122 or a plurality of strip-shaped protrusions extending and distributed along the circumference of the sealing gasket outer ring 122. The at least one protrusion is used to limit the pressing depth of the first annular knife edge 1131 on the first sealing surface 113 in the sealing gasket inner ring 121 of the first side F of the sealing gasket 120.

[0107] In some embodiments of the present disclosure, the first protrusion structure 12211 may include a plurality of protrusions, such as dot-shaped protrusions, columnar protrusions, etc., which are arranged on the first surface facing the first sealing surface 113 and are arranged at intervals along the circumference of the sealing gasket outer ring 122. The plurality of protrusions are used to limit the pressing depth of the first annular knife edge 1131 on the first sealing surface 113 on the sealing gasket inner ring 121 of the first side F of the sealing gasket 120.

[0108] like Figure 3B and Figure 3C In some embodiments of the present disclosure, the first protruding structure 12211 may include a first side 122111 of the outer ring of the sealing gasket. The thickness of the outer ring 122 of the sealing gasket is greater than the thickness of the inner ring 121 of the sealing gasket, and protrudes from the inner ring 121 of the sealing gasket toward the first sealing surface 113 to form a step structure, so that the first side 122111 of the outer ring of the sealing gasket as a whole forms the first protruding structure 12211. The first side 122111 of the outer ring of the sealing gasket is used to limit the pressing depth of the first annular knife edge 1131 on the first sealing surface 113 and the inner ring 121 of the sealing gasket.

[0109] like Figure 1B As shown, in some embodiments of the present disclosure, at least one sealing surface 110 may further include a second sealing surface 114. The second sealing surface 114 is disposed on a second side S of the sealing gasket relative to the first side F of the sealing gasket. The second sealing surface 114 may include a second annular blade 1141. The second annular blade 1141 is convexly disposed on the second sealing surface 114.

[0110] In some embodiments of the present disclosure, the second sealing surface 114 may have a structure similar to the sealing surface 110 and the first sealing surface 114 in some embodiments of the present disclosure. Figure 2 The description of the sealing surface 110 shown can be applied to the second sealing surface 114. Figure 2 The description of the annular blade edge 111 of the sealing surface 110 shown may be applicable to the second annular blade edge 1141 .

[0111] like Figure 4 As shown, in some embodiments of the present disclosure, the inner ring 121 of the sealing gasket cooperates with the second annular blade 1141 on the second side S of the sealing gasket 120 for sealing. And at least one protruding structure 1221 includes a second protruding structure 12212 facing the second sealing surface 114 on the second side S of the sealing gasket 120 to limit the pressing depth of the second annular blade 1141 and the inner ring 121 of the sealing gasket for sealing.

[0112] Those skilled in the art will understand that Figure 3A The description of the protruding structure 1221 in Figure 4The second protrusion structure 12212 is shown in FIG.

[0113] In some embodiments of the present disclosure, the second protrusion structure 12212 may include at least one protrusion disposed on the second surface facing the second sealing surface 114 and extending along the circumference of the sealing gasket outer ring 122, such as an annular protrusion extending along the circumference of the sealing gasket outer ring 122 or a plurality of strip-shaped protrusions extending and distributed along the circumference of the sealing gasket outer ring 122. The at least one protrusion is used to limit the pressing depth of the second annular knife edge 1141 on the second sealing surface 114 and the sealing gasket inner ring 121 on the second side S of the sealing gasket 120.

[0114] In some embodiments of the present disclosure, the second protrusion structure 12212 may include a plurality of protrusions, such as dot-shaped protrusions, columnar protrusions, etc., which are arranged on the second surface facing the second sealing surface 114 and spaced apart along the circumference of the sealing gasket outer ring 122. The plurality of protrusions are used to limit the pressing depth of the second annular knife edge 1141 on the second sealing surface 114 and the sealing gasket inner ring 121 on the second side S of the sealing gasket 120.

[0115] like Figure 3B and Figure 3C As shown, in some embodiments of the present disclosure, the second protruding structure 12212 may include a second side 122121 of the outer ring of the sealing gasket. The thickness of the outer ring 122 of the sealing gasket is greater than the thickness of the inner ring 121 of the sealing gasket, and protrudes from the inner ring 121 of the sealing gasket toward the second sealing surface 114 to form a step structure, so that the second side 122121 of the outer ring of the sealing gasket forms the second protruding structure 12212 as a whole.

[0116] like Figure 4 As shown, in some embodiments of the present disclosure, the first sealing surface 113 may further include a first sealing surface groove 1132 formed around the first annular blade 1131 . The second sealing surface 114 may further include a second sealing surface groove 1142 formed around the second annular blade 1141 .

[0117] Those skilled in the art will appreciate that, in some embodiments, at least one protrusion structure 1221 (e.g., the first protrusion structure 12211, the second protrusion structure 12212) may abut against the bottom surface of a sealing surface groove (e.g., the first sealing surface groove 1132, the second sealing surface groove 1142) of at least one sealing surface (e.g., the first sealing surface 113, the second sealing surface 114) to limit the insertion depth of the annular cutting edge 111 (e.g., the first annular cutting edge 1131, the second annular cutting edge 1141) and the inner ring 121 of the sealing gasket for sealing.

[0118] Figure 5A schematic structural diagram of a vacuum sealing valve 1000 according to some embodiments of the present disclosure is shown.

[0119] like Figure 5 As shown, in some embodiments of the present disclosure, the vacuum sealing valve 1000 may include a valve body 200, a valve core 300, a valve core driving device 400, and a sealing mechanism 100 in any embodiment of the present disclosure. The valve core 300 is disposed in the valve body 200. The valve core driving device 400 includes a driving flange 410. The sealing gasket 120 of the sealing mechanism 100 is disposed between the driving flange 410 and the valve body 200, and at least one sealing surface 110 of the sealing mechanism 100 includes a sealing surface of the driving flange 410 opposite to the valve body 200 and / or a sealing surface of the valve body 200 opposite to the driving flange 410.

[0120] Figure 6 A schematic structural diagram of a vacuum sealing system 10000 according to some embodiments of the present disclosure is shown. Figure 7 A schematic diagram of the exploded structure of a vacuum sealing system 10000 according to some other embodiments of the present disclosure is shown.

[0121] like Figure 6 As shown, in some embodiments of the present disclosure, the vacuum sealing system 10000 may include at least one vacuum chamber (such as the vacuum chamber 500), a valve body 200, a valve core 300 ( Figure 6 Not shown, please refer to Figure 5 ), the valve core driving device 400 and the sealing mechanism 100 ( Figure 6 Not shown, please refer to Figure 5 ). The at least one vacuum chamber may include a vacuum chamber 500. The vacuum chamber 500 may include a chamber flange 510. The valve core 300 is disposed in the valve body 200. The valve core drive device 400 may include a drive flange 410. The at least one sealing mechanism 100 may include a valve sealing mechanism (e.g. Figure 7 The valve sealing mechanism 130 shown) and at least one vacuum chamber sealing mechanism (e.g. Figure 7 The sealing gasket of the valve sealing mechanism (e.g. Figure 7 The sealing gasket 131 shown in the figure is disposed between the driving flange 410 and the valve body 200. The at least one sealing surface 110 of the valve sealing mechanism 130 may include a sealing surface where the driving flange 410 is opposite to the valve body 200 and / or a sealing surface where the valve body 200 is opposite to the driving flange 410. The sealing gasket (e.g. Figure 7 The sealing gasket 141 and the sealing gasket 142 shown in the figure can be arranged between the chamber flange 510 of at least one vacuum chamber and the valve body 200. The vacuum chamber sealing mechanism (for example Figure 7At least one sealing surface of the vacuum chamber sealing mechanism 140 shown may include a sealing surface between the chamber flange 510 and the valve body 200 and / or a sealing surface between the valve body 200 and the chamber flange 510 .

[0122] like Figure 6 As shown, according to some embodiments of the present disclosure, a vacuum sealing valve 1000 (for example, Figure 5 The vacuum sealing valve 1000 shown can be installed on the cavity body of the vacuum chamber 510 to seal the vacuum chamber 510.

[0123] like Figure 6 As shown, in some embodiments, the driving flange 410 and the valve body 200 may also include bolt holes (not shown in the figure) to fix the driving flange 410 and the valve body 200. At least one vacuum chamber sealing mechanism 140 (e.g. Figure 7 The vacuum chamber sealing mechanism 140 shown is sealed and fixedly connected to the chamber flange 510.

[0124] like Figure 7 As shown, in some embodiments of the present disclosure, at least one vacuum chamber may include a first vacuum chamber 520 and a second vacuum chamber 530. The first vacuum chamber 520 may include a first chamber flange 521. The second vacuum chamber 530 may include a second chamber flange 531. The valve body 200 may include a first butt flange 210 and a second butt flange 220 that are disposed opposite to each other. At least one vacuum chamber sealing mechanism 140 may include a first vacuum chamber sealing mechanism 141 and a second vacuum chamber sealing mechanism 142. A sealing gasket 1411 of the first vacuum chamber sealing mechanism is disposed between the first chamber flange 521 and the first butt flange 210. At least one sealing surface of the first vacuum chamber sealing mechanism 141 includes a sealing surface of the first chamber flange 521 opposite to the first butt flange 210 and / or a sealing surface of the first butt flange 210 opposite to the first chamber flange 521. A sealing gasket 1421 of the second vacuum chamber sealing mechanism is disposed between the second chamber flange 531 and the second butt flange 220. At least one sealing surface of the second vacuum chamber sealing mechanism 142 includes a sealing surface where the second chamber flange 531 is opposite to the second mating flange 220 and / or a sealing surface where the second mating flange 220 is opposite to the second chamber flange 531 .

[0125] like Figure 7 As shown, according to some embodiments of the present disclosure, the vacuum sealing valve 1000 (for example, Figure 5 The vacuum sealing valve 1000 shown in the figure can be installed between the first vacuum chamber 520 and the second vacuum chamber 530 to achieve the connection between the two vacuum chambers, namely the first vacuum chamber 520 and the second vacuum chamber 530.

[0126] The sealing mechanism, vacuum sealing valve and vacuum sealing system of some embodiments of the present disclosure can avoid the strict requirements of the planar sealing structure on the stability of the equipment operating environment, and prevent the failure of sealing due to uneven thermal expansion and contraction of the flange and the sealing gasket, ground subsidence of the equipment site, and resonance of the surrounding environment after sealing.

[0127] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A sealing mechanism, characterized in that: include: At least one sealing surface, the sealing surface comprising an annular blade, the annular blade protrusion being disposed on the sealing surface; Gasket, including: An inner ring of the sealing gasket cooperates with the annular edge of the at least one sealing surface for sealing; as well as The outer ring of the sealing gasket includes at least one protruding structure facing the at least one sealing surface, so as to limit the pressing depth of the annular cutting edge of the at least one sealing surface and the sealing gasket inner ring for sealing.

2. The sealing mechanism according to claim 1, characterized in that: The sealing surface further comprises a sealing surface groove formed around the annular blade, and the sealing surface groove is used for positioning the sealing gasket.

3. The sealing mechanism according to claim 1, characterized in that: The at least one sealing surface includes a first sealing surface, the first sealing surface includes a first annular blade, the first annular blade is protruded on the first sealing surface, the first sealing surface is arranged on a first side of the sealing gasket, the inner ring of the sealing gasket cooperates with the first annular blade on the first side of the sealing gasket for sealing, and the at least one protrusion structure includes a first protrusion structure on the first side of the sealing gasket facing the first sealing surface to limit the pressing depth of the first annular blade and the inner ring of the sealing gasket for sealing.

4. The sealing mechanism according to claim 3, characterized in that: The first protrusion structure comprises: at least one protrusion disposed on the first surface facing the first sealing surface and extending along the circumference of the outer ring of the sealing gasket; or a plurality of protrusions arranged on the first surface facing the first sealing surface and spaced apart along the circumference of the outer ring of the sealing gasket; or The first side of the outer ring of the sealing gasket has a thickness greater than that of the inner ring of the sealing gasket and protrudes from the inner ring of the sealing gasket toward the first sealing surface, so that the first side of the outer ring of the sealing gasket forms the first protrusion structure.

5. The sealing mechanism according to claim 3, characterized in that: The at least one sealing surface further comprises a second sealing surface, the second sealing surface is arranged on a second side of the sealing gasket relative to the first side of the sealing gasket, the second sealing surface comprises a second annular blade, and the second annular blade protrusion is arranged on the second sealing surface.

6. The sealing mechanism according to claim 5, characterized in that: The inner ring of the sealing gasket cooperates with the second annular cutting edge on the second side of the sealing gasket for sealing, and the at least one protruding structure includes a second protruding structure on the second side of the sealing gasket facing the second sealing surface to limit the pressing depth of the second annular cutting edge and the inner ring of the sealing gasket for sealing.

7. The sealing mechanism according to claim 6, characterized in that: The second protrusion structure comprises: at least one protrusion disposed on the second surface facing the second sealing surface and extending along the circumference of the outer ring of the sealing gasket; or a plurality of protrusions arranged on the second surface facing the second sealing surface and spaced apart along the circumference of the outer ring of the sealing gasket; or The second side of the outer ring of the sealing gasket has a thickness greater than that of the inner ring of the sealing gasket and protrudes from the inner ring of the sealing gasket toward the second sealing surface, so that the second side of the outer ring of the sealing gasket forms the second protrusion structure.

8. A vacuum sealing valve, characterized in that: include: Valve body; A valve core is arranged in the valve body; A valve core drive device, including a drive flange; as well as According to the sealing mechanism according to any one of claims 1 to 7, The sealing gasket of the sealing mechanism is arranged between the driving flange and the valve body, and at least one sealing surface of the sealing mechanism includes a sealing surface of the driving flange opposite to the valve body and / or a sealing surface of the valve body opposite to the driving flange.

9. A vacuum sealing system, characterized in that: include: at least one vacuum chamber, the vacuum chamber comprising a chamber flange; Valve body; A valve core is arranged in the valve body; a valve core drive assembly including a drive flange; and at least one sealing mechanism according to any one of claims 1 to 7, the at least one sealing mechanism comprising a valve sealing mechanism and at least one vacuum chamber sealing mechanism, The sealing gasket of the valve sealing mechanism is arranged between the driving flange and the valve body, and at least one sealing surface of the valve sealing mechanism includes a sealing surface of the driving flange opposite to the valve body and / or a sealing surface of the valve body opposite to the driving flange. The sealing gasket of the at least one vacuum chamber sealing mechanism is respectively arranged between the cavity flange of the at least one vacuum chamber and the valve body, and at least one sealing surface of the vacuum chamber sealing mechanism includes a sealing surface opposite to the cavity flange and the valve body and / or a sealing surface opposite to the valve body and the cavity flange.

10. The vacuum sealing system according to claim 9, characterized in that: The at least one vacuum chamber comprises: A first vacuum chamber, comprising a first chamber flange; A second vacuum chamber, comprising a second chamber flange; The valve body comprises a first butt flange and a second butt flange which are arranged opposite to each other; and The at least one vacuum chamber sealing mechanism includes a first vacuum chamber sealing mechanism and a second vacuum chamber sealing mechanism, the sealing gasket of the first vacuum chamber sealing mechanism is arranged between the first chamber flange and the first docking flange, at least one sealing surface of the first vacuum chamber sealing mechanism includes the sealing surface of the first chamber flange opposite to the first docking flange and / or the sealing surface of the first docking flange opposite to the first chamber flange, the sealing gasket of the second vacuum chamber sealing mechanism is arranged between the second chamber flange and the second docking flange, and at least one sealing surface of the second vacuum chamber sealing mechanism includes the sealing surface of the second chamber flange opposite to the second docking flange and / or the sealing surface of the second docking flange opposite to the second chamber flange.

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