Needle changing device of atomic force microscope

Abstract

The utility model discloses an atomic force microscope needle changing device which comprises a substrate, a moving assembly and a micro-clamping assembly, the substrate is arranged on a working platform, the moving assembly used for controlling the micro-clamping assembly to move is arranged on the substrate, the micro-clamping assembly is connected with the moving assembly, and the micro-clamping assembly is arranged on the substrate. The micro-clamping assembly controllably moves in the X direction, the Y direction and the Z direction under the action of the moving assembly, and the micro-clamping assembly controllably clamps and disassembles the probe. The probe clamping device has the advantages that the movable clamping block and the fixed clamping block in the micro-clamping assembly are driven by the micro-clamping moving assembly to be accurately matched, so that stable clamping of the probe is achieved, after the probe is clamped, the micro-clamping assembly flexibly and accurately displaces in the space through the synergistic effect of the X-direction moving assembly, the Y-direction moving assembly and the Z-direction moving assembly, and therefore the probe is rapidly disassembled and assembled. The device is simple in overall structure, convenient to operate and high in practicability, and improves the working efficiency and accuracy.

Description

Technical Field

[0001] The utility model specifically relates to a needle changing device for an atomic force microscope. Background Art

[0002] In the semiconductor industry, during the processing from wafer to chip, the wafer needs to undergo various processing and preparation processes, including lithography, etching, sputtering, grinding, polishing, etc. In order to improve the chip yield, various measurement and characterization equipment are needed to perform online detection of the wafer and optimize the processing and preparation process. The atomic force microscope is a precision measurement device that uses the mechanical force between the probe tip and the surface of the sample as feedback to perform three-dimensional imaging of the surface morphology of the sample being measured. At the same time, the atomic force microscope also has the function of characterizing mechanical properties and electrical properties, and is an important measurement and characterization equipment in the wafer processing and preparation process.

[0003] The probe plays a vital role in the atomic force microscope. During use, the probe will frequently contact and rub against the sample surface, causing wear and deformation of the probe tip. Over time, this wear will gradually accumulate, affecting the performance and measurement accuracy of the probe. Therefore, in order to ensure the detection quality and measurement accuracy, the probe needs to be replaced when it is worn.

[0004] There are currently two ways to replace the probe. One is to directly replace the probe by manually operating tweezers. The success rate of this method is related to the operator's operating experience and the selection of tweezers. It is inefficient, has many uncontrollable factors, and has a poor repetition rate. The other way is to replace the probe by operating the equipment. Compared with the first method, this method has a high repetition rate and strong controllability, and is the most widely used in industry.

[0005] The Chinese patent 202022614860.8 is named: A needle changing device for an atomic force microscope, which records a needle changing seat with a needle changing groove, characterized in that a probe seat with an inwardly recessed storage groove is provided in the needle changing groove, a plurality of probe clips slidably connected to the storage groove are provided in the storage groove, a probe storage channel with a circular cross-section is horizontally arranged in the probe clip, two probe clamping mechanisms symmetrically arranged along the center line of the probe storage channel are provided in the probe storage channel, a horizontally arranged probe outlet is also provided on the upper side of the side wall of the probe seat, a plurality of horizontally arranged probe inlets are also provided on the side wall of the probe seat away from the probe outlet, the probe inlet is connected to the probe storage channel, a probe clip driving groove is also provided at the bottom of the storage groove, and the probe clip driving groove passes through the probe seat in the vertical direction, a lifting slide groove adapted to the probe clip is provided at the top of the needle changing groove, a probe fixing assembly is provided on the side of the needle changing groove close to the probe outlet, a needle changing mechanism is provided on the side of the needle changing groove close to the uppermost probe inlet, and a probe clip lifting mechanism is also provided at the bottom of the needle changing seat.

[0006] As shown in the accompanying drawings of patent 202022614860.8, the patent focuses on the design of a storage slot for placing probes. A recessed storage slot and a plurality of probe clamps that slide with the storage slot are designed in the storage slot. The probe clamp is provided with a probe storage channel with a circular cross-section. The storage channel is provided with two probe clamping mechanisms symmetrically arranged along the center line of the probe channel. The needle is exchanged by means of a needle exchange mechanism, a probe clamp lifting mechanism and a probe seat. In principle, the needle exchange action can be realized, but the mechanism design is complex, the operation is cumbersome, and the practicality is not high. It is not suitable for replacing probes of a piezoresistive self-sensing atomic force microscope used for online measurement and characterization of wafers. Utility Model Content

[0007] The technical problem to be solved by the utility model is that the existing atomic force microscope probe mentioned in the background technology is inconvenient to replace and the existing needle replacement device has a complex structure and poor practicality.

[0008] In view of the above technical problems, an atomic force microscope needle replacement device is proposed; it is achieved by the following technical scheme: an atomic force microscope needle replacement device, including a substrate, a moving component and a micro-clamp component, the substrate is arranged on a working platform, the moving component for controlling the movement of the micro-clamp component is arranged on the substrate, the micro-clamp component is controllably movable along the X, Y, and Z directions under the action of the moving component, the micro-clamp component is connected to the moving component, and the micro-clamp component can controllably clamp and disassemble the probe.

[0009] In the utility model, the micro-clamp moving assembly is used to drive the moving clamp block and the fixed clamp block in the micro-clamp assembly to cooperate to clamp the probe, and the X-direction moving assembly, the Y-direction moving assembly and the Z-direction moving assembly are used to drive the micro-clamp assembly to move freely along the X, Y and Z directions, and the micro-clamp assembly is controlled to move in space, so as to realize the rapid disassembly and assembly of the probe, and the structure is simple and the operation is convenient.

[0010] In the preferred embodiment of the technical solution of the utility model, the moving component includes an X-direction moving component, a Y-direction moving component, a Z-direction moving component and a micro-clamp moving component. The X-direction moving component is arranged on a substrate, the Y-direction moving component is connected to the X-direction moving component, the Z-direction moving component is connected to the Y-direction moving component, and the micro-clamp moving component is connected to the Z-direction moving component. The X-direction moving component drives the Y-direction moving component, the Z-direction moving component and the micro-clamp moving component to move in the X direction, the Y-direction moving component drives the Z-direction moving component and the micro-clamp moving component to move in the Y direction, and the Z-direction moving component drives the micro-clamp moving component to move in the Z direction. The arrangement of the X-direction moving component, the Y-direction moving component and the Z-direction moving component facilitates the micro-clamp moving component to move freely in space, and facilitates the movement of the micro-clamp assembly toward the probe. The arrangement of the micro-clamp moving component facilitates the control of the opening and closing of the fixed clamping block and the movable clamping block in the micro-clamping component, facilitates the precise clamping of the probe, and is easy to use.

[0011] Preferably, the X-axis moving assembly comprises an X-axis moving plate and an X-axis fixed plate, the X-axis fixed plate is arranged on the base plate, the X-axis moving plate is movably arranged on the X-axis fixed plate, a guide rail is arranged between the X-axis moving plate and the X-axis fixed plate, the X-axis moving plate is controllably movable relative to the X-axis fixed plate through the guide rail, the arrangement of the X-axis moving plate and the X-axis fixed plate facilitates the movement of the X-axis moving plate, thereby driving the micro-clamp assembly to move in the X direction, and facilitating the disassembly and assembly of the probe.

[0012] In the preferred embodiment of the technical solution of the utility model, an XY connecting plate is arranged between the X-direction moving component and the Y-direction moving component, and the XY connecting plate is respectively connected to the Y-direction fixed plate in the Y-direction moving component and the X-direction moving plate in the X-direction moving component. The arrangement of the XY connecting plate facilitates the connection between the X-direction moving component and the Y-direction moving component and is easy to use.

[0013] In the preferred embodiment of the technical solution of the utility model, a YZ connecting plate is arranged between the Y-axis moving component and the Z-axis moving component, and the YZ connecting plate respectively connects the Y-axis moving plate in the Y-axis moving component and the Z-axis fixed plate in the Z-axis moving component. The arrangement of the YZ connecting plate facilitates the connection between the Y-axis moving component and the Z-axis moving component.

[0014] In the preferred embodiment of the technical solution of the utility model, a micro-clamp mounting plate is arranged between the micro-clamp moving assembly and the Z-axis moving assembly. The micro-clamp mounting plate is respectively connected to the micro-clamp fixed plate in the micro-clamp moving assembly and the Z-axis moving plate in the Z-axis moving assembly. The setting of the micro-clamp mounting plate facilitates the installation of the micro-clamp moving assembly.

[0015] Preferably, the micro-clamp assembly includes a fixed clamp block and a movable clamp block. The fixed clamp block is arranged on a micro-clamp movable plate inside the micro-clamp movable assembly in the movable assembly. The movable clamp block is arranged on the micro-clamp movable plate inside the micro-clamp movable assembly. The interval between the movable clamp block and the fixed clamp block is adjustable through the micro-clamp movable assembly. The arrangement of the micro-clamp assembly enables the clamping of the probe to be achieved through the movement and coordination between the fixed clamp block and the movable clamp block, thereby facilitating the disassembly of the probe.

[0016] Preferably, at the mounting ends of the fixed clamp block and the movable clamp block, a chuck for clamping the probe is detachably provided, a pressure sensor is provided on the chuck, and the interval between the two chucks is adjustable through a micro-clamp moving assembly. The setting of the pressure sensor facilitates sensing the degree of clamping of the probe through the pressure sensor, thereby ensuring the stability of the probe disassembly.

[0017] Preferably, the fixed clamp block and the movable clamp block are provided with wiring holes, and the wires in the pressure sensor are placed in the fixed clamp block and the movable clamp block through the wiring holes. A sealing plate is detachably provided on the fixed clamp block and the movable clamp block, and the sealing plate closes the wiring hole. The setting of the wiring hole facilitates the arrangement of the wires in the pressure sensor and is easy to use.

[0018] Compared with the prior art, the utility model has the following beneficial effects:

[0019] The technical solution of the utility model utilizes a micro-clamp moving component to drive the precise cooperation between the moving clamp block and the fixed clamp block in the micro-clamp component, thereby realizing stable clamping of the probe; after the probe is clamped, the X-axis moving component, the Y-axis moving component and the Z-axis moving component work together to enable the micro-clamp component to be flexibly and accurately displaced in space, thereby completing the rapid disassembly and assembly of the probe; the overall structure is simple, the operation is convenient, the practicability is strong, and the work efficiency and accuracy are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional schematic diagram of the utility model;

[0021] Figure 2 It is a partial cross-sectional view of the X-axis moving component;

[0022] Figure 3 Exploded view of mobile components;

[0023] Figure 4 A three-dimensional diagram of the micro-clip assembly Figure 1 ;

[0024] Figure 5 A three-dimensional diagram of the micro-clip assembly Figure 2 ;

[0025] Figure 6 This is an exploded view of the micro-clip assembly;

[0026] FIG. 7 is a schematic diagram of the motion process of this embodiment ( Figure 7a This is a schematic diagram of the micro-gripper assembly moving under the optical microscope. Figure 7b This is a schematic diagram of the chuck holding the probe. Figure 7c Schematic diagram for removing the probe);

[0027] Figure 8 This is an exploded view of this embodiment;

[0028] Explanation of the accompanying drawings: 1-substrate, 2-X-direction moving assembly, 21-X-direction moving plate, 22-X-direction fixed plate, 23-guide rail, 24-in-line needle bearing, 25-limit screw, 3-Y-direction moving assembly, 31-Y-direction moving plate, 32-Y-direction fixed plate, 33-XY connecting plate, 4-Z-direction moving assembly, 41-Z-direction fixed plate, 42-Z-direction moving plate, 43-YZ connecting plate, 44-micro-clamp mounting plate, 5-micro-clamp moving assembly, 51-micro-clamp fixed plate, 52-micro-clamp moving plate, 6-micro-clamp assembly, 61-fixed clamp block, 62-moving clamp block, 63-sealing plate, 64-first fixed plate, 65-wiring hole, 66-second fixed plate, 67-chuck, 7-probe, 8-probe mounting seat, 9-optical mirror. DETAILED DESCRIPTION

[0029] The following will be combined with the attached embodiment of the utility model Figure 1-8 , the technical solutions in the embodiments of the utility model are described in detail. Example

[0030] like Figure 1 and 8 As shown, an atomic force microscope needle replacement device includes a substrate 1, a moving component and a micro-clamping component 6. The substrate 1 is arranged on a working platform, and the moving component is arranged on the substrate 1. The moving component can be controllably moved in space along the X, Y, and Z directions relative to the substrate 1. The micro-clamping component 6 for clamping and removing the probe 7 is connected to the moving component. The micro-clamping component 6 can be controllably moved along the X, Y, and Z directions under the action of the moving component.

[0031] The substrate 1 is a metal plate with a rectangular cross section. The substrate 1 mainly serves as a carrier for installing the mobile component. A circular mounting hole is opened on the substrate 1, and the substrate 1 is fixed to the workbench by screws through the mounting hole.

[0032] like Figure 1 , 2 As shown in , 3 and 8, the moving assembly includes an X-axis moving assembly 2, a Y-axis moving assembly 3, a Z-axis moving assembly 4 and a micro-clamp moving assembly 5. The X-axis moving assembly 2 is arranged on the substrate 1, the Y-axis moving assembly 3 is connected to the X-axis moving assembly 2 through an XY connecting plate 33, the Z-axis moving assembly 4 is connected to the Y-axis moving assembly 3 through a YZ connecting plate 43, and the micro-clamp moving assembly 5 is connected to the Z-axis moving assembly 4 through a micro-clamp mounting plate 44.

[0033] The X-axis moving component 2 is a linear motor driven by electric power and magnetic field. The main function of the X-axis moving component 2 is to drive the Y-axis moving component 3, the Z-axis moving component 4 and the micro-clamp moving component 5 to move along the X-axis direction. The X-axis moving component 2 includes an X-axis moving plate 21 and an X-axis fixed plate 22. The X-axis moving plate 21 is the moving end of the linear motor, and the X-axis fixed plate 22 is the fixed end of the linear motor. When the device is powered on, the X-axis moving plate 21 moves relative to the X-axis fixed plate 22.

[0034] The X-axis fixed plate 22 and the X-axis movable plate 21 are rectangular as a whole. The X-axis fixed plate 22 is fixed on the base plate 1 by screws. The X-axis movable plate 21 and the X-axis fixed plate 22 have the same size. In order to facilitate the movement of the X-axis movable plate 21 relative to the X-axis fixed plate 22, two rectangular mounting strips are protruding outwardly along the X-axis direction perpendicular to the X-axis fixed plate 22 on both sides of the upper surface of the X-axis fixed plate 22. A guide rail 23 is fixed on the inner side of each mounting strip by screws. The length of the guide rail 23 is the same as the length of the X-axis fixed plate 22.

[0035] In order to facilitate the movement of the X-axis moving plate 21 relative to the X-axis fixed plate 22, two guide rails 23 are fixed to the lower surface of the X-axis moving plate 21 with screws. The guide rails 23 extend in the X-direction on the X-axis moving plate 21, and the two guide rails 23 are distributed at intervals, and are parallel and horizontally distributed corresponding to the two guide rails 23 on the X-direction fixed plate 22. In addition, in order to facilitate the sliding of the X-axis moving plate 21 and the X-direction fixed plate 22 relative to the guide rails 23, a certain gap is left between the guide rails 23 on the X-axis moving plate 21 and the guide rails 23 on the X-direction fixed plate 22, and a straight-row needle roller bearing 24 is inserted in the gap. When the equipment is powered on, the X-axis moving plate 21 moves relative to the X-direction fixed plate 22 under the guidance of the straight-row needle roller bearings 24 and the guide rails 23.

[0036] The guide rail 23 is a metal strip with a rectangular cross section. A slide groove is concave in the side of the guide rail 23 perpendicular to the guide rail 23 , and one side of the in-line needle roller bearing 24 is placed in the slide groove.

[0037] In order to prevent the in-line needle roller bearing 24 from falling off from the gap between the two guide rails 23 during the sliding process of the guide rails 23, a limit screw 25 is screwed on both ends of the guide rail 23. The diameter of the limit screw 25 is slightly larger than the cross-sectional area of ​​the guide rail 23, and the interval between the limit screws 25 between two adjacent guide rails 23 is smaller than the size of the in-line needle roller bearing 24, thereby preventing the in-line needle roller bearing 24 from falling off during use.

[0038] Definition: With substrate 1 as the reference, the direction pointing to the working platform is downward, and the direction opposite to it is upward.

[0039] Linear motors are a technology well known to those skilled in the art and can be used directly, so they will not be described in detail here.

[0040] The Y-axis moving component 3 is the same as the X-axis moving component 2, and both are linear motors driven by electric power and magnetic field. The Y-axis moving component 3 includes a Y-axis moving plate 31 and a Y-axis fixed plate 32. A guide rail 23 is arranged between the Y-axis moving plate 31 and the Y-axis fixed plate 32. At the same time, a straight-row needle roller bearing 24 is placed between two adjacent guide rails 23. When the equipment is powered on, the Y-axis moving plate 31 can move relative to the Y-axis fixed plate 32.

[0041] In order to facilitate the connection between the X-axis moving component 2 and the Y-axis moving component 3, an XY connecting plate 33 is provided between the X-axis moving component 2 and the Y-axis moving component 3. The cross section of the XY connecting plate 33 is a "convex" shape. The lower surface of the XY connecting plate 33 is connected to the X-axis moving plate 21 in the X-axis moving component 2 by screws, and the upper surface of the XY connecting plate 33 is connected to the Y-axis fixed plate 32 in the Y-axis moving component 3 by screws. The Y-axis fixed plate 32 and the X-axis moving plate 21 are distributed at 90°, that is, the moving direction of the X-axis moving component 2 points to the X-axis direction, and the moving direction of the Y-axis moving component 3 points to the Y-axis direction.

[0042] The Z-axis moving component 4 is the same as the Y-axis moving component 3 and the X-axis moving component 2. The whole is a linear motor driven by electric power and magnetic field. The Z-axis moving component 4 includes a Z-axis moving plate 42 and a Z-axis fixed plate 41. A guide rail 23 is arranged between the Z-axis moving plate 42 and the Z-axis fixed plate 41. At the same time, a straight-row needle roller bearing 24 is placed between two adjacent guide rails 23. When the equipment is powered on, the Z-axis moving plate 42 can move relative to the Z-axis fixed plate 41.

[0043] In order to facilitate the connection between the Z-axis moving component 4 and the Y-axis moving component 3, a YZ connecting plate 43 is fixed to the Y-axis moving plate 31 of the Y-axis moving component 3 with screws. The main function of the YZ connecting plate 43 is to connect the Z-axis moving component 4 and the Y-axis moving component 3. The YZ connecting plate 43 is an "L"-shaped metal angle plate. The two mutually perpendicular metal plates of the YZ connecting plate 43 are respectively connected to the Y-axis moving plate 31 and the Z-axis fixed plate 41 with screws.

[0044] In order to facilitate the installation of the micro-clamp moving component 5, a micro-clamp mounting plate 44 is fixed to the back of the Z-axis moving plate 42 with screws. The micro-clamp mounting plate 44 is a rectangular metal plate. A rectangular mounting plate is welded on the surface of the micro-clamp mounting plate 44 perpendicular to the micro-clamp mounting plate 44. The mounting plate is vertically distributed to the micro-clamp mounting plate 44, and the micro-clamp moving component 5 is fixed to the mounting plate with screws.

[0045] The micro-clamp moving assembly 5 is a linear motor driven by electric power and magnetic field. The micro-clamp moving assembly 5 includes a micro-clamp fixed plate 51 and a micro-clamp movable plate 52. When the equipment is powered on, the micro-clamp movable plate 52 can move relative to the micro-clamp fixed plate 51, driving the movable clamp block 62 on the micro-clamp assembly 6 to move, thereby completing the clamping of the probe, thereby implementing the disassembly and assembly of the probe. The micro-clamp fixed plate 51 is connected to the rectangular mounting plate on the micro-clamp mounting plate 44 by screws.

[0046] In order to facilitate the movement of the micro-clamping plate 52 relative to the micro-clamping plate 51, two parallel guide rails 23 are fixed on the micro-clamping plate 51 with screws. The interval between the two guide rails 23 is slightly larger than the width of the micro-clamping plate 51, and there is a certain gap between the two. A straight-row needle roller bearing 24 is inserted in the gap. The micro-clamping plate 52 moves relative to the micro-clamping plate 51 along the straight-row needle roller bearing 24 and the guide rail 23. In order to facilitate the placement of the straight-row needle roller bearing 24, a groove is concave along the length of the micro-clamping plate 51 on the side opposite to the guide rail 23. The straight-row needle roller bearing 24 is placed in a cavity formed by the groove on the guide rail 23 and the groove on the micro-clamping plate 51.

[0047] like Figure 3 , 4As shown in Figures 5 and 6, the micro-clamp assembly 6 includes a fixed clamp block 61 and a movable clamp block 62. The fixed clamp block 61 is installed on the guide rail 23 in the micro-clamp moving assembly 5, and the movable clamp block 62 is installed on the micro-clamp moving plate 52 in the micro-clamp moving assembly 5. By moving the micro-clamp moving plate 52 relative to the micro-clamp fixed plate 51, the opening and closing of the fixed clamp block 61 and the movable clamp block 62 can be controlled to achieve the clamping of the probe.

[0048] The fixed clamp block 61 and the movable clamp block 62 are "J"-shaped blocks formed by bending a metal strip with a rectangular cross section. A gap for arranging wires is left between the two vertical arms of the fixed clamp block 61 and the movable clamp block 62, and this gap is named a wiring hole.

[0049] In order to facilitate the fixation of the fixed clamp block 61, two rectangular fixing blocks are welded on the shorter arm of the fixed clamp block 61 at intervals perpendicular to the fixed clamp block 61. These fixing blocks are named second fixing blocks 66. The two second fixing blocks 66 correspond to the positions of the guide rails 23 on the micro-clamping plate 51 respectively. At the same time, threaded holes are opened on the surfaces of the second fixing blocks 66, and the fixed clamp block 61 can be fixed to the end of the guide rail 23 on the micro-clamping plate 51 by screws.

[0050] In order to facilitate the fixation of the movable clamp block 62, a rectangular fixed block is welded on the shorter arm of the movable clamp block 62 perpendicular to the movable clamp block 62, and this fixed block is named the first fixed block 64. The position of the first fixed block 64 corresponds to the end of the micro-clamping movable plate 52, and the two are fixed together by screws. When the micro-clamping movable plate 52 in the micro-clamping moving assembly 5 moves, it can drive the movable clamp block 62 to move.

[0051] In order to facilitate the clamping of the probe 7, a clamp 67 is fixed to the ends of the fixed clamp block 61 and the movable clamp block 62 with screws. In order to facilitate clamping in a small space, the cross-section of the clamp 67 is triangular, and the smaller end of the clamp 67 contacts the probe 7 first.

[0052] In order to prevent the chuck 67 from damaging the probe 7, the entire material of the chuck 67 is preferably rubber, and in order to facilitate the control of the clamping force, a pressure sensor is embedded in the chuck 67. The clamping force of the chuck 67 can be accurately controlled by the pressure sensor. In order to facilitate the arrangement of the pressure sensor wires, the pressure sensor wires are connected to the control board through the wiring hole 65.

[0053] In addition, in order to close the wiring holes 65 on the fixed clamp block 61 and the movable clamp block 62 to prevent the wires in the wiring holes 65 from falling off, a sealing plate 63 is fixed to the fixed clamp block 61 and the movable clamp block 62 with screws, and the sealing plate 63 covers the wiring holes 65 to prevent the wires in the wiring holes 65 from falling off.

[0054] The use process of this embodiment: when changing the needle, first operate the moving assembly to move the micro-clamp assembly 6 to the bottom of the optical mirror 9. Figure 7a, align the clamp 67 with the probe 7, and then control the movable clamp block 62 to move by the micro-clamp moving assembly 5, and use the clamp 67 to clamp the probe 7. Figure 7b After clamping, the Y-axis moving assembly 3 moves along the Y-axis direction to remove the old probe 7 from the probe mounting seat 8. Figure 7c ;

[0055] When installing the needle, first use the chuck 67 to clamp the new probe 7, then operate the moving assembly to move the micro-clamp assembly 6 to the bottom of the optical mirror 9 in the atomic force microscope, align the probe 7 with the probe mounting seat 8, and then move the Y-axis moving assembly 3 along the Y-axis direction to insert the new probe 7 into the probe mounting seat 8 to complete the needle installation action.

[0056] The above embodiments are only for illustrating the technical idea of ​​the present utility model, and cannot be used to limit the protection scope of the present utility model. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present utility model shall fall within the protection scope of the present utility model.

Claims

1. An atomic force microscope needle changing device, characterized in that: The invention comprises a substrate (1), a moving component and a micro-clamping component (6), wherein the substrate (1) is arranged on a working platform, the moving component for controlling the movement of the micro-clamping component (6) is arranged on the substrate (1), the micro-clamping component (6) is connected to the moving component, the micro-clamping component (6) is controllably movable along the X, Y and Z directions under the action of the moving component, and the micro-clamping component (6) is controllably clamped to disassemble a probe (7).

2. The needle changing device for an atomic force microscope according to claim 1, characterized in that: The moving assembly comprises an X-axis moving assembly (2), a Y-axis moving assembly (3), a Z-axis moving assembly (4) and a micro-clamp moving assembly (5); the X-axis moving assembly (2) is arranged on a substrate (1); the Y-axis moving assembly (3) is connected to the X-axis moving assembly (2); the Z-axis moving assembly (4) is connected to the Y-axis moving assembly (3); and the micro-clamp moving assembly (5) is connected to the Z-axis moving assembly (4); the X-axis moving assembly (2) drives the Y-axis moving assembly (3), the Z-axis moving assembly (4) and the micro-clamp moving assembly (5) to move in the X-axis; the Y-axis moving assembly (3) drives the Z-axis moving assembly (4) and the micro-clamp moving assembly (5) to move in the Y-axis; and the Z-axis moving assembly (4) drives the micro-clamp moving assembly (5) to move in the Z-axis.

3. The needle changing device for an atomic force microscope according to claim 2, characterized in that: The X-direction moving assembly (2) comprises an X-direction moving plate (21) and an X-direction fixed plate (22); the X-direction fixed plate (22) is arranged on the base plate (1); the X-direction moving plate (21) is movably arranged on the X-direction fixed plate (22); a guide rail (23) is arranged between the X-direction moving plate (21) and the X-direction fixed plate (22); the X-direction moving plate (21) is controllably movable relative to the X-direction fixed plate (22) via the guide rail (23).

4. The needle changing device for an atomic force microscope according to claim 2, characterized in that: An XY connecting plate (33) is provided between the X-direction moving assembly (2) and the Y-direction moving assembly (3), and the XY connecting plate (33) is respectively connected to a Y-direction fixed plate (32) in the Y-direction moving assembly (3) and an X-direction moving plate (21) in the X-direction moving assembly (2).

5. The needle changing device for an atomic force microscope according to claim 2, characterized in that: A YZ connecting plate (43) is provided between the Y-direction moving assembly (3) and the Z-direction moving assembly (4), and the YZ connecting plate (43) is respectively connected to the Y-direction moving plate (31) in the Y-direction moving assembly (3) and the Z-direction fixed plate (41) in the Z-direction moving assembly (4).

6. The needle changing device for an atomic force microscope according to claim 2, characterized in that: A micro-clamp mounting plate (44) is provided between the micro-clamp moving assembly (5) and the Z-direction moving assembly (4), and the micro-clamp mounting plate (44) is respectively connected to the micro-clamp fixed plate (51) in the micro-clamp moving assembly (5) and the Z-direction moving plate (42) in the Z-direction moving assembly (4).

7. The needle changing device for an atomic force microscope according to claim 1, characterized in that: The micro-clamping assembly (6) comprises a fixed clamping block (61) and a movable clamping block (62); the fixed clamping block (61) is arranged on a micro-clamping movable plate (52) in a micro-clamping movable assembly (5) in the movable assembly; the movable clamping block (62) is arranged on a micro-clamping movable plate (52) in the micro-clamping movable assembly (5); and the interval between the movable clamping block (62) and the fixed clamping block (61) is adjustable via the micro-clamping movable assembly (5).

8. The needle changing device for an atomic force microscope according to claim 7, characterized in that: A clamp (67) for clamping the probe (7) is detachably provided at the mounting ends of the fixed clamp block (61) and the movable clamp block (62), a pressure sensor is provided on the clamp (67), and the interval between the two clamps (67) is adjustable via a micro-clamp moving assembly (5).

9. The needle changing device for an atomic force microscope according to claim 8, characterized in that: The fixed clamp block (61) and the movable clamp block (62) are provided with wiring holes (65), and the wires in the pressure sensor are placed in the fixed clamp block (61) and the movable clamp block (62) through the wiring holes (65). The fixed clamp block (61) and the movable clamp block (62) are detachably provided with sealing plates (63), and the sealing plates (63) close the wiring holes (65).

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