Novel mask plate code scanning device

Abstract

The utility model discloses a novel mask plate code scanning device, which comprises a device base, a code reader, a mask plate correction table, a positioning cylinder and a clamping jaw, the code reader is arranged above the device base, the mask plate correction table is arranged on the clamping jaw, the positioning cylinder is fixedly arranged on the device base, and the clamping jaw is arranged on the device base. The clamping jaw is fixedly installed on the positioning air cylinder. According to the utility model, an air cylinder required by forward and backward movement of the code reader is omitted, the air cylinder movement time required by two-time code reading is saved, the data combination time required by two-time code reading is solved, the bar code reading time is greatly shortened, the complexity of an execution mechanism is reduced, and the device cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of mask code scanning, in particular to a novel mask code scanning device. Background Art

[0002] With the vigorous development of semiconductor industry technology and the increasing demand for production capacity in the semiconductor chip industry, improving the working efficiency of lithography machines is becoming increasingly important.

[0003] The mask barcode reading device is used as a photolithography machine to verify whether the barcode information of the mask is the mask that needs to be sent to the mask worktable.

[0004] Previously, the device adopted a segmented reading method for barcode reading, that is, the barcode reader was installed on the driving device of the cylinder in structure, and the barcode scanner was moved to two different reading positions through the two telescopic positions of the cylinder. The disadvantage is that the structure of the barcode reading device is relatively complicated due to the existence of the telescopic cylinder, and the barcode reading needs to be read twice, which takes a long time and has a high manufacturing cost.

[0005] Therefore, how to provide a new type of mask scanning device is a problem that technical personnel in this field need to solve urgently. Utility Model Content

[0006] One purpose of the utility model is to provide a novel mask scanning device, which eliminates the cylinder required for the forward and backward movement of the barcode reader, saves the cylinder movement time required for two barcode readings, and saves the data combination time required for two barcode readings, etc., greatly shortening the barcode reading time, while reducing the complexity of the actuator and reducing the device cost.

[0007] A novel mask scanning device according to an embodiment of the utility model includes a device base, a code reader, a mask correction platform, a positioning cylinder and a clamp, wherein the code reader is located above the device base, the mask correction platform is installed on the clamp, the positioning cylinder is fixedly installed on the device base, and the clamp is fixedly installed on the positioning cylinder.

[0008] Furthermore, an installation hole is provided on the outer surface of the device base.

[0009] Furthermore, the non-telescopic end of the positioning cylinder is fixedly mounted in a mounting hole of the device base.

[0010] Furthermore, eight positioning cylinders are provided, and each two of the eight positioning cylinders form a group, and four groups of the positioning cylinders are respectively installed on four sides of the mask correction platform.

[0011] Furthermore, eight clamps are provided, and each of the eight clamps forms a group of two, and four groups of the clamps are respectively installed on four sides of the mask correction platform.

[0012] The beneficial effects of the utility model are:

[0013] The utility model eliminates the need for the cylinder required for the barcode reader to move back and forth, saves the cylinder movement time required for two barcode readings, and saves the data combination time required for two barcode readings, etc., greatly shortening the barcode reading time, while reducing the complexity of the actuator and reducing the device cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0015] Figure 1 The utility model is a schematic diagram of the overall structure of a novel mask scanning device.

[0016] In the figure: 1. Device base; 2. Code reader; 3. Mask correction table; 4. Positioning cylinder; 5. Clamping claw. DETAILED DESCRIPTION

[0017] Now the utility model is further described in detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the utility model in a schematic manner, and therefore only show the components related to the utility model.

[0018] Please refer to Figure 1 The utility model provides a novel mask scanning device, including a device base 1, a code reader 2, a mask correction platform 3, a positioning cylinder 4 and a clamp 5, wherein the code reader 2 is located above the device base 1, the device base 1 can be installed on other equipment, or a support foot is installed at the bottom of the device base 1, the code reader 2 is used to read the barcode, the mask correction platform 3 is installed on the clamp 5, the clamp 5 clamps the four sides of the mask correction platform 3, the positioning cylinder 4 is fixedly installed on the device base 1, the clamp 5 is fixedly installed on the positioning cylinder 4, and the clamp 5 is used to clamp the mask correction platform 3.

[0019] Specifically, a mounting hole is provided on the outer surface of the device base 1, and the non-retractable end of the positioning cylinder 4 is fixedly installed in the mounting hole of the device base 1. The mounting hole positions the positioning cylinder 4. Eight positioning cylinders 4 are provided, and each of the eight positioning cylinders 4 forms a group of two. The four groups of positioning cylinders 4 are respectively installed on the four sides of the mask correction table 3. The positioning cylinders 4 are used to provide retraction and extension. Eight clamps 5 are provided, and each of the eight clamps 5 forms a group of two. The four groups of clamps 5 are respectively installed on the four sides of the mask correction table 3.

[0020] A mask correction platform 3 is provided above the base 1 of the practical structure device, and positioning cylinders 4 are provided below the platform in the X and Y directions. The output end of the positioning cylinder 4 is connected to a correction clamp 5. After the mask is placed on the mask correction platform 3, the mask is corrected by successively extending and retracting the positioning cylinders 4 in the X and Y directions.

[0021] There is a code reader 2 above the barcode on the mask, the barcode on the entire mask is within the code reading area of ​​the code reader 2, and the mask is placed on a mask correction table 3.

[0022] The action of the positioning cylinder 4 calibrates the mask, and after the correction is completed, the code reader 2 executes the code reading program.

[0023] This method avoids the previous device's use of a segmented reading method for barcode reading, that is, the barcode reader 2 is structurally installed on the cylinder's driving device, and the barcode scanner is moved to two different reading positions through the two telescopic positions of the cylinder. The disadvantage is that the structure of the barcode reading device is relatively complex due to the existence of the telescopic cylinder, and the code reading needs to be read twice, which takes a long time and has a high manufacturing cost. Since the reading is performed in two steps, each code reading needs to wait for the cylinder to move into place, which means that it takes a long time to read the barcode information of a mask, reducing the cycle time of the entire lithography process.

[0024] The utility model greatly shortens the barcode reading time, reduces the complexity of the actuator, and reduces the device cost.

[0025] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A novel mask scanning device, characterized in that: The invention comprises a device base (1), a code reader (2), a mask correction platform (3), a positioning cylinder (4) and a clamp (5), wherein the code reader (2) is located above the device base (1), the mask correction platform (3) is installed on the clamp (5), the positioning cylinder (4) is fixedly installed on the device base (1), and the clamp (5) is fixedly installed on the positioning cylinder (4).

2. The novel mask scanning device according to claim 1 is characterized in that: The outer surface of the device base (1) is provided with a mounting hole.

3. The novel mask scanning device according to claim 1 is characterized in that: The non-telescopic end of the positioning cylinder (4) is fixedly mounted in a mounting hole of the device base (1).

4. The novel mask scanning device according to claim 1, characterized in that: Eight positioning cylinders (4) are provided, and each two of the eight positioning cylinders (4) form a group. Four groups of positioning cylinders (4) are respectively installed on four sides of the mask correction platform (3).

5. The novel mask scanning device according to claim 1, characterized in that: Eight clamping jaws (5) are provided, and two of the eight clamping jaws (5) form a group. Four groups of clamping jaws (5) are respectively installed on four sides of the mask correction platform (3).

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