Processing device

Abstract

The utility model provides processing equipment, which comprises a processing device, the processing device comprises a first module and a second module, the first module is used for carrying out first processing on a to-be-detected object, and the second module is used for carrying out second processing on the to-be-detected object; the first driving module is used for driving the to-be-detected object and the processing device to perform first relative movement along a first axis, and the second driving module is also used for driving the second driving module and the to-be-detected object to perform second relative movement along the first axis. The treatment efficiency of the treatment equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing, in particular to a processing device. Background Art

[0002] In the field of detection equipment, detection equipment often includes multiple working modules, and multiple working modules often require different working conditions (such as different exposure times or different focus heights). In the related art, in order to make each working module meet its detection requirements, different detection modules are often used to detect the object to be detected at different times, which will cause the detection time to increase exponentially and reduce the detection efficiency.

[0003] In the related art, it is difficult to ensure that each detection module can work under the best conditions when multiple detection modules work simultaneously. Utility Model Content

[0004] The present application provides a processing device, which is used to improve the processing efficiency of the processing device.

[0005] The utility model provides a processing device, comprising: a processing device, the processing device comprising a first module and a second module, the first module is used to perform a first processing on an object to be tested, and the second module is used to perform a second processing on the object to be tested; a driving component, the driving component comprising a first driving module and a second driving module, the first driving module is used to drive the object to be tested and the processing device to perform a first relative movement along a first axis, and the second driving module is also used to drive the second module and the object to be tested to perform a second relative movement along the first axis.

[0006] Optionally, the driving component is used to make the relative movement speed between the second module and the object to be measured along the first axis different from the relative movement speed between the first module and the object to be measured along the first axis.

[0007] Optionally, the first driving module is used to drive the object to be tested and the processing device to perform a first relative movement along a first axis, including: the first driving module is used to drive the object to be tested to move along the first axis; and / or the first driving module is used to drive the processing device to move along the first axis.

[0008] Optionally, it further includes: a fixed platform, the fixed platform is used to fix the object to be tested; the first driving module is used to drive the object to be tested to move along the first axis, including: the first driving module is used to drive the fixed platform to move along the first axis.

[0009] Optionally, the first module is a full inspection module, which is used to perform a comprehensive scan on the surface of the object to be tested; the second module is a re-inspection module, which is used to re-inspect the object to be tested according to the detection result of the first module.

[0010] Optionally, the first driving module is used to move the object to be tested relative to the first module along the positive direction of the first axis; when the object to be tested moves relative to the first module along the positive direction of the first axis, the first driving module is used to keep the first module fixed along the first axis when performing a first processing on the object to be tested, and the second driving module is used to move the second module along the positive direction of the first axis during the second processing on the object to be tested; or, when the object to be tested moves relative to the first module along the positive direction of the first axis, the first driving module is used to move the first module along the reverse direction of the first axis when performing a first processing on the object to be tested, and the second driving module is used to keep the second module fixed along the first axis when performing a second processing on the object to be tested.

[0011] Optionally, the first driving module is used to make the object to be tested and the processing device perform a first relative movement along a first axis, and the second driving module is used to perform a second processing on the object to be tested while the second module and the object to be tested are relatively stationary; the first axis is not perpendicular to the surface to be processed of the object to be tested.

[0012] Optionally, the driving component also includes: a third driving module, which is used to drive the object to be tested and the first module to move relative to each other in a direction parallel to the surface to be processed of the object to be tested, so that the first module scans the surface to be processed, and during the scanning process, the first driving module drives the object to be tested to move along the first axis.

[0013] Optionally, the first module and the second module are separated along a second axis in the field of view of the processed surface of the object to be tested; the first driving module is used to drive the object to be tested to move along the first axis according to a first target height along the first axis of the position to be tested of the first module; the second driving module is used to drive the second module to move along the first axis according to a second target height along the first axis of the position to be tested of the second module, and the second axis is perpendicular to the first axis.

[0014] Optionally, it also includes: a height detection module, which is used to obtain the initial height of each position of the processed surface of the object to be tested along the first axis before the first processing and the second processing; the processing equipment also includes: a processing module, which is used to obtain the position of the object to be re-inspected by the second module, and the processing module is also used to obtain the second target height based on the initial height and the moving distance of the first module along the first axis.

[0015] Optionally, the first module is an imaging device, and the second module is an imaging device; the exposure time of the second module is greater than the exposure time of the first module; or the magnification of the second module is greater than the magnification of the first module.

[0016] The technical solution of the utility model has the following advantages:

[0017] In the processing device provided by the technical solution of the utility model, the first driving module is used to drive the object to be tested and the processing device to perform a first relative movement along the first axis, and the second driving module is used to drive the second module and the object to be tested to perform a second relative movement along the first axis. In this way, the first module and the second module can both select their own appropriate movement speeds relative to the object to be tested. In this way, the relative movement speed between the second module and the object to be tested along the first axis is suitable for the processing performance of the second module, and the relative movement speed between the first module and the object to be tested along the first axis is suitable for the processing performance of the first module, so that the second module and the first module can both work under preferred conditions.

[0018] Furthermore, the driving component is used to make the relative movement speed of the second module and the object to be tested along the first axis different from the relative movement speed of the first module and the object to be tested along the first axis, so that the process of the first module performing the first processing on the object to be tested and the process of the second module performing the second processing on the object to be tested have overlapping time, thereby improving the processing efficiency. The relative movement speed of the second module and the object to be tested along the first axis is different from the relative movement speed of the first module and the object to be tested along the first axis, so that the relative movement speed of the second module and the object to be tested along the first axis is suitable for the processing performance of the second module, and the relative movement speed of the first module and the object to be tested along the first axis is suitable for the processing performance of the first module, so that both the second module and the first module can work under preferred conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 This is a schematic diagram of the trajectory of the first module and the second module in one embodiment of the utility model processing the surface of the object to be tested;

[0021] Figure 2 A schematic diagram of the structure of a processing device provided in one embodiment of the utility model;

[0022] Figure 3 A block diagram of a processing device provided in one embodiment of the utility model. DETAILED DESCRIPTION

[0023] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0027] Example 1

[0028] The present invention also provides a processing device according to an embodiment of the present invention. Figure 1 , Figure 2 and Figure 3 ,include:

[0029] A processing device A, the processing device A comprises a first module 2 and a second module 3, the first module 2 is used to perform a first processing on the object to be tested, and the second module 3 is used to perform a second processing on the object to be tested;

[0030] Driving component B, driving component B includes a first driving module and a second driving module, the first driving module is used to drive the object to be tested and the processing device A to perform a first relative movement along the first axis X, and the second driving module is used to drive the second module 3 and the object to be tested to perform a second relative movement along the first axis X, and make the relative movement speed of the second module 3 and the object to be tested along the first axis X different from the relative movement speed of the first module 2 and the object to be tested along the first axis X.

[0031] In the processing device provided in this embodiment, the first driving module is used to drive the object to be tested and the processing device A to perform a first relative movement along the first axis X, and the second driving module is used to drive the second module 3 and the object to be tested to perform a second relative movement along the first axis X, so that the first module 2 and the second module 3 can both select their own appropriate movement speeds relative to the object to be tested. In this way, the relative movement speed of the second module 3 and the object to be tested along the first axis is suitable for the processing performance of the second module 3, and the relative movement speed of the first module 2 and the object to be tested along the first axis is suitable for the processing performance of the first module 2, so that the second module 3 and the first module 2 can both work under optimal conditions.

[0032] In this embodiment, the driving component B is used to make the relative movement speed of the second module 3 and the object to be tested along the first axis X different from the relative movement speed of the first module 2 and the object to be tested along the first axis X, so that the process of the first module 2 performing the first processing on the object to be tested and the process of the second module 3 performing the second processing on the object to be tested have overlapping time, thereby improving the processing efficiency. The relative movement speed of the second module 3 and the object to be tested along the first axis is different from the relative movement speed of the first module 2 and the object to be tested along the first axis, so that the relative movement speed of the second module 3 and the object to be tested along the first axis is suitable for the processing performance of the second module 3, and the relative movement speed of the first module 2 and the object to be tested along the first axis is suitable for the processing performance of the first module 2, so that the second module 3 and the first module 2 can both work under preferred conditions.

[0033] The first driving module is used to drive the object to be tested and the processing device A to move along the first axis relative to each other, including: the first driving module is used to drive the object to be tested to move along the first axis; and / or the first driving module is used to drive the processing device A to move along the first axis X.

[0034] In this embodiment, the processing device further includes: a fixing table, the fixing table is used to fix the object to be tested; the first driving module is used to drive the object to be tested to move along the first axis, including: the first driving module is used to drive the fixing table to move along the first axis.

[0035] In this embodiment, the first axis is parallel to the surface to be measured of the object to be measured.

[0036] In this embodiment, the fixed platform is a carrier platform 1, and the carrier platform 1 is used to carry the object to be tested; the first driving module is used to drive the object to be tested to move along the first axis X, including: the first driving module is used to drive the carrier platform 1 to move along the first axis X. The carrier platform includes: a vacuum chuck, an undulating chuck or an electrostatic chuck.

[0037] In another embodiment, the fixing platform is a clamping member used to clamp the side wall of the object to be tested; the first driving module is used to drive the object to be tested to move along the first axis X, including: the first driving module is used to drive the clamping member to move along the first axis X.

[0038] In this embodiment, the first module 2 is an imaging device, and the second module 3 is an imaging device. In other embodiments, the first module 2 is a combination of one or more detection modules and processing modules. The second module 3 is a combination of one or more detection modules and processing modules. The processing module includes one or more combinations of a photolithography module, an etching module, and a cutting module.

[0039] Specifically, the first processing is to image the object to be tested to detect defects on the surface of the object to be tested through the image; the second processing is to image the object to be tested to detect defects on the surface of the object to be tested through the image. In other embodiments of the present invention, the first processing is to image the object to be tested to measure the target size on the surface of the object to be tested through the image. The second processing is to image the object to be tested to re-inspect the target to be re-inspected on the surface of the object to be tested through the image.

[0040] In this embodiment, the exposure time of the second module 3 is greater than the exposure time of the first module 2. The second module 3 has a second exposure time, the first module 2 has a first exposure time, and the second exposure time is greater than the first exposure time; or, the magnification of the second module 3 is greater than the magnification of the first module 2.

[0041] In this embodiment, the first module 2 is a full inspection module, and the first module 2 is used to perform a comprehensive scan on the surface to be processed of the object to be tested. The second module 3 is a re-inspection module, and the second module 3 is used to re-inspect the object to be tested according to the processing result of the first module. In the process of using the first module 2 to perform the first processing on the object to be tested along the first axis X, the first module 2 is used to perform a comprehensive processing on the surface to be processed, and periodically capture the image of the surface to be processed. The second module 3 is used to re-inspect the object to be tested according to the processing result of the first module 2. Among them, the sensitivity of the second module 3 is higher than that of the first module 2, which is conducive to improving the processing efficiency of the defective area in the object to be tested.

[0042] In this embodiment, the object to be tested is, for example, a wafer. In other embodiments, the object to be tested may also be a chip, an OLED panel, or a mobile phone glass shell.

[0043] In this embodiment, the driving assembly further includes: a third driving module, the third driving module is used to drive the object to be tested and the first module 2 to move relative to each other in a direction parallel to the surface to be processed, so that the first module performs scanning processing on the surface to be processed, and during the scanning processing, the first driving module drives the object to be tested to move along the first axis X. Driving the object to be tested and the first module to move relative to each other in a direction parallel to the surface to be processed includes: making the object to be tested and the first module move relative to each other along the first axis X, and moving the object to be tested along the third axis Y so that the first module and the second module step along the third axis Y, and the third axis Y is perpendicular to the first axis X. The first axis X and the third axis Y are both parallel to the surface to be processed of the object to be tested.

[0044] The third driving module drives the object to be tested and the first module to move relative to each other in a direction parallel to the surface to be processed, including: the third driving module only drives the object to be tested to move, or the third driving module only drives the first module to move, or the third driving module moves both the object to be tested and the first module, but at different moving speeds.

[0045] In this embodiment, the movement track of the first module 2 and the second module 3 is an "S" shape. In other embodiments, the movement track of the first module and the second module includes concentric circles, spirals or straight lines.

[0046] In this embodiment, the first driving module is used to move the object to be tested relative to the first module 2 along the positive direction of the first axis X. Specifically, the first driving module is used to drive the object to be tested to move along the first axis. In other embodiments, the first driving module is used to drive the processing device to move along the first axis, or the first driving module is used to drive the processing device and the object to be tested to move simultaneously.

[0047] In one embodiment, when the object to be tested moves along the positive direction of the first axis relative to the first module 2, the first driving module is used to keep the first module 2 fixed along the first axis X when performing a first processing on the object to be tested, and the second driving module is used to move the second module 3 along the positive direction of the first axis X when performing a second processing on the object to be tested.

[0048] In one embodiment, when the object to be tested moves relative to the first module 2 along the positive direction of the first axis, the first module 2 remains fixed along the first axis when performing the first processing on the object to be tested. The relative moving speed of the first module 2 and the object to be tested along the first axis changes with the moving speed of the object to be tested along the first axis. When the moving speed of the object to be tested along the positive direction of the first axis is small, the relative moving distance of the first module 2 relative to the object to be tested is small (less than one pixel in the image acquired by the first module 2) during the first exposure time, and the first module 2 will not produce errors when the moving speed of the object to be tested changes along the positive direction of the first axis. The first module 2 can completely process the object to be tested under the condition that the carrier or the clamp drives the object to be tested to move along the positive direction of the first axis. In this case, the second module 3 moves along the positive direction of the first axis during the second processing of the object to be tested. The second module 3 rechecks the position to be rechecked of the object to be tested during the movement. The second module 3 moves along the positive direction of the first axis for the same time, so that the movement rate of the second module 3 relative to the object to be tested is less than the movement rate of the first module 2 relative to the object to be tested, and the movement distance of the second module 3 relative to the object to be tested during the second exposure time is reduced, so as to avoid the movement distance of the second module 3 relative to the object to be tested during the second exposure time being greater than one pixel in the image acquired by the second module 3, and to make up for the excessive movement rate of the second module 3 relative to the object to be tested during the second exposure time, which causes an error in integration, and improves the clarity of the image of the defective area captured by the second module 3. Therefore, the first module and the second module can be tested at the same time, which can improve the processing quality while ensuring the image quality.

[0049] In another embodiment, the magnification of the second module 3 is greater than that of the first module 2. The magnification of the first module 2 is relatively small, so the field of view of the first module 2 is relatively large. The magnification of the second module 3 is relatively large, so the field of view of the second module 3 is smaller than the field of view of the first module 2. Correspondingly, when the object to be tested moves relative to the first module 2 along the positive direction of the first axis, the first module 2 remains fixed along the first axis when performing the first processing on the object to be tested, and the second module 3 moves along the positive direction of the first axis during the second processing on the object to be tested. In this way, the area of ​​the object to be tested within the field of view of the second module 3 is maintained as much as possible within the exposure time of one frame of the picture, which makes up for the integral error caused by the smaller field of view of the second module 3, and the second module 3 can better track the position to be re-inspected obtained by the first module 2, which is conducive to improving the accuracy of the processing of the position to be re-inspected of the object to be tested.

[0050] In one embodiment, the exposure time of the second module is greater than the exposure time of the first module, or the magnification of the second module is greater than the magnification of the first module. The first axis is not perpendicular to the surface to be processed of the object to be tested. During the second processing of the object to be tested by the second module, the speed at which the second module moves along the positive direction of the first axis is less than or equal to (v1+n2 / (m2t2)) and greater than or equal to (v1-n2 / (m2t2)); v1 is less than or equal to n1 / (m1t1). v1 is less than or equal to n1 / (m1t1). Wherein, v1 is the moving speed of the object to be tested; n1 is the size of a pixel in the image captured by the first module, m1 is the magnification of the first module, and t1 is the first exposure time of the first module; n2 is the size of a pixel in the image captured by the second module, m2 is the magnification of the second module, and t2 is the second exposure time of the second module.

[0051] In one embodiment, when the object to be tested moves along the positive direction of the first axis X relative to the first module 2, the first driving module is used to move along the reverse direction of the first axis X during the first module 2 performing a first processing on the object to be tested, and the second driving module is used to keep the second module 3 fixed along the first axis X during the second processing on the object to be tested.

[0052] In one embodiment, the exposure time of the second module is greater than the exposure time of the first module, or the magnification of the second module is greater than the magnification of the first module; the first axis is not perpendicular to the surface to be processed of the object to be tested.

[0053] In one embodiment, the exposure time of the second module is greater than the exposure time of the first module. During the process of the object to be tested moving relative to the first module along the positive direction of the first axis, the second module remains fixed along the first axis during the second processing of the object to be tested. The second module reduces the integral error when the object to be tested changes the moving speed, and the second module can re-inspect the object to be tested under the condition that the object to be tested moves along the first axis. The first module moves in the opposite direction of the first axis during the first processing of the object to be tested. The first module performs a full inspection of the surface of the object to be tested during the movement along the first axis. The moving rate of the first module relative to the object to be tested is greater than the moving rate of the second module relative to the object to be tested, which increases the processing speed of the first module and helps to improve the processing efficiency. Therefore, the first module and the second module can be processed simultaneously, which can improve the processing quality while ensuring the processing quality.

[0054] In one embodiment, the magnification of the second module is greater than that of the first module. The magnification of the first module is relatively small, so the field of view of the first module is larger. The magnification of the second module is relatively large, so the field of view of the second module is smaller than the field of view of the first module. The first module moves in the opposite direction of the first axis during the first processing of the object to be tested along the first axis, thereby increasing the processing speed of the first module on the object to be tested, which is conducive to improving the processing efficiency.

[0055] In one embodiment, the exposure time of the second module is greater than the exposure time of the first module, or the magnification of the second module is greater than the magnification of the first module; the first axis is not perpendicular to the surface to be processed of the object to be tested. During the process of the first module performing the first processing on the object to be tested, the speed at which the first module moves in the opposite direction of the first axis is less than (n1 / (m1t1)-v1), v1 is less than or equal to n2 / m2t2; v1 is less than or equal to v1 is less than or equal to n2 / m2t2; wherein v1 is the moving speed of the object to be tested; n1 is the size of a pixel in the image captured by the first module, m1 is the magnification of the first module, and t1 is the first exposure time of the first module; n2 is the size of a pixel in the image captured by the second module, m2 is the magnification of the second module, and t2 is the second exposure time of the second module.

[0056] Specifically, in this embodiment, the first driving module is used to make the object to be tested and the processing device perform a first relative movement along the first axis X, and the second driving module is used to perform a second processing on the object to be tested while the second module 3 and the object to be tested are relatively stationary; the first axis X is not perpendicular to the surface to be processed of the object to be tested.

[0057] The second driving module is used to keep the second module 3 and the object to be tested relatively still during the second processing of the object to be tested. The second module can always detect the agreed position within the exposure time during the second processing, thereby further improving the image quality. In other embodiments, the second driving module is used to perform a second processing on the position to be re-inspected of the object to be tested, and the second module and the object to be tested can have a non-zero relative speed.

[0058] In this embodiment, the first module performs a full scan on the surface to be measured. In other embodiments, the first module processes a preset processing position.

[0059] In this embodiment, the processing device further includes: a processing module, which is used to obtain the position to be re-inspected of the second module 3 according to the processing result of the object to be tested by the first module 2. Exemplarily, the processing module determines whether there is a defective area on the surface of the object to be tested according to the processing result of the object to be tested by the first module 2, and obtains the position of the defective area on the surface of the object to be tested as the position to be re-inspected.

[0060] In other implementations, the processing position of the second module can be preset, independent of the processing result of the first module. The second module can also perform a full scan on the entire surface to be measured.

[0061] In this embodiment, the processing module is specifically used to: when at least one of the multiple images of the object to be tested taken by the first module 2 has defects, determine that there are defects on the surface of the object to be tested; and extract the corresponding position to be re-inspected in the object to be tested according to the position with defects.

[0062] In this embodiment, the processing module can be a computer. In other embodiments, the processing module can also be other devices with processing functions.

[0063] Example 2

[0064] The difference between this embodiment and embodiment 1 includes: the first axis is perpendicular to the surface to be processed of the object to be tested. The first module 2 and the second module 3 are separated along the second axis in the field of view of the surface to be processed of the object to be tested; the first driving module is used to drive the object to be tested to move along the first axis according to the first target height of the position to be tested of the first module 2 along the first axis; the second driving module is used to drive the second module 3 to move along the first axis according to the second target height of the position to be tested of the second module 3 along the first axis, and the second axis is perpendicular to the first axis.

[0065] The first process is focusing, and the second process is unfocusing.

[0066] In this embodiment, the first driving module drives the object to be tested to move along the first axis so that the first module 2 focuses the object to be tested along the first axis. The second driving module is used to drive the second module 3 to move along the first axis so that the second module 3 focuses the object to be tested along the first axis.

[0067] In this embodiment, the processing device also includes: a height detection module 4, which is used to obtain the initial height of the surface to be processed of the object to be tested along the first axis at each position before the first processing and the second processing; the processing device also includes: a processing module, which is used to obtain the position of the object to be re-inspected by the second module, and the processing module is also used to obtain the second target height based on the initial height and the moving distance of the first module along the first axis.

[0068] Specifically, the height detection module 4 is used to complete the height detection of the entire surface of the object to be tested before performing the first first processing and the first second processing on the object to be tested. In other embodiments of the present invention, the height detection module 4 includes a first autofocus module for detecting the initial height of the detection position of the first module in real time; and a second autofocus module for detecting the initial height of the detection position of the second module in real time.

[0069] The height detection module 4 may be separated from the first module 2 and the second module 3 ; or, the first autofocus module and the first module 2 partially share the same optical path; the second autofocus module and the second module 3 partially share the same optical path.

[0070] In this embodiment, the first module 2 is further used to detect, measure or process the object to be detected after the first treatment; the second module 3 is further used to detect, measure or process the object to be detected after the first treatment. Specifically, the first module 2 is used to detect the object to be detected; the second module 3 is used to detect the object to be detected.

[0071] The fields of view of the first module 2 and the second module 3 are separated, and the positions processed simultaneously by the first module 2 and the second module 3 are different, resulting in different height differences between the processing positions and the focusing positions of the first module 2 and the second module 3.

[0072] In order to make the relative movement speed of the second module 3 and the object to be tested along the first axis different from the relative movement speed of the first module 2 and the object to be tested along the first axis, the driving component is specifically used to: after the object to be tested is driven by the first driving module to move along the first axis to the focus position of the first module, the second module is driven by the second driving module to move along the first axis to the focus position of the second module. Alternatively, in the process of driving the object to be tested to move along the first axis to the focus position of the first module by the first driving module, the second module is driven by the second driving module to move along the first axis to the focus position of the second module.

[0073] In this embodiment, the driving component also includes a third driving module, which is used to make the object to be tested and the first module 2 move relative to each other in a direction parallel to the surface to be processed of the object to be tested, so that the first module 2 scans the surface to be processed, and during the scanning process, the object to be tested moves along the second axis.

[0074] In this embodiment, the driving component further includes a fourth driving module, which is used to make the second module 3 relatively move along a direction parallel to the surface to be processed of the object to be tested, so that the first module 2 scans the surface to be processed, and during the scanning process, the object to be tested is moved along the second axis. In this embodiment, the relative movement speed of the second module 3 and the object to be tested along the direction of the surface to be processed is different from the relative movement speed of the first module 2 and the object to be tested along the direction of the surface to be processed. In other embodiments, the relative movement speed of the second module 3 and the object to be tested along the direction of the surface to be processed is equal to the relative movement speed of the first module 2 and the object to be tested along the direction of the surface to be processed.

[0075] In other embodiments, the driving assembly may not include the fourth driving module and / or the third driving module.

[0076] In one embodiment, making the object to be tested and the first module move relative to each other in a direction parallel to the surface to be processed comprises: making the object to be tested and the first module move relative to each other along the second axis, and moving the object to be tested along a third axis so that the first module and the second module step along the third axis, wherein the third axis and the second axis are both perpendicular to the first axis. The second axis and the third axis are both parallel to the surface to be processed of the object to be tested.

[0077] The first axis is perpendicular to the surface to be processed of the object to be tested.

[0078] In this embodiment, the first module is a full inspection module, and the first module is used to perform a full scan of the surface to be processed of the object to be inspected along the second axis; the second module is a re-inspection module. The position to be re-inspected of the second module is obtained according to the processing result of the full scan of the first module along the second axis; and whether the second module is aligned with the position to be re-inspected is determined according to the position to be re-inspected, and if aligned, the position to be re-inspected is re-inspected by the second module.

[0079] In this embodiment, the exposure time of the second module 3 is greater than the exposure time of the first module 2. The second module 3 has a second exposure time, the first module 2 has a first exposure time, and the second exposure time is greater than the first exposure time; or, the magnification of the second module 3 is greater than the magnification of the first module 2.

[0080] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A processing device, characterized in that: include: A processing device, the processing device comprising a first module and a second module, the first module is used to perform a first process on the object to be tested, and the second module is used to perform a second process on the object to be tested; The driving component includes a first driving module and a second driving module, wherein the first driving module is used to drive the object to be tested and the processing device to perform a first relative movement along the first axis, and the second driving module is also used to drive the second module and the object to be tested to perform a second relative movement along the first axis.

2. The processing device according to claim 1, characterized in that The driving component is used to make the relative movement speed of the second module and the object to be measured along the first axis different from the relative movement speed of the first module and the object to be measured along the first axis when the second module performs the second processing.

3. The processing device according to claim 1, characterized in that The first driving module is used to drive the object to be tested and the processing device to perform a first relative movement along a first axis, including: the first driving module is used to drive the object to be tested to move along the first axis; and / or the first driving module is used to drive the processing device to move along the first axis.

4. The processing device according to claim 3, characterized in that Also includes: A fixing platform, the fixing platform is used to fix the object to be tested; The first driving module is used to drive the object to be measured to move along the first axis, including: the first driving module is used to drive the fixed platform to move along the first axis.

5. The processing device according to claim 1, characterized in that The first module is a full inspection module, which is used to perform a comprehensive scan on the surface to be processed of the object to be tested; the second module is a re-inspection module, which is used to re-inspect the object to be tested according to the processing result of the first module.

6. The processing device according to claim 1, characterized in that The first driving module is used to move the object to be measured relative to the first module along the positive direction of the first axis; When the object to be tested moves along the positive direction of the first axis relative to the first module, the first driving module is used to keep the first module fixed along the first axis when performing a first processing on the object to be tested, and the second driving module is used to drive the second module to move along the positive direction of the first axis when performing a second processing on the object to be tested; Alternatively, when the object to be tested moves along the positive direction of the first axis relative to the first module, the first driving module is used to move along the reverse direction of the first axis when the first module performs a first processing on the object to be tested, and the second driving module is used to keep the second module fixed along the first axis when performing a second processing on the object to be tested.

7. The processing device according to claim 1, characterized in that The first driving module is used to make the object to be tested and the processing device perform a first relative movement along a first axis, and the second driving module is used to make the second module and the object to be tested relatively stationary during a second processing of the object to be tested; the first axis is not perpendicular to the surface to be processed of the object to be tested.

8. The processing device according to claim 1, characterized in that The driving component also includes: a third driving module, which is used to drive the object to be tested and the first module to move relative to each other in a direction parallel to the surface to be processed of the object to be tested, so that the first module scans the surface to be processed, and during the scanning process, the first driving module drives the object to be tested to move along the first axis.

9. The processing device according to claim 1, characterized in that The first module and the second module are separated along a second axis in the field of view of the surface to be processed of the object to be tested; The first driving module is used to drive the object to be tested to move along the first axis according to a first target height of the position to be tested of the first module along the first axis; the second driving module is used to drive the second module to move along the first axis according to a second target height of the position to be tested of the second module along the first axis, and the second axis is perpendicular to the first axis.

10. The processing device according to claim 9, characterized in that Also includes: A height detection module, used for obtaining the initial height of each position of the surface to be processed of the object to be tested along the first axis before the first processing and the second processing; The processing device further includes: a processing module, which is used to obtain the position of the object to be retested by the second module, and is also used to obtain the second target height according to the initial height and the moving distance of the first module along the first axis.

11. The processing device according to any one of claims 1 to 10, characterized in that: The first module is an imaging device, and the second module is an imaging device; The exposure time of the second module is greater than the exposure time of the first module; or the magnification of the second module is greater than the magnification of the first module.

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