Lifting and throwing device for silicon wafer cleaning
By placing a flower basket immersed in high-temperature acid in the basket of the silicon wafer cleaning device, the safety problems caused by staff exposure to acid for a long time are solved, the effect of improving the safety of the device is achieved, and the service life is extended.
Patent Information
- Application Number
- CN202421119178.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-22
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-05-22
AI Technical Summary
After the silicon wafer is cleaned, the staff needs to remove the silicon wafer from the basket with acid. Long-term contact with the acid will cause damage to the staff, affecting the safety of the use of the drive device.
A lifting and throwing device for cleaning silicon wafers is designed. By placing two flower baskets in the basket, the flower basket is immersed in a high-temperature and acid tank as a whole, and then the flower basket is raised above the acid liquid level before taking it, reducing the damage to the acid to people, thereby improving the safety of the device.
Through this design, the damage caused by acid to people is reduced, the safety of the casting device is improved, and the service life of the flower basket and the basket are extended.
Smart Images
Figure CN222838798U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a lifting and throwing device for silicon wafer cleaning. Background Art
[0002] The lifting and throwing device is a device used to transport and clean objects. It can lift objects and throw them at the same time to improve cleaning efficiency and stability.
[0003] When cleaning silicon wafers, the silicon wafers are placed inside the basket, and the servo motor on the bottom plate surface drives the lead screw guide rail to move the lifting frame and the basket, and then the silicon wafers are lifted and thrown to improve the cleaning efficiency of the silicon wafers. After the silicon wafers are cleaned, the staff needs to take the silicon wafers out of the basket with acid. After the staff are exposed to the acid for a long time, the acid will cause damage to the staff, resulting in problems that affect the safety of the lifting and throwing device. Utility Model Content
[0004] The utility model proposes a lifting and throwing device for cleaning silicon wafers to solve the problem that after cleaning the silicon wafers, the workers need to take the silicon wafers out from a basket with acid. After the workers are in contact with the acid for a long time, the acid will cause damage to the workers, thereby affecting the safety of the use of the lifting and throwing device.
[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a lifting and throwing device for cleaning silicon wafers, comprising a base plate, a servo motor is provided on one side of the base plate, a driving screw is provided on the output end of the servo motor, a lifting frame is threadedly connected to the surface of the driving screw, a lifting basket is provided on one side of the lifting frame, and a flower basket is provided inside the lifting basket.
[0006] The effect achieved by the above components is: when cleaning silicon wafers, the silicon wafers will be placed inside the basket, and the servo motor on the bottom plate surface will drive the lead screw guide rail to drive the lifting frame and the basket to move, and then the silicon wafers inside the basket will be lifted and thrown to improve the cleaning efficiency of the silicon wafers. By placing two flower baskets in the basket, the flower baskets are immersed in a tank containing high-temperature acid. This structure is raised above the liquid level of the acid before taking the flower baskets, which reduces the possible harm of the acid to people, thereby increasing the safety of the use of the lifting and throwing device.
[0007] Preferably, a fixing device is provided on one side of the carrying basket, and the fixing device includes a first bolt, the first bolt is fixedly connected to the carrying basket, a placement block is threadedly connected to the surface of the first bolt, the placement block is threadedly connected to the second bolt on the inside, and a fixing block is rotatably connected to one side of the second bolt, and the fixing block abuts against the flower basket.
[0008] The effects achieved by the above components are as follows: after the flower basket is placed inside the hand basket, the placement block can be moved to make the placement block contact with the hand basket, and then the first bolt is rotated to make the first bolt pass through the placement block and fix with the hand basket, and then the second bolt is rotated to make the second bolt drive the fixing block close to the flower basket, so that the fixing block abuts and fixes the flower basket, and then the position of the flower basket inside the hand basket is fixed. By using the fixing device, the position of the flower basket can be fixed inside the hand basket, and the situation that the flower basket shakes and collides inside the hand basket when the silicon wafer at the temporal part of the flower basket is lifted and thrown is avoided, thereby reducing the damage of the flower basket and the hand basket, and then improving the service life of the flower basket and the hand basket.
[0009] Preferably, one side of the first bolt is in contact with a gasket, and one side of the gasket is in contact with the placement block.
[0010] The effect achieved by the above components is: the contact area between the first bolt and the placement block is increased by the gasket, so that the bolt is less likely to loosen.
[0011] Preferably, a positioning block is fixedly connected to one side of the basket, and the size of the positioning block is matched with the size of the placement block.
[0012] The effect achieved by the above components is: the position of the placement block on the surface of the basket can be quickly located by the positioning block, so that the placement block can be conveniently fixed.
[0013] Preferably, the placing block is internally slidably connected to a limiting rod, and one side of the limiting rod is fixedly connected to the fixing block.
[0014] The effect achieved by the above components is: the moving track of the fixed block is limited by the limiting rod, so that the stability of the movement of the fixed block can be improved.
[0015] Preferably, a plurality of anti-sliding blocks are fixedly connected to one side of the second bolt, and the plurality of anti-sliding blocks are circumferentially arranged on one side of the second bolt.
[0016] The effect achieved by the above components is: the friction between the second bolt and the staff is increased by the anti-sliding block, so that the second bolt can be rotated more easily.
[0017] Preferably, guide plates are fixedly connected to both sides of the fixing block, and the guide plates are obliquely arranged on both sides of the fixing block.
[0018] The effect achieved by the above components is: by using the guide plate, the size of the inlet and outlet of the fixing block is increased, so that the fixing block can be more easily contacted and abutted with the flower basket.
[0019] Preferably, a bearing is fixedly connected to one side of the second bolt, and an outer ring of the bearing is fixedly connected to a fixing block.
[0020] The effect achieved by the above components is: the friction between the second bolt and the fixing block is reduced through the bearing, so that the second bolt can be more easily rotated on the surface of the fixing block.
[0021] In summary, the beneficial effects of the utility model are:
[0022] By placing two flower baskets in the carrying basket, the flower baskets are immersed in a tank filled with high-temperature acid. The structure rises above the liquid level of the acid before taking the flower baskets, which reduces possible harm to people caused by the acid, thereby increasing the safety of using the lifting and throwing device.
[0023] The two ends of the basket will be set longer to increase the operating space between the basket and the lifting frame, making it easier for staff to put in and take out the flower basket. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;
[0025] Figure 2 It is a three-dimensional structural schematic diagram of the fixing device of the utility model;
[0026] Figure 3 For this utility model Figure 2 A magnified image of point A;
[0027] Figure 4 It is a schematic diagram of the partial three-dimensional structure of the reinforcement device of the utility model.
[0028] Legend: 1. Base plate; 2. Servo motor; 3. Driving screw; 4. Lifting frame; 5. Lifting basket; 6. Flower basket; 7. Fixing device; 71. First bolt; 72. Placement block; 73. Second bolt; 74. Fixing block; 75. Gasket; 76. Positioning block; 77. Limit rod; 78. Anti-sliding block; 79. Guide plate; 710. Bearing. DETAILED DESCRIPTION
[0029] Reference Figure 1-4The present embodiment discloses a lifting and throwing device for cleaning silicon wafers, including a bottom plate 1, a servo motor 2 is provided on one side of the bottom plate 1, a driving screw 3 is provided at the output end of the servo motor 2, a lifting frame 4 is threadedly connected to the surface of the driving screw 3, a lifting basket 5 is provided on one side of the lifting frame 4, and a flower basket 6 is provided inside the lifting basket 5. When cleaning silicon wafers, the silicon wafers will be placed inside the lifting basket 5, and the guide rail of the screw 3 will be driven by the servo motor 2 on the surface of the bottom plate 1 to drive the lifting frame 4 and the lifting basket 5 to move, and then the silicon wafers inside the flower basket 6 will be lifted and thrown to improve the cleaning efficiency of the silicon wafers. By placing two flower baskets 6 in the lifting basket 5, the flower baskets 6 are immersed in a tank containing high-temperature acid as a whole, and the structure is raised above the liquid level of the acid before taking the flower basket 6, which reduces the possible harm of the acid to people, thereby increasing the safety of the use of the lifting and throwing device.
[0030] Reference Figure 1-4 As shown, this embodiment discloses that a fixing device 7 is provided on one side of the carrying basket 5, and the fixing device 7 includes a first bolt 71, and the first bolt 71 is fixedly connected to the carrying basket 5, and a placement block 72 is threadedly connected to the surface of the first bolt 71, and a second bolt 73 is threadedly connected to the inner side of the placement block 72, and a fixing block 74 is rotatably connected to one side of the second bolt 73, and the fixing block 74 abuts against the flower basket 6. After the flower basket 6 is placed in the basket 5, the placement block 72 can be moved to make the placement block 72 contact with the basket 5, and then the first bolt 71 can be rotated to make the first bolt 71 pass through the placement block 72 and be fixed to the basket 5, and then the second bolt 73 can be rotated to make the second bolt 73 drive the fixing block 74 to approach the flower basket 6, so that the fixing block 74 abuts and fixes the flower basket 6, and then the position of the flower basket 6 in the basket 5 is fixed. By using the fixing device 7, the position of the flower basket 6 in the basket 5 can be fixed, so as to avoid the flower basket 6 shaking and colliding in the basket 5 when the silicon wafer in the flower basket 6 is lifted and thrown, thereby reducing the damage of the flower basket 6 and the basket 5, and thus improving the service life of the flower basket 6 and the basket 5.
[0031] Reference Figure 1-4As shown, the present embodiment discloses that one side of the first bolt 71 is abutted with a gasket 75, and one side of the gasket 75 is abutted with the placement block 72. The gasket 75 is used to increase the contact area between the first bolt 71 and the placement block 72, so that the bolt is less likely to loosen. A positioning block 76 is fixedly connected to one side of the basket 5, and the size of the positioning block 76 is adapted to the size of the placement block 72. The positioning block 76 is used to quickly locate the position of the placement block 72 on the surface of the basket 5, so that the placement block 72 can be conveniently fixed. The internal sliding connection of the placement block 72 is a limiting rod 77, and one side of the limiting rod 77 is fixedly connected to the fixed block 74. The limiting rod 77 is used to limit the moving track of the fixed block 74, so that the stability of the movement of the fixed block 74 can be improved. One side of the second bolt 73 is fixedly connected with a plurality of anti-slide blocks 78, and the plurality of anti-slide blocks 78 are arranged circumferentially on one side of the second bolt 73. The anti-slide block 78 is used to increase the friction between the second bolt 73 and the staff, so that the second bolt 73 can be rotated more easily.
[0032] Reference Figure 1-4 As shown, this embodiment discloses that guide plates 79 are fixedly connected to both sides of the fixed block 74, and the guide plates 79 are obliquely arranged on both sides of the fixed block 74. By using the guide plates 79, the size of the entrance and exit of the fixed block 74 is increased, so that the fixed block 74 can more easily contact and abut with the flower basket 6. A bearing 710 is fixedly connected to one side of the second bolt 73, and the outer ring of the bearing 710 is fixedly connected to the fixed block 74. The bearing 710 is used to reduce the friction between the second bolt 73 and the fixed block 74, so that the second bolt 73 can be more easily rotated on the surface of the fixed block 74.
[0033] Working principle: When cleaning silicon wafers, the silicon wafers will be placed inside the basket 5, and the servo motor 2 on the surface of the bottom plate 1 will drive the lead screw 3 guide rail to drive the lifting frame 4 and the basket 5 to move, and then the silicon wafers inside the basket 6 will be lifted and thrown to improve the cleaning efficiency of the silicon wafers. By placing two baskets 6 in the basket 5, the baskets 6 are immersed in a tank containing high-temperature acid. This structure is raised above the liquid level of the acid before taking the basket 6, which reduces the possible harm of the acid to people, thereby increasing the safety of the use of the lifting and throwing device.
[0034] When the flower basket 6 is placed in the basket 5, the placement block 72 can be moved to make the placement block 72 contact the basket 5 with the positioning block 76, and then the first bolt 71 is rotated to make the first bolt 71 pass through the placement block 72 and fix to the basket 5, and then the second bolt 73 with the anti-sliding block 78 is rotated to make the second bolt 73 drive the fixing block 74 with the guide plate 79 to approach the flower basket 6. At this time, the movement trajectory of the fixing block 74 is limited by the limiting rod 77, and then the fixing block 74 is abutted and fixed to the flower basket 6, and then the position of the flower basket 6 in the basket 5 is fixed. By using the fixing device 7, the position of the flower basket 6 in the basket 5 can be fixed, so as to avoid the flower basket 6 shaking and colliding in the basket 5 when the silicon wafer at the temporal part of the flower basket 6 is lifted and thrown, thereby reducing the damage of the flower basket 6 and the basket 5, and thus improving the service life of the flower basket 6 and the basket 5.
Claims
1. A lifting and throwing device for cleaning silicon wafers, comprising a bottom plate (1), characterized in that: A servo motor (2) is provided on one side of the base plate (1); a driving screw (3) is provided at the output end of the servo motor (2); a lifting frame (4) is threadedly connected to the surface of the driving screw (3); a lifting basket (5) is provided on one side of the lifting frame (4); and a flower basket (6) is provided inside the lifting basket (5).
2. The lifting and throwing device for cleaning silicon wafers according to claim 1, characterized in that: A fixing device (7) is provided on one side of the basket (5), and the fixing device (7) comprises a first bolt (71), the first bolt (71) is fixedly connected to the basket (5), a placement block (72) is threadedly connected to the surface of the first bolt (71), a second bolt (73) is threadedly connected to the inside of the placement block (72), and a fixing block (74) is rotatably connected to one side of the second bolt (73), and the fixing block (74) is in contact with the flower basket (6).
3. The lifting and throwing device for cleaning silicon wafers according to claim 2, characterized in that: One side of the first bolt (71) is in contact with a gasket (75), and one side of the gasket (75) is in contact with a placement block (72).
4. The lifting and throwing device for cleaning silicon wafers according to claim 3, characterized in that: A positioning block (76) is fixedly connected to one side of the basket (5), and the size of the positioning block (76) is compatible with the size of the placement block (72).
5. The lifting and throwing device for cleaning silicon wafers according to claim 4, characterized in that: The placement block (72) is internally slidably connected to a limiting rod (77), and one side of the limiting rod (77) is fixedly connected to the fixing block (74).
6. The lifting and throwing device for cleaning silicon wafers according to claim 5, characterized in that: A plurality of anti-sliding blocks (78) are fixedly connected to one side of the second bolt (73), and the plurality of anti-sliding blocks (78) are arranged circumferentially on one side of the second bolt (73).
7. The lifting and throwing device for cleaning silicon wafers according to claim 6, characterized in that: Guide plates (79) are fixedly connected to both sides of the fixed block (74), and the guide plates (79) are obliquely arranged on both sides of the fixed block (74).
8. The lifting and throwing device for cleaning silicon wafers according to claim 7, characterized in that: A bearing (710) is fixedly connected to one side of the second bolt (73), and an outer ring of the bearing (710) is fixedly connected to a fixing block (74).