Cleaning machine for inner wall and outer wall of quartz tube

Abstract

The utility model discloses a quartz tube inner and outer wall cleaning machine, and relates to the technical field of quartz tube cleaning devices. Comprising a swing shaft supporting seat, the swing shaft supporting seat is connected with a swing shaft, and a swing electric transmission mechanism is arranged on the side wall face of the swing shaft supporting seat. According to the utility model, the inner and outer wall flushing jig simulating the manual operation action is designed for flushing, and can swing back and forth at 30 degrees during flushing for flushing and draining, and a plurality of quartz tubes can be placed at the same time for flushing the inner and outer walls. During operation, a safe distance can be kept between a person and the flushing part, and the situation that the person is injured is avoided. During operation, the switch button is started, the swing motor operates to use the water drain to swing according to frequency, and the speed can be adjusted according to requirements. The high-pressure pump is started to pump water into the inner and outer water rows, and the inner and outer walls are sprayed and washed by reducing and pressurizing through the nozzle. And the actions of delaying, pausing, normally opening, normally closing and the like of the electromagnetic valve can be set as required.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz tube cleaning devices, in particular to a quartz tube inner and outer wall cleaning machine. Background Art

[0002] The inner and outer wall flushing process of quartz tube products used in the semiconductor industry. After the quartz tube is cleaned with a certain concentration of acidic chemical solution to remove the surface dirt, there will be residual acid on the surface, which will cause corrosive hazards to subsequent personnel operations. The inner and outer walls of the quartz tube need to be flushed with high-pressure pure water to remove the chemical acid solution on the surface. The previous operation method was to manually clean one pipe at a time, shaking it while flushing it with a water gun, which was inefficient. At the same time, close-range operation could easily cause the flushing water and acid to splash onto human skin and eyes, causing damage.

[0003] The inventor found the following problems in the prior art during the implementation of the utility model: the previous quartz tube flushing process is: holding the quartz tube at the side of the flushing pool, using a high-pressure water gun to flush the inner and outer walls of the tube. Since some tubes have a small inner diameter, it is difficult to aim at the tube mouth during flushing. When the pressure is high, the flushing water will be reflected and splashed onto the human body, causing harm to the human body. Moreover, only one tube can be flushed at a time, the operation time is long, and the efficiency is low. Utility Model Content

[0004] In view of the shortcomings of the prior art, the utility model provides a quartz tube inner and outer wall cleaning machine, which solves the previous quartz tube flushing process: holding the quartz tube at the side of the flushing pool, using a high-pressure water gun to flush the inner and outer walls of the tube. Since some tubes have a small inner diameter, it is difficult to aim at the tube mouth during flushing. When the pressure is high, the flushing water will be reflected and splashed onto the human body, causing harm to the human body. Moreover, only one tube can be flushed each time, the operation time is long, and the efficiency is low.

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: a quartz tube inner and outer wall cleaning machine, comprising a swing shaft support seat, the swing shaft support seat is connected to a swing shaft, the side wall of the swing shaft support seat is provided with a swing electric transmission mechanism, the upper wall of the swing shaft support seat is provided with three water row fixed brackets, a number of outer tube cleaning water rows are connected between the three water row fixed brackets, a number of outer tube cleaning water rows are provided with a number of outer tube cleaning nozzles at the lower ends of the several outer tube cleaning water rows, the other ends of the several outer tube cleaning water rows are connected with an external water control solenoid valve, the external water control solenoid valve, one end of the external water control solenoid valve is connected with an external water control manual valve, the upper end of the swing shaft support seat is provided with an inner tube cleaning water row, the side wall of the inner tube cleaning water row is provided with a number of inner tube cleaning nozzles, the inner tube cleaning water row is connected with an internal water control solenoid valve, the internal water control solenoid valve is connected with an internal water control manual valve, and a number of quartz tubes are placed on the swing shaft support seat.

[0006] Preferably, it further comprises a pair of high-pressure pumps, wherein the pair of high-pressure pumps are respectively connected to the external water control manual valve and the internal water control manual valve through hoses.

[0007] Preferably, the oscillating electric transmission mechanism comprises a control stand-alone waterproof box, a waterproof box cover is hinged on the upper end of the control stand-alone waterproof box, and a control electric box is arranged in the control stand-alone waterproof box.

[0008] Preferably, a pair of tube pressure plates are hinged on the upper wall surface of the swing shaft support seat.

[0009] Preferably, the swing shaft can perform a 30-degree reciprocating rotation.

[0010] Beneficial Effects

[0011] The utility model provides a quartz tube inner and outer wall cleaning machine. The utility model performs flushing by designing an inner and outer wall flushing fixture that simulates manual operation. During flushing, the inner and outer wall can be swung back and forth at 30 degrees to flush and drain. Multiple quartz tubes can be placed at the same time to flush the inner and outer walls. During operation, personnel can maintain a safe distance from the flushing components to avoid personal injury. During operation, the switch button is started, and the swing motor is operated to swing the water drain at a frequency, and the speed can be adjusted as required. The high-pressure pump is started to draw water into the inner and outer water drains, and the nozzle is used to reduce the diameter and increase the pressure to spray and flush the inner and outer walls. The solenoid valve can be set to delay, pause, normally open, normally closed and other actions as needed. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0013] Figure 2 It is a side schematic diagram of the utility model.

[0014] Figure 3 It is a schematic diagram of the horizontal state of the utility model.

[0015] Figure 4 It is a schematic diagram of the swing state of the utility model.

[0016] In the figure: 1. Control electric box; 2. Swing electric transmission mechanism; 3. Waterproof box cover; 4. Control single-machine waterproof box; 5. Quartz tube; 6. Tube pressure plate; 7. Drain fixing bracket; 8. External tube cleaning drain; 9. External tube cleaning nozzle; 10. External water control solenoid valve; 11. External water control manual valve; 12. High-pressure pump; 13. Internal water control manual valve; 14. Internal water control solenoid valve; 15. Internal tube cleaning drain; 16. Internal tube cleaning nozzle; 17. Swing shaft support seat; 18. Swing shaft. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1-4 The utility model provides a technical solution: a quartz tube inner and outer wall cleaning machine, including a swing shaft support seat 17, the swing shaft support seat 17 is connected to a swing shaft 18, the side wall of the swing shaft support seat 17 is provided with a swing electric transmission mechanism 2, the upper wall of the swing shaft support seat 17 is provided with three water row fixed brackets 7, a number of outer tube cleaning water rows 8 are connected between the three water row fixed brackets 7, a number of outer tube cleaning water rows 8 are provided with a number of outer tube cleaning nozzles 9 at the lower ends, the other ends of the number of outer tube cleaning water rows 8 are connected to an external control water solenoid valve 10, the external control water solenoid valve 10, one end of the external control water solenoid valve 10 is connected to an external control water manual valve 11, the upper end of the swing shaft support seat 17 is provided with an inner tube cleaning water row 15, the side wall of the inner tube cleaning water row 15 is provided with a number of inner tube cleaning nozzles 16, the inner tube cleaning water row 15 is connected to an internal control water solenoid valve 14, the internal control water solenoid valve 14 is connected to an internal control water manual valve 13, and a number of quartz tubes 5 are placed on the swing shaft support seat 17.

[0019] In this embodiment, specifically, a pair of high-pressure pumps 12 are further included, and the pair of high-pressure pumps 12 are respectively connected to the external water control manual valve 11 and the internal water control manual valve 13 through hoses.

[0020] In this embodiment, specifically, the swing electric transmission mechanism 2 includes a control stand-alone waterproof box 4 , a waterproof box cover 3 is hinged on the upper end of the control stand-alone waterproof box 4 , and a control electric box 1 is arranged inside the control stand-alone waterproof box 4 .

[0021] In this embodiment, specifically, a pair of tube pressing plates 6 are hingedly connected to the upper wall surface of the swing shaft support seat 17 .

[0022] In this embodiment, specifically, the swing shaft 18 can perform a 30-degree reciprocating rotation.

[0023] The detailed connection means are well-known in the art. The following mainly introduces the working principle and process. The specific work is as follows.

[0024] Embodiment: insert several quartz tubes 5 into several inner tube cleaning nozzles 16 respectively, a pair of tube pressing plates 6 rotate to press several quartz tubes 5, and one end of the tube pressing plate 6 can be adjusted and fixed on the upper wall of the swing shaft support seat 17, fix several quartz tubes 5, start a pair of high-pressure pumps 12 respectively to discharge water through the inner tube cleaning nozzle 16 and the outer tube cleaning nozzle 9 in turn, and clean the inner and outer wall surfaces of the quartz tubes 5. When cleaning, the control electric box 1 can be adjusted to make the swing shaft support seat 17 rotate around the swing shaft 18 and swing thirty degrees left and right. Combined with the action steps of simulating manual operation and the position of flushing, the swing arm is used to drive the water discharge fixing bracket to move periodically and frequently, in order to make the water in the tube pour out. The flushing frequency can be adjusted by adjusting the external water control solenoid valve 10, the external water control manual valve 11, the internal water control manual valve 13 and the internal water control solenoid valve 14. The delay, pause, normally open, normally closed and other actions can be set as needed.

[0025] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

Claims

1. A quartz tube inner and outer wall cleaning machine, comprising a swing shaft support seat (17), characterized in that: The swing shaft support seat (17) is connected to a swing shaft (18); a swing electric transmission mechanism (2) is provided on the side wall of the swing shaft support seat (17); three water drain fixing brackets (7) are provided on the upper wall of the swing shaft support seat (17); a plurality of external tube cleaning water drains (8) are connected between the three water drain fixing brackets (7); a plurality of external tube cleaning nozzles (9) are provided at the lower ends of the plurality of external tube cleaning water drains (8); the other ends of the plurality of external tube cleaning water drains (8) are connected to external tube water control solenoid valves (10); the external tube water control nozzles (9) are provided at the lower ends of the plurality of external tube cleaning water drains (8); A water solenoid valve (10), one end of the external water solenoid valve (10) is connected to an external water manual valve (11), an inner tube cleaning water drain (15) is provided at the upper end of the swing shaft support seat (17), a plurality of inner tube cleaning nozzles (16) are provided on the side wall of the inner tube cleaning water drain (15), the inner tube cleaning water drain (15) is connected to an internal water solenoid valve (14), the internal water solenoid valve (14) is connected to an internal water manual valve (13), and a plurality of quartz tubes (5) are placed on the swing shaft support seat (17).

2. The quartz tube inner and outer wall cleaning machine according to claim 1, characterized in that: It also comprises a pair of high-pressure pumps (12), wherein the pair of high-pressure pumps (12) are respectively connected to the external water control manual valve (11) and the internal water control manual valve (13) via hoses.

3. The quartz tube inner and outer wall cleaning machine according to claim 1, characterized in that: The oscillating electric transmission mechanism (2) comprises a control unit waterproof box (4), the upper end of which is hingedly connected with a waterproof box cover (3), and a control electric box (1) is arranged inside the control unit waterproof box (4).

4. The quartz tube inner and outer wall cleaning machine according to claim 1, characterized in that: A pair of tube pressing plates (6) are hingedly connected to the upper wall surface of the swing shaft support seat (17).

5. The quartz tube inner and outer wall cleaning machine according to claim 1, characterized in that: The swing shaft (18) can perform a 30-degree reciprocating rotation.

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