High-precision servo tension system of slicing machine

Abstract

The utility model relates to a slicing machine high-precision servo tension system which comprises a cutting assembly, the cutting assembly is rotatably arranged on a rack, and the cutting assembly comprises a first cutting shaft and a second cutting shaft which are horizontally arranged in parallel; the tension control assembly comprises a programmable logic controller, a sensor and a plurality of servo motors, the programmable logic controller is connected with the sensor and the servo motors, the sensor is arranged at the rotary fixing position of the first cutting shaft and the second cutting shaft, and the servo motors are arranged at the rotary fixing position of the first cutting shaft and the second cutting shaft. And the plurality of servo motors are connected with the wire storage shaft, the first cutting shaft and the second cutting shaft. The sensor records the pressure at the rotary fixing positions of the first cutting shaft and the second cutting shaft and transmits data to the programmable controller, and the programmable controller adjusts output of the servo motor after receiving the pressure data so as to adjust the tension of the rigid wire wound on the first cutting shaft and the second cutting shaft.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor-related equipment, in particular to a high-precision servo tension system for a slicer. Background Art

[0002] Tension control systems are widely used in silicon wafer wire cutting equipment. They control the tension range of the wire, ensure cutting efficiency, and reduce the wire breakage rate.

[0003] Most of the existing silicon wafer wire cutting equipment changes the wire tension by adjusting the wheelbase between the cutting axes. Although this adjustment method is intuitive, it is usually difficult to adjust the wheelbase between the cutting axes. It is necessary to loosen the two ends of the rotating fixed cutting axis, change the position of the cutting axis and then tighten it. This requires high operator proficiency, the steps are complicated, and the adjustment accuracy is difficult to ensure. In addition, the method of changing the wire tension by changing the wheelbase of the cutting axis is difficult to achieve dynamic adjustment of the tension and difficult to cope with complex working conditions in actual production. Utility Model Content

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the utility model is to provide a high-precision servo tension system for a slicer to control the tension of the rigid wire in real time.

[0005] To achieve the above purpose, the technical solution of the utility model is as follows:

[0006] The high-precision servo tension system of the slicer comprises a frame and a wire storage shaft arranged on the frame, and also comprises:

[0007] A cutting assembly, the cutting assembly is rotatably arranged on the frame, and the cutting assembly includes a first cutting shaft and a second cutting shaft arranged horizontally and in parallel;

[0008] A tension control component, the tension control component includes a programmable controller, a sensor and a plurality of servo motors, the programmable controller is connected to the sensor and the servo motor, the sensor is arranged at the rotation fixing position of the first cutting shaft and the second cutting shaft, and the plurality of servo motors are connected to the wire storage shaft, the first cutting shaft and the second cutting shaft.

[0009] Furthermore, the cutting assembly also includes a third cutting axis, the third cutting axis is parallel to the first cutting axis, and the third cutting axis is arranged below the first cutting axis.

[0010] Furthermore, the third cutting axis is connected to a servo motor.

[0011] Furthermore, the first cutting axis, the second cutting axis and the third cutting axis have the same diameter.

[0012] Furthermore, the sensors are provided at rotationally fixed locations at both ends of the first cutting shaft and the second cutting shaft.

[0013] Furthermore, the first cutting shaft and the second cutting shaft are respectively provided with driving gears, and a transmission gear is meshed between the two driving gears.

[0014] Furthermore, a cleaning component is also included, and the cleaning component includes at least one nozzle, and the nozzle is aimed at the cutting component.

[0015] Furthermore, the nozzle points from below to above.

[0016] Furthermore, a silicon wafer box is arranged between the first cutting axis and the second cutting axis, and the silicon wafer box is arranged below the first cutting axis and the second cutting axis.

[0017] Compared with the prior art, the beneficial technical effects of the utility model are as follows:

[0018] (1) The high-precision servo tension system of the slicer in the utility model is provided with sensors on the first cutting axis and the second cutting axis. The sensors record the pressure at the rotational fixed point of the first cutting axis and the second cutting axis, and transmit the data to the programmable controller. In addition, the wire storage axis, the first cutting axis and the second cutting axis are connected to servo motors. The programmable controller adjusts the output of the servo motor after receiving the pressure data. If the tension is too large, the programmable controller reduces the output of the servo motor connected to the first cutting axis and the second cutting axis, thereby reducing the output difference between the first cutting axis and the second cutting axis and the wire storage axis, and reducing the tension of the rigid wire. If the tension is too small, the programmable controller increases the output of the servo motor connected to the first cutting axis and the second cutting axis, thereby increasing the output difference between the first cutting axis and the second cutting axis and the wire storage axis, and increasing the tension of the rigid wire. The tension of the rigid wire wound on the first cutting axis and the second cutting axis can be adjusted in real time.

[0019] (2) Furthermore, a third cutting axis is included, and the third cutting axis is also connected to a servo motor to adjust the torque and rotation speed, thereby increasing the size of the silicon wafer that can be cut while ensuring the accuracy of the tension adjustment.

[0020] (3) Furthermore, sensors are provided at the rotational fixing points at both ends of the first cutting axis and the second cutting axis. The tension data obtained by the joint measurement of multiple sensors is more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A three-dimensional structural schematic diagram of a high-precision servo tension system for a slicer provided in an embodiment of the utility model is shown.

[0022] Figure 2A local enlarged view of the high-precision servo tension system of the slicer provided by the embodiment of the utility model at point A is shown.

[0023] Figure 3 A cross-sectional view of a high-precision servo tension system for a slicer provided by an embodiment of the utility model is shown.

[0024] Markings in the accompanying drawings:

[0025] 1. Frame; 2. Cutting assembly; 21. First cutting axis; 211. Driving gear; 22. Second cutting axis; 23. Transmission gear; 24. Third cutting axis; 3. Tension control assembly; 31. Programmable controller; 32. Servo motor; 33. Sensor; 4. Cleaning assembly; 41. Nozzle; 5. Wire storage shaft; 6. Wafer box. DETAILED DESCRIPTION

[0026] In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the attached drawings. It should be noted that the structures, proportions, sizes, etc. illustrated in the attached drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no technical substantive significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the effect and purpose that can be achieved by the utility model, should still fall within the scope of the technical content disclosed by the utility model.

[0027] In the description of the present invention, the orientations or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "top", "bottom", "inside", "outside", "axial", "radial", and "circumferential" are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0028] Figure 1 The three-dimensional structure diagram of the high-precision servo tension system of the slicer provided by the embodiment of the utility model is shown. Figure 2 A partial enlarged view of the high-precision servo tension system of the slicer provided by the embodiment of the utility model at position A is shown. Figure 3 A cross-sectional view of a high-precision servo tension system for a slicer provided by an embodiment of the utility model is shown. Figure 1 , Figure 2 and Figure 3, a high-precision servo tension system for a slicer includes a frame 1 and a wire storage shaft 5 arranged on the frame 1, and also includes: a cutting assembly 2, the cutting assembly 2 is rotatably arranged on the frame 1, and the cutting assembly 2 includes a first cutting shaft 21 and a second cutting shaft 22 arranged horizontally and in parallel. A tension control assembly 3, the tension control assembly 3 includes a control system, a sensor 33 and a plurality of servo motors 32, the control system connects the sensor 33 and the servo motor 32, the sensor 33 is arranged at the rotation fixing position of the first cutting shaft 21 and the second cutting shaft 22, and the plurality of servo motors 32 connect the wire storage shaft 5, the first cutting shaft 21 and the second cutting shaft 22. Specifically, the rigid wire wound on the wire storage shaft 5 is spirally wound on the first cutting shaft 21 and the second cutting shaft 22 in parallel with each other, and finally wound on another wire storage shaft 5. The sensor 33 records the pressure at the rotation fixing position of the first cutting shaft 21 and the second cutting shaft 22, and transmits the data to the programmable controller 31. The personnel set the tension range on the programmable controller 31 in advance, and the programmable controller 31 adjusts the output of the servo motor 32 after receiving the pressure data. If the tension is too high, the programmable controller 31 reduces the output of the servo motor 32 connected to the first cutting shaft 21 and the second cutting shaft 22, thereby reducing the output difference between the first cutting shaft 21 and the second cutting shaft 22 and the wire storage shaft 5, and reducing the tension of the rigid wire. If the tension is too low, the programmable controller 31 increases the output of the servo motor 32 connected to the first cutting shaft 21 and the second cutting shaft 22, thereby increasing the output difference between the first cutting shaft 21 and the second cutting shaft 22 and the wire storage shaft 5, and increasing the tension of the rigid wire. To adjust the tension of the rigid wire wound on the first cutting shaft 21 and the second cutting shaft 22.

[0029] The adjustment of the programmable controller 31 is divided into two stages: the adjustment stage and the stabilization stage. In the adjustment stage, the programmable controller 31 adjusts the output of the servo motor 32 according to the preset tension range and the received pressure data, so that the tension gradually approaches the preset tension range. In the temperature stage, the programmable controller 31 fine-tunes the output of the servo motor 32 according to the pressure data fed back in real time by the sensor 33, so that the tension of the rigid wire is kept within the preset tension range.

[0030] The specific structure of the third cutting axis 24 is described below:

[0031] Please refer to Figure 3The cutting assembly 2 further includes a third cutting axis 24, which is parallel to the first cutting axis 21 and is disposed below the first cutting axis 21. Specifically, the rigid wire is wound along the first cutting axis 21, the third cutting axis 24 and the second cutting axis 22, and the third cutting axis 24 disposed below causes the lower portion of the rigid wire wound on the cutting assembly 2 to move downward, and the interval between the lower rigid wire and the upper rigid wire increases, so that even when cutting a large silicon wafer, it can be ensured that after the silicon wafer is completely cut by the upper rigid wire, the lower portion of the cut silicon wafer will not contact the lower silicon wafer, thereby increasing the size of the silicon wafer that can be cut.

[0032] Please refer to Figure 1 and Figure 3 , the third cutting shaft 24 is connected to the servo motor 32. At the same time, the third cutting shaft 24 is also connected to the servo motor 32, which ensures the accuracy of tension adjustment.

[0033] Please refer to Figure 3 , the first cutting shaft 21, the second cutting shaft 22 and the third cutting shaft 24 have the same diameter. Specifically, the first cutting shaft 21, the second cutting shaft 22 and the third cutting shaft 24 with the same diameter have similar weights, which is convenient for ensuring stability during operation, reducing vibration of the rigid wire during operation, and ensuring cutting accuracy. At the same time, the consistent diameter also facilitates the calculation of the tension of the rigid wire wound on the cutting assembly 2.

[0034] The specific structures of the first cutting axis 21 and the second cutting axis 22 are described below:

[0035] Please refer to Figure 3 Sensors 33 are provided at the rotational fixing positions at both ends of the first cutting shaft 21 and the second cutting shaft 22. Specifically, the pressure values ​​measured by the multiple sensors 33 are transmitted to the programmable controller 31, and the programmable controller 31 calculates and takes the average value to maintain the measurement accuracy, thereby improving the accuracy of tension control.

[0036] Please refer to Figure 1 and Figure 2 The first cutting shaft 21 and the second cutting shaft 22 are respectively provided with a driving gear 211, and a transmission gear 23 is meshed between the two driving gears 211. Specifically, the servo motor 32 can simultaneously output and control the first cutting shaft 21 and the second cutting shaft 22 through the gear meshing transmission gear 23, thereby simplifying the structure.

[0037] Please refer to Figure 3 A silicon wafer box 6 is provided between the first cutting axis 21 and the second cutting axis 22, and the silicon wafer box 6 is provided below the first cutting axis 21 and the second cutting axis 22. The silicon wafers cut by the steel wire above fall into the silicon wafer box 6 and are collected together, while preventing the cut silicon wafers from being scratched by the steel wire.

[0038] The specific structure of the cleaning component 4 is described below:

[0039] Please refer to Figure 3 , and also includes a cleaning component 4, which includes at least one nozzle 41, and the nozzle 41 is aimed at the cutting component 2. Specifically, the cleaning component 4 is connected to a hydraulic pump (not shown in the figure), and the hydraulic pump is connected to a programmable controller 31. After the cutting is completed, the steel wire is automatically flushed without manual intervention, thereby improving production efficiency and reducing the work intensity of personnel.

[0040] Please refer to Figure 3 , the nozzle 41 points upward from the bottom. Specifically, the nozzle 41 is set at a position close to the bottom to avoid interference between the nozzle 41 and the rigid wire. At the same time, the liquid sprayed from bottom to top and then from top to bottom repeatedly cleans the rigid wire to ensure the cleaning effect.

[0041] The specific working process of the utility model is as follows:

[0042] The personnel pre-set the tension range in the programmable controller 31. When cutting the silicon wafer, the rigid wire wound on the cutting assembly 2 is stretched and has tension. The tension reacts on the first cutting shaft 21 and the second cutting shaft 22. The pressure is detected by the sensor 33 and transmitted to the programmable controller 31. The programmable controller 31 adjusts the output of the servo motor 32 after receiving the pressure data. If the tension is too large, the programmable controller 31 reduces the output of the servo motor 32 connected to the first cutting shaft 21 and the second cutting shaft 22, thereby reducing the output difference between the first cutting shaft 21 and the second cutting shaft 22 and the wire storage shaft 5, and reducing the tension of the rigid wire. If the tension is too small, the programmable controller 31 increases the output of the servo motor 32 connected to the first cutting shaft 21 and the second cutting shaft 22, thereby increasing the output difference between the first cutting shaft 21 and the second cutting shaft 22 and the wire storage shaft 5, and increasing the tension of the rigid wire. And the adjustment process is divided into two stages: the adjustment stage and the stabilization stage. In the adjustment stage, the programmable controller 31 adjusts the output of the servo motor 32 according to the preset tension range and the received pressure data, so that the tension gradually approaches the preset tension range. In the temperature stage, the programmable controller 31 will fine-tune the output of the servo motor 32 according to the pressure data fed back by the sensor 33 in real time, so that the tension of the rigid wire is maintained within the preset tension range.

[0043] It can be seen that the above-mentioned slicer high-precision servo tension system can accurately adjust the tension of the rigid wire in real time during the cutting process, ensuring the cutting quality and reducing the wire breakage rate, and the adjustment process does not require manual participation, which greatly improves production efficiency.

[0044] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A high-precision servo tension system for a slicer, comprising a frame and a wire storage shaft arranged on the frame, characterized in that: Also includes: A cutting assembly, the cutting assembly is rotatably arranged on the frame, and the cutting assembly includes a first cutting shaft and a second cutting shaft arranged horizontally and in parallel; A tension control component, the tension control component includes a programmable controller, a sensor and a plurality of servo motors, the programmable controller is connected to the sensor and the servo motor, the sensor is arranged at the rotation fixing position of the first cutting shaft and the second cutting shaft, and the plurality of servo motors are connected to the wire storage shaft, the first cutting shaft and the second cutting shaft.

2. The high-precision servo tension system for a slicer according to claim 1, characterized in that: The cutting assembly also includes a third cutting axis, which is parallel to the first cutting axis and is disposed below the first cutting axis.

3. The high-precision servo tension system for a slicer according to claim 2, characterized in that: The third cutting axis is connected to a servo motor.

4. The high-precision servo tension system for a slicer according to claim 2, characterized in that: The first cutting shaft, the second cutting shaft and the third cutting shaft have the same diameter.

5. The high-precision servo tension system for a slicer according to claim 1, characterized in that: The sensors are provided at the rotation fixing positions at both ends of the first cutting shaft and the second cutting shaft.

6. The high-precision servo tension system for a slicer according to claim 1, characterized in that: The first cutting shaft and the second cutting shaft are respectively provided with driving gears, and a transmission gear is meshed between the two driving gears.

7. The high-precision servo tension system for a slicer according to claim 1, characterized in that: A cleaning assembly is also included, and the cleaning assembly includes at least one nozzle, and the nozzle is aimed at the cutting assembly.

8. The high-precision servo tension system for a slicer according to claim 7, characterized in that: The spray head is directed upward from below.

9. The high-precision servo tension system for a slicer according to claim 1, characterized in that: A silicon wafer box is arranged between the first cutting axis and the second cutting axis, and the silicon wafer box is arranged below the first cutting axis and the second cutting axis.

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