Photoresist filling equipment

Abstract

The utility model relates to the technical field of photoresist, in particular to photoresist filling equipment, which comprises a filling machine, a filling chamber and a control chamber are arranged in the filling machine, a filling component is arranged in the filling chamber, a driving component is arranged on one side of the filling component in the filling chamber, and the control chamber is connected with the driving component. The periphery of the driving assembly is slidably connected with displacement assemblies used for assisting filling in a sleeving mode, a guide assembly is arranged between the displacement assemblies, and a filtering assembly is arranged in the control chamber. The displacement assembly comprises a sliding frame, a supporting base is arranged at the bottom of the sliding frame, concentric-square-shaped grooves are formed in the sliding frame and the supporting base correspondingly, and filter plates are fixedly installed in the concentric-square-shaped grooves through clamping grooves; by adding the auxiliary cleaning mechanism, the filling environment is synchronously cleaned in advance before the photoresist is subjected to filling treatment, the quality of the filling environment is improved, and meanwhile, loading and unloading operations are performed, so that the use effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist, in particular to a photoresist filling device. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that changes its solubility when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. It is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent. The development of large-scale and ultra-large-scale integrated circuits in recent years has greatly promoted the research, development and application of photoresist. Filling machines are important equipment for photoresist packaging.

[0003] At present, when using filling equipment, there is a lack of auxiliary cleaning mechanism. Usually, in the process of using the filling equipment, it is difficult to ensure the quality of the filling environment, resulting in the filling environment not meeting the standards, which easily affects the cleaning effect of the photoresist. Therefore, a photoresist filling equipment is proposed to increase the auxiliary cleaning mechanism. Before the photoresist is filled, the filling environment is pre-cleaned synchronously to improve the quality of the filling environment, and the loading and unloading operations are performed at the same time, thereby improving the use effect. Utility Model Content

[0004] In view of the problems in the prior art, the utility model provides a photoresist filling device, so as to add an auxiliary cleaning mechanism, improve the quality of the filling environment, and perform loading and unloading operations at the same time, thereby improving the use effect.

[0005] The technical solution adopted by the utility model to solve the technical problem is a photoresist filling device, including a filling machine, wherein a filling chamber and a control chamber are arranged in the filling machine, a filling component is arranged in the filling chamber, a driving component is arranged on one side of the filling component in the filling chamber, a displacement component for assisting filling is slidably sleeved on the periphery of the driving component, a guide component is arranged between the displacement components, and a filter component is arranged in the control chamber;

[0006] The displacement assembly includes a sliding frame, a supporting base is provided at the bottom of the sliding frame, and a circular groove is provided in the sliding frame and the supporting base. A filter plate is fixedly installed in the circular groove through a card slot. A vacuum pump is connected to one side of the control room by bolts, and the air inlet end of the vacuum pump is connected to the circular groove through a hose.

[0007] By adopting the above technical solution, an auxiliary cleaning mechanism can be added, the filling effect and quality of the photoresist can be improved, and the use effect of the equipment can be improved.

[0008] Specifically, a placement groove is provided on the top of the support base, a flushing nozzle is connected to the surface of the placement groove by bolts, and a drain pipe is provided at the bottom of the support base, and the drain pipe is connected to the placement groove.

[0009] By adopting the above technical solution, it is convenient to add an auxiliary flushing mechanism, improve the use effect of the filling nozzle, and improve the filling quality.

[0010] Specifically, the driving assembly includes a fixed frame, in which a screw rod is installed through a bearing, the outer sleeve of the screw rod is provided with a corresponding ball slider, and the ball slider is connected to the sliding frame through bolts, the top of the fixed frame is connected to the servo motor through bolts, and the servo motor is connected to the screw rod through a driving shaft.

[0011] By adopting the above technical solution, it is convenient to use the ball screw to control and adjust the position height of the sliding frame.

[0012] Specifically, negative pressure grooves are provided on both sides of the placement groove in the support base, and the negative pressure grooves are connected to the return groove.

[0013] By adopting the above technical solution, it is convenient to utilize the negative pressure generated by suction to simultaneously adsorb the container and perform auxiliary limiting processing on it.

[0014] Specifically, the filling assembly includes a material storage box, a discharge pipe is provided at the bottom of the material storage box, and a filling nozzle is provided at one end of the discharge pipe.

[0015] By adopting the above technical solution, it is convenient to form a filling structure to fill the photoresist.

[0016] Specifically, the guide assembly includes a telescopic sleeve, and the bottom of the telescopic sleeve is connected to the support base by bolts, the top of the telescopic sleeve is connected to the telescopic rod, and the top of the telescopic rod is connected to the sliding frame by bolts, and a compression spring is provided in the telescopic sleeve on the outer periphery of the telescopic rod.

[0017] By adopting the above technical solution, it is convenient to guide the support base by utilizing the sleeve sliding.

[0018] Specifically, the filter assembly includes a filter tank, in which a filter screen is fixedly installed through a clamping slot, and the top of the filter tank is connected to a cover plate through bolts.

[0019] By adopting the above technical solution, it is convenient to filter and clean the extracted gas.

[0020] Beneficial effects of the utility model:

[0021] (1) The photoresist filling equipment described in the utility model can add an auxiliary cleaning mechanism through the setting of a sliding frame, a supporting base, a circular groove, a filter plate, an air pump and a driving assembly, and utilize the up and down sliding displacement to move materials in and out, while assisting in cleaning the filling environment, thereby improving the quality of the filling environment, thereby improving the cleaning effect of photoresist filling, improving the use effect of the equipment, and also helping to improve the production quality of photoresist.

[0022] (2) The photoresist filling equipment described in the utility model can add an auxiliary flushing and cleaning mechanism by providing a supporting base, a placement groove, a flushing nozzle and a drain pipe, so as to avoid residual photoresist on the surface of the filling nozzle, which may contact with subsequent photoresist and cause particles to fail to meet the standards, and the equipment is more stable and reliable to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0024] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0025] Figure 2 This is a schematic diagram of the filling machine structure from a top view of the present utility model;

[0026] Figure 3 This is a schematic diagram of the displacement assembly structure of the utility model;

[0027] Figure 4 This is a schematic cross-sectional structural diagram of the sliding frame of the utility model;

[0028] Figure 5 This is a cross-sectional structural diagram of the support base of the utility model;

[0029] Figure 6 This is a schematic cross-sectional structural diagram of the guide assembly of the utility model;

[0030] Figure 7 This is a schematic cross-sectional structural diagram of a drive assembly of the utility model;

[0031] Figure 8 This is a schematic cross-sectional structural diagram of the filling component of the utility model;

[0032] Fig. 9 This is a schematic cross-sectional structural diagram of the filter assembly of the utility model;

[0033] In the figure: 1. filling machine; 2. filling room; 3. control room; 4. filling assembly; 401. storage box; 402. discharge pipe; 403. filling nozzle; 5. drive assembly; 501. fixed frame; 502. screw rod; 503. ball slider; 504. servo motor; 6. displacement assembly; 601. sliding frame; 602. supporting base; 603. circular groove; 604. filter plate; 605. placement groove; 606. flushing nozzle; 607. drain pipe; 608. negative pressure groove; 7. guide assembly; 701. telescopic sleeve; 702. telescopic rod; 703. compression spring; 8. vacuum pump; 9. filter assembly; 901. filter tank; 902. filter screen; 903. cover plate. DETAILED DESCRIPTION

[0034] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0035] In order to facilitate the addition of auxiliary cleaning mechanisms, improve the quality of the filling environment, and perform loading and unloading operations at the same time, thereby improving the use effect, such as Figure 1-4 As shown, a photoresist filling device described in the utility model comprises a filling machine 1, wherein a filling chamber 2 and a control chamber 3 are arranged in the filling machine 1, a filling assembly 4 is arranged in the filling chamber 2, a driving assembly 5 is arranged on one side of the filling assembly 4 in the filling chamber 2, a displacement assembly 6 for assisting filling is slidably sleeved on the periphery of the driving assembly 5, a guide assembly 7 is arranged between the displacement assemblies 6, and a filtering assembly 9 is arranged in the control chamber 3;

[0036] The displacement assembly 6 includes a sliding frame 601, a supporting base 602 is provided at the bottom of the sliding frame 601, and a circular groove 603 is provided in the sliding frame 601 and the supporting base 602. A filter plate 604 is fixedly installed in the circular groove 603 through a card slot. A vacuum pump 8 is connected to one side of the control chamber 3 by bolts, and the air inlet end of the vacuum pump 8 is connected to the circular groove 603 through a hose.

[0037] When in use, an auxiliary cleaning mechanism can be added through the sliding frame 601, the supporting base 602, the circular groove 603, the filter plate 604, and the vacuum pump 8, and the negative pressure generated by suction is used to assist in cleaning the filling chamber 2, thereby improving the filling environment quality and improving the filling effect.

[0038] One side of the filling chamber 2 is connected to the electric slide by bolts, and the output end of the electric slide is connected to the filling assembly 4 by bolts.

[0039] In order to improve the filling quality, exemplary, such as Figure 3 , Figure 5As shown, the utility model also includes that a placement groove 605 is opened on the top of the support base 602, and a flushing nozzle 606 is connected to the surface of the placement groove 605 by bolts, and a drain pipe 607 is arranged at the bottom of the support base 602, and the drain pipe 607 is connected to the placement groove 605.

[0040] When in use, by placing the groove 605, the flushing nozzle 606 and the drain pipe 607, an auxiliary flushing mechanism can be added to improve the use effect of the filling mechanism and avoid the residual contact particles of the photoresist not meeting the standards.

[0041] For example, Figure 7 As shown, the utility model also includes that the driving component 5 includes a fixed frame 501, a screw rod 502 is installed in the fixed frame 501 through a bearing, the outer sleeve of the screw rod 502 is provided with a corresponding ball slider 503, and the ball slider 503 is connected to the sliding frame 601 through bolts, the top of the fixed frame 501 is connected to the servo motor 504 through bolts, and the servo motor 504 is connected to the screw rod 502 through a driving shaft.

[0042] When in use, the height and position of the sliding frame 601 can be controlled and adjusted by utilizing the ball screw formed by the fixed frame 501 , the lead screw 502 , the ball slider 503 and the servo motor 504 .

[0043] For example, Figure 5 As shown, the utility model also includes that negative pressure grooves 608 are opened on both sides of the placement groove 605 in the support base 602, and the negative pressure grooves 608 are connected to the circular groove 603.

[0044] When in use, the negative pressure tank 608 facilitates the adsorption of the photoresist filling container, thereby improving the stability of loading and unloading and filling operations.

[0045] For example, Figure 8 As shown, the utility model further includes that the filling assembly 4 includes a material storage box 401 , a discharge pipe 402 is provided at the bottom of the material storage box 401 , and a filling nozzle 403 is provided at one end of the discharge pipe 402 .

[0046] When in use, a filling mechanism can be formed by the material storage box 401, the discharge pipe 402 and the filling nozzle 403 to perform a filling process on the photoresist.

[0047] For example, Figure 6As shown, the utility model also includes that the guide assembly 7 includes a telescopic sleeve 701, and the bottom of the telescopic sleeve 701 is connected to the support base 602 by bolts, the top of the telescopic sleeve 701 is sleeved and connected to the telescopic rod 702, and the top of the telescopic rod 702 is connected to the sliding frame 601 by bolts, and a compression spring 703 is provided in the telescopic sleeve 701 on the outer periphery of the telescopic rod 702.

[0048] When in use, the sliding connection between the telescopic sleeve 701 and the telescopic rod 702 can assist in guiding the sliding of the support base 602 , and the elastic force can be utilized to push the guide assembly 7 by compressing the spring 703 , thereby increasing the flexibility of the guide assembly 7 .

[0049] For example, Fig. 9 As shown, the utility model also includes that the filter assembly 9 includes a filter tank 901, a filter screen 902 is fixedly installed in the filter tank 901 through a slot, and the top of the filter tank 901 is connected to a cover plate 903 by bolts.

[0050] When in use, the extracted gas can be subjected to auxiliary filtering and cleaning treatment through the filter tank 901 and the filter screen 902 .

[0051] When the utility model is in use, the operator first opens the filling chamber, pulls the support base 602 downward, and places the filling container in the placement groove 605. Under the push of the elastic force of the compression spring 703, the support base 602 drives the container to slide upward to the opening of the sliding frame 601 to complete the limit, and then manually turns on the servo motor 504 to drive the screw rod 502 to rotate, and the ball slider 503 drives the sliding frame 601 to move vertically upward to perform the loading action. At the same time, the vacuum pump 8 is manually turned on, and the negative pressure generated by the suction of the vacuum pump 8 sucks the dust in the filling chamber 2 into the circular groove 603 for recycling. In addition, the surface of the container is adsorbed by the negative pressure groove 608, which can also improve the stability of the container during the loading process. Therefore, the use effect of the equipment can be improved by adding an auxiliary cleaning mechanism, and the quality of the filling environment can be improved at the same time.

[0052] Then, the filling nozzle 403 is manually opened to fill the container. After the filling is completed, the operator takes out the container and drives the support base 602 to slide upward through the driving assembly 5 again, so that the filling nozzle 403 is in the placement groove 605, and manually opens the external water pump to rinse the surface of the filling nozzle 403 through the flushing nozzle 606, so as to remove the residual photoresist on the surface and avoid the filling nozzle 403 from contacting with the subsequent photoresist to cause the particles to meet the standards.

[0053] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited to the above embodiments. The above embodiments and descriptions in the specification are only to illustrate the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the protection required by the utility model. The scope of protection required by the utility model is defined by the attached claims and their equivalents.

Claims

1. A photoresist filling device, characterized in that: The filling machine (1) comprises a filling chamber (2) and a control chamber (3) arranged in the filling machine (1), a filling assembly (4) arranged in the filling chamber (2), a driving assembly (5) arranged in the filling chamber (2) on one side of the filling assembly (4), a displacement assembly (6) for assisting filling being slidably sleeved on the periphery of the driving assembly (5), a guide assembly (7) being arranged between the displacement assemblies (6), and a filtering assembly (9) being arranged in the control chamber (3); The displacement assembly (6) comprises a sliding frame (601), a support base (602) is arranged at the bottom of the sliding frame (601), a circular groove (603) is provided in the sliding frame (601) and the support base (602), a filter plate (604) is fixedly installed in the circular groove (603) through a slot, and an air pump (8) is connected to one side of the control chamber (3) through bolts, and the air inlet end of the air pump (8) is connected to the circular groove (603) through a hose.

2. A photoresist filling device according to claim 1, characterized in that: A placement groove (605) is provided at the top of the support base (602), a flushing nozzle (606) is connected to the surface of the placement groove (605) via bolts, and a drainage pipe (607) is provided at the bottom of the support base (602), and the drainage pipe (607) is connected to the placement groove (605).

3. A photoresist filling device according to claim 1, characterized in that: The driving assembly (5) comprises a fixed frame (501), a screw rod (502) is installed in the fixed frame (501) via a bearing, a corresponding ball slider (503) is sleeved on the outer periphery of the screw rod (502), and the ball slider (503) is connected to a sliding frame (601) via bolts, the top of the fixed frame (501) is connected to a servo motor (504) via bolts, and the servo motor (504) is connected to the screw rod (502) via a driving shaft.

4. A photoresist filling device according to claim 2, characterized in that: Negative pressure grooves (608) are provided on both sides of the placement groove (605) in the support base (602), and the negative pressure grooves (608) are connected to the circular groove (603).

5. The photoresist filling equipment according to claim 1, characterized in that: The filling assembly (4) comprises a material storage box (401), a discharge pipe (402) is arranged at the bottom of the material storage box (401), and a filling nozzle (403) is arranged at one end of the discharge pipe (402).

6. A photoresist filling device according to claim 1, characterized in that: The guide assembly (7) comprises a telescopic sleeve (701), wherein the bottom of the telescopic sleeve (701) is connected to a support base (602) via bolts, the top of the telescopic sleeve (701) is sleeved and connected to a telescopic rod (702), and the top of the telescopic rod (702) is connected to a sliding frame (601) via bolts, and a compression spring (703) is provided in the telescopic sleeve (701) and is located on the outer periphery of the telescopic rod (702).

7. The photoresist filling equipment according to claim 1, characterized in that: The filter assembly (9) comprises a filter tank (901), a filter screen (902) is fixedly installed in the filter tank (901) via a clamping slot, and the top of the filter tank (901) is connected to a cover plate (903) via bolts.

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