Vacuum coating machine with height convenient to adjust

Abstract

The utility model discloses a vacuum coating machine convenient for height adjustment, and relates to the technical field of vacuum coating. Wherein the coating mechanism comprises a coating assembly, a mounting assembly and a feeding port, a coating space is arranged in the coating mechanism, the coating assembly is arranged at the top of the coating space, the mounting assembly is arranged on the peripheral side of the coating space, and the feeding port is formed in one end of the coating space; the adjusting mechanism comprises a mechanism body, a material carrying assembly, a lifting assembly and a moving assembly, the material carrying assembly is connected with the lifting assembly, the lifting assembly is movably arranged on the mechanism body, and the mechanism body is arranged on the moving assembly. Through combination of the lifting assembly and the mechanism body, the height of the material carrying assembly can be freely adjusted in the vertical direction. According to the structure, the adaptability of the equipment to products with different sizes and different shapes is greatly improved, and diversified production requirements can be easily met without replacing the equipment or carrying out complex adjustment.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating machine which is convenient for adjusting the height. Background Art

[0002] Vacuum coating machine generally refers to the equipment that performs coating operation under high vacuum degree, including many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. At present, the main types are divided into evaporation and sputtering.

[0003] Among them, magnetron sputtering is a type of physical vapor deposition (PVD). The general sputtering method can be used to prepare multiple materials such as metals, semiconductors, insulators, etc., and has the advantages of simple equipment, easy control, large coating area and strong adhesion. Then, with the continuous development of the industry, the current customer needs are becoming more and more diversified, and the shapes and sizes of the coated products are different. In this way, when the same vacuum coating machine is used for coating, the film formation rate of different products may vary greatly, which will lead to a reduction in production capacity. Utility Model Content

[0004] In order to solve at least one of the above technical problems, the utility model provides a vacuum coating machine with easy height adjustment.

[0005] To achieve the above objectives, the embodiments of the present application adopt the following technical solutions:

[0006] The utility model provides a vacuum coating machine with convenient height adjustment, comprising:

[0007] A coating mechanism, the coating mechanism comprising a coating component, a mounting component and a feed port, a coating space is provided inside the coating mechanism, the coating component is provided at the top of the coating space, the mounting component is provided at the peripheral side of the coating space, and the feed port is provided at one end of the coating space;

[0008] The adjusting mechanism comprises a mechanism body, a loading component, a lifting component and a moving component, wherein the loading component is connected to the lifting component, the lifting component is movably arranged on the mechanism body, and the mechanism body is arranged on the moving component.

[0009] In a possible implementation of the present application, the mounting assembly includes a first mounting member and a second mounting member, and the first mounting member and the second mounting member are arranged at the same height.

[0010] In a possible implementation of the present application, a plurality of pairs of one-to-one corresponding first mounting members and second mounting members are arranged on both sides of the coating assembly along a direction perpendicular to the coating assembly.

[0011] In a possible implementation of the present application, a width of the material carrier assembly is smaller than a distance between the first mounting member and the second mounting member.

[0012] In a possible implementation of the present application, the material carrier assembly includes a first material carrier and a second material carrier that are arranged on the same horizontal plane, and the first material carrier and the second material carrier are arranged in parallel.

[0013] In a possible implementation of the present application, the lifting assembly includes a track module and a pulley module, and the track module is fixedly connected to the mechanism body.

[0014] In a possible implementation of the present application, the moving component is a universal wheel.

[0015] In a possible implementation of the present application, a positioning assembly is further included, and the positioning assembly is fixedly connected to the lifting assembly.

[0016] Compared with the prior art, the utility model is a vacuum coating machine that is easy to adjust in height. By combining the lifting component with the main body of the mechanism, the height of the loading component can be freely adjusted in the vertical direction. This structure greatly improves the adaptability of the equipment to products of different sizes and shapes, and can easily cope with diverse production needs without replacing equipment or making complicated adjustments. Through the dual adjustment functions in height and horizontal directions, the vacuum coating machine can make full use of the production space and avoid space waste caused by fixed equipment. This is especially important for factories or laboratories with limited production space, which helps to improve space utilization and overall production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the implementation modes of the present application, the drawings required for use in the implementation modes of the present application will be described below.

[0018] Figure 1 This is a schematic diagram of the structure of an adjustment mechanism in a vacuum coating machine that is convenient for adjusting the height provided by the utility model;

[0019] Figure 2 This is another structural schematic diagram of an adjustment mechanism in a vacuum coating machine that is convenient for adjusting the height provided by the utility model;

[0020] Figure 3 The utility model is a schematic structural diagram of a coating mechanism in a vacuum coating machine which is convenient for adjusting the height.

[0021] Description of reference numerals:

[0022] 10. Coating mechanism; 110. Coating assembly; 120. Mounting assembly; 1210. First mounting part; 1220. Second mounting part; 130. Feed inlet; 20. Adjusting mechanism; 210. Mechanism body; 220. Loading assembly; 2210. First loading part; 2220. Second loading part; 230. Lifting assembly; 2310. Track module; 2320. Pulley module; 240. Moving assembly; 250. Positioning assembly. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0024] The terms "first", "second", etc. in the embodiments of the utility model are only used to distinguish related technical features and do not represent the order of precedence. It should be understood that the data used in this way can be interchanged where appropriate, so as to describe the embodiments of the present application described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0025] In the present application, the directions or positional relationships indicated by the terms "upper", "lower", "inner", "middle", "outer", "front", "back", etc. are based on the directions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific direction, or to be constructed and operated in a specific direction.

[0026] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0027] The utility model provides a vacuum coating machine that is easy to adjust in height. By combining a lifting component with a main body of the mechanism, the height of the loading component can be freely adjusted in the vertical direction. This structure greatly improves the adaptability of the equipment to products of different sizes and shapes, and can easily cope with diverse production needs without replacing equipment or making complicated adjustments. Through the dual adjustment functions in height and horizontal directions, the vacuum coating machine can make full use of the production space and avoid space waste caused by fixed equipment. This is especially important for factories or laboratories with limited production space, which helps to improve space utilization and overall production efficiency. Example

[0028] The present invention provides a vacuum coating machine that is easy to adjust in height. Figures 1 to 3 As shown, it includes a coating mechanism 10, the coating mechanism 10 includes a coating component 110, a mounting component 120 and a feed port 130, a coating space is provided inside the coating mechanism 10, the coating component 110 is provided at the top of the coating space, the mounting component 120 is provided on the peripheral side of the coating space, and the feed port 130 is provided at one end of the coating space; an adjusting mechanism 20, the adjusting mechanism 20 includes a mechanism body 210, a loading component 220, a lifting component 230 and a moving component 240, the loading component 220 is connected to the lifting component 230, the lifting component 230 is movably provided on the mechanism body 210, and the mechanism body 210 is provided on the moving component 240.

[0029] In this way, by combining the lifting assembly 230 with the main body 210, the height of the carrier assembly 220 (i.e., the part where the product to be coated is placed) can be freely adjusted in the vertical direction. This structure greatly improves the adaptability of the equipment to products of different sizes and shapes, and can easily meet diverse production needs without changing equipment or making complex adjustments. Since the height of the carrier assembly 220 can be quickly adjusted, the operator can arrange the coating process more efficiently, reducing waiting time and equipment idle time. At the same time, precise height adjustment also helps to optimize the coating process parameters, improve the coating quality and consistency, and further improve the overall production efficiency.

[0030] Since the main body 210 of the mechanism is arranged on the moving assembly 240, the entire coating mechanism 10 (including the coating space and the coating assembly 110) can move in the horizontal direction. This structure is not only convenient for the installation and maintenance of the equipment, but also enables the operator to easily send the product to be coated into the coating space and adjust it to the corresponding position for coating treatment, thereby simplifying the operation process. Through the dual adjustment function of height and horizontal direction, the vacuum coating machine can make full use of the production space and avoid the waste of space caused by the fixed equipment. This is particularly important for factories or laboratories with limited production space, which helps to improve space utilization and overall production efficiency.

[0031] The coating assembly 110 is arranged at the top of the coating space, while the installation assembly 120 is arranged on the side. This layout helps to achieve uniformity and consistency in the coating process. At the same time, the precise control of the loading assembly 220 by the lifting assembly 230 can ensure the optimal distance and angle between the product and the coating source during the coating process, thereby further improving the coating effect and quality. This technical solution is not only suitable for the coating processing of traditional metals, semiconductors and other materials, but also has strong adaptability and can meet the coating needs of new materials and complex structure products. This provides strong support for the application of vacuum coating technology in a wider range of fields.

[0032] like Figure 3 As shown, the mounting assembly 120 includes a first mounting member 1210 and a second mounting member 1220, and the first mounting member 1210 and the second mounting member 1220 are arranged at the same height. More specifically, a plurality of pairs of first mounting members 1210 and second mounting members 1220 corresponding to each other are arranged on both sides of the coating assembly 110 in a direction perpendicular to the coating assembly 110.

[0033] In this way, the first mounting member 1210 and the second mounting member 1220 are arranged in pairs on both sides of the coating assembly 110 in a direction perpendicular to the coating assembly 110, and their heights are the same. This symmetrical and balanced layout helps to enhance the overall structural stability of the coating mechanism 10. Since the first mounting member 1210 and the second mounting member 1220 are of the same height, their influence on environmental factors such as gas flow and temperature distribution in the coating space is also consistent. This helps to create a more uniform and stable coating environment in the coating space, thereby ensuring the uniform deposition of the coating layer on the surface of the product to be coated and improving the consistency and quality of the coating layer. Although the first mounting member 1210 and the second mounting member 1220 have the same height, they can still be set to be adjustable to accommodate products to be coated of different sizes and shapes. For example, the layout in the coating space can be optimized by adjusting the spacing or mounting position between the mounting members to ensure the optimal relative position between the product and the coating assembly 110. This flexibility enables the vacuum coating machine to cope with more diverse production needs. The first mounting member 1210 and the second mounting member 1220 are arranged in pairs and have the same height. This standardized structure makes them more convenient and quick to maintain and replace. When the mounting member needs to be cleaned, repaired or replaced, the operator can quickly locate and deal with the corresponding problem, reducing downtime and maintenance costs. Since the setting of the mounting assembly 120 takes into account the stability of the structure and the uniformity of the coating, the coating process can be carried out more stably and efficiently during the actual production process. This helps to reduce rework and downtime caused by equipment failure or substandard coating quality, thereby improving overall production efficiency.

[0034] like Figure 1 and Figure 3 As shown, more specifically, the width of the carrier assembly 220 may be smaller than the distance between the first mounting member 1210 and the second mounting member 1220. The narrow carrier assembly 220 enables the operator to more easily place it in and out of the coating space, especially when it is necessary to frequently change products or adjust positions. In addition, this structure also provides more room for subsequent equipment upgrades or modifications, making the entire coating system more flexible and expandable. Maintaining a certain distance between the carrier assembly 220 and the mounting member helps to reduce accidental collisions and damage caused by improper operation or equipment failure. The width of the carrier assembly 220 can be set to be adjustable (although smaller than the distance between the mounting members), so it can more flexibly adapt to products to be coated of different sizes and shapes. This adaptability enables vacuum coating machines to be widely used in various fields to meet the production needs of different customers.

[0035] like Figure 1 As shown, more specifically, the material carrier assembly 220 includes a first material carrier 2210 and a second material carrier 2220 which are arranged on the same horizontal plane, and the first material carrier 2210 and the second material carrier 2220 are arranged in parallel.

[0036] like Figure 2As shown, more specifically, the lifting assembly 230 includes a track module 2310 and a pulley module 2320, and the track module 2310 is fixedly connected to the mechanism body 210. The track module 2310 provides a stable and smooth sliding path for the pulley module 2320. The pulley module 2320 moves along the track module 2310, which can ensure the stability and accuracy of the carrier assembly 220 during the lifting process. This structure reduces the shaking and vibration during the lifting process, which helps to protect the coating equipment and the products in the coating process from damage. Since the pulley module 2320 moves relatively smoothly on the track module 2310, a faster lifting speed can be achieved. This is of great significance for improving production efficiency, especially in production lines that require frequent adjustment of the coating position or processing of a large number of products. The fixed connection between the track module 2310 and the mechanism body 210 ensures the precise positioning of the lifting assembly 230 during the lifting process. By precisely controlling the position of the pulley module 2320 on the track module 2310, the height of the carrier assembly 220 can be precisely adjusted to meet the coating requirements of different products. : The fixed connection between the track module 2310 and the mechanism body 210 not only provides a stable lifting path, but also enhances the structural strength of the entire lifting assembly 230. This enables the lifting assembly 230 to withstand greater weight and load, and improves the service life and reliability of the equipment. Since the track module 2310 can be customized and installed as needed, it can be flexibly adapted to different production environments and space layouts. This provides more options for the installation and configuration of the vacuum coating machine, which helps to optimize the production line and improve efficiency.

[0037] like Figure 2As shown, more specifically, the moving component 240 is a universal wheel. The universal wheel allows the vacuum coating machine to move freely in multiple directions, including forward, backward, left and right turns, etc. This high degree of flexibility allows the equipment to easily adapt to various production environments and site layouts, whether in a spacious workshop or a small laboratory, it can be moved quickly and conveniently. Compared with the fixed installation method, the use of universal wheels as the moving component 240 can greatly simplify the operation process of the equipment. The operator only needs to push or pull the machine to move and position the equipment without complex mechanical devices or additional power sources. Since the universal wheel allows the equipment to be moved flexibly, the vacuum coating machine can be pushed to a corner or other idle position when not in use to save valuable production space. This is particularly important for production environments with limited space resources. By moving the vacuum coating machine quickly and conveniently, the operator can arrange the production process more flexibly, reducing waiting time and equipment idle time. At the same time, when multiple batches or different types of products need to be processed, the equipment can be quickly moved to the corresponding production area, thereby improving overall production efficiency. The setting of universal wheels enables the vacuum coating machine to easily cope with various uneven or complex ground conditions. Whether it is a smooth concrete floor, a rough steel plate platform or a ramped channel, the equipment can remain stable and move smoothly, thereby improving the adaptability and reliability of the equipment. When the vacuum coating machine needs to be maintained and serviced, the operator can easily move it to the maintenance area or workbench. This convenience helps to reduce maintenance time and costs and ensure that the equipment is always in good working condition.

[0038] like Figure 2As shown, more specifically, it may be that it also includes a positioning component 250, and the positioning component 250 is fixedly connected to the lifting component 230. The positioning component 250 can be used to identify the installation component 120 and speed up the placement of the product to be coated. The positioning component 250 can accurately identify the installation component 120 to ensure that when the lifting component 230 moves the carrier component 220, it can be accurately positioned to the specified installation position. This avoids position deviations caused by human operating errors or mechanical errors, and improves the stability and reliability of the coating process. With the assistance of the positioning component 250, the operator can pick up and place the product to be coated more quickly. The positioning component 250 not only provides accurate position information, but also may integrate an automated or semi-automated placement mechanism, thereby further shortening the placement time and improving production efficiency. The introduction of the positioning component 250 reduces the need for manual position adjustment and confirmation during the coating process. This can not only reduce labor intensity, but also reduce errors and uncertainties caused by human factors, and improve the consistency of coating quality. In an automated or semi-automated production environment, the precise identification capability of the positioning component 250 helps avoid collisions and frictions between devices and protects the safety of equipment and products. At the same time, it can also reduce accidents caused by improper operation and improve the safety of the entire production process. The positioning component 250 may have adjustable or configurable functions to accommodate products to be coated of different sizes, shapes and weights. This flexibility enables the vacuum coating machine to handle more diverse production tasks and meet the needs of different customers. With the development of intelligent manufacturing technology, the positioning component 250 may be integrated with other parts of the coating machine (such as control systems, monitoring systems, etc.) to form a more intelligent and automated production system. This integrated setting helps to improve production efficiency, reduce operating costs, and bring greater competitive advantages to enterprises.

[0039] Compared with the prior art, the embodiment of the utility model provides a vacuum coating machine that is easy to adjust in height. By combining the lifting component with the main body of the mechanism, the height of the loading component can be freely adjusted in the vertical direction. This structure greatly improves the adaptability of the equipment to products of different sizes and shapes, and can easily cope with diverse production needs without replacing equipment or making complicated adjustments. Through the dual adjustment functions in height and horizontal directions, the vacuum coating machine can make full use of the production space and avoid space waste caused by fixed equipment. This is especially important for factories or laboratories with limited production space, which helps to improve space utilization and overall production efficiency.

[0040] The above are only preferred specific implementation methods of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be covered within the protection scope of the present invention.

Claims

1. A vacuum coating machine that is easy to adjust in height, characterized in that: include: A coating mechanism (10), the coating mechanism (10) comprising a coating component (110), a mounting component (120) and a feed port (130), a coating space being provided inside the coating mechanism (10), the coating component (110) being provided at the top of the coating space, the mounting component (120) being provided at the peripheral side of the coating space, and the feed port (130) being provided at one end of the coating space; An adjusting mechanism (20), the adjusting mechanism (20) comprising a mechanism body (210), a material loading assembly (220), a lifting assembly (230) and a moving assembly (240), the material loading assembly (220) being connected to the lifting assembly (230), the lifting assembly (230) being movably disposed on the mechanism body (210), and the mechanism body (210) being disposed on the moving assembly (240).

2. The vacuum coating machine with easy height adjustment according to claim 1, characterized in that: The mounting assembly (120) comprises a first mounting member (1210) and a second mounting member (1220), and the first mounting member (1210) and the second mounting member (1220) are arranged at the same height.

3. The vacuum coating machine with easy height adjustment according to claim 2, characterized in that: A plurality of pairs of one-to-one corresponding first mounting members (1210) and second mounting members (1220) are arranged on both sides of the coating assembly (110) in a direction perpendicular to the coating assembly (110).

4. The height-adjustable vacuum coating machine according to claim 2 or 3, characterized in that: The width of the material carrying component (220) is smaller than the distance between the first mounting member (1210) and the second mounting member (1220).

5. The vacuum coating machine with easy height adjustment according to claim 1, characterized in that: The material carrier assembly (220) comprises a first material carrier (2210) and a second material carrier (2220) which are arranged on the same horizontal plane, and the first material carrier (2210) and the second material carrier (2220) are arranged in parallel.

6. The vacuum coating machine with easy height adjustment according to claim 1, characterized in that: The lifting assembly (230) comprises a track module (2310) and a pulley module (2320), and the track module (2310) is fixedly connected to the mechanism body (210).

7. The vacuum coating machine with easy height adjustment according to claim 1, characterized in that: The moving component (240) is a universal wheel.

8. The vacuum coating machine with easy height adjustment according to claim 1, characterized in that: It also includes a positioning assembly (250), wherein the positioning assembly (250) is fixedly connected to the lifting assembly (230).

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