Heat insulation structure of epitaxial furnace
By setting a heat shield on the outside of the second and first half of the epitaxial furnace and fixing the barrier between the two, the problems of heat loss and energy consumption during the heating process of the existing epitaxial furnace are solved, and more efficient insulation effect and lower equipment losses are achieved.
Patent Information
- Application Number
- CN202421789828.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-26
- Publication Date
- 2025-05-09
- Estimated Expiration
- 2034-07-26
AI Technical Summary
During the heating process, the existing epitaxial furnaces have too small gaps in the insulation felt, causing the contact surface to be ignited. If the gap is too large, it will cause heat loss and energy consumption, which will affect production quality and abnormal equipment losses.
An insulation structure of an epitaxial furnace is designed. By setting a lower and upper insulation cover on the outside of the second half of the month heating seat and the first half of the month heating seat, and a barrier strip is set between the two. The barrier strip is fixed at the sharp corner of the heat shield to avoid deformation and bending caused by high temperature, thereby avoiding ignition and heat loss caused by resistance contact.
It effectively avoids contact and gaps between the heat insulation covers, reduces heat loss, improves energy efficiency, reduces equipment losses and production costs, and improves the production quality of the epitaxial furnace.
Smart Images
Figure CN222846893U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of epitaxial furnaces, in particular to a heat insulation structure of an epitaxial furnace. Background Art
[0002] With the advancement of science and technology, the third-generation semiconductor materials have many advantages over traditional silicon-based power devices, effectively reducing power loss and having high thermal stability, making them widely used in photovoltaic and new energy vehicle fields in high voltage, high current and high power situations. The epitaxial furnace is one of the important equipment in the processing of semiconductor materials. The horizontal planetary reactor epitaxial furnace has a large plate in the reaction chamber, on which are arranged several small plate bases for placing substrates. An injector connected to the air inlet pipeline is arranged above the center of the large plate. The source gas enters the reaction chamber through the injector from the air inlet pipeline and is transported radially along the large plate. The exhaust gas is discharged from the exhaust channel around the large plate. A heating coil for heating the reaction chamber is arranged at the bottom of the large plate. Due to the characteristics of low cost, high speed, high production capacity of 900℃ wafer collection, horizontal epitaxy is the most mass-produced equipment among SiC substrate epitaxial manufacturers.
[0003] The usual horizontal air intake SiC epitaxial furnace adopts electromagnetic induction heating, and the upper and lower heating seats of the workpiece in the furnace are heated by external coils to achieve the heating function; in order to avoid heat loss, graphite hard felt is added on the outside for insulation treatment. However, if the reserved gap of the insulation felt is too small, it will cause sparks on the contact surface, and if the gap is too large, it will cause heat loss and excessive energy consumption, which greatly affects the production quality and abnormal loss of the epitaxial furnace. Utility Model Content
[0004] The utility model aims to provide an insulation structure for an epitaxial furnace to solve the problems in the prior art that too small a reserved gap for the thermal insulation felt may lead to ignition on the contact surface, and too large a gap may cause heat loss and excessive energy consumption, which greatly affects the production quality and abnormal loss of the epitaxial furnace.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a heat insulation structure of an epitaxial furnace, comprising a lower semi-moon heating seat and an upper semi-moon heating seat, the two sides of the lower semi-moon heating seat and the upper semi-moon heating seat are supported by baffles, a lower heat insulation cover is arranged on the outer side of the lower semi-moon heating seat, an upper heat insulation cover is arranged on the outer side of the upper semi-moon heating seat, a baffle bar is arranged between the lower heat insulation cover and the upper heat insulation cover, the baffle bar is fixed at the sharp corner of the heat insulation cover, and during electromagnetic induction heating, the baffle bar always isolates the contact between the heat insulation covers to prevent the heat insulation covers from being deformed and bent due to high temperature.
[0006] Preferably, the upper half-moon heating seat is provided with a limiting groove on one side of the lower half-moon heating seat, and the lower half-moon heating seat is provided with a limiting groove on one side of the upper half-moon heating seat, and the limiting groove is used to limit the baffle; the baffle is located at the limiting grooves of the upper half-moon heating seat and the lower half-moon heating seat.
[0007] Preferably, the two baffles are arranged in parallel.
[0008] Preferably, the upper heat insulation cover is provided with a stepped structure on one side of the lower heat insulation cover, and the lower heat insulation cover is provided with a stepped structure on one side of the upper heat insulation cover. The stepped structure has a relatively good heat insulation effect.
[0009] Preferably, there are four baffles in total, two of which are located at the stepped structure of the upper heat insulation cover, and the other two are located at the stepped structure of the lower heat insulation cover; the four baffles are fixed at the sharp corners of the heat insulation cover, and during electromagnetic induction heating, the baffles always isolate the contact between the heat insulation covers to prevent the heat insulation covers from deforming and bending due to high temperature, thereby preventing the resistances of the upper and lower heating seats from contacting each other and causing sparks, thereby preventing damage to components, and avoiding gaps between the two heat insulation covers to prevent heat loss.
[0010] Compared with the prior art, the utility model has the following beneficial effects: a lower heat insulation cover is arranged on the outer side of the lower semi-moon heating seat, an upper heat insulation cover is arranged on the outer side of the upper semi-moon heating seat, and a baffle is arranged between the lower heat insulation cover and the upper heat insulation cover; four baffles are fixed at the sharp corners of the heat insulation covers, and during electromagnetic induction heating, the baffles always isolate the contact between the heat insulation covers to avoid deformation and bending of the heat insulation covers caused by high temperature, thereby avoiding sparking caused by contact between the resistances of the upper semi-moon heating seat and the lower semi-moon heating seat, avoiding damage to components, and avoiding the gap between the two heat insulation covers to prevent heat loss. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:
[0012] Figure 1 It is a structural schematic diagram of the utility model;
[0013] Figure 2 It is a schematic diagram of the structure of the utility model when the upper heat insulation cover is removed;
[0014] Figure 3 It is a schematic diagram of the structure of the utility model when the upper heat insulation cover and the lower heat insulation cover are removed;
[0015] Figure 4 This is a schematic diagram of the structure of the lower half of the heating seat of the utility model;
[0016] Figure 5 It is a structural schematic diagram of the lower heat insulation cover of the utility model.
[0017] In the figure: 1, lower half of the heating seat; 2, baffle; 3, upper half of the heating seat; 4, upper heat insulation cover; 5, lower heat insulation cover; 6, baffle bar; 101, limit groove; 501, step structure. DETAILED DESCRIPTION
[0018] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the utility model for which protection is claimed, but merely represents selected embodiments of the utility model.
[0019] See also Figure 1-3 In the embodiment of the utility model, a heat insulation structure of an epitaxial furnace includes a lower half-moon heating seat 1 and an upper half-moon heating seat 3. The lower half-moon heating seat 1 and the upper half-moon heating seat 3 are supported on both sides by baffles 2. A lower heat insulation cover 5 is arranged on the outer side of the lower half-moon heating seat 1, and an upper heat insulation cover 4 is arranged on the outer side of the upper half-moon heating seat 3. A baffle 6 is arranged between the lower heat insulation cover 5 and the upper heat insulation cover 4. The baffle is fixed at the sharp corner of the heat insulation cover. During electromagnetic induction heating, the baffle always isolates the contact between the heat insulation covers to avoid deformation and bending of the heat insulation covers caused by high temperature. The baffle 2 and the baffle 6 adopt sintered silicon carbide + CVD silicon carbide coating 100um; the lower heat insulation cover 5 and the upper heat insulation cover 4 both adopt graphite hard felt + graphite paint coating.
[0020] like Figure 2-4 ; The upper half-moon heating seat 3 is located on one side of the lower half-moon heating seat 1 and a limiting groove 101 is set, and the lower half-moon heating seat 1 is located on one side of the upper half-moon heating seat 3 and a limiting groove 101 is set; the baffle 2 is located at the limiting groove 101 of the upper half-moon heating seat 3 and the lower half-moon heating seat 1, and the limiting groove 101 is used to limit the baffle 2; the two baffles 2 are arranged in parallel.
[0021] like Figure 2 , 3and 5; the upper heat insulation cover 4 is provided with a stepped structure 501 on one side of the lower heat insulation cover 5, and the stepped structure makes the heat insulation effect relatively good, and the lower heat insulation cover 5 is provided with a stepped structure 501 on one side of the upper heat insulation cover 4; there are four baffles 6 in total, two of which are located at the stepped structure 501 of the upper heat insulation cover 4, and the other two baffles 6 are located at the stepped structure 501 of the lower heat insulation cover 5; the four baffles are fixed at the sharp corners of the heat insulation covers, and during electromagnetic induction heating, the baffles always isolate the contact between the heat insulation covers to prevent the heat insulation covers from being deformed and bent due to high temperature, thereby contacting the upper and lower semi-moon heating seat resistors to cause sparks, resulting in damage to components, while avoiding the gap between the two heat insulation covers to prevent heat loss.
[0022] The working principle of the utility model is that four baffles 6 are fixed at the sharp corners of the heat insulation covers. During electromagnetic induction heating, the baffles 6 always isolate the contact between the heat insulation covers to prevent the heat insulation covers from being deformed and bent due to high temperature, thereby preventing the resistances of the upper half-moon heating seat and the lower half-moon heating seat from contacting each other to cause sparks and damage to components, while also avoiding the gap between the two heat insulation covers to prevent heat loss.
[0023] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A heat insulation structure of an epitaxial furnace, comprising a lower half-moon heating seat (1) and an upper half-moon heating seat (3), characterized in that: The lower half-moon heating seat (1) and the upper half-moon heating seat (3) are supported on both sides by baffles (2); a lower heat insulation cover (5) is arranged on the outer side of the lower half-moon heating seat (1); an upper heat insulation cover (4) is arranged on the outer side of the upper half-moon heating seat (3); and a baffle (6) is arranged between the lower heat insulation cover (5) and the upper heat insulation cover (4).
2. The heat insulation structure of an epitaxial furnace according to claim 1, characterized in that: The upper half-moon heating seat (3) is provided with a limiting groove (101) on one side of the lower half-moon heating seat (1), and the lower half-moon heating seat (1) is provided with a limiting groove (101) on one side of the upper half-moon heating seat (3); the baffle (2) is located at the limiting grooves (101) of the upper half-moon heating seat (3) and the lower half-moon heating seat (1).
3. The thermal insulation structure of an epitaxial furnace according to claim 1 or 2, characterized in that: The two baffles (2) are arranged in parallel.
4. The heat insulation structure of an epitaxial furnace according to claim 1, characterized in that: The upper heat insulation cover (4) is provided with a stepped structure (501) on one side of the lower heat insulation cover (5), and the lower heat insulation cover (5) is provided with a stepped structure (501) on one side of the upper heat insulation cover (4).
5. The heat insulation structure of an epitaxial furnace according to claim 4, characterized in that: A total of four baffles (6) are provided, of which two baffles (6) are located at the stepped structure (501) of the upper heat insulation cover (4), and the other two baffles (6) are located at the stepped structure (501) of the lower heat insulation cover (5).