Multi-section hinge and sealing cavity

Abstract

The utility model provides a multi-section hinge and a sealing cavity. The multi-section hinge is used for connecting a cavity and a sealing door of the cavity and comprises a first connecting rod, a second connecting rod and a third connecting rod, the first connecting rod and the second connecting rod are hinged through a first rotating shaft, and the second connecting rod and the third connecting rod are hinged through a second rotating shaft. The first connecting rod is connected with the side wall of the cavity; the third connecting rod is connected with the sealing door; a tensioning assembly is arranged between the second connecting rod and the third connecting rod, and the tensioning assembly applies acting force to the third connecting rod so that the third connecting rod can move around the second rotating shaft, and the sealing door is driven to be pressed in the opening direction of the cavity. According to the multi-section type hinge and the sealing cavity, the first connecting rod, the second connecting rod and the third connecting rod which are hinged to one another are arranged, and the tensioning assembly is arranged to apply rotation around the second rotating shaft to the third connecting rod so that the sealing door of the third connecting rod can be tightly pressed with the opening of the cavity; the sealing performance between the cavity and the sealing door which are connected through the multi-section hinge is improved.

Description

Technical Field

[0001] The utility model relates to a multi-section hinge and a sealing cavity. Background Art

[0002] In the semiconductor processing process, some specific process steps require the process chamber to be evacuated to a vacuum state for processing. The process chamber includes a chamber, a sealing door, and a door hinge connected to the chamber and the sealing door. The two ends of the existing door hinge are rigidly connected to the chamber and the sealing door respectively. Due to the structural reasons of the existing door hinge itself, when the sealing door covers the chamber, the sealing door and the chamber cannot be completely tightly fitted along the circumference of the chamber opening. There is a gap between the sealing door and the chamber at certain positions. In this way, when the chamber is evacuated, the gas outside the chamber will enter the chamber through the gap between the sealing door and the chamber, making the sealing of the chamber worse. In order to solve the problem of the gap between the door hinge connecting the sealing door and the cavity, the door hinge is designed as a floating structure. However, for the door hinge with a floating structure, when the sealing door falls on the cavity and the interior of the cavity has not yet been vacuumed, external force is required to press the sealing door tightly, so that the seal (usually an O-ring) between the cavity and the sealing door will produce a certain deformation to ensure that the sealing door and the cavity form a reliable seal, resulting in the sealing between the sealing door and the cavity before vacuuming being more complicated. Utility Model Content

[0003] The utility model aims to provide a multi-section hinge and a sealing cavity, which have the advantage of good sealing performance.

[0004] To achieve the above object, the utility model provides a multi-section hinge for connecting a cavity and a sealing door of the cavity, wherein the multi-section hinge comprises a first connecting rod, a second connecting rod and a third connecting rod, wherein the first connecting rod and the second connecting rod are hinged through a first rotating shaft, and the second connecting rod and the third connecting rod are hinged through a second rotating shaft;

[0005] The first connecting rod is connected to the side wall of the cavity;

[0006] The third connecting rod is connected to the sealing door;

[0007] And a tensioning assembly is arranged between the second connecting rod and the third connecting rod, and the tensioning assembly applies a force to the third connecting rod to generate a torque, so that the third connecting rod can move around the second rotating axis, driving the sealing door to be pressed toward the opening direction of the cavity.

[0008] Optionally, the third connecting rod includes a rod body and an extension portion, the extension portion extends from the second rotating axis in the direction of the first rotating axis, and the extension portion is arranged between the second connecting rod and the cavity, the tensioning assembly tightens the second connecting rod and the extension portion, the rod body extends from the second rotating axis in a direction away from the extension portion, and the rod body is used to connect the sealing door.

[0009] Optionally, the tensioning assembly includes a first elastic component and a pull rod component, the first end of the pull rod component is fixedly connected to the extension portion, the second end of the pull rod component passes through the second connecting rod, and the two ends of the first elastic component respectively abut against the second end of the pull rod component and the second connecting rod to enable the pull rod component to tension the extension portion.

[0010] Optionally, the pull rod component includes a first screw, and a first threaded hole matching the first screw is formed on the extension portion, and the first screw passes through the second connecting rod and is fixedly connected to the first threaded hole.

[0011] Optionally, a mounting groove is provided on the second connecting rod, the first elastic component and the second end of the pull rod component are arranged in the mounting groove, and the first elastic component abuts against a groove bottom surface of the mounting groove.

[0012] Optionally, the tensioning assembly includes a second elastic component, and two ends of the second elastic component are respectively connected to the second connecting rod and the extension portion.

[0013] Optionally, the tensioning assembly includes a third elastic component, which includes a coil spring body and a first end and a second end located at both ends of the coil spring body. The third elastic component is arranged at the second rotating axis, and the coil spring body is coaxially arranged with the second rotating axis, and the first end and the second end are respectively connected to the second connecting rod and the third connecting rod.

[0014] Optionally, along the axial direction of the second rotating shaft, a first slot and a second slot are respectively provided on the second connecting rod and the third connecting rod, the first end portion is engaged with the first slot, and the second end portion is engaged with the second slot.

[0015] Optionally, the tensioning assembly includes a first magnetic component and a second magnetic component that attract each other, and the first magnetic component and the second magnetic component are respectively arranged in the second connecting rod and the extension portion.

[0016] Optionally, an adjustment component is further provided on the second connecting rod, and the adjustment component is pressed against the extension portion from the second connecting rod to adjust the minimum distance of rotation of the extension portion toward the second connecting rod.

[0017] Optionally, a mounting hole is provided on the second connecting rod, and the adjusting component is disposed in the mounting hole. The adjusting component can move in the mounting hole and stay at different positions to abut against the extending portion.

[0018] Optionally, a thread is provided in the mounting hole, and the adjustment assembly includes a second screw matching the thread in the mounting hole, and the second screw abuts against the extension portion from the mounting hole.

[0019] Optionally, the mounting hole passes through the second connecting rod, and the adjusting assembly further includes an anti-loosening component, and the anti-loosening component abuts against the second screw.

[0020] Optionally, the anti-loosening component includes a third screw, and the third screw abuts against the second screw in the mounting hole.

[0021] The utility model also provides a sealed cavity, the sealed cavity comprising:

[0022] A cavity having an opening on one side, and a sealing groove for accommodating a sealing ring is provided around the outer periphery of the opening;

[0023] A sealing door in a flat plate shape, and the sealing door can cover the sealing groove to fit with the sealing ring to seal the cavity;

[0024] A multi-section hinge as described above is used to connect the cavity and the sealing door.

[0025] Optionally, the sealed cavity is a vacuum reaction chamber used in semiconductor manufacturing equipment, and the sealed cavity also includes a sealing handle, and the sealing handle and the multi-section hinge are relatively arranged at two ends of the opening of the cavity, and the sealing handle is detachably connected to the cavity and the sealing door to cooperate with the multi-section hinge to seal the sealing door and the cavity.

[0026] In summary, compared with the prior art, the multi-section hinge and sealed cavity provided by the utility model have the following beneficial effects:

[0027] The multi-section hinge and sealed cavity of the utility model are provided with a first connecting rod, a second connecting rod and a third connecting rod which are hinged to each other, and a tensioning assembly is provided to apply rotation about a second rotating axis to the third connecting rod so that the sealing door connected to the third connecting rod can be pressed against the opening of the cavity, thereby improving the sealing between the cavity connected by the multi-section hinge and the sealing door. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the multi-section hinge of the utility model.

[0029] Figure 2 It is a structural schematic diagram of the sealing chamber of the utility model.

[0030] Description of reference numerals:

[0031] Multi-section hinge 10

[0032] First connecting rod 110

[0033] Second connecting rod 120

[0034] Mounting slot 121

[0035] The third connecting rod 130

[0036] Rod body 131

[0037] Extension 132

[0038] Rotating shaft connection portion 133

[0039] First rotary axis 140

[0040] Second rotary axis 150

[0041] Tensioning assembly 160

[0042] The first elastic member 161

[0043] Tie rod component 162

[0044] Adjustment assembly 170

[0045] Second screw 171

[0046] Anti-loosening parts 172

[0047] Cavity 20

[0048] Seal 210

[0049] Sealed door 30

[0050] Sealed handle 40 DETAILED DESCRIPTION

[0051] The following will be combined with the appended examples in the present utility model Figure 1 -Attached Figure 2 , the technical scheme, structural features, objectives achieved and effects in the embodiments of the utility model are described in detail.

[0052] It should be noted that the drawings are in a very simplified form and use non-precise proportions. They are only used to conveniently and clearly assist in explaining the implementation methods of the utility model, and are not used to limit the conditions for the implementation of the utility model. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed by the utility model without affecting the efficacy and purpose that can be achieved by the utility model.

[0053] It should be noted that, in the present invention, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only the elements explicitly listed, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0054] In order to solve the problems that the existing door hinges cannot be completely sealed between the sealing door and the cavity due to their own structural defects, and the floating structure door hinges require external force to intervene to press the sealing door and the cavity before vacuuming, which is cumbersome to operate. The utility model proposes a multi-section hinge, including a first connecting rod, a second connecting rod and a third connecting rod, wherein the first connecting rod and the third connecting rod are used to connect the cavity and the sealing door respectively, and the two ends of the second connecting rod are movably connected to the first connecting rod and the third connecting rod, so that the third connecting rod can move relative to the first connecting rod while maintaining parallelism with the cavity opening, ensuring that the sealing door connected to the third connecting rod can be completely tightly sealed with the cavity, and the tensioning assembly tightens the third connecting rod toward the second connecting rod, so that the sealing door can be pressed against the sealing member on the cavity under the action of its own weight, so that the sealing member is deformed to ensure a good seal between the sealing door and the cavity. The multi-section hinge of the utility model can achieve complete sealing between the cavity and the sealing door connected at both ends of the multi-section hinge. Before vacuuming the cavity, when the multi-section hinge drives the sealing door to seal in the cavity, the sealing door presses the sealing ring on the cavity under the action of its own weight to cause deformation, thereby achieving reliable sealing between the sealing door and the cavity without the intervention of external force.

[0055] Specifically, Figure 1As shown, the utility model provides a multi-section hinge for connecting a cavity 20 and a sealing door 30 of the cavity 20, and the sealing door 30 is used to seal the opening of the cavity 20. The multi-section hinge includes a first connecting rod 110, a second connecting rod 120 and a third connecting rod 130, and the first connecting rod 110 is used to connect the side wall of the cavity 20, and the third connecting rod 130 is used to connect the sealing door 30. The first connecting rod 110 and the second connecting rod 120 are hinged by a first rotating shaft 140, and the second connecting rod 120 and the third connecting rod 130 are hinged by a second rotating shaft 150. A tensioning assembly 160 is also provided between the second connecting rod 120 and the third connecting rod 130. The sealing door 30 and the tensioning assembly 160 are respectively located on both sides of the second rotating shaft 150. The tensioning assembly 160 applies a force to the third connecting rod 130 to generate a torque, so that the third connecting rod 130 can move around the second rotating shaft 150, driving the sealing door 30 to be pressed toward the opening direction of the cavity 20. Each time the sealing door 30 is closed, the tensioning assembly 160 can adjust the position of the sealing door 30 by itself, and the tensioning assembly 160 drives the third connecting rod 130 and the sealing door 30 to be pressed toward the opening direction of the cavity 20, avoiding a gap between the sealing door 30 and the cavity 20, and ensuring a reliable seal between the sealing door 30 and the cavity 20.

[0056] The third connecting rod 130 includes a rod body 131, an extension portion 132 and a rotary shaft connection portion 133. The rotary shaft connection portion 133 is sleeved on the second rotary shaft 150 and can rotate around the second rotary shaft 150. The rod body 131 and the extension portion 132 disposed on both sides of the rotary shaft connection portion 133 are respectively located on both sides of the second rotary shaft 150. The tensioning assembly 160 tensions the extension portion 132 of the third connecting rod 130. The extension portion 132 extends from the second rotary shaft 150 to the direction of the first rotary shaft 140; the rod body 131 extends from the second rotary shaft 150 to the direction away from the extension portion 132. When the first connecting rod 110 is connected to the side wall of the cavity 20, the third connecting rod 130 is connected to the sealing door 30, and the multi-section hinge is applied to the connection between the sealing cavity 20 and the sealing door 30, the extension portion 132 is arranged between the second connecting rod 120 and the cavity 20, and the tensioning assembly 160 tightens the second connecting rod 120 and the extension portion 132, so that the extension portion 132 has a tendency to move toward the second connecting rod 120 around the second rotating axis 150. Since the rod body 131 and the extension portion 132 are respectively located at the two ends of the rotating shaft connection portion 133, when the extension portion 132 is tightened upward by the tensioning assembly 160 toward the direction of the second connecting rod 120, the extension portion 132 drives the rotating shaft connection portion 133 to rotate around the second rotating shaft 150, and the rotating shaft connection portion 133 drives the rod body 131 to move downward around the second rotating shaft 150, and the rod body 131 drives the sealing door 30 to be pressed toward the cavity 20, ensuring that there is no gap between the sealing door 30 connected to the rod body 131 and the cavity 20, thereby achieving reliable sealing between the sealing door 30 connected to the rod body 131 and the cavity 20.

[0057] In this embodiment, the tensioning assembly 160 includes a first elastic component 161 and a rod component 162. The first end of the rod component 162 is fixedly connected to the extension portion 132, the second end of the rod component 162 passes through the lower end of the second connecting rod 120, and the two ends of the first elastic component 161 respectively abut against the second end of the rod component 162 and the second connecting rod 120 so that the rod component 162 tensions the extension portion 132. The first elastic component 161 can be a spring. During the process of compression and sealing of the sealing cavity 20 and the sealing door 30, the first elastic component 161 is always in a compressed state, thereby applying a force perpendicular to the second connecting rod 120 and moving the force upward away from the second connecting rod 120 in the vertical direction to the second end of the rod component 162. The first end of the pull rod component 162 is fixedly connected to the extension portion 132, and the force applied by the first elastic component 161 to the second end of the pull rod component 162 is transmitted to the extension portion 132 through the pull rod component 162, so that the extension portion 132 can move toward the second connecting rod 120 or has a tendency to move toward the second connecting rod 120. Since the rod body 131 and the extension portion 132 are located on both sides of the second rotating shaft 150, when the extension portion 132 moves toward the second connecting rod 120, the rod body 131 is The other side of the rotating shaft 150 moves downward; when the extension portion 132 has a tendency to move upward in the vertical direction toward the second connecting rod 120, the rod body 131 has a tendency to move downward around the second rotating shaft 150; the rod body 131 drives the sealing door 30 connected to it to be pressed against the opening of the cavity 20, ensuring that there is no gap between the sealing door 30 connected to the rod body 131 and the cavity 20, thereby achieving reliable sealing between the sealing door 30 connected to the rod body 131 and the cavity 20.

[0058] In this embodiment, the pull rod component 162 includes a first screw, and a first threaded hole matching the first screw is opened on the extension portion 132. The first screw is connected to the extension portion 132 through threaded cooperation, and the first screw is tightened in the first threaded hole on the extension portion 132 to ensure a reliable connection between the first screw and the extension portion 132.

[0059] In other embodiments, the pull rod component 162 may also include a pin, and a corresponding through hole is opened on the extension portion 132. The pin and the through hole on the extension portion 132 have an interference fit. During installation, the pin is pressed into the through hole to achieve a reliable connection between the pull rod component 162 and the extension portion 132.

[0060] The second connecting rod 120 is provided with a mounting groove 121, and the second ends of the first elastic component 161 and the rod component 162 are arranged in the mounting groove 121, and the first elastic component 161 abuts against the bottom surface of the mounting groove 121. In this embodiment, the mounting groove 121 is a countersunk hole opened on the surface of the second connecting rod 120 away from the cavity 20, and the diameter of the mounting groove 121 is larger than the outer diameter of the rod component 162 so that the mounting groove 121 can accommodate the rod component 162. A through hole is opened at the bottom of the mounting groove 121 for the rod component 162 to pass through so as to connect with the extension portion 132 of the third connecting rod 130.

[0061] The second connecting rod 120 is further provided with an adjusting assembly 170 , which abuts against the extending portion 132 from the second connecting rod 120 to adjust the minimum distance between the extending portion 132 and the second connecting rod 120 when the extending portion 132 rotates toward the second connecting rod 120 . The adjusting assembly 170 is fixedly mounted on the second connecting rod 120 and protrudes from the surface of the second connecting rod 120 on the side close to the cavity 20. The tensioning assembly 160 tensions the extension 132 of the third connecting rod 130, so that the extension 132 moves toward the second connecting rod 120 around the second rotary axis 150 until it abuts against the end of the adjusting assembly 170 to reach a balanced position, that is, the extension 132 moves upward and approaches the second connecting rod 120 under the tensioning force of the tensioning assembly 160 until it abuts against the position where the adjusting assembly 170 cannot continue to move upward. At this position, the torque acting on the extension 132 by the tensioning assembly 160 and the torque acting on the extension 132 by the adjusting assembly 170 are balanced with each other, and the extension 132 is in a torque balance state. The height of the portion of the adjusting assembly 170 protruding from the second connecting rod 120 is adjustable, so as to adjust the relative distance between the extension 132 and the second connecting rod 120 when the tensioning assembly 160 tensions the extension 132 to be in the balanced position. Specifically, when the adjustment component 170 protrudes more from the second link 120, the extension portion 132 of the third link 130 is farther away from the second link 120 when it is in the equilibrium position; when the adjustment component 170 protrudes less from the second link 120, the extension portion 132 of the third link 130 is closer to the second link 120 when it is in the equilibrium position.

[0062] A mounting hole is provided on the second connecting rod 120. The second connecting rod 120 includes two surfaces close to the cavity 20 and away from the cavity 20, and the mounting hole is arranged along a direction parallel to the line connecting the two surfaces close to and away from the cavity 20 on the second connecting rod 120. The adjustment assembly 170 is arranged in the mounting hole, and the adjustment assembly 170 can move in the mounting hole and stay at different positions to abut against the extension portion 132. In this embodiment, a thread is provided in the mounting hole, and the adjustment assembly 170 includes a second screw 171 matching the thread in the mounting hole, a head is provided at one end of the second screw 171, and the head is provided with an end surface for abutting against the extension portion 132, and the head of the second screw 171 protrudes from the second connecting rod 120. The head of the second screw 171 abuts against the extension portion 132 from the mounting hole, and the position of the second screw 171 in the mounting hole is adjusted by rotating the second screw 171, so as to adjust the protrusion amount of the head of the second screw 171 protruding from the bottom surface of the second connecting rod 120. When the head of the second screw 171 protrudes more from the bottom surface of the second connecting rod 120, the extension portion 132 in a balanced state is farther away from the second connecting rod 120, the extension portion 132 is at a lower position in the vertical direction, and the sealing door 30 connected to the rod body 131 is at a higher position in the vertical direction; on the contrary, when the head of the second screw 171 protrudes less from the bottom surface of the second connecting rod 120, the extension portion 132 in a balanced state is closer to the second connecting rod 120, the extension portion 132 is at a higher position in the vertical direction, and the sealing door 30 connected to the rod body 131 is at a lower position in the vertical direction. The relative position of the sealing door 30 connected to the rod body 131 with respect to the cavity 20 is adjusted by adjusting the protrusion amount of the head of the second screw 171 beyond the second connecting rod 120, thereby ensuring that when different first connecting rods 110 within the dimensional tolerance range are connected to the cavity 20, the sealing door 30 can always remain parallel to the opening plane of the cavity 20 by fine-tuning the protrusion amount of the head of the second screw 171 beyond the second connecting rod 120, thereby ensuring a reliable seal between the sealing door 30 and the cavity 20.

[0063] In this embodiment, the mounting hole runs through the second connecting rod 120, and the adjustment assembly 170 also includes an anti-loosening component 172. The other end of the second screw 171 is a tail portion, and the tail portion cooperates with a tool to adjust the position of the second screw 171 in the mounting hole. The anti-loosening component 172 is located in the mounting hole and abuts against the tail portion of the second screw 171 to limit the position of the second screw 171 in the mounting hole. In this embodiment, the anti-loosening component 172 can be a third screw. During the process, if there is no third screw, the second screw 171 may be offset due to vibration. This position offset will affect the positioning of the sealing door 30 when it is closed. The third screw limits the second screw 171 to avoid this position offset. In some embodiments, the third screw is selected to be the same model as the second screw 171 to improve versatility.

[0064] like Figure 2 As shown, the utility model also provides a sealed cavity, which includes a cavity 20, a flat sealing door 30 and the multi-section hinge 10 as described above. One side of the cavity 20 has an opening, and a sealing ring 210 (such as Figure 1 When the sealing ring 210 is disposed in the sealing groove, the top of the sealing ring 210 slightly protrudes from the sealing groove. When the sealing door 30 closes the opening of the cavity 20, the sealing door 30 can cover the sealing groove to fit with the sealing ring 210 to seal the cavity 20, thereby ensuring a sealed connection between the sealing door 30 and the cavity 20.

[0065] The sealed chamber is a vacuum reaction chamber used in semiconductor manufacturing equipment. The sealed chamber also includes a sealing handle 40. The sealing handle 40 and the multi-section hinge 10 are relatively arranged at the two ends of the opening of the chamber 20. The sealing handle 40 can be detachably connected to the chamber 20 and the sealing door 30 to cooperate with the multi-section hinge 10 to seal the sealing door 30 and the chamber 20. The sealing handle 40 is used as a component to assist in connecting the sealing door 30 and the chamber 20. After the multi-section hinge 10 drives the sealing door 30 to be sealed and connected with the chamber 20, the sealing handle 40 is tightened. The sealing handle 40 and the multi-section hinge 10 are located at the two ends of the chamber 20 to ensure that the sealing door 30 and the chamber 20 are reliably sealed and connected.

[0066] Example 2

[0067] The same parts of this embodiment 2 as those of embodiment 1 will not be repeated, and only the different parts will be described. In embodiment 1, the tensioning assembly 160 includes a first elastic component 161 and a pull rod component 162, and in embodiment 2, the tensioning assembly includes a second elastic component.

[0068] In this embodiment, the tensioning assembly includes a second elastic component, which can be a spring that is always in a stretched state. The two ends of the second elastic component are respectively connected to the second connecting rod 120 and the extension portion 132. The second elastic component always applies a force to the extension portion 132 to approach the second connecting rod 120, and due to the second rotating shaft 150, the extension portion 132 rotates around the second rotating shaft 150 under the action of the second elastic component to approach the second connecting rod 120. Specifically, the tensioning assembly tensions the extension portion 132. The extension portion 132 extends from the second rotating shaft 150 to the direction of the first rotating shaft 140; the rod body 131 extends from the second rotating shaft 150 to the direction away from the extension portion 132. When the first connecting rod 110 is connected to the side wall of the cavity 20, the third connecting rod 130 is connected to the sealing door 30, and the multi-section hinge is used to seal the cavity 20 and the sealing door 30, the extension portion 132 is arranged between the second connecting rod 120 and the cavity 20, and the tensioning assembly tightens the second connecting rod 120 and the extension portion 132, so that the extension portion 132 has a tendency to move toward the second connecting rod 120 around the second rotating axis 150. Since the extension portion 132 and the rod body 131 are respectively located on both sides of the second rotating axis 150, the rod body 131 is used to connect the sealing door 30, and the tensioning assembly tightens the extension portion 132 toward the second connecting rod 120, that is, the tensioning assembly tightens the extension portion 132 upward, and the rod body 131 and the extension portion 132 are respectively located at both ends of the second rotating axis 150. When the extension portion 132 is tightened upward, the rod body 131 moves downward around the second rotating axis 150, and the rod body 131 drives the sealing door 30 to be pressed toward the direction of the cavity 20, ensuring that there is no gap between the sealing door 30 connected to the rod body 131 and the cavity 20, thereby achieving reliable sealing between the sealing door 30 connected to the rod body 131 and the cavity 20.

[0069] Example 3

[0070] The same parts of this embodiment 3 as those of embodiment 1 will not be repeated, and only the different parts will be described. In embodiment 1, the tensioning assembly 160 includes a first elastic component 161 and a pull rod component 162, and in embodiment 3, the tensioning assembly includes a third elastic component.

[0071] In this embodiment, the tensioning assembly includes a third elastic component. The third elastic component includes a coil spring body and a first end and a second end located at both ends of the coil spring body. The third elastic component is arranged at the second rotating shaft 150, and the coil spring body is coaxially arranged with the second rotating shaft 150, and the first end and the second end are respectively connected to the second connecting rod 120 and the third connecting rod 130. Along the axial direction of the second rotating shaft 150, a first clamping groove and a second clamping groove are respectively opened on the second connecting rod 120 and the third connecting rod 130, the first end is clamped with the first clamping groove, and the second end is clamped with the second clamping groove. The third elastic component applies a force to the extension part 132 to approach the second connecting rod 120 through the first end and the second end, and due to the second rotating shaft 150, the extension part 132 rotates around the second rotating shaft 150 under the action of the third elastic component to approach the second connecting rod 120. In this embodiment, the extension portion 132 extends from the second rotary axis 150 in the direction of the first rotary axis 140; the rod body 131 extends from the second rotary axis 150 in the direction away from the extension portion 132. When the first connecting rod 110 is connected to the side wall of the cavity 20, the third connecting rod 130 is connected to the sealing door 30, and the multi-section hinge is used to seal the cavity 20 and the sealing door 30, the extension portion 132 is arranged between the second connecting rod 120 and the cavity 20, and the coil spring body drives the extension portion 132 of the third connecting rod 130 to move toward the second connecting rod 120, so that the extension portion 132 has a tendency to move toward the second connecting rod 120 around the second rotary axis 150. Since the extension portion 132 and the rod body 131 are respectively located on both sides of the second rotating axis 150, the rod body 131 is used to connect the sealing door 30, and the tensioning assembly tightens the extension portion 132 toward the second connecting rod 120, that is, the coil spring body drives the extension portion 132 to move toward the second connecting rod 120, and the rod body 131 and the extension portion 132 are respectively located at both ends of the second rotating axis 150. When the extension portion 132 is driven upward, that is, the rod body 131 moves downward around the second rotating axis 150, the rod body 131 drives the sealing door 30 to be pressed toward the cavity 20, ensuring that there is no gap between the sealing door 30 connected to the rod body 131 and the cavity 20, thereby achieving reliable sealing between the sealing door 30 connected to the rod body 131 and the cavity 20.

[0072] Example 4

[0073] The same parts of this embodiment 4 as those of embodiment 1 will not be repeated, and only the different parts will be described. In embodiment 1, the tensioning assembly 160 includes a first elastic component 161 and a pull rod component 162, and in embodiment 2, the tensioning assembly includes a first magnetic component and a second magnetic component.

[0074] In this embodiment, the tensioning assembly includes a first magnetic component and a second magnetic component that attract each other. The first magnetic component and the second magnetic component are respectively arranged in the second connecting rod 120 and the extension part 132. The first magnetic component and the second magnetic component can be magnets that attract each other. The first magnetic component and the second magnetic component attract each other to apply a force to the extension part 132 to approach the second connecting rod 120, and due to the second rotating shaft 150, the extension part 132 rotates around the second rotating shaft 150 under the action of the first magnetic component and the second magnetic component to approach the second connecting rod 120. Specifically, the first magnetic component and the second magnetic component of the tensioning assembly attract each other to pull the extension part 132 toward the second connecting rod 120. Among them, the extension part 132 extends from the second rotating shaft 150 to the direction of the first rotating shaft 140; the rod body 131 extends from the second rotating shaft 150 to the direction away from the extension part 132. When the first connecting rod 110 is connected to the side wall of the cavity 20, the third connecting rod 130 is connected to the sealing door 30, and the multi-section hinge is used to seal the cavity 20 and the sealing door 30, the extension portion 132 is arranged between the second connecting rod 120 and the cavity 20, and the first magnetic component and the second magnetic component attract each other to pull the second connecting rod 120 toward the extension portion 132, so that the extension portion 132 has a tendency to move toward the second connecting rod 120 around the second rotating axis 150. Since the extension portion 132 and the rod body 131 are respectively located on both sides of the second rotating axis 150, the rod body 131 is used to connect the sealing door 30, and the tensioning assembly tightens the extension portion 132 toward the second connecting rod 120, that is, the tensioning assembly tightens the extension portion 132 upward, and the rod body 131 and the extension portion 132 are respectively located at both ends of the second rotating axis 150. When the extension portion 132 is tightened upward, the rod body 131 moves downward around the second rotating axis 150, and the rod body 131 drives the sealing door 30 to be pressed toward the direction of the cavity 20, ensuring that there is no gap between the sealing door 30 connected to the rod body 131 and the cavity 20, thereby achieving reliable sealing between the sealing door 30 connected to the rod body 131 and the cavity 20.

[0075] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A multi-section hinge for connecting a cavity and a sealing door of the cavity, characterized in that: The multi-section hinge comprises a first connecting rod, a second connecting rod and a third connecting rod, wherein the first connecting rod and the second connecting rod are hinged via a first rotating shaft, and the second connecting rod and the third connecting rod are hinged via a second rotating shaft; The first connecting rod is connected to the side wall of the cavity; The third connecting rod is connected to the sealing door; And a tensioning assembly is arranged between the second connecting rod and the third connecting rod, and the tensioning assembly applies a force to the third connecting rod to generate a torque, so that the third connecting rod can move around the second rotating axis, driving the sealing door to be pressed toward the opening direction of the cavity.

2. The multi-section hinge according to claim 1, characterized in that: The third connecting rod includes a rod body and an extension portion, wherein the extension portion extends from the second rotating axis in the direction of the first rotating axis, and the extension portion is arranged between the second connecting rod and the cavity, the tensioning assembly tightens the second connecting rod and the extension portion, the rod body extends from the second rotating axis in a direction away from the extension portion, and the rod body is used to connect the sealing door.

3. The multi-section hinge according to claim 2, characterized in that: The tensioning assembly includes a first elastic component and a pull rod component, the first end of the pull rod component is fixedly connected to the extension portion, the second end of the pull rod component passes through the second connecting rod, and the two ends of the first elastic component respectively abut against the second end of the pull rod component and the second connecting rod so that the pull rod component tensions the extension portion.

4. The multi-section hinge according to claim 3, characterized in that: The pull rod component includes a first screw, and a first threaded hole matching the first screw is formed on the extension portion. The first screw passes through the second connecting rod and is fixedly connected to the first threaded hole.

5. The multi-section hinge according to claim 3 or 4, characterized in that: The second connecting rod is provided with a mounting groove, the first elastic component and the second end of the pull rod component are arranged in the mounting groove, and the first elastic component abuts against the groove bottom surface of the mounting groove.

6. The multi-section hinge according to claim 2, characterized in that: The tensioning assembly includes a second elastic component, and two ends of the second elastic component are respectively connected to the second connecting rod and the extending portion.

7. The multi-section hinge according to claim 2, characterized in that: The tensioning assembly includes a third elastic component, which includes a coil spring body and a first end and a second end located at both ends of the coil spring body. The third elastic component is arranged at the second rotating axis, and the coil spring body is coaxially arranged with the second rotating axis. The first end and the second end are respectively connected to the second connecting rod and the third connecting rod.

8. The multi-section hinge according to claim 7, characterized in that: A first clamping groove and a second clamping groove are respectively provided on the second connecting rod and the third connecting rod along the axial direction of the second rotary shaft, the first end is clamped with the first clamping groove, and the second end is clamped with the second clamping groove.

9. The multi-section hinge according to claim 2, characterized in that: The tensioning assembly includes a first magnetic component and a second magnetic component that attract each other, and the first magnetic component and the second magnetic component are respectively disposed in the second connecting rod and the extending portion.

10. The multi-section hinge according to claim 2, characterized in that: The second connecting rod is also provided with an adjusting component, and the adjusting component is pressed against the extending portion from the second connecting rod to adjust the minimum distance of rotation of the extending portion toward the second connecting rod.

11. The multi-section hinge according to claim 10, characterized in that: A mounting hole is provided on the second connecting rod, and the adjusting component is arranged in the mounting hole. The adjusting component can move in the mounting hole and stay at different positions to abut against the extending portion.

12. The multi-section hinge according to claim 11, characterized in that: The mounting hole is provided with threads, and the adjustment assembly includes a second screw matching the threads in the mounting hole, and the second screw abuts against the extension portion from the mounting hole.

13. The multi-section hinge according to claim 12, characterized in that: The mounting hole passes through the second connecting rod, and the adjusting assembly further includes an anti-loosening component, and the anti-loosening component abuts against the second screw.

14. The multi-section hinge according to claim 13, characterized in that: The anti-loosening component includes a third screw, and the third screw abuts against the second screw in the mounting hole.

15. A sealed chamber, characterized in that: The sealed cavity comprises: A cavity having an opening on one side, and a sealing groove for accommodating a sealing ring is provided around the outer periphery of the opening; A sealing door in a flat plate shape, and the sealing door can cover the sealing groove to fit with the sealing ring to seal the cavity; A multi-section hinge as described in any one of claims 1 to 14, to connect the cavity and the sealed door.

16. The sealed chamber according to claim 15, characterized in that: The sealed cavity is a vacuum reaction chamber used in semiconductor manufacturing equipment. The sealed cavity also includes a sealing handle. The sealing handle and the multi-section hinge are relatively arranged at the two ends of the opening of the cavity. The sealing handle is detachably connected to the cavity and the sealing door to cooperate with the multi-section hinge to seal the sealing door and the cavity.

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