Combined device for conveying cooling water of semiconductor equipment

Abstract

The utility model discloses a combined device for conveying cooling water of semiconductor equipment, which is applied to the field of semiconductors. By rotating the rotating cylinder, the rotating cylinder transversely moves, the elastic clamping rod is separated from the clamping hole through transverse movement of the rotating cylinder, then the telescopic pipe is moved to a needed position, the rotating cylinder is reversely rotated, the clamping rod is clamped with the clamping hole, the telescopic pipe is fixed, adjustment is completed, and therefore the purpose of adjusting the length is achieved. When the water pump works, cooling water in the pipeline generates certain water pressure, the cooling water pushes away the flow blocking plate, the cooling water is conveyed normally, when the water pump stops working, the pressure of the cooling water disappears, the flow blocking plate is tightly attached to the inner wall of the conveying pipeline under the action of the spring, and the cooling water is conveyed normally. The purpose of preventing cooling water from flowing back can be achieved by blocking the pipe orifice of the conveying pipeline, reverse rotation of the water pump is avoided, and the service life is prolonged.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a combined device for transmitting cooling water of semiconductor equipment. Background Art

[0002] Semiconductor equipment cooling water, also known as process cooling water system (PCW), is a very important system, mainly used to cool process equipment and ensure that it operates within the appropriate temperature range. In the semiconductor production process, due to the high heat of evaporation, low-temperature cooling water cooling becomes inevitable. Therefore, circulating cooling water becomes an indispensable operating system. When the cooling water is circulated, it is transmitted through the transmission pipeline.

[0003] After searching Chinese patents, the publication number is: CN220488584U, a nylon water pipe for cooling water delivery, including a nylon outer tube, a docking sleeve, a connecting sleeve, a nylon inner tube and a limit block, the two ends of the nylon outer tube are respectively provided with a docking sleeve and a connecting sleeve, and the inside of the nylon outer tube is connected to the nylon inner tube, and the outer surface of the nylon inner tube is provided with a pressure spring, and also includes: a docking sleeve, which is nested and installed at the right end of the nylon outer tube, and a docking block is fixedly installed on the docking sleeve, and the docking block is fixed on the limit block. The nylon water pipe for cooling water delivery enters the connecting sleeve through the docking hole through the symmetrically arranged docking blocks, so that it pushes the docking block to rotate, so that the left end of the docking block is clamped with the limit block as it rotates, and at the same time, the docking block squeezes the first airbag to make the second airbag wrap the nylon outer tube more tightly, so that the connection between the water pipes is more stable, and the user's disassembly and replacement is more convenient.

[0004] The existing combination device cannot replace the connecting head. Generally, the pipe diameter of the combination device is fixed. During use, if it is necessary to connect with pipes of different diameters, the pipe of the combination device needs to be replaced, which increases the use cost and reduces practical applicability and applicability. The length cannot be adjusted. Generally, the length of the pipe of the combination device is fixed. If the distance between the devices changes, the pipe cannot be used and the transmission pipe of the corresponding length needs to be replaced, which is inconvenient to use and does not have a backflow prevention function. When the transmission pipe is transmitting cooling water, if the water pump stops power output, the cooling water will flow back, which will cause the water pump to reverse, which can easily cause equipment damage and affect the service life of the water pump. In order to solve the above-mentioned problems, we propose a combination device for transmitting cooling water for semiconductor equipment. Utility Model Content

[0005] The utility model aims to provide a combined device for cooling water transmission of semiconductor equipment, which has the advantages of being able to replace the connector, being able to adjust the length and having the function of preventing backflow.

[0006] The above technical objectives of the utility model are achieved through the following technical solutions: a combined device for transmitting cooling water for semiconductor equipment, comprising a delivery pipeline, a telescopic tube is slidably sleeved inside the delivery pipeline, one end of the telescopic tube and the delivery pipeline are both connected with a threaded pipe head, the surface of the threaded pipe head is threadedly connected with a reducer, one end of the delivery pipeline is integrally formed with a threaded barrel, and the threaded barrel is slidably sleeved with the surface of the telescopic tube, the surface of the threaded barrel is threadedly connected with a rotating barrel, one end of the threaded barrel is welded with an elastic clamping rod, and the elastic clamping rod is located inside the rotating barrel, a clamping hole is opened on the surface of the telescopic tube, and the clamping hole is clamped with one end of the elastic clamping rod, the inner wall of the delivery pipeline is bolted with a fixing frame, the surface of the fixing frame is bolted with a telescopic rod, one end of the telescopic rod is bolted with a baffle, and the baffle is tightly attached to the inner wall of the delivery pipeline, a spring is arranged between the baffle and the fixing frame, and the spring is sleeved on the surface of the telescopic rod.

[0007] By adopting the above technical scheme, a threaded connection is adopted between the reducer and the threaded pipe head, which is convenient for disassembling and replacing the reducer, and can be replaced with different interfaces according to actual needs, thereby reducing the use cost and improving practicality and applicability. By rotating the rotating cylinder, the rotating cylinder is rotated to move the rotating cylinder horizontally, and the lateral movement of the rotating cylinder causes the elastic clamping rod to disengage from the clamping hole, and then the telescopic tube is moved to the required position, and the rotating cylinder is rotated in the opposite direction to clamp the clamping rod with the clamping hole, fix the telescopic tube, and complete the adjustment, thereby achieving the purpose of adjusting the length, improving applicability and facilitating use. When the water pump is working, the cooling water inside the pipeline generates a certain water pressure, the cooling water pushes the baffle open, and the cooling water is transmitted normally. When the water pump stops working, the cooling water pressure disappears, and the baffle is tightly attached to the inner wall of the delivery pipeline under the action of the spring, and the delivery pipeline The pipe mouth is blocked, which can prevent the cooling water from flowing back, avoids the reversal of the water pump, and improves the service life.

[0008] The utility model is further configured as follows: an anti-slip sleeve is fixedly sleeved on the surface of the rotating cylinder.

[0009] By adopting the above technical solution, the anti-skid cover is provided to prevent the hand from slipping and facilitate operation.

[0010] The utility model is further configured as follows: the number of the elastic clamping rods is four, and the four elastic rods are evenly distributed on the surface of the threaded barrel.

[0011] By adopting the above technical solution, the number of elastic clamping rods is set to four, and the four elastic rods are evenly distributed on the surface of the threaded barrel, thereby improving the stability of the fixation.

[0012] The utility model is further configured as follows: scale lines are printed on the surface of the telescopic tube.

[0013] By adopting the above technical solution, the length can be easily adjusted by setting scale lines.

[0014] The utility model is further configured as follows: one end of the telescopic tube is square.

[0015] By adopting the technical solution, one end of the telescopic tube is arranged to be square, so that the telescopic tube is prevented from rotating, and the use is convenient.

[0016] The utility model is further configured as follows: a sealing ring is embedded in the surface of the telescopic tube.

[0017] The above technical solution is adopted to prevent water leakage by arranging a sealing ring.

[0018] The utility model is further configured as follows: a sealing gasket is embedded in the surface of the spoiler.

[0019] By adopting the above technical solution and arranging a sealing pad, water leakage can be prevented and the flow blocking effect can be improved.

[0020] The utility model is further configured as follows: the material of the reducer can be brass, stainless steel or forged aluminum.

[0021] By adopting the above technical solution, the material of the reducer can be brass, stainless steel or forged aluminum, which is easy to use.

[0022] In summary, the utility model has the following beneficial effects:

[0023] 1. The utility model adopts threaded connection between the reducer and the threaded pipe head, which is convenient for disassembly and replacement of the reducer, and can be replaced with different interfaces according to actual needs, thereby reducing the use cost and improving the practicality and applicability;

[0024] 2. The utility model rotates the rotating drum, and the rotating drum rotates to move the rotating drum laterally. The lateral movement of the rotating drum disengages the elastic clamping rod from the clamping hole, and then moves the telescopic tube to a required position, rotates the rotating drum in the opposite direction, so that the clamping rod is clamped with the clamping hole, fixes the telescopic tube, and completes the adjustment, thereby achieving the purpose of adjusting the length, improving applicability, and facilitating use.

[0025] 3. The utility model generates a certain water pressure for the cooling water inside the pipeline when the water pump is working. The cooling water pushes the baffle plate open and the cooling water is transmitted normally. When the water pump stops working, the cooling water pressure disappears. The baffle plate clings to the inner wall of the delivery pipeline under the action of the spring and blocks the pipe opening of the delivery pipeline. This can prevent the cooling water from flowing back, avoid the reversal of the water pump and increase the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a three-dimensional diagram of the structure of the utility model;

[0027] Figure 2 It is a cross-sectional view of the structure of the utility model;

[0028] Figure 3 It is a three-dimensional diagram of the local structure of the utility model;

[0029] Figure 4 It is a side sectional view of the local structure of the utility model.

[0030] Figure numerals: 1. conveying pipeline; 2. telescopic pipe; 3. threaded pipe head; 4. reducing joint; 5. threaded cylinder; 6. rotating cylinder; 7. elastic clamping rod; 8. clamping hole; 9. fixing frame; 10. telescopic rod; 11. spoiler; 12. spring; 13. anti-slip sleeve; 14. scale line; 15. sealing ring; 16. sealing gasket. DETAILED DESCRIPTION

[0031] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0032] Embodiment 1:

[0033] refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 A combined device for transmitting cooling water for semiconductor equipment comprises a delivery pipeline 1, a telescopic tube 2 is slidably sleeved inside the delivery pipeline 1, a threaded pipe head 3 is connected to one end of the telescopic pipe 2 and the delivery pipeline 1, a reducer 4 is threadedly connected to the surface of the threaded pipe head 3, a threaded barrel 5 is integrally formed at one end of the delivery pipeline 1, and the threaded barrel 5 is slidably sleeved to the surface of the telescopic tube 2, a rotating barrel 6 is threadedly connected to the surface of the threaded barrel 5, an elastic clamping rod 7 is welded to one end of the threaded barrel 5, and the elastic clamping rod 7 is located inside the rotating barrel 6, a clamping hole 8 is opened on the surface of the telescopic tube 2, and the clamping hole 8 is connected to the elastic clamping rod 6. One end of the rod 7 is clamped, and a threaded connection is adopted between the reducer 4 and the threaded pipe head 3, which is convenient for disassembling and replacing the reducer 4. It can be replaced with different interfaces according to actual needs, thereby reducing the use cost and improving practicality and applicability. By rotating the rotating cylinder 6, the rotating cylinder 6 is rotated to move the rotating cylinder 6 horizontally, and the horizontal movement of the rotating cylinder 6 disengages the elastic clamping rod 7 from the clamping hole 8, and then the telescopic tube 2 is moved to the required position, and the rotating cylinder 6 is rotated in the opposite direction to clamp the clamping rod and the clamping hole 8, so that the telescopic tube 2 is fixed and the adjustment is completed, thereby achieving the purpose of adjusting the length, improving applicability and facilitating use.

[0034] refer to Figure 1 and Figure 2 The surface of the rotating cylinder 6 is fixedly sleeved with an anti-skid sleeve 13. The anti-skid sleeve 13 can prevent hand slippage and facilitate operation.

[0035] refer to Figure 3The number of the elastic clamping rods 7 is four, and the four elastic rods are evenly distributed on the surface of the threaded barrel 5. By setting the number of the elastic clamping rods 7 to four, and the four elastic rods are evenly distributed on the surface of the threaded barrel 5, the stability of the fixation is improved.

[0036] refer to Figure 1 The surface of the telescopic tube 2 is printed with scale lines 14, and the scale lines 14 are provided to facilitate length adjustment.

[0037] refer to Figure 4 One end of the telescopic tube 2 is square. By setting one end of the telescopic tube 2 to be square, the telescopic tube 2 is prevented from rotating, which is convenient for use.

[0038] Embodiment 2:

[0039] refer to Figure 2 A fixing frame 9 is bolted to the inner wall of the delivery pipe 1, a telescopic rod 10 is bolted to the surface of the fixing frame 9, a baffle 11 is bolted to one end of the telescopic rod 10, and the baffle 11 is in close contact with the inner wall of the delivery pipe 1, a spring 12 is arranged between the baffle 11 and the fixing frame 9, and the spring 12 is sleeved on the surface of the telescopic rod 10. When the water pump is working, the cooling water inside the pipeline generates a certain water pressure, the cooling water pushes the baffle 11 away, and the cooling water is transmitted normally. When the water pump stops working, the cooling water pressure disappears, and the baffle 11 is in close contact with the inner wall of the delivery pipe 1 under the action of the spring 12, and the pipe mouth of the delivery pipe 1 is blocked, which can achieve the purpose of preventing the cooling water from flowing back, avoid the reversal of the water pump, and improve the service life.

[0040] refer to Figure 2 A sealing ring 15 is embedded in the surface of the telescopic tube 2, and water leakage is prevented by setting the sealing ring 15.

[0041] refer to Figure 2 A sealing gasket 16 is embedded in the surface of the spoiler 11. By providing the sealing gasket 16, water leakage is prevented and the flow blocking effect is improved.

[0042] refer to Figure 1 and Figure 2 The material of the reducer 4 can be brass, stainless steel or forged aluminum. By setting the material of the reducer 4 to be brass, stainless steel or forged aluminum, it is easy to use.

[0043] Brief description of the use process: The reducer 4 and the threaded pipe head 3 are connected by a threaded connection, which is convenient for disassembling and replacing the reducer 4. It can be replaced with different interfaces according to actual needs. The rotating cylinder 6 is rotated, and the rotating cylinder 6 is rotated to move the rotating cylinder 6 horizontally. The rotating cylinder 6 moves horizontally to disengage the elastic clamping rod 7 from the clamping hole 8, and then the telescopic tube 2 is moved to the required position, and the rotating cylinder 6 is rotated in the opposite direction to clamp the clamping rod and the clamping hole 8, and the telescopic tube 2 is fixed to complete the adjustment, thereby achieving the purpose of adjusting the length; when the water pump is working, the cooling water inside the pipeline generates a certain water pressure, and the cooling water pushes the baffle 11 away, and the cooling water is transmitted normally. When the water pump stops working, the cooling water pressure disappears, and the baffle 11 is tightly attached to the inner wall of the delivery pipeline 1 under the action of the spring 12, and the pipe mouth of the delivery pipeline 1 is blocked, which can achieve the purpose of preventing the cooling water from flowing back.

[0044] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A combined device for conveying cooling water for semiconductor equipment, comprising a conveying pipeline (1), characterized in that: The inside of the delivery pipe (1) is slidably sleeved with a telescopic pipe (2), one end of the telescopic pipe (2) and the delivery pipe (1) are both connected with a threaded pipe head (3), the surface of the threaded pipe head (3) is threadedly connected with a reducer (4), one end of the delivery pipe (1) is integrally formed with a threaded barrel (5), and the threaded barrel (5) is slidably sleeved with the surface of the telescopic pipe (2), the surface of the threaded barrel (5) is threadedly connected with a rotating barrel (6), one end of the threaded barrel (5) is welded with an elastic clamping rod (7), and the elastic clamping rod (7) is located at the rotating barrel ( 6), a clamping hole (8) is provided on the surface of the telescopic tube (2), and the clamping hole (8) is clamped with one end of an elastic clamping rod (7), a fixing frame (9) is bolted to the inner wall of the conveying pipe (1), a telescopic rod (10) is bolted to the surface of the fixing frame (9), a baffle (11) is bolted to one end of the telescopic rod (10), and the baffle (11) is tightly attached to the inner wall of the conveying pipe (1), a spring (12) is provided between the baffle (11) and the fixing frame (9), and the spring (12) is sleeved on the surface of the telescopic rod (10).

2. A combined device for transmitting cooling water for semiconductor equipment according to claim 1, characterized in that: An anti-slip sleeve (13) is fixedly sleeved on the surface of the rotating cylinder (6).

3. A combined device for transmitting cooling water for semiconductor equipment according to claim 1, characterized in that: The number of the elastic clamping rods (7) is four, and the four elastic rods are evenly distributed on the surface of the threaded barrel (5).

4. A combined device for transmitting cooling water for semiconductor equipment according to claim 1, characterized in that: The surface of the telescopic tube (2) is printed with scale lines (14).

5. The combined device for transmitting cooling water for semiconductor equipment according to claim 1, characterized in that: One end of the telescopic tube (2) is square.

6. A combined device for transmitting cooling water for semiconductor equipment according to claim 1, characterized in that: A sealing ring (15) is embedded in the surface of the telescopic tube (2).

7. A combined device for transmitting cooling water for semiconductor equipment according to claim 1, characterized in that: A sealing gasket (16) is embedded in the surface of the baffle (11).

8. The combined device for transmitting cooling water for semiconductor equipment according to claim 1, characterized in that: The reducer (4) may be made of brass, stainless steel or forged aluminum.

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