Automatic measuring machine for surface roughness of quartz boat

Abstract

The utility model discloses an automatic measuring machine for surface roughness of a quartz boat, and relates to the technical field of quartz boat measurement. Comprising an equipment base and a vertical quartz boat, a protective cover is arranged on the side wall face of the equipment base, a programming control system is arranged in the equipment base, an equipment leveling mechanism is arranged in the equipment base, a fixing support is arranged at the upper end of the equipment base, a precise transmission module moving seat is slidably installed on the fixing support, and a precise transmission module is arranged on the precise transmission module moving seat. The automatic measuring machine comprises an equipment base, a main motor is arranged in the equipment base, the telescopic end of the main motor is connected with a telescopic precision transmission module moving seat, a link rod mechanism is arranged on the side wall surface of the precision transmission module moving seat, and the link rod mechanism is connected with a multifunctional measuring instrument. The precision of each level of height can be ensured to be 0.01-0.02 mm, more than 90% of groove tooth surface measurement can be covered, programming control and data recording can be carried out by one person, the working efficiency and the measurement precision are greatly improved, and the operation is very convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz boat measurement, in particular to an automatic measuring machine for the surface roughness of a quartz boat. Background Art

[0002] The process of detecting the surface flatness and roughness of the groove teeth of the vertical quartz boat slot rods used in the semiconductor industry. The vertical quartz boat is composed of a top plate, a receiving platform, and slot rods. After welding and forming, the slot rod tooth surface is inspected for various indicators according to the drawings and technical requirements, including the flatness and roughness of the tooth surface, and the parallelism of the relative positions of the multi-slot rod teeth. Since the number of teeth on each slot rod varies, ranging from dozens to hundreds, and the spacing is different, the slot width and slot type are different, it is difficult to use a universal measuring fixture to measure all products. The existing measuring instruments are in the form of fixed standards, and the data for surface measurement of precision products is relatively authoritative and reliable. However, when using it, it can only be measured in a fixed style, without related auxiliary fixtures to cooperate with it, and many positions cannot be measured due to limited space. In order to improve this situation, a quartz boat tooth surface roughness automatic measuring machine was invented. The measuring instrument is fixed on a tray that can rotate 270 degrees in space. The spatial position of the tray is adjusted through automatic control programming to measure different positions of the tooth surface and collect the required data to verify product quality.

[0003] The inventor discovered the following problems in the prior art during the process of implementing the utility model: the previous vertical quartz boat slot rod slot tooth surface flatness and roughness position tolerance detection process method is to use pads of different heights to adjust the position of the multifunctional measuring instrument. Before measurement, it is necessary to prepare a variety of auxiliary pads and adjustment jigs. When measuring at a higher position, multiple people are required to operate, and it is also necessary to prevent the pads from bumping against the quartz parts. Once the ring slot teeth are hit, the entire quartz boat product must be repaired or scrapped, which is inconvenient to operate and has low safety. At the same time, the measurement accuracy and the number of measurement points will also be affected, making it difficult to ensure the accuracy of the data. Utility Model Content

[0004] In view of the shortcomings of the prior art, the utility model provides an automatic measuring machine for the surface roughness of a quartz boat, which solves the existing vertical quartz boat slot rod groove tooth surface flatness and roughness type tolerance detection process method. The method is to use pads of different heights to adjust the position of the multifunctional measuring instrument. Before measurement, a variety of auxiliary pads and adjustment jigs need to be prepared. When measuring at a higher position, multiple personnel are required to operate, and the pads must be prevented from bumping against the quartz parts. Once the ring groove teeth are hit, the entire quartz boat product must be repaired or scrapped, which is inconvenient to operate and has low safety. At the same time, the measurement accuracy and the number of measurement points will also be affected, making it difficult to ensure the accuracy of the data.

[0005] To achieve the above objectives, the utility model is implemented through the following technical solutions: a quartz boat surface roughness automatic measuring machine, including a device base and a vertical quartz boat, the side wall surface of the device base is provided with a protective cover, the device base is provided with a programming control system, the device base is provided with a device leveling mechanism, the upper end of the device base is provided with a fixed bracket, a precision transmission module moving seat is slidably installed on the fixed bracket, a main motor is provided in the device base, the telescopic end of the main motor is connected to the telescopic precision transmission module moving seat, the side wall surface of the precision transmission module moving seat is provided with a connecting rod mechanism, the connecting rod mechanism is connected with a multi-function measuring instrument, and the multi-function measuring instrument can be placed in the vertical quartz boat.

[0006] Preferably, an adjustment knob is provided on the upper wall surface of the multifunctional measuring instrument.

[0007] Preferably, the main motor is a telescopic motor.

[0008] Preferably, a plurality of heat dissipation holes are provided in the shield.

[0009] Beneficial Effects

[0010] The utility model provides a quartz boat surface roughness automatic measuring machine, which fixes the measuring instrument on a tray that can rotate 270 degrees in space, adjusts the spatial position of the tray through automatic control programming, measures different positions of the groove tooth surface, collects required data to verify product quality, and after using the quartz boat surface roughness automatic measuring machine, can ensure the accuracy of each level height of 0.01-0.02mm, can cover 90% of the groove tooth surface measurement, can be programmed and operated by one person, and records data, greatly improving work efficiency and measurement accuracy, and is very convenient to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0012] Figure 2 It is a schematic diagram of the use state of the utility model.

[0013] Figure 3 It is a side schematic diagram of the utility model.

[0014] In the figure: 1. Equipment base; 2. Equipment leveling mechanism; 3. Main motor; 4. Protective cover; 5. Linkage mechanism; 6. Multifunctional measuring instrument; 7. Precision transmission module moving seat; 8. Fixed bracket; 9. Vertical quartz boat; 10. Heat dissipation hole; 11. Adjustment knob. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] See also Figure 1-3 The utility model provides a technical solution: a quartz boat surface roughness automatic measuring machine, including a device base 1 and a vertical quartz boat 9, a protective cover 4 is provided on the side wall of the device base 1, a programming control system is provided in the device base 1, a device leveling mechanism 2 is provided in the device base 1, a fixed bracket 8 is provided at the upper end of the device base 1, a precision transmission module moving seat 7 is slidably installed on the fixed bracket 8, a main motor 3 is provided in the device base 1, the telescopic end of the main motor 3 is connected to the telescopic precision transmission module moving seat 7, a link mechanism 5 is provided on the side wall of the precision transmission module moving seat 7, the link mechanism 5 is connected to a multifunctional measuring instrument 6, and the multifunctional measuring instrument 6 can be placed in the vertical quartz boat 9.

[0017] In this embodiment, specifically, an upper wall surface of the multifunctional measuring instrument 6 is provided with an adjustment knob 11 .

[0018] In this embodiment, specifically, the main motor 3 is a telescopic motor.

[0019] In this embodiment, specifically, a plurality of heat dissipation holes 10 are provided in the shield 4 .

[0020] The detailed connection means are well-known in the art. The following mainly introduces the working principle and process. The specific work is as follows.

[0021] Embodiment: Before placing the equipment on the marble platform, use the equipment leveling mechanism 2 to adjust the equipment level, mainly by adjusting the extension height through bolts to achieve the change of the bottom support angle, so that the device can be placed horizontally, and the multifunctional measuring instrument 6 is fixed on the tray protruding from the front end of the equipment. The tray and the connecting rod mechanism are axially connected. The connecting rod mechanism consists of three shaft connecting rods of the main motor, which can rotate horizontally at multiple angles. After adjusting the angle position, it is locked and fixed by the screw lock. Place the vertical quartz boat 9 to be measured on the marble platform and adjust the position with the multifunctional measuring instrument 6. At this time, the contact point between the probe and the groove tooth surface can be adjusted by the button on the programming control system. Generally, the marble platform surface is set as the reference point, and the incremental calculation is performed according to the drawing spacing of the groove bar and groove teeth. The incremental parameter input is performed, and then the stop or delay time beat is set, and the height operation program of all groove surfaces is completed. Start the main motor 3 to drive the precision transmission module moving seat 7, and the multifunctional measuring instrument 6 will increase incrementally according to each level of height in the program to measure the surface of each height groove tooth. The angle of the connecting rod mechanism 5 can be manually adjusted inside the vertical boat to adjust the contact point between the probe and the groove tooth surface.

[0022] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

Claims

1. A quartz boat surface roughness automatic measuring machine, comprising an equipment base (1) and a vertical quartz boat (9), characterized in that: The side wall surface of the device base (1) is provided with a protective cover (4), the device base (1) is provided with a programming control system, the device base (1) is provided with a device leveling mechanism (2), the upper end of the device base (1) is provided with a fixed bracket (8), a precision transmission module moving seat (7) is slidably mounted on the fixed bracket (8), a main motor (3) is provided in the device base (1), the telescopic end of the main motor (3) is connected to the telescopic precision transmission module moving seat (7), the side wall surface of the precision transmission module moving seat (7) is provided with a connecting rod mechanism (5), the connecting rod mechanism (5) is connected with a multifunctional measuring instrument (6), and the multifunctional measuring instrument (6) can be placed in the vertical quartz boat (9).

2. The quartz boat surface roughness automatic measuring machine according to claim 1, characterized in that: An adjustment knob (11) is provided on the upper wall surface of the multifunctional measuring instrument (6).

3. The quartz boat surface roughness automatic measuring machine according to claim 1, characterized in that: The main motor (3) is a telescopic motor.

4. The quartz boat surface roughness automatic measuring machine according to claim 1, characterized in that: A plurality of heat dissipation holes (10) are provided in the protective cover (4).

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