Rare gas isotope mass spectrometer ion source cavity
By designing a rare gas isotope mass spectrometer ion source cavity suitable for rare gas mass spectrometry analysis, the problem that existing domestic instruments cannot meet the static analysis requirements and excessive internal volume is solved, and the analysis effect of high vacuum and high sensitivity is achieved.
Patent Information
- Application Number
- CN202421195143.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-29
- Publication Date
- 2025-05-09
- Estimated Expiration
- 2034-05-29
AI Technical Summary
The existing domestic rare gas mass spectrometer cannot meet the needs of static analysis, and the internal volume is large, so it is not suitable for mass spectrometry analysis of rare gases.
A rare gas isotope mass spectrometer ion source cavity is designed. By setting a vacuum pump connection port at the back end of the cavity, setting an analysis tube connection port at the front end, and setting a wiring terminal interface on the left and right ends, and magnet racks are set on the upper and lower sides to provide a vacuum gauge interface and a sample injection system interface to achieve high vacuum degree and high sensitivity analysis.
This design significantly reduces the internal volume of the cavity, reduces residual gas, improves the sensitivity of the instrument, and meets the high vacuum and high sensitivity requirements for mass spectrometry analysis of rare gases.
Smart Images
Figure CN222851383U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of mass spectrometers, and in particular relates to an ion source cavity of a rare gas isotope mass spectrometer. Background Art
[0002] The mass spectrometry analysis of rare gases has high requirements on the vacuum degree and sensitivity of the instrument. It adopts the static analysis method, and the internal vacuum pump stops working when the mass spectrometer is working. The maintenance of vacuum degree depends on the sealing of the cavity itself. Therefore, the internal volume of the ion source cavity should be as small as possible to maintain high vacuum. At the same time, a smaller internal volume means less residual gas, which makes the detected background signal smaller and the sensitivity of the instrument higher. Therefore, a smaller internal volume is the design point of the ion source external cavity, which involves the wiring method of the ion source and the design of many necessary interfaces. The rare gas mass spectrometers used in China today are completely dependent on imports, and many existing domestic gas mass spectrometers cannot meet the needs of static analysis, and have a large internal volume, which is not suitable for mass spectrometry analysis of rare gases. Utility Model Content
[0003] In order to overcome the above-mentioned deficiencies, the inventor of the utility model has continuously improved and innovated through long-term exploration and attempts, multiple experiments and efforts, and proposed an ion source chamber of a rare gas isotope mass spectrometer. Each vacuum pump interface has a preset valve interface to achieve the blocking of the vacuum pump during operation, which is used for static analysis. At the same time, terminal interfaces are provided at the left and right ends of the ion source chamber to make the internal volume small, which is suitable for rare gas mass spectrometry analysis with high vacuum and high sensitivity requirements.
[0004] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: to provide an ion source chamber of a rare gas isotope mass spectrometer, which includes a chamber body, a vacuum pump connection port is arranged at the rear end of the chamber body, an analysis tube connection port is arranged at the front end of the chamber body, wiring terminal interfaces are arranged at the left and right ends of the chamber body, magnet racks are arranged at the upper and lower sides of the chamber body, and a vacuum gauge interface and a sample injection system interface are arranged at the upper and lower sides of the chamber body.
[0005] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is: the chamber body is a cylindrical chamber with an inner diameter of 50 mm, an outer diameter of 100 mm, and a height of 90 mm, and the left and right ends of the chamber body where the terminal interface is arranged are arranged as a planar structure.
[0006] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is: the vacuum pump interface arranged at the rear end of the chamber is a CF50 flange, the vacuum pump interface is connected to the valve and then connected to the three-way chamber, the three-way chamber is connected to the mechanical pump and the turbomolecular pump to provide vacuum conditions for the chamber.
[0007] According to the ion source cavity of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is that the opening interfaces of the cavity all use CF flanges.
[0008] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is: each end of the terminal interface has a CF35 flange interface, which is used to connect the CF35 terminal flanges of 5 terminals respectively, and a total of 10 high-voltage terminals can be provided for the internal ion source.
[0009] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is: the magnet frame is arranged at the upper and lower ends of the chamber, and a circular opening with a diameter of 20 mm is radially opened from the outer wall of the chamber to 5 mm away from the inner wall of the chamber, and a circle of tube wall for fixing the magnet is connected to the outside. The tube wall is tapped with an M5 threaded through hole. After the cylindrical magnet is installed, the magnet is squeezed and fixed by screws on both sides.
[0010] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is that the first opening pipeline of the injection system interface has an angle of 60° with the horizontal direction and is located between the magnet frame and the analysis tube interface.
[0011] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is: the inner diameter of the first opening pipeline is 6 mm, the outer diameter is 22 mm, and the port is a CF16 flange interface for connecting the valve and then docking the injection system.
[0012] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is that the second opening pipe of the vacuum gauge interface is at an angle of 60° to the horizontal direction and is located between the magnet frame and the analysis tube interface.
[0013] According to the ion source chamber of a rare gas isotope mass spectrometer described in the utility model, a further preferred technical solution is: the inner diameter of the second opening pipe is 6 mm, the outer diameter is 22 mm, and the port is a CF35 flange interface for connecting the valve and then docking the vacuum gauge.
[0014] Compared with the prior art, the technical solution of the utility model has the following advantages / benefits:
[0015] 1. The rear end of the ion source cavity is provided with a vacuum pump connection port, the front end of the ion source cavity is provided with an analysis tube connection port, the left and right ends of the ion source cavity are provided with terminal interfaces, the upper and lower sides of the ion source cavity are provided with magnet racks, and the upper and lower sides of the ion source cavity are provided with a vacuum gauge interface and a sample injection system interface. The cavity structure and interface design of the utility model are novel, which greatly reduces the cavity volume and the residual gas in the cavity, providing favorable conditions for the high vacuum degree and high sensitivity required for rare gas analysis.
[0016] 2. Each vacuum pump interface is preset with a valve interface to achieve the blocking of the vacuum pump during operation, which is used for static analysis. At the same time, the internal volume is small, which is suitable for rare gas mass spectrometry analysis with high vacuum and high sensitivity requirements. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0018] Figure 1 The utility model is a structural schematic diagram of an ion source cavity of a rare gas isotope mass spectrometer.
[0019] Figure 2 yes Figure 1 Front view of .
[0020] Figure 3 yes Figure 2 Cross-sectional view at AA in the middle.
[0021] Figure 4 yes Figure 2 Cross-sectional view at the middle BB.
[0022] The markings in the figure are: 1, chamber body 2, vacuum pump interface 3, analysis tube interface 4, terminal interface 5, magnet frame 6, injection system interface 7, vacuum gauge interface 8, threaded hole. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical scheme and advantages of the utility model clearer, the technical scheme in the embodiment of the utility model is clearly and completely described below. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model. Therefore, the detailed description of the embodiment of the utility model provided below is not intended to limit the scope of the utility model claimed for protection, but only represents the selected embodiment of the utility model.
[0024] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and thus, once an item is defined in one drawing, it may not be further defined or explained in the subsequent drawings.
[0025] Embodiment 1:
[0026] like Figure 1 As shown, an external cavity of an ion source of a rare gas isotope mass spectrometer comprises a cavity body 1, a vacuum pump connection port is arranged at the rear end of the cavity body 1, an analysis tube connection port is arranged at the front end of the cavity body 1, terminal interfaces 4 are arranged at the left and right ends of the cavity body 1, magnet racks 5 are arranged at the upper and lower sides of the cavity body 1, and a vacuum gauge interface 7 and an injection system interface 6 are respectively arranged at the upper and lower sides of the cavity body 1.
[0027] The cavity body 1 is a cylindrical cavity with an inner diameter of 50 mm, an outer diameter of 100 mm and a height of 90 mm. The left and right ends of the cavity body 1 where the terminal interface 4 is arranged are arranged as a flat structure, which can facilitate the arrangement of a flat interface.
[0028] The terminal interface 4 is arranged at the left and right ends of the cavity, and each end has a CF35 flange interface, which is respectively used to connect the CF35 terminal flanges of 5 terminals, and a total of 10 high-voltage terminals can be provided for the internal ion source. The setting of the terminal is a key factor affecting the internal volume of the cavity. Most existing ion sources adopt the method of wiring at the rear end of the cavity, that is, the terminal is installed at the rear end of the cavity, and the ion source is fixed to the terminal through a bracket, and the cavity is inserted after the wiring is completed outside the cavity. The advantage of this method is that the wiring is convenient and the disassembly is simple, but the disadvantage is that the space occupied by the bracket is large, and all the wiring is on the same terminal. There are more terminals at the terminal, and the required terminal area is larger, and the internal volume of the cavity will be forced to increase a lot. The utility model arranges the terminal on both sides of the cavity, and the ion source is connected to the M5 threaded hole 8 by screws and is directly fixed on the cavity. The terminal interface 4 is a CF35 flange, which is suitable for connecting the CF35 terminal flange of 5 terminals, and a total of 10 high-voltage terminals can be provided for the internal ion source on both sides. This wiring method greatly reduces the volume of the chamber, which is about 150ml, compared with the single rear-end wiring method, which reduces the internal volume by about 100ml. That is, the small volume of the chamber of the utility model is due to the use of the two-end wiring method, which reduces the size of the wiring terminal, and because there are threaded holes inside the chamber, the ion source can be directly fixed in the chamber by screws, without the need to use support rods or other forms that occupy volume.
[0029] The vacuum pump interface 2 is set at the rear end of the cavity, and the interface is a CF50 flange. Due to the high vacuum requirements of the rare gas mass spectrometer and the need for baking and heating, the opening interfaces of the cavity all use CF flanges, and the dimensions are all based on GB / T 6071-2003 ultra-high vacuum flanges. The vacuum pump interface 2 is connected to the valve and then connected to the three-way cavity. The three-way connects the mechanical pump and the turbomolecular pump to provide vacuum conditions for the cavity.
[0030] The analysis tube interface 3 is arranged at the front end of the cavity. The interface is a CF35 flange with an inner diameter of 22 mm. The interface size and pipeline length are designed for docking with a specific analysis tube.
[0031] The magnet frame 5 is set at the upper and lower ends of the cavity, with a circular opening of 20mm diameter radially opened from the outer wall of the cavity to 5mm from the inner wall of the cavity, and a circle of tube wall for fixing the magnet is connected to the outer wall. The tube wall is tapped with M5 threaded through holes. After the cylindrical magnet is installed, the magnet is squeezed and fixed by screws on both sides. There are two factors to consider in the 5mm design. One is that the magnet can be as close to the internal cavity as possible to provide a larger magnetic field, and the other is that the thickness of the tube wall cannot be too thin, which may cause the risk of leakage. The diameter of 20mm takes into account that the magnet cannot be too small or the side strength is insufficient, and the opening cannot be too large to prevent it from being too close to the other holes in the cavity. Of course, this specific setting data can be set according to actual needs.
[0032] The sampling system interface 6 is arranged above the left side of the cavity, and the first opening pipe is at an angle of 60° to the horizontal direction, and is located between the magnet frame 5 and the analysis tube interface 3. The first opening pipe has an inner diameter of 6mm and an outer diameter of 22mm, and the port is a CF16 flange interface, which is used to connect the valve and then dock the sampling system. The vacuum gauge interface 7 is arranged above the right side of the cavity, and the second opening pipe has an angle of 60° to the horizontal direction, and is located between the magnet frame 5 and the analysis tube interface 3. The second opening pipe has an inner diameter of 6mm and an outer diameter of 22mm, and the port is a CF35 flange interface, which is used to connect the valve and then dock the vacuum gauge. The first opening pipe and the second opening pipe are arranged symmetrically, and the overall structure is Y-shaped.
[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0034] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0035] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0036] The above are only preferred embodiments of the present invention. It should be noted that the above preferred embodiments should not be regarded as limiting the present invention. The protection scope of the present invention should be based on the scope defined by the claims. For ordinary technicians in this technical field, several improvements and modifications can be made without departing from the spirit and scope of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.
Claims
1. A rare gas isotope mass spectrometer ion source chamber, characterized in that: It includes a cavity body, a vacuum pump connection port is arranged at the rear end of the cavity body, an analysis tube connection port is arranged at the front end of the cavity body, terminal interfaces are arranged at the left and right ends of the cavity body, magnet frames are arranged at the upper and lower sides of the cavity body, and a vacuum gauge interface and an injection system interface are respectively arranged on the upper and lower sides of the cavity body.
2. The ion source chamber of a noble gas isotope mass spectrometer according to claim 1, characterized in that: The cavity body is a cylindrical cavity with an inner diameter of 50 mm, an outer diameter of 100 mm, and a height of 90 mm. The left and right ends of the cavity body where the terminal interface is arranged are arranged as a plane structure.
3. The ion source chamber of a noble gas isotope mass spectrometer according to claim 1, characterized in that: The vacuum pump interface arranged at the rear end of the cavity is a CF50 flange. The vacuum pump interface is connected to the valve and then to the three-way cavity. The three-way cavity is connected to the mechanical pump and the turbomolecular pump to provide vacuum conditions for the cavity.
4. The ion source chamber of a noble gas isotope mass spectrometer according to claim 1, characterized in that: The opening interfaces of the cavity all use CF flanges.
5. The ion source chamber of a noble gas isotope mass spectrometer according to claim 1, characterized in that: Each end of the terminal interface has a CF35 flange interface, which is used to connect the CF35 terminal flanges of 5 terminals, and can provide a total of 10 high-voltage terminals for the internal ion source.
6. The ion source chamber of a noble gas isotope mass spectrometer according to claim 1, characterized in that: The magnet frame is arranged at the upper and lower ends of the cavity, with a circular opening with a diameter of 20 mm radially opened from the outer wall of the cavity to 5 mm away from the inner wall of the cavity, and a circle of tube wall for fixing the magnet is connected to the outside. The tube wall is tapped with M5 threaded through holes. After the cylindrical magnet is installed, the magnet is squeezed and fixed by screws on both sides.
7. The ion source chamber of a noble gas isotope mass spectrometer according to claim 1, characterized in that: The first opening pipeline of the sample injection system interface has an angle of 60° with the horizontal direction and is located between the magnet frame and the analysis tube interface.
8. The ion source chamber of a noble gas isotope mass spectrometer according to claim 7, characterized in that: The first opening pipe has an inner diameter of 6 mm and an outer diameter of 22 mm, and the port is a CF16 flange interface for connecting the valve to the injection system.
9. The ion source chamber of a noble gas isotope mass spectrometer according to claim 1, characterized in that: The second opening pipe of the vacuum gauge interface has an angle of 60° with the horizontal direction and is located between the magnet frame and the analysis tube interface.
10. The ion source chamber of a noble gas isotope mass spectrometer according to claim 9, characterized in that: The second opening pipe has an inner diameter of 6 mm and an outer diameter of 22 mm, and a CF35 flange interface at the port for connecting the valve to a vacuum gauge.