Transfer box for horizontal storage process of multiple wafers

Abstract

The utility model discloses a multi-wafer horizontal storage process turnover box, which comprises a box body and a box cover, the bottom of the box body is divided into a driving cavity through a horizontal interlayer, the driving cavity is positioned below the interlayer, at least three vertically arranged clamping strips are arranged in the box body, and the clamping strips are arranged in the box body. The at least three clamping strips are circularly and evenly distributed around the center of the box body, the lower ends of the clamping strips are slidably installed on the partition layer, the clamping strips slide in the radius direction of a circular area defined by the at least three clamping strips, the at least three clamping strips are driven by a driving mechanism to slide synchronously, and the driving mechanism is arranged in the driving cavity. In this way, one turnover box can be used for storing wafers of different sizes, the investment of the turnover box is reduced, and the purchase cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer packaging, in particular to a multi-wafer horizontal storage process turnover box. Background Art

[0002] Usually, when wafers are circulated in various process parts, turnover boxes are needed for storage and transportation. According to the direction of placing the wafers, the turnover boxes can be divided into vertical turnover boxes and horizontal turnover boxes. Among them, the horizontal turnover box, as the name suggests, places the wafers horizontally in the turnover box, and the two adjacent wafers are separated by foam pads. However, in the prior art, the size of the wafers placed in the turnover box is fixed, and the wafers have a variety of sizes. Therefore, in order to meet the demand, multiple batches of turnover boxes of different specifications are usually prepared. Utility Model Content

[0003] In order to solve the above-mentioned deficiencies in the prior art, the utility model proposes a multi-wafer horizontal storage process turnover box.

[0004] In order to achieve the above technical effects, the utility model adopts the following scheme:

[0005] A multi-wafer horizontal storage process turnover box comprises a box body and a box cover, wherein the bottom of the box body is separated by a horizontal partition to form a drive cavity, wherein the drive cavity is located below the partition, wherein at least three vertically arranged clamping strips are arranged in the box body, wherein the at least three clamping strips are evenly distributed in a circle around the center of the box body, wherein the lower ends of the clamping strips are slidably mounted on the partition, wherein the sliding direction of the clamping strips is along the radial direction of a circular area surrounded by the at least three clamping strips, wherein the at least three clamping strips are driven by a driving mechanism to slide synchronously, and wherein the driving mechanism is arranged in the driving cavity.

[0006] A preferred technical solution, the driving mechanism includes a circular turntable rotatably installed in the driving cavity, the rotation center of the turntable overlaps with the center of the box body, the lower end of the clamping strip is fixedly connected to a slider located in the driving cavity through a connecting block, the partition has a strip-shaped through hole for the connecting block to pass through and slide, the length direction of the strip through hole is arranged along the sliding direction of the clamping strip, the slider is installed on the sliding edge and slides along the sliding direction of the clamping strip, the turntable has connecting columns consistent with the number of sliders, a plurality of connecting columns correspond one-to-one to a plurality of sliders, and a plurality of connecting columns are evenly distributed around the center of the turntable, the connecting columns are hinged to the corresponding sliders through connecting rods, and the turntable is connected to a locking structure.

[0007] The preferred technical solution is that the locking structure includes a rotating shaft, a limit head, a pressure plate and a rotating head. The lower end of the box body is provided with an upward groove, the bottom of the box body has a penetrating rotating hole, the lower end of the rotating hole is connected to the groove, the rotating shaft is rotatably installed in the rotating hole through a bearing, the upper end of the rotating shaft is fixedly connected to the rotation center of the turntable, the lower end of the rotating shaft is connected to the limit head, the limit head is located in the groove, the size of the limit head is larger than the size of the rotating shaft, the pressure plate is located in the groove and above the limit head, the pressure plate has a through hole for the rotating shaft to pass through, and the upper end of the pressure plate passes through a plurality of The spring is connected to the top of the groove, and the lower end of the pressure plate is pressed against the upper end of the limit head by the elastic force of the spring. The lower end of the pressure plate has a first rough surface, and the upper end of the limit head has a second rough surface corresponding to the first rough surface. The pressure plate is connected to a limited sliding structure so that the pressure plate can only move vertically but not rotate. The lower end of the limit head has an upwardly arranged square hole, and the cross-section of the square hole is polygonal. The rotating head includes a vertically arranged cylinder, the upper end of the cylinder can be inserted into the groove and cover the limit head, a square rod that can be inserted into the square hole is fixedly provided in the cylinder, and a tail plate is fixedly provided at the lower end of the cylinder.

[0008] According to a preferred technical solution, the first rough surface has a plurality of protruding first teeth, the second rough surface has a plurality of protruding second teeth, and the plurality of first teeth and the plurality of second teeth are closely arranged.

[0009] According to a preferred technical solution, the position-limiting sliding structure includes a groove and a pressure plate, the horizontal cross-section of the groove is polygonal, and the shape of the pressure plate is polygonal and matches the groove.

[0010] According to a preferred technical solution, the sliding edge is protruded from the bottom of the driving cavity, the cross section of the sliding edge is in a "T" shape, and the lower end of the slider slides on the sliding edge through a sliding groove.

[0011] According to a preferred technical solution, the width of the slider is greater than the width of the strip-shaped through hole, and the upper end of the slider slides against the lower end of the partition.

[0012] According to a preferred technical solution, the connecting rod includes a first combination rod and a second combination rod, one end of the first combination rod is hinged to the slider, the other end of the first combination rod is inclined and extends in a counterclockwise or clockwise direction toward the turntable on the outside of the turntable, the other end of the first combination rod is bent and extended toward the inside of the turntable to form a second combination rod, and the other end of the second combination rod is hinged to the connecting column.

[0013] Compared with the prior art, the beneficial effects are:

[0014] The utility model has a simple structure and is easy to use. The wafers are placed in the area surrounded by the clamping strips in the box body. The clamping strips are driven to move by the driving mechanism, so that the size of the circular area surrounded by multiple clamping strips can be adjusted to adapt to wafers of different sizes. In this way, one turnover box can be used to store wafers of different sizes, which reduces the investment in turnover boxes and reduces procurement costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a cross-sectional schematic diagram of the utility model;

[0016] Figure 2 yes Figure 1 The enlarged structural diagram of part A in the middle;

[0017] Figure 3 It is a top view schematic diagram of the box body in the utility model;

[0018] Figure 4 This is a schematic diagram of the structure of the driving mechanism in the utility model;

[0019] Figure 5 It is a top view schematic diagram of the limit head in the utility model.

[0020] Figure numerals: 1, box body; 2, box cover; 3, partition; 4, driving chamber; 5, clamping strip; 6, slider; 7, strip through hole; 8, sliding edge; 9, connecting rod; 10, turntable; 11, rotating shaft; 12, bearing; 13, limit head; 14, square hole; 15, groove; 16, pressure plate; 17, pressure plate; 18, square rod; 19, tail plate; 20, spring; 21, first rough surface; 22, second rough surface; 23, connecting column; 24, first combination rod; 25, second combination rod; 26, second tooth. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0022] A process turnover box for horizontal storage of multiple wafers comprises a box body 1 and a box cover 2, wherein the box cover 2 is detachably covered on the upper end of the box body 1, and adopts the existing technology. The bottom of the box body 1 is separated by a horizontal partition 3 to form a driving cavity 4, and the driving cavity 4 is located below the partition 3. The wafers are stored above the partition 3. At least three vertically arranged clamping strips 5 are provided in the box body 1, and the at least three clamping strips 5 are evenly distributed in a circle around the center of the box body 1. The lower ends of the clamping strips 5 are slidably installed on the partition 3, and the sliding direction of the clamping strips 5 is along the radius direction of the circular area surrounded by the at least three clamping strips 5. The at least three clamping strips 5 are driven by a driving mechanism to slide synchronously, and the driving mechanism is arranged in the driving cavity 4.

[0023] The wafer is placed in the area surrounded by the clamping strips 5 in the box body 1, and the clamping strips 5 are driven to move by the driving mechanism, so that the size of the circular area surrounded by multiple clamping strips 5 can be adjusted to adapt to wafers of different sizes. In this way, one turnover box can be used to store wafers of different sizes, reducing the investment in turnover boxes and lowering procurement costs.

[0024] The preferred technical solution is that the driving mechanism includes a circular turntable 10 rotatably mounted in the driving cavity 4, the rotation center of the turntable 10 overlaps with the center of the box body 1, the lower end of the clamping strip 5 is fixedly connected to a slider 6 located in the driving cavity 4 through a connecting block, the interlayer 3 has a strip-shaped through hole 7 for the connecting block to pass through and slide, the length direction of the strip-shaped through hole 7 is arranged along the sliding direction of the clamping strip 5, the slider 6 is mounted on the sliding edge 8 and slides along the sliding direction of the clamping strip 5, the turntable 10 has a connecting column 23 with the same number of sliders 6, a plurality of connecting columns 23 correspond to a plurality of sliders 6 one by one, and a plurality of connecting columns 23 are evenly distributed around the center of the turntable 10, the connecting column 23 is hinged with the corresponding slider 6 through a connecting rod 9, and the turntable 10 is connected with a locking structure. The turntable 10 is rotated, and the slider 6 is driven to slide on the sliding edge 8 through the connecting rod 9, thereby driving the clamping strip 5 to move, and in order to prevent the turntable 10 from rotating freely, the turntable 10 is fixed by a locking mechanism when the turntable 10 is not rotating to prevent the clamping strip 5 from shifting.

[0025] The preferred technical solution is that the locking structure includes a rotating shaft 11, a limit head 13, a pressure plate 17 and a rotating head. The lower end of the box body 1 is provided with an upward groove 15, and the bottom of the box body 1 has a through rotating hole. The lower end of the rotating hole is connected to the groove 15. The rotating shaft 11 is rotatably installed in the rotating hole through a bearing 12. The upper end of the rotating shaft 11 is fixedly connected to the rotation center of the turntable 10, and the turntable 10 is driven to rotate by the rotation of the rotating shaft.

[0026] The lower end of the rotating shaft 11 is connected to the limit head 13, and the limit head 13 is located in the groove 15. The size of the limit head 13 is larger than the size of the rotating shaft 11. The pressing plate 17 is located in the groove 15 and above the limit head 13. The pressing plate 17 has a through hole for the rotating shaft 11 to pass through. The size of the through hole matches the size of the rotating shaft 11, so that the pressing plate 17 can be pressed on the upper end of the limit head 13. The upper end of the pressing plate 17 is connected to the top of the groove 15 through a plurality of springs 20, and the lower end of the pressing plate 17 is pressed against the upper end of the limit head 13 by the elastic force of the spring 20. The lower end of the pressing plate 17 has a first rough surface 21, and the upper end of the limit head 13 has a second rough surface 22 corresponding to the first rough surface 21. The pressing plate 17 is connected to a limited sliding structure so that the pressing plate 17 can only move vertically but not rotate. When the position of the clamping strip 5 is not adjusted, the pressure plate 17 is pressed against the upper end of the limit head 13 by the elastic force of the spring 20, and the first rough surface 21 is in contact with the second rough surface 22, thereby increasing friction. Since the pressure plate 17 cannot rotate, the limit head 13 is prevented from rotating, so that the turntable 10 does not rotate, and the position of the clamping strip 5 is fixed;

[0027] The lower end of the limit head 13 has an upwardly arranged square hole 14, and the cross-section of the square hole 14 is polygonal. The rotating head includes a vertically arranged cylinder, the upper end of which can be inserted into the groove 15 and cover the limit head 13. A square rod 18 that can be inserted into the square hole 14 is fixed in the cylinder, and a tail plate 19 is fixed at the lower end of the cylinder. When the position of the clamping strip 5 needs to be adjusted, take out the rotating head, hold the tail plate 19 by hand, insert the upper end of the cylinder into the groove 15, and cover the limit head 13, so that the square rod 18 is inserted into the square hole 14, move the cylinder upward to press on the pressure plate 17 and push the pressure plate 17 away from the upper end of the limit head 13, so that the first rough surface 21 is separated from the second rough surface 22, and then rotate the cylinder to drive the limit head 13 to rotate through the square rod 18, so that the turntable 10 rotates, and the position of the clamping strip 5 is adjusted. After the adjustment is completed, pull out the rotating head, and the pressure plate 17 is pressed against the upper end of the limit head 13 again under the elastic force of the spring 20 to lock the turntable 10.

[0028] A preferred technical solution is that the first rough surface 21 has a plurality of raised first teeth, the second rough surface 22 has a plurality of raised second teeth 26, the plurality of first teeth and the plurality of second teeth 26 are closely arranged, the plurality of first teeth and the plurality of second teeth 26 are evenly distributed around the rotating shaft 11, and the plurality of first teeth and the plurality of second teeth 26 are staggered, thereby locking the limit head 13.

[0029] The preferred technical solution is that the limited sliding structure includes the shapes of the groove 15 and the pressing plate 17, the horizontal cross section of the groove 15 is polygonal, and the shape of the pressing plate 17 is polygonal and matches the groove 15. The polygonal pressing plate 17 is matched and arranged in the polygonal groove 15, and due to the left and right edges, the pressing plate 17 cannot rotate in the groove 15 and can only move up and down.

[0030] According to a preferred technical solution, the sliding edge 8 is protruded from the bottom of the driving cavity 4 , the cross section of the sliding edge 8 is in a “T” shape, and the lower end of the slider 6 slides on the sliding edge 8 through a sliding groove.

[0031] In a preferred technical solution, the width of the slider 6 is greater than the width of the strip-shaped through hole 7, and the upper end of the slider 6 slides against the lower end of the partition 3. Thus, the slider 6 is clamped by the partition 3 and the sliding edge 8 to prevent the clamping strip 5 from sliding.

[0032] According to a preferred technical solution, the connecting rod 9 includes a first combination rod 24 and a second combination rod 25, wherein one end of the first combination rod 24 is hinged to the slider 6, and the other end of the first combination rod 24 is inclined and extends in a counterclockwise or clockwise direction toward the turntable 10 on the outside of the turntable 10, and the other end of the first combination rod 24 is bent and extended toward the inside of the turntable 10 to form the second combination rod 25, and the other end of the second combination rod 25 is hinged to the connecting column 23.

[0033] In the description of the present utility model, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present utility model.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0035] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

Claims

1. A multi-wafer horizontal storage process turnover box, characterized in that: The invention comprises a box body (1) and a box cover (2), wherein the bottom of the box body (1) is separated by a horizontal partition (3) to form a driving cavity (4), wherein the driving cavity (4) is located below the partition (3), and at least three vertically arranged clamping strips (5) are arranged in the box body (1), wherein the at least three clamping strips (5) are evenly distributed in a circular shape around the center of the box body (1), and the lower ends of the clamping strips (5) are slidably mounted on the partition (3), wherein the sliding direction of the clamping strips (5) is along the radial direction of a circular area surrounded by the at least three clamping strips (5), and the at least three clamping strips (5) are driven by a driving mechanism to slide synchronously, and the driving mechanism is arranged in the driving cavity (4).

2. A multi-wafer horizontal storage process turnover box as claimed in claim 1, characterized in that: The driving mechanism comprises a circular turntable (10) rotatably mounted in a driving cavity (4), the rotation center of the turntable (10) overlaps with the center of the box body (1), the lower end of the clamping strip (5) is fixedly connected to a slider (6) located in the driving cavity (4) through a connecting block, the partition (3) has a strip-shaped through hole (7) for the connecting block to pass through and slide, the length direction of the strip-shaped through hole (7) is arranged along the sliding direction of the clamping strip (5), the slider (6) is mounted on the sliding edge (8) and slides along the sliding direction of the clamping strip (5), the turntable (10) has connecting columns (23) with the same number as the sliders (6), a plurality of connecting columns (23) correspond to a plurality of sliders (6) one by one, and a plurality of connecting columns (23) are evenly distributed around the center of the turntable (10), the connecting columns (23) are hinged to the corresponding sliders (6) through a connecting rod (9), and the turntable (10) is connected to a locking structure.

3. A multi-wafer horizontal storage process turnover box as claimed in claim 2, characterized in that: The locking structure comprises a rotating shaft (11), a limiting head (13), a pressing plate (17) and a rotating head. The lower end of the box body (1) is provided with an upward groove (15). The bottom of the box body (1) has a rotating hole extending therethrough. The lower end of the rotating hole is connected to the groove (15). The rotating shaft (11) is rotatably installed in the rotating hole through a bearing (12). The upper end of the rotating shaft (11) is fixedly connected to the rotation center of the turntable (10). The lower end of the rotating shaft (11) is connected to the limiting head (13). The limiting head (13) is located in the groove (15). The size of the limiting head (13) is larger than the size of the rotating shaft (11). The pressing plate (17) is located in the groove (15) and above the limiting head (13). The pressing plate (17) has a through hole for the rotating shaft (11) to pass through. The upper end of the pressing plate (17) passes through a hole. A dry spring (20) is connected to the top of the groove (15); the lower end of the pressure plate (17) is pressed against the upper end of the limit head (13) by the elastic force of the spring (20); the lower end of the pressure plate (17) has a first rough surface (21); the upper end of the limit head (13) has a second rough surface (22) corresponding to the first rough surface (21); the pressure plate (17) is connected to a limited sliding structure so that the pressure plate (17) can only move vertically but not rotate; the lower end of the limit head (13) has an upwardly arranged square hole (14); the cross-section of the square hole (14) is polygonal; the rotating head includes a vertically arranged cylinder; the upper end of the cylinder can be inserted into the groove (15) and covers the limit head (13); a square rod (18) that can be inserted into the square hole (14) is fixedly provided in the cylinder; and a tail plate (19) is fixedly provided at the lower end of the cylinder.

4. A multi-wafer horizontal storage process turnover box as claimed in claim 3, characterized in that: The first rough surface (21) has a plurality of protruding first teeth, and the second rough surface (22) has a plurality of protruding second teeth (26), and the plurality of first teeth and the plurality of second teeth (26) are closely arranged.

5. The multi-wafer horizontal storage process turnover box according to claim 3, characterized in that: The position-limiting sliding structure comprises the shapes of a groove (15) and a pressing plate (17); the horizontal cross section of the groove (15) is polygonal, and the shape of the pressing plate (17) is polygonal and matches the groove (15).

6. A multi-wafer horizontal storage process turnover box as claimed in claim 2, characterized in that: The sliding edge (8) is protruding from the bottom of the driving cavity (4), and the cross section of the sliding edge (8) is in a "T" shape. The lower end of the sliding block (6) slides on the sliding edge (8) through a sliding groove.

7. A multi-wafer horizontal storage process turnover box as claimed in claim 6, characterized in that: The width of the slider (6) is greater than the width of the strip-shaped through hole (7), and the upper end of the slider (6) slides against the lower end of the partition (3).

8. The multi-wafer horizontal storage process turnover box according to claim 2, characterized in that: The connecting rod (9) comprises a first combination rod (24) and a second combination rod (25); one end of the first combination rod (24) is hinged to the slider (6); the other end of the first combination rod (24) extends obliquely in a counterclockwise or clockwise direction toward the turntable (10) at the outer side of the turntable (10); the other end of the first combination rod (24) is bent and extended toward the inner side of the turntable (10) to form the second combination rod (25); the other end of the second combination rod (25) is hinged to the connecting column (23).

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