Conveying arm suitable for four-inch wafer
By designing a conveyor arm suitable for four-inch wafers, the positioning mechanism and support arm design solves the problem that existing arms cannot adapt to four-inch wafers, and achieves convenient adjustment and conversion of eight-inch and four-inch wafers.
Patent Information
- Application Number
- CN202421437329.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-05-09
- Estimated Expiration
- 2034-06-21
AI Technical Summary
The existing conveyor arms can only adapt to one wafer size and cannot meet the needs of four-inch wafers, resulting in the need to replace the arms and making operation troublesome.
A conveyor arm suitable for four-inch wafers is designed, including support arms and center blocks, and convenient adjustment of eight-inch and four-inch wafers is achieved through the design of positioning mechanisms and support arms.
It realizes quick adjustment conversion of eight-inch and four-inch wafers, which is simple to operate and reduces the hassle of arm replacement.
Smart Images
Figure CN222851407U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer-related equipment, in particular to a conveying arm suitable for four-inch wafers. Background Art
[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its raw material is silicon. High-purity polysilicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod is formed into a silicon wafer, that is, a wafer. Domestic wafer production lines are mainly 8 inches and 12 inches. The transportation of wafers requires the use of a conveyor arm. The existing conveyor arm can only adapt to one size. In order to meet market demand, 4-inch wafers need to be produced. For new size wafers, the corresponding conveyor arm needs to be replaced, which is more troublesome to operate. Utility Model Content
[0003] The main purpose of the utility model is to provide a transfer arm suitable for four-inch wafers, which can effectively solve the problems in the background technology.
[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is:
[0005] A conveying arm suitable for four-inch wafers comprises a support arm and a center block, a rotating column is fixedly installed on the top of one end of the support arm, a rotating groove is provided inside the center block, the rotating column is adapted to the rotating groove, two slots are provided on both side surfaces of the center block, latch columns are inserted into the four slots, a first support arm and a second support arm are fixedly installed on the two latch columns on both sides, two positioning mechanisms are embedded and installed on the support arm, two first brackets are provided on the bottom surface of the first support arm, and two second brackets are provided on the bottom of the second support arm.
[0006] Preferably, the positioning mechanism includes a cylinder, a sliding cavity, a spring and a sliding column. The cylinder is embedded in the support arm, a sliding cavity is opened on the top of the cylinder, a sliding column is slidably installed in the sliding cavity, and a ball is rollingly embedded in the top of the sliding column.
[0007] Preferably, a spring is fixedly installed between the sliding column and the bottom surface of the sliding cavity.
[0008] Preferably, the two balls correspond to and fit with the two first brackets and the second brackets at the top, respectively.
[0009] Preferably, a first-sized cavity is provided in the first supporting arm, and three first supporting blocks are equidistantly installed in the first-sized cavity.
[0010] Preferably, a second-sized cavity is provided in the second supporting arm, and three second supporting blocks are equidistantly installed in the second-sized cavity.
[0011] Compared with the prior art, the utility model has the following beneficial effects: by selecting a suitable first support arm or a second support arm, and then rotating the center block, the ball is connected to the corresponding first bracket or the second bracket, the overall support connection is stable, the adjustment and conversion between eight-inch wafers and four-inch wafers is convenient and fast, and the operation is simple. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 This is a schematic diagram of the overall structure of a transfer arm suitable for four-inch wafers of the utility model;
[0013] Figure 2 This is a schematic diagram of a top view of a transfer arm suitable for four-inch wafers according to the utility model;
[0014] Figure 3 This is a front view structural schematic diagram of a transfer arm suitable for four-inch wafers of the utility model;
[0015] Figure 4 This is a schematic diagram of the assembly structure of a first supporting arm, a second supporting arm and a center block of a conveying arm suitable for four-inch wafers of the utility model;
[0016] Figure 5 The utility model is a schematic diagram of the assembly structure of the outer cylinder positioning mechanism of the conveying arm suitable for four-inch wafers.
[0017] In the figure: 1. support arm; 2. rotating column; 3. positioning mechanism; 31. cylinder; 32. sliding cavity; 33. spring; 34. sliding column; 35. ball; 4. first support arm; 5. second support arm; 6. first size cavity; 7. second size cavity; 8. first support block; 9. second support block; 10. center block; 11. first bracket; 12. second bracket; 13. rotating groove; 14. latch column. DETAILED DESCRIPTION
[0018] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.
[0019] like Figure 1-5As shown, a conveying arm suitable for four-inch wafers includes a support arm 1 and a center block 10, a rotating column 2 is fixedly installed on the top of one end of the support arm 1, a rotating groove 13 is opened inside the center block 10, the rotating column 2 is adapted to the rotating groove 13, two slots are opened on the two side surfaces of the center block 10, four latch columns 14 are inserted into the four slots, a first support arm 4 and a second support arm 5 are fixedly installed on the two latch columns 14 on both sides, two positioning mechanisms 3 are embedded and installed on the support arm 1, two first brackets 11 are opened on the bottom surface of the first support arm 4, and two second brackets 12 are opened on the bottom of the second support arm 5.
[0020] In this embodiment, the positioning mechanism 3 includes a cylinder 31, a sliding cavity 32, a spring 33 and a sliding column 34. The cylinder 31 is embedded in the support arm 1. The top of the cylinder 31 is provided with a sliding cavity 32. A sliding column 34 is slidably installed in the sliding cavity 32. A ball 35 is rollingly embedded in the top of the sliding column 34. A spring 33 is fixedly installed between the sliding column 34 and the bottom surface of the sliding cavity 32. The two balls 35 correspond to and are adapted to the positions of the two first brackets 11 and the second bracket 12 at the top, respectively.
[0021] Specifically, when in use, select the appropriate first supporting arm 4 or second supporting arm 5 according to the size of the wafer to be transported, and then rotate the center block 10 so that the ball 35 is connected to the corresponding first bracket 11 or second bracket 12. The overall support connection is stable, and the adjustment and conversion between eight-inch wafers and four-inch wafers is convenient and fast, and the operation is simple.
[0022] In this embodiment, a first-sized cavity 6 is provided in the first supporting arm 4 , and three first supporting blocks 8 are installed in the first-sized cavity 6 at equal intervals; a second-sized cavity 7 is provided in the second supporting arm 5 , and three second supporting blocks 9 are installed in the second-sized cavity 7 at equal intervals.
[0023] Specifically, weight-reducing holes are provided on the first supporting arm 4, the second supporting arm 5 and the supporting arm 1 to reduce the weight of the conveying arm. The material may be 7075 aluminum, which has higher strength than the traditional 6061 aluminum.
[0024] Working principle: In the utility model, damping is arranged between the middle plug pin 14 and the slot on the center block 10. The first size cavity 6 is adapted to eight-inch wafers, and the second size cavity 7 is adapted to four-inch wafers. When in use, the appropriate first support arm 4 or second support arm 5 is selected according to the size of the wafer to be transported, and then the center block 10 is rotated to connect the ball 35 to the corresponding first bracket 11 or second bracket 12. The overall support connection is stable, and the adjustment and conversion between eight-inch wafers and four-inch wafers is convenient and fast, and the operation is simple. Weight reduction holes are opened on the first support arm 4, the second support arm 5 and the support arm 1 to reduce the weight of the conveying arm. The material can be selected from 7075 aluminum, which has higher strength than traditional 6061 aluminum.
[0025] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.
Claims
1. A transfer arm suitable for four-inch wafers, comprising a support arm (1) and a center block (10), characterized in that: A rotating column (2) is fixedly mounted on the top of one end of the support arm (1), a rotating groove (13) is provided inside the center block (10), the rotating column (2) is adapted to the rotating groove (13), two slots are provided on both side surfaces of the center block (10), four latch columns (14) are inserted into the four slots, a first support arm (4) and a second support arm (5) are fixedly mounted on the two latch columns (14) on both sides, two positioning mechanisms (3) are embedded and mounted on the support arm (1), two first brackets (11) are provided on the bottom surface of the first support arm (4), and two second brackets (12) are provided on the bottom of the second support arm (5).
2. A transfer arm suitable for four-inch wafers according to claim 1, characterized in that: The positioning mechanism (3) comprises a cylinder (31), a sliding cavity (32), a spring (33) and a sliding column (34); the cylinder (31) is embedded in the support arm (1); a sliding cavity (32) is provided at the top of the cylinder (31); a sliding column (34) is slidably installed in the sliding cavity (32); a ball (35) is rollingly embedded in the top of the sliding column (34).
3. A transfer arm suitable for four-inch wafers according to claim 2, characterized in that: A spring (33) is fixedly installed between the sliding column (34) and the bottom surface of the sliding cavity (32).
4. A transfer arm suitable for four-inch wafers according to claim 2, characterized in that: The two rolling balls (35) correspond to and fit with the two first brackets (11) and the second brackets (12) at the top, respectively.
5. The transfer arm suitable for four-inch wafers according to claim 1, characterized in that: A first-sized cavity (6) is provided in the first supporting arm (4), and three first supporting blocks (8) are installed in the first-sized cavity (6) at equal distances.
6. The transfer arm suitable for four-inch wafers according to claim 1, characterized in that: A second-sized cavity (7) is provided in the second supporting arm (5), and three second supporting blocks (9) are installed in the second-sized cavity (7) at equal intervals.