Liquid medicine coating device capable of uniformly coating for silicon wafer

Abstract

The utility model provides a liquid medicine coating device capable of uniformly coating for a silicon wafer, and relates to the field of coating. The liquid medicine coating device comprises a platform, a threaded pipe is rotationally connected to the inner wall of a mounting groove formed in the upper portion of the platform, a placement plate is rotationally connected to the top end of the outer side of the threaded pipe, the placement plate is fixedly connected to the upper portion of the platform, and the outer side of the threaded pipe is sleeved with a threaded ring in a threaded mode. According to the liquid medicine coating device capable of uniformly coating the silicon wafer, a plurality of clamping mechanisms and threaded rings are arranged, and the threaded rings are promoted to ascend and descend in a threaded rod rotating mode, so that the clamping mechanisms can be adjusted to be close to or far away from the center of the placing plate at the same time, the silicon wafer can be clamped and fixed, and meanwhile, the silicon wafer can be positioned and straightened; therefore, the medicine coating accuracy and stability of the medicine liquid coating device capable of uniformly coating for the silicon wafer can be effectively improved, and the fixing stability of the silicon wafer is improved.

Description

Technical Field

[0001] The utility model relates to a drug liquid coating device capable of coating uniformly, in particular to a drug liquid coating device capable of coating uniformly for silicon wafers, belonging to the technical field of coating. Background Art

[0002] Silicon wafers can integrate 160,000 transistors on a rice-sized silicon wafer, which is another milestone in scientific and technological progress; the silicon element, which accounts for 25.8% of the earth's crust, provides an inexhaustible source for the production of single-crystal silicon. Since silicon is one of the most abundant elements in the earth's crust, for products such as solar cells that are destined to enter the mass market, the advantage of reserves is also one of the reasons why silicon has become the main material for photovoltaics.

[0003] During the production process of silicon wafers, a robot is needed to place the silicon wafers on the workpiece, and then a liquid coating device is used to coat the surface of the silicon wafers. However, when the robot is operating the silicon wafers, the silicon wafers may be placed incorrectly, which will affect the normal operation of the coating operation, resulting in reduced practicality and stability of the liquid coating device that can apply uniform coating. Utility Model Content

[0004] Technical issues solved

[0005] The purpose of the utility model is to provide a device for coating silicon wafers with a liquid medicine that can be coated evenly in order to solve the above problems, so as to solve the problem of coating operation caused by improper placement of silicon wafers in the prior art.

[0006] Technical Solution

[0007] The utility model is realized through the following technical scheme: a device for coating silicon wafers with a liquid medicine that can be evenly coated, comprising a platform, a threaded tube is rotatably connected to the inner wall of a mounting groove opened on the upper part of the platform, a placement plate is rotatably connected to the top end of the outer side of the threaded tube, the placement plate is fixedly connected to the upper part of the platform, a threaded ring is provided on the threaded sleeve on the outer side of the threaded tube, connecting inclined rods distributed in a circumferential array are rotatably connected to the outer side of the threaded ring, a track groove distributed in a circumferential array is opened on the upper part of the placement plate, a slider is slidably connected in the track groove, a clamping mechanism is arranged on the upper part of the slider, and the bottom of each of the sliders is rotatably connected to the movable end of each connecting inclined rod.

[0008] Preferably, the clamping mechanism includes a fixed plate and a clamping plate, one side of the clamping plate is fixedly connected to a threaded rod, the movable end of the threaded rod is threadedly connected to a threaded hole opened on one side of the fixed plate, the fixed plate is fixedly connected to the upper part of the slider, and the clamping plate is slidably connected to the upper part of the slider.

[0009] Preferably, a support frame is installed on one side of the platform, a hydraulic rod is installed on the support frame, a lifting plate is installed on the movable end of the hydraulic rod through a connecting piece, a paint spray head is installed at the bottom of the lifting plate, and a telescopic rod is arranged between the upper part of the lifting plate and the support frame.

[0010] Preferably, a mounting groove is provided on the placement plate, each of the track grooves is located on both sides of the mounting groove, a conveyor belt is rotatably connected in the mounting groove, push rods equidistantly distributed are fixedly connected to the outside of the conveyor belt, and the upper part of the conveyor belt is flush with the upper part of the placement plate.

[0011] Preferably, a vacuum pump is provided on one side of the platform, and the air inlet end of the vacuum pump is fixedly connected to two conduits. Two adsorption holes are provided on the upper part of the placement plate, and the two adsorption holes are respectively fixedly connected to the movable ends of the two conduits. Each of the track grooves is respectively located on both sides of the two adsorption holes, and the two adsorption holes are respectively located on both sides of the conveyor belt.

[0012] Preferably, the outer fixed sleeve of the threaded tube is provided with a worm wheel, one side of the worm wheel is meshedly connected with a worm, the worm wheel and the worm are rotatably connected to the inner wall of the mounting groove, the movable end of the worm is fixedly connected with a turntable, and the turntable is located on one side of the platform.

[0013] Preferably, two stabilizing rods are fixedly connected to the inner wall of the installation groove, and stabilizing grooves are provided on both sides of the threaded ring, and the two stabilizing grooves are slidably connected to the two stabilizing rods respectively.

[0014] The utility model provides a device for coating a silicon wafer with a liquid medicine that can be evenly coated, and the beneficial effects thereof are as follows:

[0015] The device for coating silicon wafers with liquid medicine that can be evenly coated is provided with a plurality of clamping mechanisms and threaded rings, and the threaded rings are caused to rise and fall by rotating the threaded rods, so that each clamping mechanism can be adjusted to be closer to or farther away from the center of the placement plate at the same time, so that the silicon wafer can be clamped and fixed, and the silicon wafer can also be positioned and adjusted to facilitate coating the silicon wafer with liquid medicine, thereby effectively improving the coating accuracy and stability of the device for coating silicon wafers with liquid medicine that can be evenly coated, and improving the stability of fixing the silicon wafer.

[0016] The device for coating silicon wafers with a liquid medicine that can be evenly coated is configured with a clamping plate and a threaded rod that can be rotated so that a related clamping mechanism can be adjusted according to the shape of the silicon wafer, so that the clamping mechanism can adapt to the shape of the silicon wafer and fix it, and by adjusting the distance between the clamping plate and the fixing plate, the holding mechanism can clamp and fix the rectangular silicon wafer, thereby effectively improving the applicability of the clamping mechanism for clamping the silicon wafer and the practicality of the device for coating silicon wafers with a liquid medicine that can be evenly coated.

[0017] The device for coating silicon wafers with a chemical liquid that can be evenly coated passes through a conveyor belt, so that after the coating of the silicon wafers is completed, the conveyor belt can be used to push the silicon wafers away from the workbench, so that the silicon wafers can be easily unloaded, thereby improving the work efficiency of the device for coating silicon wafers with a chemical liquid that can be evenly coated, and the convenience of unloading. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic diagram of the utility model as a whole;

[0019] Figure 2 It is a three-dimensional schematic diagram of the cooperation of the placement plate, worm gear and vacuum pump of the utility model;

[0020] Figure 3 It is a three-dimensional schematic diagram of the matching of the threaded pipe and the threaded ring of the utility model;

[0021] Figure 4 It is a three-dimensional schematic diagram of the conveyor belt of the utility model.

[0022]

Main component symbol description

[0023] 1. Platform; 2. Worm; 3. Conveyor belt; 4. Placement plate; 5. Vacuum pump; 6. Paint nozzle; 7. Lifting plate; 8. Hydraulic rod; 9. Fixed plate; 10. Track groove; 11. Adsorption hole; 12. Mounting groove; 13. Stabilizer bar; 14. Threaded pipe; 15. Worm gear; 16. Conduit; 17. Threaded ring; 18. Connecting diagonal rod; 19. Slider; 20. Clamp; 21. Threaded rod; 22. Push rod. DETAILED DESCRIPTION

[0024] The embodiment of the utility model provides a device for coating a silicon wafer with a chemical solution that can be coated evenly.

[0025] See also Figures 1 to 4 , including a platform 1, a threaded tube 14 is rotatably connected to the inner wall of the installation groove opened on the upper part of the platform 1, a placement plate 4 is rotatably connected to the top of the outer side of the threaded tube 14, the placement plate 4 is fixedly connected to the upper part of the platform 1, a threaded ring 17 is provided on the outer threaded sleeve of the threaded tube 14, a connecting inclined rod 18 distributed in a circumferential array is rotatably connected to the outer side of the threaded ring 17, a track groove 10 distributed in a circumferential array is opened on the upper part of the placement plate 4, a slider 19 is slidably connected in the track groove 10, a clamping mechanism is arranged on the upper part of the slider 19, and the bottom of each slider 19 is rotatably connected to the movable end of each connecting inclined rod 18 respectively;

[0026] Put the silicon wafer on the placement plate 4, then rotate the threaded tube 14, the threaded tube 14 drives the threaded ring 17 to rise and fall, and the threaded ring 17 drives the slider 19 to slide in the track groove 10 by connecting the inclined rod 18, so that each slider 19 can approach the center position of the placement plate 4 at the same time, and each clamping mechanism can hijack and clamp the silicon wafer, and position the silicon wafer in the center.

[0027] See also Figure 3 The clamping mechanism includes a fixed plate 9 and a clamping plate 20, a threaded rod 21 is fixedly connected to one side of the clamping plate 20, and a movable end of the threaded rod 21 is threadedly connected to a threaded hole opened on one side of the fixed plate 9, the fixed plate 9 is fixedly connected to the upper part of the slider 19, and the clamping plate 20 is slidably connected to the upper part of the slider 19;

[0028] The threaded rod 21 is rotated to adjust the clamping plate 20 away from or close to the fixed plate 9. A scale is provided on the slider 19. The position of the clamping plate 20 can be understood according to the position of the scale, so that the positions of the two relative clamping plates 20 can be adjusted to be equal, thus avoiding the center position of the objects clamped by each clamping mechanism from being offset.

[0029] See also Figure 1 A support frame is installed on one side of the platform 1, a hydraulic rod 8 is installed on the support frame, a lifting plate 7 is installed on the movable end of the hydraulic rod 8 through a connecting piece, a paint spray head 6 is installed at the bottom of the lifting plate 7, and a telescopic rod is arranged between the upper part of the lifting plate 7 and the support frame;

[0030] The coating liquid is applied to the upper part of the silicon wafer through the coating nozzle 6.

[0031] Please refer to Figure 1 and Figure 4 The placement plate 4 is provided with a mounting groove 12, each track groove 10 is respectively located on both sides of the mounting groove 12, a conveyor belt 3 is rotatably connected in the mounting groove 12, and push rods 22 equidistantly distributed are fixedly connected to the outer side of the conveyor belt 3, and the upper part of the conveyor belt 3 is flush with the upper part of the placement plate 4;

[0032] A servo motor is installed in the placement plate 4. The movable shaft of the servo motor drives the roller on the conveyor belt 3 to rotate, so that the conveyor belt 3 rotates. The conveyor belt 3 uses the push rod 22 to push the silicon wafer off the placement plate 4. When unloading the silicon wafer, it is necessary to loosen each clamping mechanism.

[0033] Please refer to Figure 2 A vacuum pump 5 is provided on one side of the platform 1, and the air inlet end of the vacuum pump 5 is fixedly connected with two conduits 16. Two adsorption holes 11 are provided on the upper part of the placement plate 4, and the two adsorption holes 11 are respectively fixedly connected to the movable ends of the two conduits 16. Each track groove 10 is respectively located on both sides of the two adsorption holes 11, and the two adsorption holes 11 are respectively located on both sides of the conveyor belt 3;

[0034] The vacuum pump 5 is used to generate suction force in the adsorption holes 11 to adsorb the silicon wafer, thereby fixing the silicon wafer on the upper part of the placement plate 4.

[0035] Please refer to Figure 2 and Figure 3A worm gear 15 is provided on the outer fixed sleeve of the threaded tube 14, and a worm 2 is meshedly connected to one side of the worm gear 15. The worm gear 15 and the worm 2 are both rotatably connected to the inner wall of the mounting groove. A turntable is fixedly connected to the movable end of the worm 2, and the turntable is located on one side of the platform 1;

[0036] By rotating the worm 2 , the worm 2 drives the threaded tube 14 to rotate via the worm wheel 15 .

[0037] See also Figure 2 Two stabilizing rods 13 are fixedly connected to the inner wall of the installation groove, and stabilizing grooves are provided on both sides of the threaded ring 17, and the two stabilizing grooves are slidably connected to the two stabilizing rods 13 respectively;

[0038] The stabilizing rod 13 is used to stabilize the threaded ring 17 to ensure that the threaded ring 17 can only be lifted and slid but cannot rotate.

[0039] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A device for coating a silicon wafer with a uniformly coated liquid, comprising a platform (1), characterized in that: A threaded tube (14) is rotatably connected to the inner wall of the installation groove opened on the upper part of the platform (1), and a placement plate (4) is rotatably connected to the outer top of the threaded tube (14). The placement plate (4) is fixedly connected to the upper part of the platform (1). A threaded ring (17) is provided on the outer threaded sleeve of the threaded tube (14). The outer side of the threaded ring (17) is rotatably connected to connecting inclined rods (18) distributed in a circumferential array. A track groove (10) distributed in a circumferential array is opened on the upper part of the placement plate (4). A slider (19) is slidably connected in the track groove (10). A clamping mechanism is provided on the upper part of the slider (19), and the bottom of each slider (19) is rotatably connected to the movable end of each connecting inclined rod (18).

2. The device for coating a silicon wafer with a uniformly coated chemical solution according to claim 1, characterized in that: The clamping mechanism comprises a fixed plate (9) and a clamping plate (20), one side of the clamping plate (20) being fixedly connected to a threaded rod (21), a movable end of the threaded rod (21) being threadedly connected to a threaded hole provided on one side of the fixed plate (9), the fixed plate (9) being fixedly connected to the upper part of the slider (19), and the clamping plate (20) being slidably connected to the upper part of the slider (19).

3. The device for coating a silicon wafer with a uniformly coated chemical solution according to claim 1, characterized in that: A support frame is installed on one side of the platform (1), a hydraulic rod (8) is installed on the support frame, a lifting plate (7) is installed on the movable end of the hydraulic rod (8) via a connecting piece, a paint spray head (6) is installed at the bottom of the lifting plate (7), and a telescopic rod is provided between the upper part of the lifting plate (7) and the support frame.

4. The device for coating a silicon wafer with a uniformly coated chemical solution according to claim 1, characterized in that: The placement plate (4) is provided with a mounting groove (12), each of the track grooves (10) is located on both sides of the mounting groove (12), a conveyor belt (3) is rotatably connected in the mounting groove (12), and push rods (22) distributed at equal distances are fixedly connected to the outside of the conveyor belt (3), and the upper part of the conveyor belt (3) is flush with the upper part of the placement plate (4).

5. The device for coating a silicon wafer with a chemical solution that can be evenly coated according to claim 4, characterized in that: A vacuum pump (5) is provided on one side of the platform (1), and an air inlet end of the vacuum pump (5) is fixedly connected to two conduits (16). Two adsorption holes (11) are provided on the upper part of the placement plate (4), and the two adsorption holes (11) are respectively fixedly connected to the movable ends of the two conduits (16). Each of the track grooves (10) is respectively located on both sides of the two adsorption holes (11), and the two adsorption holes (11) are respectively located on both sides of the conveyor belt (3).

6. The device for coating a silicon wafer with a uniformly coated chemical solution according to claim 1, characterized in that: A worm wheel (15) is provided on the outer fixed sleeve of the threaded tube (14); one side of the worm wheel (15) is meshingly connected to a worm (2); the worm wheel (15) and the worm (2) are both rotatably connected to the inner wall of the mounting groove; the movable end of the worm (2) is fixedly connected to a turntable; the turntable is located on one side of the platform (1).

7. The device for coating a silicon wafer with a uniformly coated chemical solution according to claim 1, characterized in that: Two stabilizing rods (13) are fixedly connected to the inner wall of the installation groove, and stabilizing grooves are provided on both sides of the threaded ring (17), and the two stabilizing grooves are respectively slidably connected to the two stabilizing rods (13).

Images