Fine adjustment device for rotary table

Abstract

The utility model provides a rotary table fine adjustment device, which belongs to the technical field of rotary alignment platform fine adjustment and comprises a rotatable top cover, a fine adjustment unit and a transmission unit providing power for the fine adjustment unit, the fine adjustment unit comprises a nut seat, a fixing block I, an elastic sheet and a traction block, fine adjustment of the angle of the top cover is realized through deformation of the elastic sheet, and the rotary table fine adjustment device is simple in structure and convenient to operate. Maintenance is convenient and cost is low; mechanical wear is reduced, and the operation stability and wear resistance of the rotating table during the service life are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of fine adjustment of a rotary alignment platform, in particular to a rotary table fine adjustment device in the fields of semiconductor manufacturing, scanning microscopes, precision machining machine tools, etc. Background Art

[0002] As an important device for achieving micro displacement, the precision displacement platform has played a key breakthrough role in precision machining technology. For example, flexible hinges are used to provide frictionless linear and rotational motion. Common drivers include piezoelectric ceramic drivers, servo drivers, etc. Worm gears or linear guides plus ball screws are used to transmit motion and power between two staggered axes.

[0003] The above transmission mechanism is expensive and complicated to assemble, and the stability and wear resistance of the rotary table are required to be high. Utility Model Content

[0004] The main purpose of the utility model is to provide a rotating table fine-tuning device with simple structure and excellent stability and wear resistance.

[0005] According to the utility model, a rotary table fine-tuning device is proposed, comprising a rotatable top cover, a fine-tuning unit and a transmission unit for providing power to the fine-tuning unit, wherein the transmission unit comprises a motor and a ball screw connected to the motor; wherein the fine-tuning unit comprises a nut seat, a fixing block I, a spring sheet and a traction block; a threaded hole matching the ball screw is provided on the nut seat, the fixing block I is fixed on the nut seat, a first protrusion is provided on the side of the fixing block I, the spring sheet comprises a main body portion, a first extension end and a second extension end extending to the same side from the main body portion, and a third extension end connected to the second extension end through a connecting portion; the first extension end is connected to the first protrusion, the third extension end is connected to the traction block, and the traction block is fixed on the top cover.

[0006] Preferably, the length of the second extending end is greater than the length of the first extending end.

[0007] Preferably, the third extending end is parallel to the second extending end, and the third extending end extends away from a side of the connecting portion toward the main body portion.

[0008] Preferably, the third extending end forms an acute angle with the second extending end, and the third extending end extends away from a side of the connecting portion toward the main body portion.

[0009] Preferably, the second extending end is symmetrically arranged with respect to the first extending end.

[0010] Preferably, the third extending end is fixed to the traction block via a fixing block II, and the first extending end is fixed to the first protruding portion via a fixing block III.

[0011] Preferably, a second protruding portion is provided on one side of the traction block, a first straight portion is provided on a side of the top cover, and the second protruding portion is connected to the first straight portion.

[0012] Preferably, a second straight portion is arranged on the side of the top cover, a photoelectric sensor is arranged near the second straight portion, and a second cover plate is arranged outside the photoelectric sensor.

[0013] Preferably, a first cover plate is provided on the outer side of the transmission unit.

[0014] The utility model provides a rotating table fine-tuning device, comprising a rotatable top cover, a fine-tuning unit and a transmission unit providing power to the fine-tuning unit, wherein the fine-tuning unit comprises a nut seat, a fixing block I, a spring sheet and a traction block, and the fine-tuning of the top cover angle is achieved through deformation of the spring sheet. The utility model has a simple structure, convenient maintenance and low cost; mechanical wear is reduced, and the operating stability and wear resistance of the rotating table during its service life are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] With reference to the accompanying drawings, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings are only used for illustrative purposes and are not intended to limit the protection scope of the present utility model.

[0016] Figure 1 It is a three-dimensional schematic diagram of a rotating table involved in an embodiment of the utility model.

[0017] Figure 2 It is a three-dimensional schematic diagram of a fine-tuning unit involved in an embodiment of the utility model.

[0018] Figure 3 It is a three-dimensional schematic diagram of a spring piece involved in an embodiment of the utility model.

[0019] Figure 4 It is a three-dimensional schematic diagram of a fine-tuning unit involved in an embodiment of the utility model.

[0020] Figure 5 It is an overall three-dimensional schematic diagram of the rotating table fine-tuning device involved in an embodiment of the utility model.

[0021] Description of Figure Numbers:

[0022] 11. Base;

[0023] 111, retaining ring;

[0024] 112. Bearings;

[0025] 113, top cover; 113a, first straight portion; 113b, second straight portion;

[0026] 114, groove; 114a, first end; 114b, second end;

[0027] 115, transmission unit; 115a, motor; 115b, coupling; 115c, ball screw; 1151, first fixed seat; 1152, second fixed seat; 1153, first cover plate;

[0028] 116, nut seat; 116a, threaded hole;

[0029] 117, fixing block I; 117a, first protruding portion;

[0030] 118, spring piece; 118a, fixing block II; 118b, fixing block III; 1181, main body; 1182, first extension end; 1183, second extension end; 1184, connecting part; 1185, third extension end;

[0031] 118a1, 118b1, 1182a, 1185a, fixing holes;

[0032] 119, traction block; 119a, second protrusion; 119b, through hole;

[0033] 12. Photoelectric sensor; 121. Second cover plate.

[0034] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0036] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0037] There are various forms of turntables, and the purpose is to achieve precise alignment by adjusting displacement or angle. Linear displacement in the horizontal direction is more common, such as using piezoelectric ceramic drive. However, the control and adjustment of the rotation angle is relatively difficult. Based on this, this application takes a circular turntable as an example for explanation. It can be seen that it is also applicable to square or special-shaped turntables. The turntable fine-tuning device proposed in this application includes a rotating platform, a fine-tuning unit and a power unit (transmission unit 115).

[0038] See also Figure 1 and Figure 5 The rotating platform includes a horizontally arranged base 11, a retaining ring 111 is arranged on the base 11, and a bearing 112 is arranged inside the retaining ring 111. Preferably, it is a cross roller bearing, which can obtain a relatively stable transmission force and a relatively stable rotation center. A top cover 113 is arranged above the bearing 112. The top cover 113 is horizontal on the base 11 and can achieve angular rotation through the bearing 112. It can be seen that a flange corresponding to the bearing 112 is arranged at the bottom of the top cover 113 to ensure reliable connection and smooth transmission between the top cover 113 and the bearing 112. The assembly diagram of the base 11, the retaining ring 111, the bearing 112 and the top cover 113 is shown in FIG. Figure 5 The bearing 112 is shielded and sealed by the retaining ring 111 and the top cover 113, providing a closed environment, filling with lubricant, and protecting the bearing 112 from wear during use.

[0039] The top cover 113 is circular and has a certain thickness. A first straight portion 113a and a second straight portion 113b are provided on the side. The first straight portion 113a is used to connect the fine-tuning unit; the second straight portion 113b is used to verify and detect the rotation angle. A photoelectric sensor 12 is provided on the side of the second straight portion 113b. The photoelectric sensor 12 does not rotate with the top cover 113. A second cover plate 121 is provided on the outside of the photoelectric sensor 12 to protect the photoelectric sensor 12.

[0040] The power unit (transmission unit 115) is used to provide power to the fine-tuning unit to realize the fine-tuning function, and specifically includes a motor 115a, a coupling 115b connected to the output end of the motor 115a, and a ball screw 115c connected to the coupling 115b, and the fine-tuning unit is slidably arranged on the ball screw 115c. The coupling 115b and / or the motor 115a are arranged on the first fixed seat 1151, and the tail end (the end away from the coupling) of the ball screw 115c is provided with a second fixed seat 1152, and the first fixed seat 1151 and the second fixed seat 1152 are arranged on the base 11. Specifically, a groove 114 is provided on the base 11, and the ball screw 115c is located in the groove 114, and the fine-tuning unit can slide back and forth on the ball screw 115c in the groove 114. A first fixing seat 1151 is fixedly disposed at the first end 114a of the groove 114, and a second fixing seat 1152 is fixedly disposed at the second end 114b of the groove 114. Figure 5 The ball screw 115c and the top cover 113 are kept horizontal.

[0041] See also Figure 2 , Figure 3 and Figure 4 The fine-tuning unit includes a nut seat 116, a fixing block 117, a spring piece 118 and a traction block 119.

[0042] The nut seat 116 is provided with a threaded hole 116 a , which matches the ball screw 115 c , so that the nut seat 116 can slide along the ball screw 115 .

[0043] A fixing block I 117 is disposed on the side of the nut seat 116. The cross section of the fixing block I 117 is convex. A first protrusion 117a is disposed on the fixing block I 117 for connecting and fixing the spring sheet 118.

[0044] The spring piece 118 is a sheet-like structure made of metal and has toughness and rigidity. Figure 3 , including a body portion 1181, a first extension end 1182 and a second extension end 1183 extending from the body portion 1181 to the same side, and the length of the second extension end 1183 is greater than the length of the first extension end 1182. A plurality of fixing holes 1182a are provided near the end of the first extension end 1182, which is fixed to the first protruding portion 117a of the fixing block I 117 through the fixing block III 118b. The second extension end 1183 is connected to the third extension end 1185 through the connecting portion 1184.

[0045] The third extending end 1185 is parallel to the second extending end 1183 , and a tail end (a portion away from the connecting portion 1184 ) of the third extending end 1185 extends toward the main body portion 1181 .

[0046] The third extending end 1185 forms an acute angle with the second extending end 1183 , and a tail end of the third extending end 1185 (a portion away from the connecting portion 1184 ) extends toward the main body portion 1181 .

[0047] The second extending end 1183 is symmetrically arranged with respect to the first extending end 1182 , so as to increase the elastic force of the spring piece 118 .

[0048] A plurality of fixing holes 1185a are provided near the end of the third extension end 1185, and the third extension end 1185 is fixed to the traction block 119 through the fixing block II 118a. The fixing blocks II 118a and III 118b are provided with fixing holes 118a1 and fixing holes 118b1 respectively, and fixing blocks II 118a are provided on both sides of the spring sheet 118, and the fixing blocks II 118a are fixed to the traction block 119, so as to avoid direct contact between the spring sheet 118 and the traction block 119 and the nut seat 116, thereby affecting the deformation of the spring sheet 119 and affecting the adjustment accuracy of the rotation angle ( Figure 4 ).

[0049] A second protrusion 119a is provided on one side of the traction block 119, which is connected to the first straight portion 113a of the top cover 113. A through hole 119b is provided on the traction block 119 to provide deformation space for the fixing block III 118b within the space range, and at the same time, it is also convenient to install the fixing block III 118b on the first protrusion 117a of the fixing block I 117. The assembled fine adjustment unit is shown in FIG. Figure 4 The second protrusion 119 of the traction block 119 is connected to the first straight portion 113a of the top cover 113, and the nut seat 116 is sleeved on the ball screw 115c, as shown. Figure 5 A first cover plate 1153 is provided on the power unit (transmission unit 115) to protect the fine-tuning unit and the ball screw 115c.

[0050] When the utility model is used, the horizontality of the base 11 is adjusted by controlling the rotation of the motor 115a to drive the ball screw 115c to rotate, further driving the nut seat 116 threadedly connected to the ball screw 115c to slide along the ball screw 115c, the fixed block 117 on the nut seat 116 is fixedly connected to the first protruding end 1182 of the spring sheet 118, the third protruding end 1185 of the spring sheet 118 is fixedly connected to the traction block 119, and the traction block 119 is fixed on the first straight portion 113a of the top cover 113. When the nut seat 116 moves, the spring sheet 118 begins to deform, and the elastic force of the spring sheet 118 changes, driving the traction block 119 to move, thereby realizing the fine adjustment of the angle of the top cover 113.

[0051] It can be seen that, by knowing the stiffness coefficient of the spring 118 and the length of the extended end, a mathematical model can be established to calculate the moving distance (x) and the rotation angle of the nut seat 116. The variable relationship.

Claims

1. A rotary table fine-tuning device, comprising a rotatable top cover (113), a fine-tuning unit, and a transmission unit (115) for providing power to the fine-tuning unit, wherein the transmission unit (115) comprises a motor (115a) and a ball screw (115c) connected to the motor (115a); characterized in that: The fine-tuning unit comprises a nut seat (116), a fixing block I (117), a spring sheet (118) and a traction block (119); the nut seat (116) is provided with a threaded hole (116a) matching the ball screw (115c); the fixing block I (117) is fixed on the nut seat (116); a first protrusion (117a) is provided on the side of the fixing block I (117); the spring sheet (118) comprises a main body portion (1181), a The main body portion (1181) comprises a first extending end (1182) and a second extending end (1183) extending to the same side, and a third extending end (1185) connected to the second extending end (1183) via a connecting portion (1184); the first extending end (1182) is connected to the first protruding portion (117a), the third extending end (1185) is connected to the traction block (119), and the traction block (119) is fixed on the top cover (113).

2. The rotary table fine adjustment device according to claim 1, characterized in that: The length of the second extending end (1183) is greater than the length of the first extending end (1182).

3. The rotating table fine adjustment device according to claim 2, characterized in that: The third extending end (1185) is parallel to the second extending end (1183), and the third extending end (1185) extends toward the main body portion (1181) away from the side of the connecting portion (1184).

4. The rotating table fine adjustment device according to claim 2, characterized in that: The third extending end (1185) forms an acute angle with the second extending end (1183), and the third extending end (1185) extends toward the main body portion (1181) away from the side of the connecting portion (1184).

5. The rotating table fine adjustment device according to any one of claims 3-4, characterized in that: The second extending end (1183) is symmetrically arranged with respect to the first extending end (1182).

6. The rotating table fine adjustment device according to claim 5, characterized in that: The third extending end (1185) is fixed to the traction block (119) via a fixing block II (118a), and the first extending end (1182) is fixed to the first protruding portion (117a) via a fixing block III (118b).

7. The rotating stage fine adjustment device according to claim 6, characterized in that: A second protruding portion (119a) is disposed on one side of the traction block (119), a first straight portion (113a) is disposed on the side of the top cover (113), and the second protruding portion (119a) is connected to the first straight portion (113a).

8. The rotating table fine adjustment device according to claim 7, characterized in that: A second straight portion (113b) is arranged on the side of the top cover (113), a photoelectric sensor (12) is arranged near the second straight portion (113b), and a second cover plate (121) is arranged outside the photoelectric sensor (12).

9. The rotating stage fine adjustment device according to claim 8, characterized in that: A first cover plate (1153) is arranged outside the transmission unit (115).

Images