Crystal pulling furnace capable of avoiding blockage of exhaust pipeline

Abstract

The utility model discloses a crystal pulling furnace capable of preventing an exhaust pipeline from being blocked, and belongs to the technical field of crystal pulling furnaces. A crystal pulling furnace capable of preventing an exhaust pipeline from being blocked comprises a crystal pulling furnace body and further comprises a rotating column, a main exhaust pipe is arranged below the crystal pulling furnace body, a side exhaust pipe is arranged on the side face of the main exhaust pipe, a slag collecting box is arranged below the main exhaust pipe, the rotating column is located on the lower portion of the main exhaust pipe, and a material guide plate is arranged on the side face of the rotating column. A scraper is arranged on the side face of the guide plate. In order to solve the problem that a special coating can be gradually peeled off from the inner wall of a pipeline after long-term high temperature and chemical reaction, so that blockage of the exhaust pipeline is further aggravated, sediment on the inner wall of the exhaust pipeline is scraped off by a scraping plate while a rotating column rotates and moves from bottom to top in the exhaust pipeline, and thus the blockage of the exhaust pipeline is further aggravated. And the scraped sediments enter the inside of the slag collecting box along the material guide plate, so that the problem that the exhaust pipeline is blocked is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal pulling furnaces, in particular to a crystal pulling furnace which can avoid blockage of an exhaust pipe. Background Art

[0002] A crystal pulling furnace is a device used to produce single crystal silicon. It grows rod-shaped single crystal silicon from the melt by the Czochralski method or the floating zone melting method. Crystal pulling is based on the plastic deformation properties of the material. Under the action of external force, the atomic spacing of the crystal material changes, and the internal defects and dislocations of the crystal are repaired, thereby changing the shape and size of the crystal. At high temperatures, the oxides generated by the reaction of oxygen with silicon or other materials in the furnace are a common cause of exhaust pipe blockage. These oxides form a deposit layer on the inner wall of the pipe, which may cause complete or partial blockage of the exhaust pipe over time.

[0003] The existing method of placing exhaust pipe blockage mainly relies on evenly applying a smooth special coating on the inner wall of the pipe to reduce the adhesion of oxides on the inner wall of the pipe, and regular maintenance by personnel to ensure the smooth flow of the exhaust pipe.

[0004] The above method has the problem that the special coating will gradually peel off from the inner wall of the pipe after long-term high temperature and chemical reaction, thereby further aggravating the problem of exhaust pipe blockage; therefore, it does not meet the existing needs, and a crystal pulling furnace that avoids exhaust pipe blockage is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a crystal pulling furnace that can avoid blockage of the exhaust duct. A rotating column is arranged inside the exhaust duct, and a spiral guide plate and a scraper are arranged on the side of the rotating column. The side of the scraper contacts the inner wall of the exhaust duct. When the rotating column rotates from the bottom to the top of the exhaust duct, the scraper scrapes off the deposits on the inner wall of the exhaust pipe. The scraped deposits enter the interior of the slag collecting box along the guide plate, thereby avoiding the problem of blockage of the exhaust duct and solving the problems in the prior art.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a crystal pulling furnace that avoids blockage of the exhaust duct, comprising a crystal pulling furnace body and a rotating column, wherein the rotating column is located below the crystal pulling furnace body, a main exhaust pipe is arranged below the crystal pulling furnace body, a side exhaust pipe is arranged on the side of the main exhaust pipe, a slag collecting box is arranged below the main exhaust pipe, the rotating column is located at the lower part of the main exhaust pipe, a closing plate is arranged above the rotating column, a material guide plate is arranged on the side of the rotating column, a scraper is arranged on the side of the material guide plate, a screw rod is arranged inside the slag collecting box, the upper end of the screw rod is connected to the lower end of the rotating column, and a motor is arranged below the slag collecting box.

[0007] Preferably, the guide plate is a spiral structure, the guide plate is connected to the scraper, and the scraper is in contact with the inner wall of the main exhaust pipe.

[0008] Preferably, a sheath is provided inside the slag collecting box, a through hole is provided on the top of the slag collecting box, the screw rod is located inside the sheath, and the internal space of the main exhaust pipe is connected with the internal space of the slag collecting box.

[0009] Preferably, a second gear is disposed outside the screw rod, and the second gear is sleeved on the screw rod. A first gear is disposed at one end of the motor, and the first gear is meshed with the second gear.

[0010] Preferably, the closing plate is located inside the main exhaust pipe, a sealing ring is provided on the side of the closing plate, the closing plate is connected to the main exhaust pipe via a hinge, a rotating shaft is provided at one end of the hinge, and a handle is provided at one end of the rotating shaft.

[0011] Preferably, a heat insulation board is provided inside the closing plate, and a hinge is installed at the connection between the main exhaust pipe and the side exhaust pipe.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The utility model drives the screw rod to rotate upward through a motor, and the screw rod drives the rotating column to rotate from the bottom to the top of the main exhaust pipe, so that the scraper scrapes off the oxide deposits on the inner wall of the exhaust pipe. The scraped oxide deposits move downward along the guide plate and finally fall into the inside of the slag collecting box, thereby maintaining the smoothness of the exhaust pipe and avoiding the problem of exhaust pipe blockage.

[0014] 2. The utility model arranges a closing plate inside the main exhaust pipe, and a side exhaust pipe on the side of the main exhaust pipe. The closing plate is rotated from the inside of the main exhaust pipe to the inside of the side exhaust pipe through a hinge, so that the closing plate can block one end of the side exhaust pipe. The closing plate divides the main exhaust pipe into two parts, an upper part and an lower part. The rotating column is located at the lower part of the main exhaust pipe. Generally, the closing plate guides the gas inside the main exhaust pipe to the side exhaust pipe. When the main exhaust pipe is blocked, the closing plate rotates to the inside of the side exhaust pipe, avoiding long-term contact between the rotating column, the guide plate and the scraper and the high-temperature gas inside the exhaust pipe, thereby reducing unnecessary losses and improving the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is the overall front view of the utility model;

[0016] Figure 2 It is a schematic diagram of the local structure of the rotating column of the utility model;

[0017] Figure 3 It is a schematic diagram of the local structure of the slag collecting box of the utility model;

[0018] Figure 4 It is a schematic diagram of the local structure of the closing plate of the utility model.

[0019] In the figure: 1. crystal pulling furnace body; 2. main exhaust pipe; 201. side exhaust pipe; 3. slag collecting box; 301. sheath; 302. through hole; 4. motor; 401. first gear; 5. closing plate; 501. sealing ring; 502. hinge; 503. rotating shaft; 504. handle; 6. rotating column; 601. scraper; 602. guide plate; 7. screw; 701. second gear. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] To solve the problem, the special coating will gradually peel off from the inner wall of the pipe after long-term high temperature and chemical reaction, further aggravating the problem of exhaust pipe blockage. Figure 1-4 The utility model provides an embodiment: a crystal pulling furnace for avoiding blockage of an exhaust duct, comprising a crystal pulling furnace body 1, and also comprising a rotating column 6, the rotating column 6 is located below the crystal pulling furnace body 1, a main exhaust pipe 2 is arranged below the crystal pulling furnace body 1, a side exhaust pipe 201 is arranged on the side of the main exhaust pipe 2, a slag collecting box 3 is arranged below the main exhaust pipe 2, the rotating column 6 is located at the lower part of the main exhaust pipe 2, a closing plate 5 is arranged above the rotating column 6, a material guide plate 602 is arranged on the side of the rotating column 6, a scraper 601 is arranged on the side of the material guide plate 602, a screw rod 7 is arranged inside the slag collecting box 3, the upper end of the screw rod 7 is connected to the lower end of the rotating column 6, and a motor 4 is arranged below the slag collecting box 3.

[0022] The guide plate 602 is a spiral structure, which is connected to the scraper 601. The scraper 601 contacts the inner wall of the main exhaust pipe 2. A sheath 301 is provided inside the slag collecting box 3. A through hole 302 is provided on the top of the slag collecting box 3. The screw rod 7 is located inside the sheath 301. The internal space of the main exhaust pipe 2 is connected to the internal space of the slag collecting box 3. A second gear 701 is provided outside the screw rod 7. The second gear 701 is sleeved on the screw rod 7. A first gear 401 is provided at one end of the motor 4, and the first gear 401 is meshed with the second gear 701.

[0023] The motor 4 controls the first gear 401 to rotate, the first gear 401 drives the second gear 701 to rotate, the second gear 701 drives the screw rod 7 to rotate upward, and the screw rod 7 drives the rotating column 6 to rotate from the bottom to the top of the main exhaust pipe 2, so that the scraper 601 scrapes off the oxidized deposits on the inner wall of the main exhaust pipe 2, and the scraped oxidized deposits move downward along the guide plate 602 and finally fall into the inside of the slag collecting box 3, thereby maintaining the patency of the exhaust pipe and further avoiding the problem of exhaust pipe blockage.

[0024] The closing plate 5 is located inside the main exhaust pipe 2, a sealing ring 501 is arranged on the side of the closing plate 5, the closing plate 5 is connected to the main exhaust pipe 2 via a hinge 502, a rotating shaft 503 is arranged at one end of the hinge 502, a handle 504 is arranged at one end of the rotating shaft 503, a heat insulation board is arranged inside the closing plate 5, and the hinge 502 is installed at the connection between the main exhaust pipe 2 and the side exhaust pipe 201.

[0025] The closing plate 5 is rotated from the inside of the main exhaust pipe 2 to the inside of the side exhaust pipe 201 through the hinge 502, so that the closing plate 5 can block one end of the side exhaust pipe 201, and the closing plate 5 divides the main exhaust pipe 2 into two parts, the upper and lower parts, and the rotating column 6 is located at the lower part of the main exhaust pipe. Under normal circumstances, the closing plate 5 guides the gas inside the main exhaust pipe 2 to the side exhaust pipe 201. When the main exhaust pipe 2 is blocked, the personnel rotates the handle 504 externally to control the closing plate 5 to rotate to the inside of the side exhaust pipe 201, thereby connecting the upper and lower parts of the main exhaust pipe 2. At this time, the motor 4 is started again to clean the oxidized deposits on the inner wall of the main exhaust pipe 2, thereby avoiding long-term contact between components such as the rotating column 6, the guide plate 602 and the scraper 601 and the high-temperature gas inside the exhaust pipe, thereby reducing unnecessary losses and further improving the service life.

[0026] Working principle: Under normal circumstances, the closing plate 5 guides the gas inside the main exhaust pipe 2 to the side exhaust pipe 201. When the main exhaust pipe 2 is blocked, the closing plate 5 rotates to the inside of the side exhaust pipe 201. At this time, the motor 4 is started, and the rotating column 6 drives the scraper 601 to rotate upward inside the main exhaust pipe 2. The scraper 601 scrapes off the oxide deposits on the inner wall of the main exhaust pipe 2, and the scraped oxide deposits fall along the guide plate 602 to the inside of the slag collecting box 3. After the blockage is cleaned, the closing plate 5 is reset, and the main exhaust pipe 2 is reconnected with the side exhaust pipe 201, thereby maintaining the patency of the exhaust pipe.

[0027] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A crystal pulling furnace for avoiding blockage of an exhaust pipe, comprising a crystal pulling furnace body (1), characterized in that: It also includes a rotating column (6), wherein the rotating column (6) is located below the crystal pulling furnace body (1), a main exhaust pipe (2) is arranged below the crystal pulling furnace body (1), a side exhaust pipe (201) is arranged on the side of the main exhaust pipe (2), a slag collecting box (3) is arranged below the main exhaust pipe (2), the rotating column (6) is located at the lower part of the main exhaust pipe (2), a closing plate (5) is arranged above the rotating column (6), a material guide plate (602) is arranged on the side of the rotating column (6), a scraper (601) is arranged on the side of the material guide plate (602), a screw rod (7) is arranged inside the slag collecting box (3), the upper end of the screw rod (7) is connected to the lower end of the rotating column (6), and a motor (4) is arranged below the slag collecting box (3).

2. A crystal pulling furnace for avoiding blockage of exhaust pipe according to claim 1, characterized in that: The guide plate (602) is a spiral structure, the guide plate (602) is connected to the scraper (601), and the scraper (601) is in contact with the inner wall of the main exhaust pipe (2).

3. A crystal pulling furnace for avoiding blockage of exhaust pipe according to claim 1, characterized in that: A sheath (301) is provided inside the slag collecting box (3), a through hole (302) is provided on the top of the slag collecting box (3), the screw rod (7) is located inside the sheath (301), and the internal space of the main exhaust pipe (2) is connected to the internal space of the slag collecting box (3).

4. A crystal pulling furnace for avoiding blockage of exhaust pipe according to claim 1, characterized in that: A second gear (701) is arranged outside the screw rod (7), and the second gear (701) is sleeved on the screw rod (7). A first gear (401) is arranged at one end of the motor (4), and the first gear (401) is meshed with the second gear (701).

5. A crystal pulling furnace for avoiding blockage of exhaust pipe according to claim 1, characterized in that: The closing plate (5) is located inside the main exhaust pipe (2), a sealing ring (501) is provided on the side of the closing plate (5), the closing plate (5) is connected to the main exhaust pipe (2) via a hinge (502), a rotating shaft (503) is provided at one end of the hinge (502), and a handle (504) is provided at one end of the rotating shaft (503).

6. A crystal pulling furnace for avoiding blockage of exhaust pipe according to claim 5, characterized in that: A heat insulation board is arranged inside the closing plate (5), and a hinge (502) is installed at the connection between the main exhaust pipe (2) and the side exhaust pipe (201).

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