Silicon nitride htcc heating element aging equipment

By designing a silicon nitride HTCC heating body aging equipment including an aging box, a heater, a placement seat, a clamp and a push spring, the problem of position shift and uneven heating of the heating body during the aging process is solved, and the uniformity of temperature distribution and the accuracy of aging results are achieved.

CN222866811UActive Publication Date: 2025-05-13HENAN JINGNA MICROELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202421293408.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-07
Publication Date
2025-05-13
Estimated Expiration
2034-06-07

AI Technical Summary

Technical Problem

In the existing silicon nitride HTCC heating element aging equipment, the silicon nitride HTCC heating element may have position shifts or uneven heating due to its inactivity during the aging process, resulting in uneven temperature distribution, affecting the accuracy of the aging results.

Method used

A silicon nitride HTCC heating body aging device including an aging box, a heater, a plating seat, a clamp and a pushing spring is designed. By pushing the spring to push the pushing plate, push the rotating plate, and push the clamp to clamp the heating body to ensure its stable position.

Benefits of technology

By clamping the heating element, position shift and uneven heating are avoided, the uniformity of temperature distribution during aging is ensured, and the accuracy of aging results is improved.

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Abstract

The utility model relates to the technical field of aging equipment, and discloses silicon nitride htcc heating body aging equipment, which comprises an aging oven, the front side of the aging oven is rotatably connected with an oven door, the left side and the right side of the interior of the aging oven are both provided with heaters, the bottom end of the interior of the aging oven is fixedly connected with a placing seat, and the placing seat is fixedly connected with the aging oven. The device comprises a placement seat, two clamping plates are slidably connected to the top end of the placement seat, the ends, far away from each other, of the two clamping plates are fixedly connected with limiting assemblies, two rotating pieces are rotatably connected to the interior of the placement seat, sliding rods are rotatably connected to the interiors of the two rotating pieces, and sliding seats are slidably connected to the outer sides of the two sliding rods. According to the utility model, the pushing sheet is pushed by the pushing spring I, so that the rotating sheet is pushed, the rotating sheet pushes the clamping plate to clamp the heating body, the condition of position deviation or non-uniform heating is avoided, the temperature distribution in the aging process is more uniform, and the accuracy of the aging result is ensured.
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Description

Technical Field

[0001] The utility model relates to the technical field of aging equipment, in particular to a silicon nitride HTCC heating element aging equipment. Background Art

[0002] A silicon nitride HTCC heating element aging equipment is a device specially used for aging test and performance evaluation of silicon nitride HTCC heating elements. It provides a controlled high temperature environment to simulate the working environment of silicon nitride HTCC heating elements in actual applications to evaluate their performance parameters and life characteristics.

[0003] After searching, the existing Chinese patent announcement number is: CN204731332U, an aging room equipment, including two rows of aging cabinet groups arranged back to back and two electrical boxes, wherein an electrical box is correspondingly arranged on one side of each aging cabinet group, each aging cabinet group includes a plurality of aging cabinets arranged in a queue, each electrical box individually controls each aging cabinet in the corresponding aging cabinet group, each aging cabinet includes a cabinet body surrounding a chamber, an exhaust air duct arranged on the cabinet body, an exhaust fan arranged on the exhaust air duct, a heating system arranged on the cabinet body and a temperature sensor arranged in the chamber, an air outlet connected to the exhaust air duct is opened on the cabinet body, the temperature sensor includes a first temperature sensor arranged at the air outlet and a second temperature sensor arranged in the center of the chamber, each aging cabinet is correspondingly provided with a thermostat, the thermostat controls the exhaust fan and the heating system according to the first temperature sensor and the second temperature sensor, each chamber is provided with a shelf, and a roller is provided at the bottom of the shelf.

[0004] In the specific implementation of the above patent, the aging room equipment is capable of testing multiple types of products at the same time by setting up each group of aging cabinets composed of multiple aging cabinets and setting an electrical box corresponding to each group of aging cabinets. Since a first temperature sensor is set on the air outlet of the aging cabinet, a second temperature sensor is set in the center of the chamber, and the temperature controller controls the exhaust fan and the heating system according to the first temperature sensor and the second temperature sensor, the test accuracy is achieved and the control stability is improved. In addition, in this patent, since rollers are set at the bottom of the shelf, it is convenient to move the object to be tested so that the operation is more convenient. However, this patent does not explain how to place the silicon nitride htcc heating element that needs to be aged. This makes the silicon nitride htcc heating element directly placed on the shelf during aging, and it is not fixed. When the heating element is not fixed, position displacement or uneven heating may occur, resulting in uneven temperature distribution during the aging process, which may affect the accuracy of the aging result and cause the aging effect of some areas of the sample to be inconsistent with other areas. For this reason, a silicon nitride htcc heating element aging equipment is proposed to solve the above problems. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides a silicon nitride HTCC heater aging equipment, which aims to improve the prior art that the silicon nitride HTCC heater is directly placed on the shelf during aging without being fixed. When the heater is not fixed, position displacement or uneven heating may occur, resulting in uneven temperature distribution during the aging process, which may affect the accuracy of the aging results and cause the aging effect of some areas of the sample to be inconsistent with other areas.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A silicon nitride HTCC heating element aging equipment, comprising an aging box, the front side of the aging box is rotatably connected to a box door, heaters are installed on both sides of the inside of the aging box, the bottom end of the inside of the aging box is fixedly connected to a placement seat, the top of the placement seat is slidably connected to two clamping plates, the far ends of the two clamping plates are fixedly connected to a limiting component, the inside of the placement seat is rotatably connected to two rotating pieces, the insides of the two rotating pieces are rotatably connected to sliding rods, the outer sides of the two sliding rods are slidably connected to sliding seats, the outer sides of the two sliding rods are fixedly connected to push pieces, the outer sides of the two sliding rods are sleeved with push springs, the top of the inside of the aging box is fixedly connected to a relaxation component, and the inside of the box door is provided with a sealing component;

[0008] As a further description of the above technical solution:

[0009] The limiting assembly includes a limiting column and a limiting plate, the outer side of the limiting column is slidably connected to the inside of the limiting plate, and the bottom end of the limiting plate is fixedly connected to the top end of the placement seat;

[0010] As a further description of the above technical solution:

[0011] The release assembly comprises a placement seat, a knob, a rotating disk and two pulling rods, the top end of the placement seat is fixedly connected to the bottom end of the placement seat, the outer side of the knob is rotatably connected to the inside of the placement seat, the front side of the rotating disk is fixedly connected to the rear end of the knob, the rear ends of the two pulling rods are rotatably connected to the front side of the rotating disk, and the far ends of the two pulling rods are rotatably connected to the near ends of the two sliding rods respectively;

[0012] As a further description of the above technical solution:

[0013] The top ends of the two rotating pieces are respectively rotatably connected to the ends of the two clamping plates that are far away, and the ends of the two push springs that are far away are respectively fixedly connected to the ends of the two push pieces that are close to each other;

[0014] As a further description of the above technical solution:

[0015] The sealing assembly includes a card slot, a placement slot, a plurality of push springs 2, a limit ring and a sealing strip, wherein the card slot is opened inside the box door, the placement slot is opened on the front side of the aging box, the push spring 2 is arranged inside the placement slot, the outer side of the limit ring is slidably connected to the inside of the placement slot, and the outer side of the sealing strip is slidably connected to the inside of the card slot;

[0016] As a further description of the above technical solution:

[0017] The front sides of the plurality of push springs are fixedly connected to the rear end of the limiting ring, and the rear end of the sealing strip is fixedly connected to the front side of the limiting ring;

[0018] As a further description of the above technical solution:

[0019] A handle is fixedly connected to the front side of the box door, and support legs are fixedly connected to the four corners of the bottom end of the aging box;

[0020] As a further description of the above technical solution:

[0021] The bottom ends of the two clamping plates are in contact with the top end of the placement seat, and the top ends of the two sliding seats are fixedly connected to the inner top end of the placement seat.

[0022] The utility model has the following beneficial effects:

[0023] In the utility model, a push spring pushes the push sheet, thereby pushing the rotating sheet, and the rotating sheet pushes the clamping plate to clamp the heating element, thereby avoiding position displacement or uneven heating, making the temperature distribution more uniform during the aging process and ensuring the accuracy of the aging result.

[0024] In the utility model, the limiting ring and the sealing strip are pushed by pushing the spring 2, so that the sealing strip and the card slot are engaged together, and the gap between the aging box and the box door is sealed, which effectively prevents external air and moisture from entering the aging room, thereby maintaining the stability of the aging environment and reducing energy waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a three-dimensional schematic diagram of a silicon nitride htcc heating element aging device proposed by the utility model;

[0026] Figure 2 This is a schematic diagram of the structure of a heater of a silicon nitride htcc heating element aging device proposed by the utility model;

[0027] Figure 3This is a structural schematic diagram of a placement seat for a silicon nitride htcc heating element aging device proposed by the utility model;

[0028] Figure 4 This is a structural cross-sectional view of a box door of a silicon nitride HTCC heating element aging device proposed by the utility model.

[0029] Legend:

[0030] 1. Aging box; 2. Box door; 3. Heater; 4. Placement seat; 5. Clamp; 6. Limit column; 7. Limit plate; 8. Rotating plate; 9. Sliding rod; 10. Sliding seat; 11. Push plate; 12. Push spring 1; 13. Placement seat; 14. Knob; 15. Rotating disk; 16. Pull rod; 17. Slot; 18. Placement slot; 19. Push spring 2; 20. Limit ring; 21. Sealing strip; 22. Handle; 23. Support leg. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] Reference Figure 1 - Figure 3 The utility model provides an embodiment: a silicon nitride HTCC heating element aging equipment, including an aging box 1, the front side of the aging box 1 is rotatably connected to a box door 2, the box door 2 is designed to close the aging box 1, the left and right sides of the interior of the aging box 1 are installed with heaters 3, the heater 3 is made of silicon nitride HTCC, the bottom end of the interior of the aging box 1 is fixedly connected to a placement seat 4, the placement seat 4 is designed to facilitate the placement of items to be aged, the top of the placement seat 4 is slidably connected to two clamps 5, the clamps 5 are designed to facilitate the clamping of the silicon nitride HTCC heating element, the far ends of the two clamps 5 are fixedly connected to the limiting assembly, the interior of the placement seat 4 is rotatably connected to two rotating pieces 8, the rotating pieces 8 are designed to connect the clamps 5 and the sliding rod 9.

[0033] The inside of the two rotating plates 8 are both rotatably connected with sliding rods 9. The sliding rods 9 are designed to push one end of the rotating plate 8 when the pushing spring 12 pushes the pushing plate 11, so that the other end of the rotating plate 8 pushes the clamping plate 5 to clamp the silicon nitride HTCC heating element. The outer sides of the two sliding rods 9 are slidably connected with sliding seats 10. The sliding seats 10 are designed to facilitate the fixing of the sliding rods 9. The outer sides of the two sliding rods 9 are both fixedly connected with pushing plates 11. The pushing plates 11 are designed to push the sliding rods 9 under the push of the pushing spring 12, thereby pushing one end of the rotating plate 8. The outer sides of the two sliding rods 9 are both sleeved with pushing springs 12. The pushing springs 12 are designed to push the pushing plates 11 to push the sliding rods 9.

[0034] A release component is fixedly connected to the top of the interior of the aging box 1, a sealing component is opened inside the box door 2, the limit component includes a limit column 6 and a limit plate 7, the outer side of the limit column 6 is slidably connected to the inside of the limit plate 7, the bottom end of the limit plate 7 is fixedly connected to the top of the placement seat 4, the limit column 6 is designed to cooperate with the limit plate 7 to limit the movement of the splint 5, the release component includes a placement seat 13, a knob 14, a rotating disk 15 and two pulling rods 16, the top of the placement seat 13 is fixedly connected to the bottom of the placement seat 4, the placement seat 13 is designed to facilitate the fixing of the knob 14, the outer side of the knob 14 is rotatably connected to the inside of the placement seat 13, and the knob 14 is designed to rotate the rotating disk 15, thereby driving the two pulling rods 16, and then pulling the two sliding rods 9.

[0035] The front side of the rotating disk 15 is fixedly connected to the rear end of the knob 14, the rear ends of the two pull rods 16 are rotatably connected to the front side of the rotating disk 15, the far ends of the two pull rods 16 are respectively rotatably connected to the near ends of the two sliding rods 9, the top ends of the two rotating pieces 8 are respectively rotatably connected to the far ends of the two clamping plates 5, the rotating piece 8 is designed to connect the clamping plate 5 and the sliding rod 9, the far ends of the two push springs 12 are respectively fixedly connected to the near ends of the two push pieces 11, and the push spring 12 is designed to push the push spring 11 by pushing the push spring 11. Plate 11, thereby pushing the sliding rod 9, a handle 22 is fixedly connected to the front side of the box door 2, and the handle 22 is designed to facilitate opening the box door 2, and the four corners of the bottom end of the aging box 1 are fixedly connected with supporting legs 23, and the supporting legs 23 are designed to facilitate supporting the aging box 1, and the bottom ends of the two splints 5 are in contact with the top of the placement seat 4, and the splints 5 are designed to facilitate clamping the silicon nitride HTCC heating element to be processed, and the top ends of the two sliding seats 10 are fixedly connected to the inner top of the placement seat 4, and the sliding seat 10 is designed to facilitate fixing the sliding rod 9.

[0036] like Figure 4As shown, the sealing assembly includes a card slot 17, a receiving slot 18, a plurality of push springs 19, a limit ring 20 and a sealing strip 21. The card slot 17 is arranged inside the box door 2. The card slot 17 is designed to be combined with the sealing strip 21 to seal the gap between the aging box 1 and the box door 2. The receiving slot 18 is arranged on the front side of the aging box 1. The receiving slot 18 is designed to conveniently accommodate the push spring 19, the limit ring 20 and the sealing strip 21. The push spring 19 is arranged inside the receiving slot 18. The push spring 19 is designed to facilitate pushing the limit ring 20, thereby pushing the sealing strip 21 to tightly engage with the card slot 17.

[0037] The outer side of the limiting ring 20 is slidably connected to the inside of the accommodating groove 18. The limiting ring 20 is designed to facilitate the limiting of the sealing strip 21. The outer side of the sealing strip 21 is slidably connected to the inside of the card slot 17. The sealing strip 21 is designed to engage with the card slot 17, thereby sealing the gap between the aging box 1 and the box door 2. The front side of multiple push springs 19 is fixedly connected to the rear end of the limiting ring 20. The push springs 19 are designed to facilitate pushing the limiting ring 20, thereby pushing the sealing strip 21 to engage tightly with the card slot 17. The rear end of the sealing strip 21 is fixedly connected to the front side of the limiting ring 20. The sealing strip 21 is designed to engage with the card slot 17, thereby sealing the gap between the aging box 1 and the box door 2.

[0038] Working principle: when the silicon nitride htcc heating element aging equipment is needed to age the items to be aged, open the door 2 and turn the knob 14 to drive the rotating disk 15 to rotate. The rotating disk 15 will pull the two sliding rods 9 through the pulling rod 16. The sliding rod 9 will pull one end of the rotating sheet 8, so that the other end of the rotating sheet 8 will pull the splint 5 to increase the distance between the two splints 5. At this time, the silicon nitride htcc heating element can be placed between the two splints 5. After placement, release the hand that turns the knob 14, and the push spring 12 will push the push sheet 11, thereby pushing one end of the rotating sheet 8, so that the other end of the rotating sheet 8 will push the splint 5 to clamp the silicon nitride htcc heating element. At this time, the heater 3 can be turned on and the door 2 can be closed. By letting the push spring 12 push the push sheet The movable plate 11 pushes one end of the rotating plate 8, and the other end of the rotating plate 8 pushes the clamping plate 5 to clamp the silicon nitride HTCC heating element to avoid position displacement or uneven heating, so that the temperature distribution during the aging process is more uniform, ensuring the accuracy of the aging result. When the box door 2 and the aging box 1 are closed, the pushing spring 19 will push the limiting ring 20, so that the limiting ring 20 with the sealing strip 21 is engaged with the card slot 17 to seal the gap between the aging box 1 and the box door 2. The limiting ring 20 and the sealing strip 21 are pushed by the pushing spring 19, so that the sealing strip 21 is engaged with the card slot 17 to seal the gap between the aging box 1 and the box door 2, effectively preventing external air and moisture from entering the aging room, thereby maintaining the stability of the aging environment and reducing energy waste.

[0039] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon nitride htcc heating element aging device, comprising an aging box (1), characterized in that: The front side of the aging box (1) is rotatably connected to a box door (2), the left and right sides of the interior of the aging box (1) are both equipped with heaters (3), the bottom end of the interior of the aging box (1) is fixedly connected to a placement seat (4), the top of the placement seat (4) is slidably connected to two clamping plates (5), the far ends of the two clamping plates (5) are fixedly connected to a limiting component, the interior of the placement seat (4) is rotatably connected to two rotating plates (8), the interiors of the two rotating plates (8) are rotatably connected to sliding rods (9), the outer sides of the two sliding rods (9) are slidably connected to sliding seats (10), the outer sides of the two sliding rods (9) are fixedly connected to push plates (11), the outer sides of the two sliding rods (9) are both sleeved with push springs (12), the top of the interior of the aging box (1) is fixedly connected to a relaxation component, and the interior of the box door (2) is provided with a sealing component.

2. A silicon nitride htcc heating element aging equipment according to claim 1, characterized in that: The limiting assembly comprises a limiting column (6) and a limiting plate (7), the outer side of the limiting column (6) is slidably connected to the inside of the limiting plate (7), and the bottom end of the limiting plate (7) is fixedly connected to the top end of the placement seat (4).

3. A silicon nitride htcc heating element aging equipment according to claim 1, characterized in that: The relaxation assembly comprises a seating seat (13), a knob (14), a rotating disk (15) and two pulling rods (16); the top end of the seating seat (13) is fixedly connected to the bottom end of the placement seat (4); the outer side of the knob (14) is rotationally connected to the inside of the seating seat (13); the front side of the rotating disk (15) is fixedly connected to the rear end of the knob (14); the rear ends of the two pulling rods (16) are rotationally connected to the front side of the rotating disk (15); and the far ends of the two pulling rods (16) are rotationally connected to the near ends of the two sliding rods (9).

4. The silicon nitride htcc heating element aging equipment according to claim 1, characterized in that: The top ends of the two rotating plates (8) are respectively rotatably connected to the ends of the two clamping plates (5) that are far away from each other, and the ends of the two pushing springs (12) that are far away from each other are respectively fixedly connected to the ends of the two pushing plates (11) that are close to each other.

5. The silicon nitride htcc heating element aging equipment according to claim 1, characterized in that: The sealing assembly comprises a clamping groove (17), a placement groove (18), a plurality of push springs (19), a limiting ring (20) and a sealing strip (21); the clamping groove (17) is arranged inside the box door (2); the placement groove (18) is arranged on the front side of the aging box (1); the push spring (19) is arranged inside the placement groove (18); the outer side of the limiting ring (20) is slidably connected to the inside of the placement groove (18); and the outer side of the sealing strip (21) is slidably connected to the inside of the clamping groove (17).

6. A silicon nitride htcc heating element aging equipment according to claim 5, characterized in that: The front sides of the plurality of push springs (19) are fixedly connected to the rear end of the limiting ring (20), and the rear end of the sealing strip (21) is fixedly connected to the front side of the limiting ring (20).

7. The silicon nitride htcc heating element aging equipment according to claim 1, characterized in that: A handle (22) is fixedly connected to the front side of the box door (2), and support legs (23) are fixedly connected to the four corners of the bottom end of the aging box (1).

8. The silicon nitride htcc heating element aging equipment according to claim 1, characterized in that: The bottom ends of the two clamping plates (5) are in contact with the top end of the placement seat (4), and the top ends of the two sliding seats (10) are fixedly connected to the inner top end of the placement seat (4).

Citation Information

Patent Citations

  • Ageing room equipment

    CN204731332U