Intelligent semiconductor pressure adjusting device

Abstract

The utility model discloses an intelligent semiconductor pressure regulating device which comprises a key input module, an ARM processor, a display screen, a communication module, an AD converter, a constant pressure controller, a pressure regulator valve body and an internal pressure sensor. The key input module is connected to the ARM processor and is used for sending a pressure set value set by a user through keys to the ARM processor; the display screen is connected to the ARM processor; the communication module is connected to the ARM processor and is used for receiving a pressure set value remotely set by a user; the AD converter is connected to the ARM processor and used for sending the pressure detection value obtained after digital-to-analog conversion to the ARM processor. The internal pressure sensor is connected with the AD converter and is used for detecting the internal pressure of the device; the ARM processor is connected with the constant pressure controller and is used for sending a pressure control instruction; the constant pressure controller is connected with the pressure regulator valve body and used for controlling the pressure regulator valve body to carry out pressure regulation. The device has the advantages of high automation degree and high safety.

Description

Technical Field

[0001] The utility model relates to the technical field of air pressure control, in particular to an intelligent semiconductor pressure regulating device. Background Art

[0002] As the technological requirements of high-end equipment become increasingly higher, especially the demand for ultra-high purity and ultra-clean pipelines, valves, and pressure vessels in the fields of semiconductors, solar energy, and biopharmaceuticals, the existing ordinary rough corrugations and processes of stainless steel materials are difficult to meet the growing demand. For media such as highly corrosive and toxic gases and ultra-high purity gases, under the conditions of increasingly stringent calibration of high and low temperature properties and gas content in the air, it is difficult for existing pressure regulating devices to simultaneously meet cleanliness and air tightness under the premise of double safety. In addition, the existing pressure regulating devices require on-site manual control by staff, making it difficult to achieve intelligent automatic control of pressure regulation, and the safety of the pressure regulation process is low.

[0003] Therefore, it is urgent to invent an intelligent semiconductor pressure regulating device to improve the automation and safety of the existing pressure regulating devices. Summary of the invention

[0004] In view of this, an embodiment of the present invention provides an intelligent semiconductor pressure regulating device, which at least partially solves the problems existing in the prior art.

[0005] Other features and advantages of the present invention will become apparent from the following detailed description or may be learned in part from the practice of the present invention.

[0006] In order to achieve the above purpose, the embodiment of the utility model provides the following technical solutions:

[0007] According to an embodiment of the utility model, an intelligent semiconductor pressure regulating device is provided, the device comprises: a key input module, an ARM processor, a display screen, a communication module, an AD converter, a constant pressure controller, a pressure regulator valve body and an internal pressure sensor;

[0008] The key input module is connected to the ARM processor, and the key input module is used to send the pressure setting value set by the user through the key to the ARM processor;

[0009] The display screen is connected to the ARM processor, and the display screen is used to display device parameters;

[0010] The communication module is connected to the ARM processor, and the communication module is used to receive the pressure setting value set remotely by the user and send it to the ARM processor;

[0011] The AD converter is connected to the ARM processor, and the AD converter is used to send the pressure detection value after digital-to-analog conversion to the ARM processor;

[0012] The internal pressure sensor is connected to the AD converter, and the internal pressure sensor is used to detect the internal pressure of the device and send the pressure detection value to the AD converter;

[0013] The ARM processor is connected to the constant pressure controller, and the ARM processor is used to send a pressure control instruction to the constant pressure controller according to the received pressure setting value and the internal pressure detection value;

[0014] The constant pressure controller is connected to the pressure regulator valve body, and is used to control the pressure regulator valve body to perform pressure regulation according to a received pressure control instruction.

[0015] Furthermore, the device also includes an external pressure signal input port, which is connected to the AD converter and is used to send the received external pressure detection value to the AD converter.

[0016] Furthermore, the external pressure signal input port is connected to an external pressure sensor, and the external pressure sensor is used to detect external pressure and transmit the detected external pressure detection value to the external pressure signal input port.

[0017] Furthermore, the key input module includes a selection key, a function key and a modification key.

[0018] Furthermore, the display screen is a 128×64 dot matrix OLED display screen.

[0019] Furthermore, the communication module is an RS485 communication module.

[0020] Furthermore, the AD converter is a 24-bit AD converter.

[0021] Furthermore, the AD converter is a 16-bit AD converter.

[0022] Furthermore, the device also includes a communication indicator light and an alarm indicator light; the communication indicator light is green, and is used to indicate the communication status of the communication module; the alarm indicator light is red, and is used to sound an alarm based on the pressure detection value.

[0023] Furthermore, the pressure regulator valve body includes a pressure relief valve and a pressure increasing valve.

[0024] The utility model has the following advantages:

[0025] An intelligent semiconductor pressure regulating device disclosed in an embodiment of the utility model is very convenient to install and debug, and has extremely small pressure loss; it also has a digital communication function, and can send the pressure setting value to the regulating device through a communication module, so as to realize remote control, and use digital communication instead of the original analog signal to reduce the error caused by signal transmission. It also has the functions of high-precision data acquisition, closed-loop control, and can be connected to PLC, and has the advantages of high degree of automation and high safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the implementation or the prior art description. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0027] Figure 1 One of the structural schematic diagrams of an intelligent semiconductor pressure regulating device provided by an embodiment of the utility model;

[0028] Figure 2 The second structural schematic diagram of an intelligent semiconductor pressure regulating device provided in an embodiment of the utility model.

[0029] Reference numerals:

[0030] 1-key input module; 2-ARM processor; 3-display screen;

[0031] 4-communication module; 5-AD converter; 6-constant voltage controller;

[0032] 7-pressure regulator valve body; 8-internal pressure sensor; 9-external pressure signal input port; 10-external pressure sensor. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0036] In the description of the present utility model, it should be noted that the nouns indicating orientation or positional relationships appearing in the content of this specification are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as a limitation on the present utility model.

[0037] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] refer to Figure 1 An embodiment of the utility model provides an intelligent semiconductor pressure regulating device, which specifically includes: a key input module 1, an ARM processor 2, a display screen 3, a communication module 4, an AD converter 5, a constant pressure controller 6, a pressure regulator valve body 7 and an internal pressure sensor 8.

[0039] Specifically, the key input module 1 is connected to the ARM processor 2, and the key input module 1 is used to send the pressure setting value set by the user through the key to the ARM processor 2. The key input module 1 includes a selection key, a function key and a modification key; for the function key, there is no response when the function key is pressed shortly, and if the function key is pressed for more than 3 seconds, the data modification mode is entered, and different data are selected for modification according to the prompt of the display screen 3. In the data modification mode, pressing the function key is used to confirm the current selection or confirm the modified data; for the selection key, the selection key is used to turn the page backward in the normal display mode, and the selection key is used to move the cursor left and right to select the data to be modified in the data modification mode; for the modification key, the modification key is used to turn the page forward in the normal display mode, and the modification key is used to modify the selected data in the data modification mode. Each time the modification key is pressed, the modified data is increased by 1, and the modified data changes between 0 and 9.

[0040] The display screen 3 is connected to the ARM processor 2, wherein the display screen 3 is a 128×64 dot matrix OLED display screen, which is used to display various parameters of the device.

[0041] The communication module 4 is connected to the ARM processor 2, wherein the communication module 4 is an RS485 communication module for receiving a pressure setting value set remotely by a user and sending it to the ARM processor 2. The embodiment of the utility model utilizes the RS485 communication module to realize remote input of the pressure setting value.

[0042] The AD converter 5 is connected to the ARM processor 2 . The AD converter 5 is a 24-bit high-precision AD converter, which is used to perform digital-to-analog conversion on the pneumatic pressure signal of the pressure sensor and send the pressure detection value after digital-to-analog conversion to the ARM processor 2 .

[0043] The internal pressure sensor 8 is connected to the AD converter 5 , and is used to detect the internal pressure of the device and send the internal pressure detection value to the AD converter 5 .

[0044] The above-mentioned ARM processor 2 is connected to the constant pressure controller 6. The ARM processor 2 adopts a 32-bit microprocessor and integrates automatic data detection and intelligent PID control algorithms. It is used to generate pressure control instructions based on the received pressure setting value and internal pressure detection value and send the pressure control instructions to the constant pressure controller 6.

[0045] The constant pressure controller 6 is connected to the pressure regulator valve body 7. The constant pressure controller 6 is used for pressure-maintaining control of a pressure vessel whose controlled pressure is below 1.6 MPa, and controls the pressure regulator valve body 7 to adjust the pressure according to the received pressure control instruction.

[0046] The pressure regulator valve body 7 includes a pressure relief valve and a pressure increasing valve. The pressure relief valve is used to automatically exhaust gas to the outside to reduce pressure when the internal pressure is higher than a set value, and the pressure increasing valve is used to increase the internal pressure when the internal pressure is lower than a set value.

[0047] In addition, the intelligent semiconductor pressure regulating device also includes a communication indicator light and an alarm indicator light, wherein the communication indicator light is green, and is used to indicate the communication status of the communication module 4. When the communication module 4 is connected to the 485 communication network, the communication indicator light flashes once each time the communication module 4 receives data; the alarm indicator light is red, and is used to sound an alarm based on the pressure detection value. When the measured value exceeds the preset alarm value, the alarm indicator light flashes, and the flashing frequency of the alarm indicator light varies depending on the alarm level; it should be noted that the working methods of the above-mentioned indicator lights all belong to the existing technical means.

[0048] In addition, the key input module 1, display screen 2, communication indicator light and alarm indicator light are all integrated on the control panel of the intelligent semiconductor pressure regulating device.

[0049] Specifically, the power supply voltage range of the intelligent semiconductor pressure regulating device provided by the embodiment of the utility model is 24VDC±10%; the acquisition accuracy of the device (full scale) is less than or equal to 0.2%; the external pressure transmitter of the device is a 2-wire 4~20mA; the power consumption of the device is less than or equal to 3W (when the solenoid valve is actuated); the working temperature of the device is between -20℃ and 70℃; the storage temperature of the device is -30℃~+80℃; the relative humidity of the device is less than or equal to 90%; the communication protocol used by the device is MODBUS RTU; the baud rate of the communication module RS485 is 1200~115200bps, and the data format is 8n1; the device adjustment record is saved 900 times in a 1-second period.

[0050] refer to Figure 2 In one example, the intelligent semiconductor pressure regulating device provided by the embodiment of the utility model also includes an external pressure signal input port 9, one end of the external pressure signal input port 9 is connected to the external pressure sensor 10, and the other end is connected to the AD converter 5; the external pressure sensor 10 is used to detect the external pressure and transmit the detected external pressure detection value to the external pressure signal input port 9, and the external pressure signal input port 9 is used to send the received external pressure detection value to the AD converter 5; in this example, the AD converter 5 adopts a 16-bit high-precision AD converter, the internal pressure detection is used to determine whether the gas source of the device is normal, and the external pressure detection is used to detect the result of the regulated object, thereby forming a closed-loop regulation circuit.

[0051] The intelligent semiconductor pressure regulating device provided by the embodiment of the utility model can be used in the pilot pressure closed-loop control system, replacing the existing electrical converter in the pilot pressure closed-loop control system, so that the replaced pilot pressure closed-loop control system has extremely small pressure loss and has digital communication function at the same time. The intelligent semiconductor pressure regulating device provided by the embodiment of the utility model can also be used alone as a pressure regulating valve; when the medium is compressed air or nitrogen and the flow rate is very small, the intelligent semiconductor pressure regulating device can be directly used as a pressure regulating valve.

[0052] The technical solution of the utility model has the following advantages:

[0053] An intelligent semiconductor pressure regulating device provided by an embodiment of the utility model is very convenient to install and debug, and has extremely small pressure loss; it also has a digital communication function, and can send the pressure setting value to the regulating device through a communication module, so as to realize remote control, and use digital communication instead of the original analog signal to reduce the error caused by signal transmission. It also has the functions of high-precision data acquisition, closed-loop control, and can be connected to PLC, and has the advantages of high degree of automation and high safety.

[0054] The above-listed embodiments show and describe the basic principles and main features of the utility model, but the utility model is not limited to the above-mentioned embodiments. Any modifications, equivalent changes and modifications made to the utility model by those skilled in the art without making any creative work should fall within the scope of protection of the technical solution of the utility model.

Claims

1. An intelligent semiconductor pressure regulating device, characterized in that: The device comprises: a key input module (1), an ARM processor (2), a display screen (3), a communication module (4), an AD converter (5), a constant pressure controller (6), a pressure regulator valve body (7) and an internal pressure sensor (8); The key input module (1) is connected to the ARM processor (2), and the key input module (1) is used to send the pressure setting value set by the user through the key to the ARM processor (2); The display screen (3) is connected to the ARM processor (2), and the display screen (3) is used to display device parameters; The communication module (4) is connected to the ARM processor (2), and the communication module (4) is used to receive a pressure setting value remotely set by a user and send it to the ARM processor (2); The AD converter (5) is connected to the ARM processor (2), and the AD converter (5) is used to send the pressure detection value after digital-to-analog conversion to the ARM processor (2); The internal pressure sensor (8) is connected to the AD converter (5), and the internal pressure sensor (8) is used to detect the internal pressure of the device and send the pressure detection value to the AD converter (5); The ARM processor (2) is connected to the constant pressure controller (6), and the ARM processor (2) is used to send a pressure control instruction to the constant pressure controller (6) according to the received pressure setting value and the internal pressure detection value; The constant pressure controller (6) is connected to the pressure regulator valve body (7), and the constant pressure controller (6) is used to control the pressure regulator valve body (7) to perform pressure regulation according to a received pressure control instruction.

2. The intelligent semiconductor pressure regulating device according to claim 1, characterized in that: The device further comprises an external pressure signal input port (9), wherein the external pressure signal input port (9) is connected to the AD converter (5), and the external pressure signal input port (9) is used to send the received external pressure detection value to the AD converter (5).

3. The intelligent semiconductor pressure regulating device according to claim 2, characterized in that: The external pressure signal input port (9) is connected to an external pressure sensor (10), and the external pressure sensor (10) is used to detect external pressure and transmit the detected external pressure detection value to the external pressure signal input port (9).

4. The intelligent semiconductor pressure regulating device according to claim 1, characterized in that: The key input module (1) comprises a selection key, a function key and a modification key.

5. The intelligent semiconductor pressure regulating device according to claim 1, characterized in that: The display screen (3) is a 128×64 dot matrix OLED display screen.

6. The intelligent semiconductor pressure regulating device according to claim 1, characterized in that: The communication module (4) is an RS485 communication module.

7. The intelligent semiconductor pressure regulating device according to claim 1, characterized in that: The AD converter (5) is a 24-bit AD converter.

8. The intelligent semiconductor pressure regulating device according to claim 3, characterized in that: The AD converter (5) is a 16-bit AD converter.

9. The intelligent semiconductor pressure regulating device according to claim 1, characterized in that: The device also includes a communication indicator light and an alarm indicator light; the communication indicator light is green and is used to indicate the communication status of the communication module (4); the alarm indicator light is red and is used to sound an alarm based on the pressure detection value.

10. The intelligent semiconductor pressure regulating device according to claim 1, characterized in that: The pressure regulator valve body (7) comprises a pressure relief valve and a pressure increasing valve.

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