Clamping point, boat piece and carrier

Abstract

The utility model belongs to the technical field of semiconductors, and discloses a clamping point, a boat sheet and a carrier, the clamping point is used for supporting a sheet, the clamping point comprises a matching part and a bearing part, the matching part is installed on a boat sheet body, the bearing part is connected with the matching part, and a gap used for clamping the sheet is formed between the bearing part and the matching part. A hollowed-out area is arranged on the side, away from the matching part, of the bearing part and communicates with the gap. The contact area of the clamping point and the sheet is small, and the clamping point is provided with the hollow area to guide ions to be emitted to the part, shielded by the clamping point, of the sheet, so that the scorching area of the sheet and the trace that the shielded position of the fuzzy sheet cannot be coated are greatly reduced, and the efficiency of converting solar energy into electric energy by a battery piece in unit area is improved.

Description

Technical Field

[0001] The utility model relates to the technical fields of semiconductors and photovoltaics, and in particular to a card point, a boat sheet and a carrier. Background Art

[0002] In the manufacturing equipment of semiconductors and solar cells, diffusion equipment, oxidation equipment, coating equipment, etc. all require graphite boats to load cells. Graphite boats are usually composed of multiple boat pages connected together. Each boat page is equipped with a card point for connecting the cells. In the actual process, the cells will inevitably be blocked by the card point. The larger the blocked area, the larger the area of ​​the burnt area during the process. The larger the burnt area, the lower the efficiency of solar energy conversion per unit area of ​​the cell. Utility Model Content

[0003] The first purpose of the utility model is to provide a card point, which has a small contact area with the sheet, and a hollow area is provided on the card point to guide ions to shoot to the part of the sheet blocked by the card point, which greatly reduces the burnt area of ​​the sheet and blurs the traces of the blocked position of the sheet that cannot be coated, thereby facilitating improving the efficiency of solar energy conversion into electrical energy per unit area of ​​the battery sheet.

[0004] To achieve this purpose, the utility model adopts the following technical solutions:

[0005] The utility model discloses a clamping point, which is used to support a sheet material. The clamping point comprises: a matching part, which is installed on a boat sheet body; a bearing part, which is connected to the matching part, and a gap for clamping the sheet material is formed between the bearing part and the matching part, and a hollow area is provided on the side of the bearing part away from the matching part, and the hollow area is connected to the gap.

[0006] The beneficial effect of the clamping point of the utility model is that when the sheet is inserted into the gap, the presence of the hollow area will reduce the shielding area of ​​the sheet by the bearing part, making the area affected by the shielding and burning very small. At the same time, the hollow area can also guide ions to shoot toward the position of the sheet blocked by the bearing part, blurring the traces of the blocked position of the sheet that cannot be coated. By setting the hollow area, the sheet can be supported by the clamping point and the burnt area is very small after the process is carried out, which is almost invisible to the naked eye, thereby helping to improve the efficiency of solar energy conversion of the battery per unit area.

[0007] In some embodiments, the hollow area is a fan-shaped groove.

[0008] In some embodiments, at least a portion of the sidewalls of the hollow area are inclined and are used to guide the coating medium to the area of ​​the sheet material blocked by the supporting portion.

[0009] In some specific embodiments, in a direction approaching the matching portion, the hollow area is formed as a wedge-shaped groove with a gradually decreasing cross-sectional area.

[0010] In some embodiments, the bearing portion includes a supporting section and a limiting section, two ends of the supporting section are respectively connected to the matching portion and the limiting section, and the supporting section is used to support the sheet;

[0011] The gap is enclosed by the outer peripheral wall of the supporting section, the side wall of the limiting section facing the matching portion, and the side wall of the matching portion facing the limiting section.

[0012] In some embodiments, the vertical cross-section of the mating portion is non-circular, and the vertical cross-section is a plane that is perpendicular to the center line of the mating portion and parallel to the end surface of the mating portion.

[0013] In some specific embodiments, the outer peripheral surface of the matching portion includes a limiting surface, and the limiting surface and the hollow area are respectively located on both sides of the center line of the matching portion; the boat piece is provided with a mounting surface matching with the limiting surface.

[0014] In some embodiments, there are two bearing portions, and the two bearing portions are respectively arranged at two ends of the matching portion along the axial direction thereof.

[0015] The second object of the utility model is to provide a boat sheet, which can reduce the burnt area of ​​the sheet and blur the traces of the blocked position of the sheet that cannot be coated, thereby facilitating improving the efficiency of solar energy conversion into electrical energy per unit area of ​​the battery sheet.

[0016] To achieve this purpose, the utility model adopts the following technical solutions:

[0017] The utility model also discloses a boat piece, comprising a boat piece body and a plurality of any one of the aforementioned clamping points, wherein the clamping points are installed on the boat piece body.

[0018] The beneficial effects of the boat sheet of the utility model are as follows: since each bearing position corresponds to a plurality of the aforementioned card points, and since a hollow area is provided on the card points, after the sheet is inserted into the boat sheet and processed, the burnt area is very small and is almost invisible to the naked eye, which is beneficial to improving the efficiency of solar energy conversion into electrical energy per unit area of ​​the battery sheet.

[0019] In some embodiments, each of the bearing positions is provided with at least two of the clamping points, and the two clamping points are supported on two adjacent side walls of the sheet.

[0020] The third object of the utility model is to provide a carrier, which can reduce the burnt area of ​​the sheet and blur the traces of the blocked position of the sheet that cannot be coated, thereby facilitating improving the efficiency of solar energy conversion into electrical energy per unit area of ​​the battery sheet.

[0021] The utility model also discloses a carrier, comprising a plurality of boat pieces and a connecting assembly as described above, wherein the plurality of boat pieces are arranged at intervals, and the connecting assembly is used to connect the plurality of boat pieces.

[0022] The beneficial effects of the carrier of the utility model are as follows: since it includes a plurality of the aforementioned boat pieces, hollow areas are provided on the card points on the boat pieces, so that after the sheet is inserted into the boat pieces and processed, the burnt area is very small and is almost invisible to the naked eye, which is beneficial to improving the efficiency of solar energy conversion into electrical energy per unit area of ​​the battery sheet.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a structural schematic diagram of a card point in an embodiment of the utility model;

[0025] Figure 2 yes Figure 1 A schematic diagram of the structure of the stuck point in another direction;

[0026] Figure 3 It is a structural schematic diagram of another clamping point of an embodiment of the utility model.

[0027] Figure 4 This is a schematic diagram of the structure of the boat piece of an embodiment of the utility model;

[0028] Figure 5 yes Figure 4 The enlarged schematic diagram of the circled A;

[0029] Figure 6 It is a structural schematic diagram of a carrier according to an embodiment of the utility model;

[0030] Figure 7 It is an enlarged view of the local structure of the carrier according to the embodiment of the utility model.

[0031] Reference numerals:

[0032] 100, card point; 110, matching part; 111, limit surface; 120, bearing part; 1201, gap; 1202, hollow area; 121, support section; 122, limit section;

[0033] 200, scapula body; 210, scapula ear;

[0034] 300, connecting assembly; 310, insulating rod; 320, insulating sleeve; 330, first gasket; 340, first nut;

[0035] 400, conductive block; 410, electrode hole; 420, supporting foot;

[0036] 500, conductive component; 510, conductive rod; 520, second gasket; 530, second nut;

[0037] 10. Sheet. DETAILED DESCRIPTION

[0038] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0039] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0041] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0042] Reference below Figure 1-Figure 2 The specific structure of the clamping point 100 according to the embodiment of the present utility model is described.

[0043] The utility model discloses a clamping point 100, which is used to support a sheet 10. Figure 1 and Figure 2 As shown, the clamping point 100 includes a matching portion 110 and a bearing portion 120, the matching portion 110 is installed on the boat body 200, the bearing portion 120 is connected to the matching portion 110, a gap 1201 for clamping the sheet 10 is formed between the bearing portion 120 and the matching portion 110, and a hollow area 1202 is provided on the side of the bearing portion 120 away from the matching portion 110, and the hollow area 1202 is connected to the gap 1201. It can be understood that when the sheet 10 is inserted into the gap 1201, since the hollow area 1202 is connected to the gap 1201, the additional hollow area 1202 will reduce the shielding area of ​​the bearing portion 120 for the sheet 10, so that the area of ​​the shielding and burning influence range becomes very small, and at the same time, the hollow area 1202 can guide ions to shoot to the position of the sheet 10 shielded by the bearing portion 120. By setting the hollow area 1202 on the clamping point 100, the sheet 10 can be supported by the clamping point 100 and after the process, the burnt area is very small and almost invisible to the naked eye, which is beneficial to improving the efficiency of solar energy conversion into electrical energy per unit area of ​​the battery cell.

[0044] Optionally, the hollow area 1202 is a fan-shaped groove. It is understandable that the hollow area 1202 is a fan-shaped groove, so that when the clamping point 100 is actually installed, the operator can install it according to the shape of the hollow area 1202, so that the sheet 10 is aligned with the arc surface of the clamping point 100 every time it is inserted from the automatic sheet, which well buffers the sheet 10, avoids the phenomenon of the sheet 10 hitting the tip and breaking, and does not cause the sheet 10 to be poorly fixed due to angle problems.

[0045] Optionally, at least part of the side walls of the hollow area 1202 are tilted. It can be understood that in actual operation, the hollow area 1202 can guide the plasma generated in the process to the position where the sheet 10 is blocked by the supporting portion 120. In the present embodiment, at least part of the side walls of the hollow area 1202 are tilted, which can enhance the guiding effect of the hollow area 1202, so that more plasma can be better directed to the position where the sheet 10 is blocked by the supporting portion 120, thereby further blurring the traces that the blocked position of the sheet 10 cannot be coated.

[0046] Further optionally, in the direction close to the mating portion 110, the hollow area 1202 is formed into a wedge-shaped groove with a gradually decreasing cross-sectional area. It is understandable that the hollow area 1202 is formed into a wedge-shaped groove, which can be more convenient to process and has a better guiding effect. It should be noted here that in other embodiments of the utility model, the specific shape of the hollow area 1202 can be selected according to actual needs and is not limited to the above description.

[0047] refer to Figure 1 and Figure 2 As shown, the bearing portion 120 includes a support section 121 and a limiting section 122. The two ends of the support section 121 are connected to the matching portion 110 and the limiting section 122 respectively. The support section 121 is used to support the sheet 10. The outer peripheral wall of the support section 121, the side wall of the limiting section 122 facing the matching portion 110, and the side wall of the matching portion 110 facing the limiting section 122 together form a gap 1201. It can be understood that the support section 121 is used to support the sheet 10. The outer peripheral wall of the support section 121, the side wall of the limiting section 122 facing the matching portion 110, and the side wall of the matching portion 110 facing the limiting section 122 together form a gap 1201. When the sheet 10 is inserted into the bearing portion 120, the support of the support section 121 and the limiting of the limiting section 122 can ensure that the sheet 10 is stably limited by the card point 100 on the boat sheet, which is conducive to ensuring the normal progress of the process.

[0048] Optionally, a side of the bearing portion 120 away from the matching portion 110 is chamfered.

[0049] Optionally, there are two bearing parts 120, and the two bearing parts 120 are respectively arranged at the two ends of the matching part 110 along the axial direction thereof. It can be understood that since the clamping point 100 of this embodiment has two bearing parts 120, that is, in the actual working process, one clamping point 100 can support the sheets 10 on both sides of the boat sheet, which is conducive to increasing the sheet loading capacity.

[0050] Optionally, the bearing portion 120 and the matching portion 110 are integrally formed. It is understandable that in actual working process, the bearing portion 120 and the matching portion 110 are integrally formed, which can facilitate the manufacture of the bearing portion 120 and the matching portion 110, improve the connection strength of the bearing portion 120 and the matching portion 110, and avoid the phenomenon of the connection position of the bearing portion 120 and the matching portion 110 being broken.

[0051] Optionally, the clamping point 100 is a graphite piece. It is understandable that the boat is usually made of graphite material, and the clamping point 100 is also made of graphite material to avoid damage to the boat when installing the clamping point 100, which is conducive to extending the service life of the boat.

[0052] refer to Figure 3As shown, the vertical cross section of the mating portion 110 is non-circular, and the vertical cross section is a plane perpendicular to the center line a of the mating portion 110 and parallel to the end face of the mating portion 110. It can be understood that since the vertical cross section of the mating portion 110 is non-circular, the direction of the clamping point 100 is unique during installation, so that the sheet 10 is aligned with the mating portion 110 and the bearing portion 120 without sharp edges and corners each time the sheet 10 is automatically inserted, and the phenomenon of unstable fixation of the sheet 10 due to the angle deviation of the insertion is avoided.

[0053] Furthermore, the outer peripheral surface of the matching portion 110 includes a limiting surface 111, and the limiting surface 111 and the hollow area 1202 are respectively located on both sides of the center line a of the matching portion 110; the boat piece is provided with a mounting surface that matches the limiting surface 111. It can be understood that the limiting surface 111 is used to prevent the card point 100 from rotating relative to the boat piece after being installed on the boat piece. At the same time, in the process of installing the card point 100 on the boat piece body 200, the operator can install it according to the convenience of the limiting surface 111, which has a good fool-proof function, and can make the sheet 10 be aligned with the arc surface of the card point 100 every time from the automatic insertion, which well buffers the sheet 10, avoids the phenomenon of the sheet 10 hitting the tip and breaking, and does not cause the sheet 10 to be poorly fixed due to angle problems.

[0054] Reference below Figure 4-Figure 5 The specific structure of the boat piece of the embodiment of the utility model is described.

[0055] The utility model also discloses a boat piece, referring to Figure 4 As shown, it includes a boat body 200 and a plurality of any of the aforementioned clamping points 100, and the clamping points 100 are installed on the boat body 200. It can be understood that since each bearing position corresponds to a plurality of the aforementioned clamping points 100, and since a hollow area 1202 is provided on the clamping point 100, the sheet 10 can be inserted into the boat and processed, and the burnt area is very small, which is almost invisible to the naked eye, thereby helping to improve the efficiency of solar energy conversion of the battery per unit area.

[0056] refer to Figure 5 As shown, each bearing position is provided with at least two clamping points 100, and the two clamping points 100 are supported on two adjacent side walls of the sheet 10. It can be understood that by clamping the sheet 10 with the two clamping points 100, the installation stability of the sheet 10 can be ensured, thereby facilitating the process. Preferably, each bearing position is provided with three clamping points 100, one clamping point 100 is supported on the bottom wall of the sheet 10, and the other two clamping points 100 are respectively located on both sides of the sheet 10, and one of the two clamping points 100 is located at the top and the other is located at the bottom.

[0057] The utility model also discloses a carrier, referring to Figure 6As shown, it includes a plurality of boats and a connecting assembly 300 as described above, wherein the plurality of boats are arranged at intervals, and the connecting assembly 300 is used to connect the plurality of boats. It is understandable that, since a plurality of boats are included, a hollow area 1202 is provided on the card point 100 on the boat, so that after the sheet 10 is inserted into the boat and processed, the burnt area is very small and can hardly be seen by naked eyes, thereby facilitating improving the efficiency of solar energy conversion of the battery per unit area.

[0058] refer to Figure 7 As shown, the connection assembly 300 includes an insulating rod 310, an insulating sleeve 320, a first gasket 330 and a first nut 340, the insulating rod 310 is inserted into a plurality of boat bodies 200, the insulating sleeve 320 is sleeved on the insulating rod 310 and clamped between two adjacent boat bodies 200, the first nut 340 is connected to both sides of the insulating rod 310, and the first gasket 330 is clamped between the first nut 340 and the boat body 200. It can be understood that the insulating rod 310 and the insulating sleeve 320 connect the plurality of boat bodies 200 together to ensure the structural stability of the carrier. The first nut 340 can play a locking role to prevent the boat body 200 from being transmitted along the axial direction of the insulating rod 310, and the first gasket 330 can prevent the first nut 340 from scratching the sheet 10. Optionally, the insulating rod 310, the insulating sleeve 320, the first gasket 330 and the first nut 340 are all ceramic parts.

[0059] refer to Figure 7 As shown, boat ears 210 are provided at both ends of the boat sheet body 200, and the multiple boat sheet bodies 200 are divided into two groups, and the boat ears 210 of the two groups of boat sheet bodies 200 are staggered and arranged alternately. That is, the boat ears 210 of the two adjacent boat sheet bodies 200 are staggered, and the boat sheets of the two alternate boat sheet bodies 200 are arranged oppositely. The carrier also includes a conductive block 400 sandwiched between the two oppositely arranged boat ears 210. It can be understood that the multiple boat sheet bodies 200 can be connected by the arrangement of the conductive block 400, which is convenient for external electrodes.

[0060] Optionally, the conductive block 400 is provided with an electrode hole 410, and the electrode hole 410 is used for externally connecting an electrode. This facilitates the connection between the carrier and the electrode, thereby facilitating the process. The conductive block 400 is also provided with a support foot 420. This facilitates the cooperation between the carrier and the support rod in the process chamber, thereby ensuring that the entire carrier can be stably placed in the process chamber.

[0061] refer to Figure 7As shown, the carrier also includes a conductive component 500, which is used to fix the boat ear 210 and the conductive block 400. The conductive component 500 includes a conductive rod 510, a second gasket 520 and a second nut 530. Each conductive rod 510 is inserted into a group of boat ears 210 and the corresponding conductive block 400, the second nut 530 is connected to both ends of the conductive rod 510, and the second gasket 520 is sandwiched between the conductive block 400 and the second nut 530. The additional conductive rod 510 can ensure the connection stability of multiple conductive blocks 400 and the boat ear 210, the second nut 530 can prevent the conductive block 400 from moving along the axial direction of the conductive rod 510, and the second gasket 520 can prevent the second nut 530 from scratching the conductive block 400.

[0062] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0063] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A card point, characterized in that: include: A matching portion, the matching portion being mounted on the boat body; A bearing portion is connected to the matching portion, and a gap for clamping the sheet is formed between the bearing portion and the matching portion. A hollow area is provided on one side of the bearing portion away from the matching portion, and the hollow area is connected to the gap.

2. The card point according to claim 1, characterized in that: The hollow area is a fan-shaped groove.

3. The card point according to claim 1, characterized in that: At least a portion of the side walls of the hollow area are arranged obliquely, and are used to guide the coating medium to the area of ​​the sheet material blocked by the supporting part.

4. The card point according to claim 3, characterized in that: In a direction approaching the matching portion, the hollow area is formed as a wedge-shaped groove with a gradually decreasing cross-sectional area.

5. The card point according to claim 1, characterized in that: The bearing portion includes a supporting section and a limiting section, and two ends of the supporting section are connected to the matching portion and the limiting section respectively; wherein: The outer peripheral wall of the supporting section, the side wall of the limiting section facing the matching portion, and the side wall of the matching portion facing the limiting section together enclose the gap.

6. The card point according to any one of claims 1 to 5, characterized in that: The vertical cross section of the matching portion is non-circular, and the vertical cross section is a plane that is perpendicular to the center line of the matching portion and parallel to the end surface of the matching portion.

7. The card point according to claim 6, characterized in that: The outer peripheral surface of the matching portion includes a limiting surface, and the limiting surface and the hollow area are respectively located on both sides of the center line of the matching portion; the boat piece is provided with a mounting surface matching with the limiting surface.

8. The card point according to any one of claims 1 to 5, characterized in that: There are two bearing parts, and the two bearing parts are respectively arranged at two ends of the matching part along the axial direction thereof.

9. A boat sheet, characterized in that: It comprises a boat body and a plurality of clamping points as claimed in any one of claims 1 to 8, wherein the clamping points are installed on the boat body.

10. A carrier, characterized in that: It comprises a plurality of boat pieces and a connection assembly as claimed in claim 9, wherein the plurality of boat pieces are arranged at intervals, and the connection assembly is used to connect the plurality of boat pieces.

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