Sample feeding device for thin film preparation

Abstract

The utility model relates to the field of vacuum coating films, and discloses a sample feeding device for film preparation, which comprises a support rod and a middle support block, the upper half part of the support rod is fixedly sleeved with the middle support block, the top end of the middle support block is fixedly connected with a stop block, and the left side and the right side of the stop block are respectively and fixedly provided with a group of insulating porcelain plates. The sample feeding device for thin film preparation is provided with the chuck caps, the material for automatic feeding of thin film preparation is a 3mm carbon rod of a right clamping block, is ground into a conical surface and an inclined surface in advance according to requirements and is clamped between the chuck caps, when high-voltage current passes through the carbon rod, a contact point can generate instant high temperature due to the passing of the current, so that carbon ions are evaporated, and in a vacuum state, the high-voltage current passes through the carbon rod. The chuck cap can be automatically fed to a designated position due to the tension of the feeding spring along with evaporation, the continuity of evaporation is kept, automatic sample feeding is achieved, the reaction speed is high, the structure is compact, the film preparation precision is guaranteed, and the problem that manual sample feeding is needed is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating films, in particular to a sample delivery device for film preparation. Background Art

[0002] In the development of modern science and technology and industrial production, vacuum coating technology plays a very important role. The development of a new vacuum coating equipment or the application of a new process often directly brings huge economic and social benefits. The functions of vacuum coating are multifaceted, which also determines that its application occasions are very rich. The main functions of vacuum coating include giving the surface of the plated piece a high metallic luster and mirror effect, making the film layer on the thin film material have excellent barrier properties, and providing excellent electromagnetic shielding and conductive effects.

[0003] In the field of vacuum coated thin films, the development of equipment for sample preparation such as scanning electron microscopes and electron probes is increasingly tending towards systems with compact structures and high automation requirements. Automatic sample delivery devices are the future development direction of the equipment. Existing mechanisms tend to be manual and cannot meet the needs of special working conditions. They are time-consuming and labor-intensive, and have slow response speeds.

[0004] Therefore, it is necessary to develop a sample delivery device for thin film preparation to solve the defects of manual sample delivery. Utility Model Content

[0005] The utility model aims to provide a sample feeding device for thin film preparation, so as to solve the problems that the existing mechanisms proposed in the above background technology are manual, time-consuming and labor-intensive, and have slow response speed.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a sample delivery device for thin film preparation, comprising a support rod and a middle support block, the upper half of the support rod is fixedly sleeved with the middle support block, the top of the middle support block is fixedly connected with a stop block, a group of insulating ceramic plates are fixed on each of the left and right sides of the stop block, a left support block is arranged at the front end of the top of the insulating ceramic plate on the left side of the stop block, an electrode clamping cap is installed on the top of the left support block, a right support block is arranged at the front end of the top of the insulating ceramic plate on the right side of the stop block, a group of chuck caps are arranged on adjacent sides of the right support block and the left support block, and a left clamping sleeve is arranged on the left side of the left support block.

[0007] Preferably, a left knurled clamping pin is installed inside the left jacket, and a right knurled clamping pin is installed on the top of the right support block.

[0008] Preferably, the insulating ceramic plates are provided in two groups and are arranged on both sides of the block, a knurled screw is installed at the bottom end of the insulating ceramic plate on the left side of the block, a knurled flat nut is installed at the bottom end of the insulating ceramic plate on the right side of the block, and a knurled nut is installed at the front end of the right support block.

[0009] Preferably, two groups of tension springs are arranged at the front end of the stopper, and two groups of feed springs are arranged at the rear end of the stopper.

[0010] Preferably, the tail ends of the left jacket and the right clamp block are respectively connected to the insulated electrode rods of the vacuum preparation chamber through insulated wires.

[0011] Preferably, a rod groove is provided in the lower half of the support rod, an inner rod is sleeved in the rod groove, a plurality of screw holes are provided at the inner rod, and two sets of height adjustment bolts are installed between the right side of the support rod and the screw holes.

[0012] Preferably, five groups of screw holes are arranged in the inner rod, and the screw holes are distributed at equal intervals vertically.

[0013] Preferably, the bottom end of the inner rod is plugged into a mounting seat of the vacuum preparation chamber.

[0014] Compared with the prior art, the utility model has the following beneficial effects: the sample feeding device for thin film preparation not only realizes automatic sample feeding, has a fast reaction speed, a compact structure, ensures the precision of thin film preparation, prevents the other parts from generating discharge in a vacuum environment, is more resistant to high pressure, has a higher preparation purity, but also realizes better installation adaptability for vacuum preparation tanks of different sizes;

[0015] (1) By providing a chuck cap and a feeding spring, the material for automatic feeding of the film preparation is a 3mm carbon rod of the right clamp block, which is ground into a conical surface and an inclined surface in advance as required and clamped between the chuck caps. When a high voltage current passes through the carbon rod, the contact point will generate an instantaneous high temperature due to the passage of the current, thereby evaporating carbon ions, which will instantly evaporate onto the object under a vacuum state, thereby forming an effective film. As the evaporation proceeds, the chuck cap will automatically feed the material to the specified position due to the pulling force of the feeding spring, and maintain the continuity of evaporation, so as to achieve continuous evaporation, thereby completing the formation of the entire film, realizing automatic sample feeding, fast reaction speed, compact structure, and ensuring the accuracy of film preparation;

[0016] (2) The device is provided with an insulating ceramic plate, a left jacket, and a right clamping block. The device is associated with a vacuum pressure sensor, a vacuum evaporation power supply, and an electrode. The vacuum system pressure is feedback-controlled by the vacuum pressure sensor actuator and the vacuum coating process technology. The device is connected to the vacuum evaporation power supply through a conductive electrode to trigger the evaporation power supply to work and realize evaporation vacuum coating. The device is connected to the insulating electrode rod running through the chamber at the left jacket and the right clamping block through an insulating wire. The insulating wire will move linearly with the automatic feeding device. The device is specially equipped with an insulating ceramic plate for insulation to prevent the other parts from generating discharge in a vacuum environment, thereby meeting the purity requirements of the film quality, being more resistant to high pressure, and having a higher preparation purity.

[0017] (3) The device is adapted to the vacuum preparation tank by providing a support rod, a height adjustment bolt, and an inner rod. When installed in the vacuum preparation tank, the bottom of the support rod is fixed to the base of the preparation chamber by a fixing part. If the height needs to be adjusted, the two sets of height adjustment bolts are loosened, and the support rod is pulled out upward. Different locking heights are provided by multiple sets of inner rods to realize the height adjustable function, which has better installation adaptability for vacuum preparation tanks of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a front view structural schematic diagram of the utility model;

[0019] Figure 2 It is a side view structural schematic diagram of the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the utility model when viewed from above;

[0021] Figure 4 It is a front view structural diagram of the inner rod of the utility model.

[0022] In the figure: 1. left clamping sleeve; 2. support rod; 3. right clamping block; 4. right support block; 5. right knurled clamping pin; 6. chuck cap; 7. electrode clamping cap; 8. left support block; 9. left knurled clamping pin; 10. middle support block; 11. stopper; 12. knurled flat nut; 13. insulating porcelain plate; 14. knurled nut; 15. knurled screw; 16. tensioning spring; 17. feeding spring; 18. height adjustment bolt; 19. rod slot; 20. inner rod; 21. screw hole. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1: Please refer to Figure 1-4, a sample feeding device for film preparation, comprising a support rod 2 and a middle support block 10, wherein the middle support block 10 is fixedly sleeved on the upper half of the support rod 2, a stopper 11 is fixedly connected to the top of the middle support block 10, a group of insulating porcelain plates 13 are fixed on the left and right sides of the stopper 11, a left support block 8 is arranged at the front end of the top of the insulating porcelain plate 13 on the left side of the stopper 11, an electrode clamping cap 7 is installed on the top of the left support block 8, a right support block 4 is arranged at the front end of the top of the insulating porcelain plate 13 on the right side of the stopper 11, a group of chuck caps 6 are arranged on the adjacent sides of the right support block 4 and the left support block 8, a left clamping sleeve 1 is arranged on the left side of the left support block 8, a left knurled clamping nail 9 is installed inside the left clamping sleeve 1, a right knurled clamping nail 5 is installed on the top of the right support block 4, two groups of tension springs 16 are arranged at the front end of the inside of the stopper 11, and two groups of feeding springs 17 are arranged at the rear end of the inside of the stopper 11;

[0025] Specifically, Figure 1 , Figure 2 and Figure 3 As shown, the material for automatic feeding of the film preparation is a 3mm carbon rod in the right clamp block, which is ground into a conical surface and an inclined surface in advance as required and clamped between the chuck caps 6. When a high voltage current passes through the carbon rod, the contact point will generate an instantaneous high temperature due to the passage of the current, thereby evaporating carbon ions, which will instantly evaporate onto the object under a vacuum state, thereby forming an effective film. As the evaporation proceeds, the chuck cap 6 will automatically feed the material to the specified position due to the pulling force of the feeding spring 17, and maintain the continuity of the evaporation, thereby ensuring the continuous evaporation.

[0026] Embodiment 2: Two groups of insulating ceramic plates 13 are provided and arranged on both sides of the stopper 11. A knurled screw 15 is installed at the bottom end of the insulating ceramic plate 13 on the left side of the stopper 11, and a knurled flat nut 12 is installed at the bottom end of the insulating ceramic plate 13 on the right side of the stopper 11. A knurled nut 14 is installed at the front end of the right support block 4. The tail ends of the left jacket 1 and the right clamping block 3 are respectively connected to the insulating electrode rod of the vacuum preparation chamber through insulating wires;

[0027] Specifically, Figure 1 , Figure 2 and Figure 3 As shown, the device is associated with a vacuum pressure sensor, a vacuum evaporation power supply and an electrode. The vacuum system pressure is feedback-controlled through the vacuum pressure sensor actuator and the vacuum coating process technology, and is connected to the vacuum evaporation power supply through a conductive electrode to trigger the evaporation power supply to work and realize evaporation vacuum coating. The device is located at the left jacket 1 and the right clamp 3, and is connected to the insulating electrode rod running through the room through an insulating wire. The insulating wire will move linearly with the automatic feeding device. The device is specially equipped with an insulating ceramic plate 13 for insulation to prevent the other parts from discharging in a vacuum environment.

[0028] Embodiment 3: A rod groove 19 is provided in the lower half of the support rod 2, an inner rod 20 is sleeved in the rod groove 19, a plurality of screw holes 21 are provided at the inner rod 20, two sets of height adjustment bolts 18 are installed between the right side of the support rod 2 and the screw holes 21, five sets of screw holes 21 are provided in the inner rod 20, and the screw holes 21 are distributed at equal intervals vertically, and the bottom end of the inner rod 20 is plugged into the vacuum preparation chamber mounting seat;

[0029] Specifically, Figure 1 , Figure 2 and Figure 4 As shown, the device is adapted to a vacuum preparation tank. When installed in the vacuum preparation tank, the bottom of the support rod 2 is fixed to the base of the preparation chamber by a fixing piece. If the height needs to be adjusted, the two sets of height adjustment bolts 18 are loosened, the support rod 2 is pulled out upward, and different locking heights are provided through multiple sets of inner rods 20.

[0030] Working principle: The device is associated with a vacuum pressure sensor, a vacuum evaporation power supply and electrodes. The vacuum system pressure is feedback-controlled through the vacuum pressure sensor actuator and the vacuum coating process technology, and is connected to the vacuum evaporation power supply through a conductive electrode to trigger the evaporation power supply to work and realize evaporation vacuum coating. The material for automatic feeding of the film preparation is a 3mm carbon rod in the right clamp block, which is ground into a conical surface and an inclined surface in advance as required and clamped between the chuck caps 6. When a high-voltage current passes through the carbon rod, the contact point will generate an instantaneous high temperature due to the passage of the current, thereby evaporating carbon ions. In a vacuum state, they will instantly evaporate onto the object, thereby forming an effective film. As the evaporation proceeds, the chuck cap 6 will automatically feed the material to the specified position due to the pulling force of the feeding spring 17, and maintain the continuity of the evaporation, so as to ensure the continuous evaporation and complete the formation of the entire film.

[0031] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A sample delivery device for thin film preparation, comprising a support rod (2) and a middle support block (10), characterized in that: The upper half of the support rod (2) is fixedly sleeved with a middle support block (10), the top of the middle support block (10) is fixedly connected with a stop block (11), a group of insulating ceramic plates (13) are fixed on the left and right sides of the stop block (11), a left support block (8) is arranged at the front end of the top of the insulating ceramic plate (13) on the left side of the stop block (11), an electrode clamping cap (7) is installed on the top of the left support block (8), a right support block (4) is arranged at the front end of the top of the insulating ceramic plate (13) on the right side of the stop block (11), a group of chuck caps (6) are arranged on the adjacent sides of the right support block (4) and the left support block (8), and a left clamping sleeve (1) is arranged on the left side of the left support block (8).

2. A sample delivery device for thin film preparation according to claim 1, characterized in that: A left knurled clamping pin (9) is installed inside the left jacket (1), and a right knurled clamping pin (5) is installed on the top of the right support block (4).

3. A sample delivery device for thin film preparation according to claim 1, characterized in that: The insulating ceramic plates (13) are provided in two groups and are arranged on both sides of the stopper (11); a knurled screw (15) is installed at the bottom end of the insulating ceramic plate (13) located on the left side of the stopper (11); a knurled flat nut (12) is installed at the bottom end of the insulating ceramic plate (13) located on the right side of the stopper (11); and a knurled nut (14) is installed at the front end of the right support block (4).

4. A sample feeding device for thin film preparation according to claim 3, characterized in that: Two groups of tension springs (16) are arranged at the front end of the stopper (11), and two groups of feeding springs (17) are arranged at the rear end of the stopper (11).

5. The sample delivery device for thin film preparation according to claim 1, characterized in that: The tail ends of the left clamping jacket (1) and the right clamping block (3) are respectively connected to the insulating electrode rod of the vacuum preparation chamber through insulating wires.

6. A sample delivery device for thin film preparation according to claim 1, characterized in that: A rod groove (19) is provided in the lower half of the support rod (2), an inner rod (20) is sleeved in the rod groove (19), a plurality of screw holes (21) are provided on the inner rod (20), and two groups of height adjustment bolts (18) are installed between the right side of the support rod (2) and the screw holes (21).

7. A sample feeding device for thin film preparation according to claim 6, characterized in that: Five groups of screw holes (21) are arranged in the inner rod (20), and the screw holes (21) are distributed at equal intervals in the vertical direction.

8. A sample feeding device for thin film preparation according to claim 6, characterized in that: The bottom end of the inner rod (20) is plugged into a vacuum preparation chamber mounting seat.

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