Target cylinder with good cooling effect
By designing the water inlet channel water outlet in the target cartridge of the vacuum magnetron sputtering coating equipment near the inner side of the target cartridge and setting up multiple water inlets inlets of the outlets in the target cartridge, the problems of uneven cooling water flow rate and poor drainage in the prior art are solved, and efficient cooling and convenient disassembly of the target cartridge are achieved.
Patent Information
- Application Number
- CN202421846035.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-31
- Publication Date
- 2025-05-16
- Estimated Expiration
- 2034-07-31
AI Technical Summary
The target cartridge in the existing vacuum magnetron sputtering coating equipment has a high temperature during operation, and the uneven cooling water flow rate cannot be achieved to maximize the cooling and cooling effect, and poor drainage affects the target cartridge disassembly.
A target cartridge is designed, and the water outlet of the water inlet passage of the sealing cover is arranged near the inner side of the target cartridge to ensure that the cooling water fully contacts the inner side of the target cartridge, and to achieve efficient cooling water discharge through the water inlets of multiple water outlets.
Effectively disperse the air in the inner cavity of the target camera, ensure that the cooling water is in full contact with the inner side of the target camera, improves the cooling and cooling effect, and can completely discharge the cooling water, simplifying the disassembly process of the target camera.
Smart Images
Figure CN222878067U_ABST
Abstract
Description
[Technical field]
[0001] The utility model relates to a target tube with good cooling effect. [Background Technology]
[0002] When the existing vacuum magnetron sputtering coating equipment is working, the temperature of the target barrel is very high and must be dissipated in time. Specifically, cooling water is input into the target barrel to cool the target barrel. The target barrel structure is as follows: Figure 1 As shown, cooling water is input from one end of the core shaft 3 in the target barrel 1, and is input into the inner cavity of the target barrel 1 through the water inlet channel of the sealing cover 2 to cool the magnetic steel, and then discharged from the water outlet channel of the sealing cover 2 on the other side. Figure 1-2 As shown, the cooling water enters the water inlet channel from the middle through hole of the sealing cover through the core shaft, and then enters the inner cavity of the target barrel through the small through holes around it. Finally, the cooling water in the target barrel is discharged through the small through holes around the sealing cover on the other side.
[0003] On the other hand, during the coating process, the target barrel will rotate and work. Since the small through holes on the sealing cover are arranged near the middle, there will be air in the top of the inner cavity of the target barrel that cannot be discharged, so that the inner side of the target barrel cannot be completely in contact with the cooling water. At the same time, the cooling water flow rate near the small through holes is faster than the cooling water flow rate near the inner side of the target barrel, but the magnetic steel is generally arranged near the inner side of the target barrel, so this structure cannot achieve maximum cooling of the target barrel and the magnetic steel. On the other hand, when draining water, since the small through holes on the sealing cover are arranged near the middle, a lot of cooling water will remain in the target barrel and is difficult to drain, affecting the disassembly of the target barrel. [Contents of the utility model]
[0004] The utility model overcomes the shortcomings of the prior art and provides a target barrel with good cooling effect.
[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0006] A target barrel with good cooling effect is characterized in that: it includes a target barrel, two open ends of the target barrel are respectively covered with sealing covers, a core shaft for cooling water to pass through and respectively connected to the sealing covers on both sides is arranged in the target barrel, one end of the sealing cover is provided in the sealing cover and the other end is connected to the target barrel. The other end of the core shaft is connected to the cooling water pipe, and the other end of the sealing cover is provided on the sealing cover on the other side. The water outlet of the water inlet channel of the sealing cover is arranged at a position close to the inner side of the target barrel.
[0007] The target tube with good cooling effect as described above is characterized in that the water outlet channel water inlet of the sealing cover water outlet channel is arranged opposite to the water inlet channel water outlet.
[0008] The target barrel with good cooling effect as described above is characterized in that the sealing cover water outlet channel is provided with a plurality of water outlet channel water inlets respectively connected with the target barrel.
[0009] The target barrel with good cooling effect as described above is characterized in that the cooling water pipe passes through the sealing cover and is connected to the core shaft.
[0010] The target barrel with good cooling effect as described above is characterized in that a clamp for locking the sealing cover on the target barrel is sleeved between the sealing cover and the outer side of the target barrel.
[0011] The target barrel with good cooling effect as described above is characterized in that: a sealing cover convex block is provided on the outer side of the sealing cover for pressing against the opening end of the target barrel after the sealing cover is installed in the target barrel, and a clamp convex ring is provided on the clamp to surround and press against the sealing cover convex block.
[0012] The target barrel with good cooling effect as described above is characterized in that a first sealing ring is provided between the sealing cover and the target barrel.
[0013] The target barrel with good cooling effect as described above is characterized in that a second sealing ring is provided between the clamp and the target barrel.
[0014] The beneficial effects of the utility model are:
[0015] In the utility model, a sealing cover on one side is provided with a sealing cover water inlet channel, one end of which is connected with the core shaft and the other end of which is connected with the target barrel, and a water outlet of the sealing cover water inlet channel is arranged at a position close to the inner side of the target barrel, and a sealing cover water outlet channel is provided on the other side of the sealing cover, one end of which is connected with the target barrel and the other end of which is connected with the outside. After the cooling water enters the sealing cover water inlet channel through the core shaft, it can only be input into the target barrel inner cavity from the water outlet of the sealing cover water inlet channel close to the inner side of the target barrel, so that the air in the target barrel inner cavity can be dispersed and discharged with the cooling water through the sealing cover water outlet channel, so that the target barrel inner cavity is filled with cooling water, and the cooling water is fully in contact with the inner side of the target barrel, and at the same time, the flow rate of the cooling water near the magnetic steel is also accelerated, which greatly improves the cooling effect, and all the cooling water can be discharged when draining. [Drawings]
[0016] Figure 1 It is a cross-sectional view of the existing target tube structure and a schematic diagram of the water flow direction;
[0017] Figure 2 It is a schematic diagram of the existing target tube sealing cover;
[0018] Figure 3 This is a cross-sectional view of the structure of the utility model;
[0019] Figure 4 This is a schematic diagram of the sealing cover of the utility model;
[0020] Figure 5 It is a schematic diagram of water flow direction of the utility model. [Specific implementation method]
[0021] The technical solutions in the embodiments of the present utility model will be described clearly and completely below in conjunction with the accompanying drawings.
[0022] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly. In addition, the descriptions of "preferred", "sub-preferred", etc. in the present invention are only used for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "preferred" or "sub-preferred" may explicitly or implicitly include at least one of the features.
[0023] like Figure 3-5As shown, a target barrel with good cooling effect includes a target barrel 1, two open ends of the target barrel 1 are respectively covered with sealing covers 2, a core shaft 3 is provided in the target barrel 1 for cooling water to pass through and is respectively connected to the sealing covers 2 on both sides, one side of the sealing cover 2 is provided with a sealing cover water inlet channel 4, one end of which is connected with the core shaft 3 and the other end of which is connected with the target barrel 1, the other end of the core shaft 3 is connected to the cooling water pipe, and the other side of the sealing cover 2 is provided with a sealing cover water outlet channel 5, one end of which is connected with the target barrel 1 and the other end of which is connected with the outside, and the sealing cover water inlet channel 4 is provided with a water outlet 41, and is arranged near the inner side of the target barrel 1. In actual use, the magnetic steel is arranged in the inner cavity of the target barrel 1 and is arranged at a position close to the inner side of the target barrel 1, which is not drawn in the figure; when the coating is working, the target barrel 1 rotates, and at the same time, cooling water enters from one end of the core shaft 3, and enters the sealing cover water inlet channel 4 at the other end of the core shaft 3, and then enters the inner cavity of the target barrel 1 from the water outlet 41 of the water inlet channel, and finally the cooling water in the inner cavity of the target barrel 1 is output from the sealing cover water outlet channel 5 of the sealing cover 2 on the other side. During the process of inputting cooling water into the inner cavity of the target barrel 1, the residual air in the target barrel 1 will always float on the upper side of the inner cavity of the target barrel 1. When the water outlet 41 of the water inlet channel rotates with the target barrel 1 to the upper side of the target barrel 1, the high-pressure cooling water will disperse the air and output the dispersed air from the water outlet channel 5 of the sealing cover along with the cooling water, so that the cooling water fills the target barrel 1, thereby making the cooling water fully contact with the inner side of the target barrel, and at the same time, the flow rate of the cooling water near the magnetic steel is also accelerated, greatly improving the cooling effect; similarly, when draining water, compressed air is input to one end of the core shaft 3, and the compressed air enters the target barrel 1 and squeezes the air to be output from the water outlet channel 5 of the sealing cover, and the residual cooling water in the target barrel 1 always flows on the lower side of the target barrel 1. When the water outlet 41 of the water inlet channel rotates with the target barrel 1 to the lower side of the target barrel 1, the compressed air can squeeze the cooling water out.
[0024] like Figure 3 As shown, the water outlet channel water inlet 51 of the sealing cover water outlet channel 5 is arranged opposite to the water inlet channel water outlet 41, which can maximize the filling of the target barrel 1 with cooling water or discharge all the cooling water in the target barrel 1.
[0025] In this case, the sealing cover water outlet channel 5 is provided with a plurality of water outlet channel water inlets 51 respectively connected to the target barrel 1 , so as to efficiently fill the target barrel 1 with cooling water or discharge all the cooling water in the target barrel 1 .
[0026] like Figure 3-5As shown, the cooling water pipe passes through the sealing cover 2 and is connected to the core shaft 3; a clamp 6 is provided on the outer side of the sealing cover 2 and the target barrel 1 to lock the sealing cover 2 on the target barrel 1; a sealing cover protrusion 21 is provided on the outer side of the sealing cover 2 to press against the open end of the target barrel 1 after the sealing cover 2 is installed in the target barrel 1, and a clamp convex ring 61 is provided on the clamp 6 to surround and press against the sealing cover protrusion 21; a first sealing ring 7 is provided between the sealing cover 2 and the target barrel 1; a second sealing ring 8 is provided between the clamp 6 and the target barrel 1 to improve the sealing performance of the target barrel 1.
[0027] The above are only preferred embodiments of the utility model, and do not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept of the utility model, or directly or indirectly used in other related technical fields are included in the patent protection scope of the utility model.
Claims
1. A target tube with good cooling effect, characterized in that: The invention comprises a target barrel (1), wherein two opening ends of the target barrel (1) are respectively covered with sealing covers (2), a core shaft (3) for cooling water to pass through and respectively connected to the sealing covers (2) on both sides is arranged in the target barrel (1), a sealing cover water inlet channel (4) is arranged in one side of the sealing cover (2), one end of the sealing cover (2) is connected to the core shaft (3) and the other end is connected to the target barrel (1), the other end of the core shaft (3) is connected to the cooling water pipe, and a sealing cover water outlet channel (5) is arranged on the other side of the sealing cover (2), one end of the sealing cover water inlet channel (4) is connected to the target barrel (1) and the other end is connected to the outside, and a water inlet channel outlet (41) of the sealing cover water inlet channel (4) is arranged at a position close to the inner side of the target barrel (1).
2. A target barrel with good cooling effect according to claim 1, characterized in that: The water outlet channel water inlet (51) of the sealing cover water outlet channel (5) is arranged opposite to the water inlet channel water outlet (41).
3. A target barrel with good cooling effect according to claim 1, characterized in that: The sealing cover water outlet channel (5) is provided with a plurality of water outlet channel water inlets (51) respectively connected to the target barrel (1).
4. A target barrel with good cooling effect according to claim 1, characterized in that: The cooling water pipe passes through the sealing cover (2) and is connected to the core shaft (3).
5. A target barrel with good cooling effect according to claim 1, characterized in that: The sealing cover (2) and the target barrel (1) are sleeved with a clamp (6) for locking the sealing cover (2) on the target barrel (1).
6. A target barrel with good cooling effect according to claim 5, characterized in that: The outer side surface of the sealing cover (2) is provided with a sealing cover protrusion (21) which presses against the opening end of the target barrel (1) after the sealing cover (2) is installed in the target barrel (1), and the clamp (6) is provided with a clamp protrusion ring (61) which surrounds and presses against the sealing cover protrusion (21).
7. A target barrel with good cooling effect according to claim 6, characterized in that: A first sealing ring (7) is provided between the sealing cover (2) and the target tube (1).
8. A target barrel with good cooling effect according to claim 6, characterized in that: A second sealing ring (8) is provided between the clamp (6) and the target tube (1).