Optical filter coating jig

Abstract

The utility model relates to an optical filter coating jig, and belongs to the technical field of jigs, the optical filter coating jig comprises a turntable and a placing plate, the turntable is connected with a rotating shaft of a rotating device in coating equipment, the bottom surface of the turntable is provided with a plurality of first magnets, the top surface of the placing plate is provided with a plurality of second magnets, and the first magnets and the second magnets are in one-to-one correspondence; a plurality of placing grooves are formed in the placing plate, at least one group of springs are arranged in the placing grooves, the number of each group of springs is two, the two springs in the same group are oppositely arranged, each spring is connected with a clamping block, all the clamping blocks jointly abut against the circumferential surface of the optical filter, and a guide surface and an abutting surface are arranged on the side, facing the optical filter, of each clamping block. The guide face is closer to the feeding end of the containing groove than the abutting face. The optical filter fixing device has the advantages that a plurality of optical filters can be conveniently and firmly fixed in the coating equipment, the production efficiency is improved, and meanwhile, the coating uniformity of the optical filters is improved.

Description

Technical Field

[0001] The present application relates to the technical field of jigs, and in particular to a filter coating jig. Background Art

[0002] The coating process of filters is a key step in the manufacturing process of optical devices and optoelectronic equipment. The coating process usually includes the following main steps: Select the appropriate filter, clean and dry it to remove dust, grease and other contaminants on the surface to ensure the adhesion and quality of the coating layer. Fix the clean filter on the coating fixture. The fixture can be a frame or other fixing device that presses the filter to ensure that the filter does not move during the coating process. Place the fixture with the filter in the vacuum coating equipment. Evacuate the equipment to remove air and water vapor in the chamber to prevent interference from contaminants during the coating process. Preheat the filter to improve the adhesion and uniformity of the coating layer. Prepare the coating material (such as metal, metal oxide, etc.), usually in the form of evaporation or sputtering. Use plasma to sputter atoms or molecules of the coating material from the surface of the target and deposit them on the surface of the filter. At the same time, the coating equipment will drive the fixture to rotate to make the filter coating uniform. After the coating is completed, the filter is gradually cooled to room temperature. Release the vacuum and take out the coated filter. Perform quality inspection and testing on the coated filter to check the film thickness, uniformity, adhesion, optical performance and other parameters to ensure that the design requirements are met.

[0003] Regarding the above-mentioned related technologies, the existing jigs are generally single-piece filter fixing jigs and multi-piece filter fixing jigs, and their fixing is usually mechanical, such as using bolts or reinforcements to fix optical elements. However, the use of bolts or clamps to fix optical elements requires manual tightening or adjustment, and the operation process is complicated and time-consuming, which increases the production cycle. Of course, there is also a fixing method that uses an adapted groove to place the filter directly in the groove, but this fixing effect is poor. The rotation of the jig during the coating process can easily cause the optical element to shake, which in turn leads to uneven coating. Utility Model Content

[0004] In order to facilitate the secure fixing of multiple filters in a coating device, improve production efficiency, and at the same time improve the coating uniformity of the filters, the present application provides a filter coating fixture.

[0005] The filter coating fixture provided in this application adopts the following technical solution:

[0006] A filter coating jig comprises a turntable and a placement plate, wherein the turntable is connected to the rotating shaft of a rotating device in a coating device, a plurality of first magnets are arranged on the bottom surface of the turntable, and a plurality of second magnets are arranged on the top surface of the placement plate, wherein the first magnets correspond to the second magnets one to one, a plurality of placement slots are provided on the placement plate, and at least one group of springs is arranged in the placement slots, wherein each group of springs has two springs, and the two springs in the same group are arranged opposite to each other, and each of the springs is connected to a clamping block, and all of the clamping blocks are in contact with the circumferential surface of the filter, and a guide surface and a pressing surface are provided on the side of the clamping block facing the filter, wherein the guide surface is closer to the feed end of the placement slot than the pressing surface.

[0007] By adopting the above technical scheme, the filter is grabbed to the placement slot by manual grasping or mechanical grasping, and then the filter is pushed into the placement slot. The peripheral surface of the filter first contacts the guide surface, and a number of clamping blocks move to make room for the filter to continue to extend into the placement slot. The spring is in a compressed state. When the filter is completely located in the placement slot, the pressing surface presses the filter under the action of the spring. After all the filters are fixed, the placement plate is transferred to the bottom of the turntable and aligned with the installation position, and then the placement plate is brought close to the turntable to allow the first magnet and the second magnet to be adsorbed, thereby achieving multiple filters. The plate is firmly fixed in the coating equipment without manual tightening or adjustment, simplifying the operation process, and improving production efficiency. At the same time, the filter is not easy to shake when rotating, thereby improving the coating uniformity of the filter.

[0008] Optionally, a protruding plate is provided on the circumferential surface of the placement plate, and when the placement plate is adsorbed on the turntable, one end of the protruding plate extends out of the circumferential surface of the turntable.

[0009] By adopting the above technical solution, a human or robot arm can clamp the raised plate, which facilitates the transfer of the placement plate and its installation on the turntable.

[0010] Optionally, there are two placement plates, each placement plate is a semicircular plate, and an outer diameter of each placement plate is the same as an outer diameter of the turntable.

[0011] Optionally, the placement groove is a circular groove, and the central axis of each group of springs intersects with the central axis of the placement groove.

[0012] By adopting the above technical solution, the circular groove design can accommodate more springs and clamping blocks, thereby strengthening the fixation of the filter, and the position design of each group of springs can make the filter evenly stressed.

[0013] Optionally, both the guide surface and the abutting surface are provided with elastic pads.

[0014] By adopting the above technical solution, the elastic pad abuts against the peripheral surface of the filter, thereby preventing the filter from being damaged by the rigid abutment between the filter and the clamping block.

[0015] Optionally, a guide block is provided on the circumferential surface of the placing plate, and a guide plate is provided on the circumferential surface of the turntable. The length direction of the guide plate is parallel to the central axis direction of the turntable. The guide plate is provided with a guide groove along its length direction. The guide block extends into the guide groove, and a clamping assembly for clamping the guide block in the guide groove is provided on the guide plate.

[0016] By adopting the above technical solution, when fixing the placement plate, the guide block is inserted into the guide groove, so that the corresponding first magnet and the second magnet can be quickly aligned, and then the placement plate is moved vertically upward to make the placement plate close to the turntable and fixed on the turntable. The installation efficiency of the placement plate is improved, and then the pressing component is controlled to press the guide block, thereby strengthening the fixation of the placement plate and reducing the occurrence of uneven filter coating caused by the shaking of the placement plate when the turntable rotates.

[0017] Optionally, the clamping assembly includes a screw and a motor, the screw is rotatably connected in the guide groove, the screw is parallel to the central axis of the turntable, the motor is arranged on the guide plate, the motor is connected to the screw, the screw is threadedly connected with a clamping block, the clamping block is located in the guide groove and is slidably connected to the guide plate, the guide block is provided with a slot, and the screw passes through the slot.

[0018] By adopting the above technical solution, when the guide block is tightened, the motor is started, the motor drives the lead screw to rotate, and the lead screw drives the tightening block to move toward the guide block. The tightening block presses against the guide block, and the other side of the guide block presses against the inner top wall of the slot, thereby achieving tightening of the guide block.

[0019] Optionally, the first magnets are arranged equidistantly along the circumference of the turntable, and the first magnets are arranged in at least two circles.

[0020] By adopting the above technical solution, the multiple circles of first magnets and second magnets cooperate with each other, so that the placement plate can be more firmly adsorbed on the turntable.

[0021] In summary, the present application includes at least one of the following beneficial technical effects:

[0022] 1. Multiple filters can be firmly fixed in the coating equipment without manual tightening or adjustment, which simplifies the operation process and improves production efficiency. At the same time, the filter is not easy to shake when rotating, which improves the coating uniformity of the filter;

[0023] 2. The circular groove design can accommodate more springs and clamping blocks, thereby strengthening the fixation of the filter, and the position design of each set of springs can make the filter evenly stressed;

[0024] 3. When fixing the placement plate, insert the guide block into the guide groove, so that the corresponding first magnet and second magnet can be quickly aligned, and then move the placement plate vertically upward to make the placement plate close to the turntable and fix it on the turntable. Improve the installation efficiency of the placement plate, and then control the tightening component to tighten the guide block, thereby strengthening the fixation of the placement plate and reducing the occurrence of uneven filter coating caused by the shaking of the placement plate when the turntable rotates. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application.

[0026] Figure 2 It is a schematic diagram of the structure of the first magnet used in an embodiment of the present application.

[0027] Figure 3 It is a schematic diagram of the structure of the second magnet and the slot according to an embodiment of the present application.

[0028] Figure 4 It is a schematic diagram of the structure of the clamping assembly used in the embodiment of the present application.

[0029] Figure 5 yes Figure 4 Enlarged schematic diagram of part A.

[0030] Explanation of the reference numerals: 1. turntable; 11. first magnet; 12. guide plate; 121. guide groove; 2. placement plate; 21. second magnet; 22. placement groove; 23. spring; 24. clamping block; 241. guide surface; 242. pressing surface; 243. elastic pad; 25. raised plate; 26. guide block; 261. slot; 3. pressing assembly; 31. motor; 32. lead screw; 33. pressing block. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1-5 This application is described in further detail.

[0032] The embodiment of the present application discloses a filter coating fixture.

[0033] like Figure 1 , Figure 2 and Figure 3The filter coating fixture includes a turntable 1 and two placement plates 2. The turntable 1 is connected to the shaft of the rotating device in the coating equipment. A plurality of first magnets 11 are installed on the bottom surface of the turntable 1. The first magnets 11 are embedded in the turntable 1, and the bottom surface of the first magnets 11 extends out of the turntable 1. The plurality of first magnets 11 are arranged in two circles around the central axis of the turntable 1. Two guide plates 12 are installed on the circumference of the turntable 1. The guide plates 12 are long strips and their length direction is parallel to the central axis of the turntable 1. The two guide plates 12 are symmetrically arranged about the central axis of the turntable 1. A guide groove 121 is opened on the opposite side of the two guide plates 12. The guide groove 121 is opened along the length direction of the guide plate 12. A tightening component 3 is arranged in the guide plate 12;

[0034] like Figure 4 The tightening assembly 3 includes a motor 31 and a lead screw 32. The lead screw 32 is rotatably connected in the guide groove 121. The length direction of the lead screw 32 is parallel to the central axis of the turntable 1. The lead screw 32 is threadedly connected with a tightening block 33, and the tightening block 33 is slidably connected to the guide plate 12.

[0035] like Figure 3 , Figure 4 and Figure 5 The placement plate 2 is a semicircular plate, and the outer diameter of the placement plate 2 is the same as the outer diameter of the turntable 1. A plurality of second magnets 21 are installed on the top surface of the placement plate 2. The second magnets 21 are embedded in the placement plate 2, and the bottom surface of the second magnets 21 extends out of the placement plate 2. The second magnets 21 correspond to the first magnets 11 one by one. A plurality of placement grooves 22 are provided on the bottom surface of the placement plate 2. The placement grooves 22 are circular grooves. The placement grooves 22 are arranged equidistantly along the circumference of the placement plate 2, and the placement grooves 22 are located between two circles of second magnets 21. Two groups of springs 23 are installed on the inner side wall of the placement grooves 22. The number of springs 23 in each group is two. The two springs 23 in the same group are arranged oppositely. The central axes of the two springs 23 in the same group are collinear and have an intersection with the central axis of the placement groove 22. The central axes of the two groups of springs 23 are perpendicular to each other. One end of the spring 23 facing away from the inner wall of the placement groove 22 is connected to the clamping block 24, and the two clamping blocks 24 in the same group are provided with a guide surface 241 and a pressing surface 242 on the opposite sides. The guide surface 241 is an inclined surface compared to the pressing surface 242 near the opening of the placement groove 22, and the clamping surface and the pressing surface 242 are both pasted with elastic pads 243.

[0036] A raised plate 25 is installed on the circumference of the placement plate 2, and a guide block 26 is also installed on the circumference of the placement plate 2. The included angle between the center line of the raised plate 25 and the center line of the guide block 26 is 90 degrees. When two placement plates 2 are spliced ​​into a circular plate, the two guide blocks 26 are symmetrically arranged about the center axis of the circular plate. The guide block 26 is provided with a slot 261. When the guide block 26 extends into the guide groove 121, the lead screw 32 passes through the slot 261.

[0037] Grab the filter to the placement slot 22 manually or by a robot, and then push the filter into the placement slot 22. The peripheral surface of the filter first contacts the guide surface 241. A number of clamping blocks 24 move to make room for the filter to continue to extend into the placement slot 22. The spring 23 is in a compressed state. When the filter is completely located in the placement slot 22, the pressing surface 242 presses against the filter under the action of the spring 23. After all the filters are fixed, insert the guide block 26 into the guide slot 121 to quickly align the corresponding first magnet 11 and the second magnet 21. Then move the placement plate 2 vertically upward to make The first magnet 11 and the second magnet 21 are adsorbed, and then the motor 31 is started. The motor 31 drives the lead screw 32 to rotate, and the lead screw 32 drives the clamping block 33 to move toward the direction close to the guide block 26. The clamping block 33 presses against the guide block 26, and the other side of the guide block 26 presses against the inner top wall of the slot 261, thereby achieving the clamping of the guide block 26, strengthening the fixation of the placement plate 2, and achieving the firm fixation of multiple filters in the coating equipment without manual tightening or adjustment, simplifying the operation process, and improving production efficiency. At the same time, the filter is not easy to shake when rotating, thereby improving the coating uniformity of the filter.

[0038] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A filter coating fixture, characterized in that: The device comprises a turntable (1) and a placement plate (2), wherein the turntable (1) is connected to the rotation shaft of a rotating device in a coating device, a plurality of first magnets (11) are arranged on the bottom surface of the turntable (1), a plurality of second magnets (21) are arranged on the top surface of the placement plate (2), the first magnets (11) and the second magnets (21) correspond to each other one by one, a plurality of placement grooves (22) are provided on the placement plate (2), and at least one group of springs (23) are arranged in the placement grooves (22). The number of the springs (23) in each group is two, and the two springs (23) in the same group are arranged opposite to each other. Each spring (23) is connected to a clamping block (24), and all the clamping blocks (24) are in common contact with the peripheral surface of the filter. A guide surface (241) and a pressing surface (242) are provided on the side of the clamping block (24) facing the filter, and the guide surface (241) is closer to the feeding end of the placement groove (22) than the pressing surface (242).

2. The filter coating fixture according to claim 1, characterized in that: The circumferential surface of the placement plate (2) is provided with a protruding plate (25); when the placement plate (2) is adsorbed on the turntable (1), one end of the protruding plate (25) extends out of the circumferential surface of the turntable (1).

3. The filter coating fixture according to claim 1, characterized in that: The number of the placement plates (2) is two, and the placement plates (2) are semicircular plates. The outer diameter of the placement plates (2) is the same as the outer diameter of the rotating disk (1).

4. The filter coating fixture according to claim 1, characterized in that: The placement groove (22) is a circular groove, and the central axis of each group of springs (23) has an intersection with the central axis of the placement groove (22).

5. The filter coating fixture according to claim 1, characterized in that: The guide surface (241) and the pressing surface (242) are both provided with elastic pads (243).

6. The filter coating fixture according to claim 3, characterized in that: A guide block (26) is arranged on the circumference of the placement plate (2), and a guide plate (12) is arranged on the circumference of the turntable (1). The length direction of the guide plate (12) is parallel to the center axis direction of the turntable (1). The guide plate (12) is provided with a guide groove (121) along its length direction. The guide block (26) extends into the guide groove (121). A pressing assembly (3) for pressing the guide block (26) against the guide groove (121) is arranged on the guide plate (12).

7. The filter coating fixture according to claim 6, characterized in that: The clamping assembly (3) comprises a lead screw (32) and a motor (31), wherein the lead screw (32) is rotatably connected in the guide groove (121), the lead screw (32) is parallel to the central axis of the turntable (1), the motor (31) is arranged on the guide plate (12), the motor (31) is connected to the lead screw (32), the lead screw (32) is threadedly connected with a clamping block (33), the clamping block (33) is located in the guide groove (121) and is slidably connected to the guide plate (12), the guide block (26) is provided with a slot (261), and the lead screw (32) passes through the slot (261).

8. The filter coating fixture according to claim 3, characterized in that: The first magnets (11) are arranged at equal intervals along the circumference of the turntable (1), and the first magnets (11) are arranged in at least two circles.

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